CN108508539A - Silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler - Google Patents
Silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler Download PDFInfo
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
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Abstract
The present invention discloses a kind of silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, including：(n+1) tapered transmission line and n tapered coupling of a input waveguide, multiple curved waveguides, n different in width；First input waveguide is connected by first tapered coupling with one end of first tapered transmission line, and the other end of k-th of tapered transmission line is connected by one end of+1 tapered transmission line of+1 tapered coupling of kth and kth；I-th of input waveguide is coupled to the i-th 1 tapered transmission lines by least one curved waveguide and forms the i-th 1 taper asymmetrical directional couplers, the i-th 1 taper asymmetrical directional couplers by the optical signal that i-th of input waveguide inputs for being converted into corresponding higher order mode and being coupled to bus waveguide to be transmitted, wherein, the corresponding higher order mode of each taper asymmetrical directional coupler is different；The multiplexing of (n+1) a different wave length may be implemented in the present invention.
Description
Technical field
The present invention relates to integrated optics technique fields, and taper asymmetrical directional coupler is based on more particularly, to one kind
Silicon substrate wavelength division multiplexer.
Background technology
There are on-chip optical interconnection multiplexing technology many unique places, the research of related fields also to have become the heat in field
Point.For multichannel is multiplexed optical interconnection system, on piece integrates one of the device that (solution) multiplexer is wherein crucial.Wavelength-division is multiple
It is common technology in optical fiber telecommunications system with (WDM), to increase total transmission bandwidth.
Realize that the device of wavelength-division multiplex mainly has array waveguide grating (AWG), etched diffraction grating in the prior art
(EDG), micro-ring resonator (MRR), Mach-Zeng Deer interferometers (MZI), multi-mode interference coupler (MMI) etc..Traditional wave
Division multiplexer, such as array waveguide grating and etched diffraction grating, device size and insertion loss are all bigger, be not easy to and other
It is integrated that device carries out on piece；And based on the wavelength-division multiplex of micro-ring resonator, Mach-Zender interferometer and multi-mode interference coupler
It is pairs of cannot still to meet on piece collection although size is smaller compared with size for array waveguide grating and etched diffraction grating for device
The requirement of device small size, and need to be improved in terms of wavelength channel extension and design flexibility.
Invention content
In view of the drawbacks of the prior art, the present invention provides a kind of silicon substrate wavelength-divisions based on taper asymmetrical directional coupler
Multiplexer, the purpose is to realize the multiplexing of different wave length on the waveguiding structure of small size, solution on piece waveguide dimensions are big, make
Tolerance is small, the technical issues of being not easy to extend.
To achieve the above object, the present invention provides a kind of silicon substrate wavelength-division multiplex based on taper asymmetrical directional coupler
Device, including：(n+1) tapered transmission line and n tapered coupling of a input waveguide, multiple curved waveguides, n different in width；
First input waveguide is connected by first tapered coupling with one end of first tapered transmission line, k-th
The other end of tapered transmission line is connected by one end of+1 tapered transmission line of+1 tapered coupling of kth and kth, 1≤k≤n-1；
The width of n tapered transmission line is incremented by successively, first input waveguide, n tapered transmission line and n tapered coupling connection
Structure composition bus waveguide；I-th of input waveguide is coupled to (i-1)-th tapered transmission line composition by least one curved waveguide
(i-1)-th taper asymmetrical directional coupler, (i-1)-th taper asymmetrical directional coupler are used for i-th of incoming wave
The optical signal for leading input is converted into corresponding higher order mode and is coupled to the bus waveguide being transmitted, wherein each taper
The corresponding higher order mode of asymmetrical directional coupler is different, 2≤i≤n+1；
(n+1) a input waveguide transmits the optical signal of (n+1) a different wave length respectively, (n+1) a input waveguide, more
A curved waveguide, the tapered transmission line of n different in width and n tapered coupling are placed in silicon base, described non-based on taper
The multiplexing of (n+1) a different wave length may be implemented in the silicon substrate wavelength division multiplexer of symmetric directional coupler.
Optionally, if the head and the tail width of n tapered transmission line is followed successively by w1aAnd w1b, w2aAnd w2b, w3aAnd w3b..., wnaWith
wnb, the midpoint width of n tapered transmission line coupling regime is followed successively by w1, w2, w3…wn；
The width of n-th of tapered transmission line passes through n-th of wavelength XnPhase-matching condition and make tolerance Δ wnIt determines, it is defeated
Enter the corresponding basic mode TE of waveguide0With n-th of tapered transmission line coupling regime midpoint wnCorresponding high-order mode TEnMeet phase matched item
Part；
N-th of tapered transmission line head end width wnaWith input waveguide width w- Δs wn, aftermost breadth wnbWith input waveguide width w
+ΔwnMeet phase-matching condition, Δ w respectivelynIt is determined by balance coupling efficiency and coupling length relationship between the two,
In, w is the width that input waveguide supports basic mode.
Optionally, the length of the coupling unit of the n taper asymmetrical directional coupler is followed successively by L1, L2, L3…Ln,
The length is determined by mode-interference theory, is that coupling efficiency is made to reach maximum Best Coupling length.
Optionally, the spacing of i-th of input waveguide and (i-1)-th tapered transmission line is 150nm~300nm；Meeting technique
Under the premise of manufacturing conditions, which is conducive to coupling of the light from input waveguide to bus waveguide, and ensures as possible relatively short
Coupling length.
Optionally, the width value range of a input waveguide cross section described (n+1) is 0.4 μm~0.5 μm, to meet list
Mould condition so that the light field in waveguide only exists basic mode, is conducive to turn of pattern when light is coupled from input waveguide to bus waveguide
It changes, is conducive to the silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler and carries out on piece collection with the waveguide device except it
At.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, have below beneficial to effect
Fruit：
(1) a kind of silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler provided by the invention, each wave
Long signal injects input waveguide in the form of basic mode, and corresponding high-order is converted into respectively by taper asymmetrical directional coupler
Pattern is simultaneously coupled to bus waveguide, and the multiplexing of (n+1) a wavelength is realized with this；Due to meeting phase-matching condition, theoretically may be used
Realize the complete coupling that maximum coupling efficiency is 1, you can to meet the requirement of wavelength division multiplexer low insertion loss, small crosstalk,
Ensure the performance of device；It is connected by tapered coupling between each taper asymmetrical directional coupler, realizes light in bus wave
Lead almost loss-free transmission；Input waveguide and tapered transmission line parallel coupling are easy to and other active or passive wave guide devices
It is integrated to carry out on piece.
(2) a kind of silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler provided by the invention, relatively based on normal
The silicon substrate wavelength division multiplex device for advising asymmetrical directional coupler has the making tolerance of bigger；Pass through phase-matching condition and pattern
Interference theory can design a channel (n+1), that is, realize the multiplexing of (n+1) a wavelength, ensure that the flexibility of design and can expand
Malleability.
Description of the drawings
Fig. 1 is the structural representation of the silicon substrate wavelength division multiplexer provided by the invention based on taper asymmetrical directional coupler
Figure；
Fig. 2 is that the cross section of the silicon substrate wavelength division multiplexer provided by the invention based on taper asymmetrical directional coupler is illustrated
Figure；
Fig. 3 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
Structural schematic diagram；
Fig. 4 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
In wavelength X1Lower TE1And TE0The relational graph that changes with duct width of effective refractive index；
Fig. 5 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
In wavelength X0It is lower to emulate obtained light field transmission figure；
Fig. 6 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
In wavelength X1It is lower to emulate obtained light field transmission figure；
Fig. 7 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
In wavelength X2It is lower to emulate obtained light field transmission figure；
Fig. 8 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
In wavelength X3It is lower to emulate obtained light field transmission figure；
Fig. 9 is the four wavelength silicon substrate wavelength division multiplexers provided in an embodiment of the present invention based on taper asymmetrical directional coupler
The light field transmission figure that part emulates under four wavelength multiplexings；
Figure 10 is the four wavelength silicon substrate wavelength-division multiplex provided in an embodiment of the present invention based on taper asymmetrical directional coupler
The insertion loss that device emulates with input waveguide change width relational graph；
Figure 11 is the four wavelength silicon substrate wavelength-division multiplex provided in an embodiment of the present invention based on taper asymmetrical directional coupler
The experimental result picture of device；
In all the appended drawings, identical reference numeral is used for indicating identical element or structure, wherein：1 for curved waveguide,
Width, the w that 2 be tapered coupling, w is input waveguide support basic modenFor tapered transmission line midpoint width, wnaFor n-th of conical wave
Lead head end width, wnbFor n-th of tapered transmission line aftermost breadth, the coupling length of (n+1)th input waveguide and n-th of tapered transmission line
For Ln, input waveguide and tapered transmission line spacing be gap, λnFor the wavelength of optical signal of n-th of tapered transmission line transmission.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
It does not constitute a conflict with each other and can be combined with each other.
According to one aspect of the present invention, a kind of silicon substrate wavelength-division multiplex based on taper asymmetrical directional coupler is provided
Device, including (n+1) a input waveguide, the taper that the tapered transmission line and input waveguide of n different in width collectively constitute are asymmetric fixed
To coupler, n tapered coupling；
Wherein, all waveguiding structures are all placed in silicon-based substrate；(n+1) a input waveguide is used for the input of optical signal,
Taper asymmetrical directional coupler for being converted into corresponding higher order mode by the optical signal of different wave length and being coupled to respectively
Bus waveguide is transmitted, with the multiplexing of realization (n+1) a wavelength；Tapered coupling is used to connect the tapered transmission line of different in width
Bus waveguide is formed, is transmitted in bus waveguide with ensureing that optical signal is almost loss-free；Input waveguide and bus waveguide are at a distance of one
Fixed distance；The width of input waveguide and the width of corresponding tapered transmission line are determined by phase-matching condition, with reality
The light of existing different wave length reaches Best Coupling in bus waveguide.Silicon provided by the invention based on taper asymmetrical directional coupler
Fundamental wave division multiplexer have size is small, insertion loss is low, crosstalk is small, scalability, design flexibility and it is simple for process, be fabricated to
The advantages of this relative moderate.
Preferably, the silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, above-mentioned (n+1) a input waveguide are horizontal
The width value range in section is at 0.4 μm~0.5 μm, to meet single mode condition so that the light field in waveguide only exists basic mode, has
The conversion of pattern when being coupled from input waveguide to bus waveguide conducive to light, is conducive to the silicon based on taper asymmetrical directional coupler
Fundamental wave division multiplexer carries out on piece with other waveguide devices and integrates.
Preferably, the silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, above-mentioned input waveguide and conical wave
Spacing between leading is in 150nm~300nm；Under the premise of meeting technique manufacturing conditions, which is conducive to light from incoming wave
The coupling of bus waveguide is led, and ensures relatively short coupling length as possible.
Preferably, the silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, above-mentioned n Asymmetric directional coupler
Device coupling regime is tapered transmission line, and the head and the tail width of n tapered transmission line is followed successively by w1aAnd w1b, w2aAnd w2b, w3aAnd w3b..., wna
And wnb, the midpoint width of n tapered transmission line coupling regime is followed successively by w1, w2, w3…wn.The width of tapered transmission line passes through a certain wave
(λ under lengthn) phase-matching condition and make tolerance Δ wnIt determines；Make the corresponding basic mode TE of input waveguide0It is coupled with tapered transmission line
Region midpoint wnCorresponding high-order mode TEnMeet phase-matching condition；Tapered transmission line head end width wnaWith input waveguide width w-
Δwn, aftermost breadth wnbWith input waveguide width w+ Δs wnMeet phase-matching condition, Δ w respectivelynBy balance coupling efficiency and
Coupling length relationship between the two determines.
Preferably, the silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, the above-mentioned asymmetric orientation of n taper
The length of the coupling unit of coupler is followed successively by L1, L2, L3…Ln, which is determined by mode-interference theory, is that coupling is made to imitate
Rate reaches maximum Best Coupling length.
Preferably, the above-mentioned silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, substrate use SOI Substrate.
Specifically, the silicon substrate wavelength division multiplexer provided by the present invention based on taper asymmetrical directional coupler, structure
As schematically shown in Figure 1, including (n+1) a input waveguide, curved waveguide 1, tapered coupling 2, n tapered transmission line.
First input waveguide is connected by first tapered coupling with one end of first tapered transmission line, k-th
The other end of tapered transmission line is connected by one end of+1 tapered transmission line of+1 tapered coupling of kth and kth, 1≤k≤n-1；
The width of n tapered transmission line is incremented by successively, the structure of the first input waveguide, n tapered transmission line and the connection of n tapered coupling
Form bus waveguide；I-th of input waveguide is coupled to (i-1)-th tapered transmission line composition (i-1)-th by least one curved waveguide
A taper asymmetrical directional coupler, (i-1)-th taper asymmetrical directional coupler are used to input i-th of input waveguide
Optical signal be converted into corresponding higher order mode and be coupled to the bus waveguide being transmitted, wherein each taper is asymmetric
The corresponding higher order mode of directional coupler is different, 2≤i≤n+1；
(n+1) a input waveguide transmits the optical signal of (n+1) a different wave length respectively, (n+1) a input waveguide, multiple curved
Bent waveguide, the tapered transmission line of n different in width and n tapered coupling are placed in silicon base, described asymmetric based on taper
The multiplexing of (n+1) a different wave length may be implemented in the silicon substrate wavelength division multiplexer of directional coupler.
Wherein, (n+1)th input waveguide and the coupling length of n-th of tapered transmission line are Ln, n-th of tapered transmission line midpoint it is wide
Degree is wn, n-th of tapered transmission line head and the tail width be respectively wnaAnd wnb, input waveguide and tapered transmission line spacing be gap.
In the present invention, for the silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, (n+1) a input waveguide
It is 0.4 μm~0.5 μm of single mode waveguide to choose width so that only exists basic mode in waveguide, is conducive to light from input waveguide to total
The conversion of pattern is carried out when line waveguide couples.Spacing gap values between input waveguide and tapered transmission line in 150nm~300nm,
Under the premise of meeting technique manufacturing conditions, which is conducive to coupling of the light from input waveguide to bus waveguide, ensures simultaneously
Relatively short coupling length.Curved waveguide 1 outputs and inputs for realizing light.The wavelength X of first input waveguide0With base
Mould TE0Form be directly injected into bus waveguide, for removing wavelength X0Some specific wavelength of input waveguide transmission in addition
λnSo that the basic mode TE that input waveguide is supported at that wavelength0With tapered transmission line coupling regime midpoint width wnCorresponding high-order mode
TEnMeet phase-matching condition, i.e. the two effective refractive index is equal；N-th of tapered transmission line head end width is wna, aftermost breadth is
wnb, and head end width wnaWith input waveguide width w- Δs wn, aftermost breadth wnbWith input waveguide width w- Δs wnMeet phase respectively
Position matching condition.Coupling length L is determined by mode-interference theoryn, which is that coupling efficiency is made to reach maximum best coupling
Close length.For some specific wavelength Xn, input waveguide intercouples with tapered transmission line, optical signal TE in the form of basic mode0
Corresponding high-order mode TE is converted to from input waveguide by tapered transmission linen, last (n+1) a wavelength X0, λ1, λ2, λ3…λnPoint
Not with TE0, TE1, TE2, TE3…TEnPattern in bus waveguide common transport, realize (n+1) a wavelength multiplexing.
It is the cross of the silicon substrate wavelength division multiplexer provided by the present invention based on taper asymmetrical directional coupler shown in Fig. 2
Schematic cross-section, upper under-clad layer are all silica, and sandwich layer is silicon.
Fig. 3 be it is provided by the invention based on the silicon substrate wavelength division multiplexer of taper asymmetrical directional coupler with four wavelength multiplexings
For the structural schematic diagram of embodiment.In the present embodiment, it is SiO to select the silicon nanowires waveguide based on SOI, under-clad layer material2,
Thickness is 2 μm；Core material is Si, thickness 220nm；Top covering material is SiO2, thickness is 1 μm；(n+1) a input waveguide
W takes width for 0.4 μm to meet single mode condition；Spacing gap between input waveguide and tapered transmission line is 200nm；Four wavelength point
It Wei not λ0=1550nm, λ1=1549.2nm, λ2=1548.4nm, λ3=1547.6nm.Due to wavelength X0With basic mode TE0Form
It is directly injected into bus waveguide, so here with λ1For illustrate specific design process.For wavelength X1So that incoming wave
Lead the basic mode TE of support0With tapered transmission line midpoint width w1Corresponding high-order mode TE1Meet phase-matching condition, i.e., the two has
It is equal to imitate refractive index；Tapered transmission line head end width w1aWith input waveguide width w- Δs w1, aftermost breadth w1bWith input waveguide width w
+Δw1Meet phase-matching condition respectively.
Fig. 4 is the four wavelength silicon substrate wavelength-division multiplex based on taper asymmetrical directional coupler that the embodiment of the present invention is provided
Device is λ in wavelength1When, single order pattern TE1With basic mode TE0The relational graph that changes with duct width of effective refractive index；Thus it obtains
The midpoint width w of tapered transmission line1It is 0.835 μm, head and the tail width w1aAnd w1bRespectively 0.795 μm and 0.875 μm.It is dry according to pattern
It relates to theoretical calculation and obtains coupling length, the coupling length L optimized using simulation software 3D FDTD modeling and simulatings1It is 20 μm；
Similarly obtain corresponding wavelength λ2, tapered transmission line width w2a、w2And w2bRespectively 1.21 μm, 1.27 μm and 1.33 μm, the coupling of optimization
Close length L2It is 23.4 μm；Corresponding wavelength λ3, tapered transmission line width w3a、w3And w3bRespectively 1.62 μm, 1.71 μm and 1.8 μm,
The coupling length L of optimization3It is 27 μm.Compared to existing wavelength division multiplexer, the embodiment of the present invention is provided non-right based on taper
Claim four wavelength silicon substrate wavelength division multiplexers of directional coupler that there is smaller size (about 125 μm of 8 μ m), higher design spirit
Activity and scalability.
Fig. 5 is the four wavelength silicon substrate wavelength division multiplexers based on taper asymmetrical directional coupler that are provided by embodiment in wave
Long λ0It is lower to emulate obtained light field transmission figure, it can be seen that wavelength X0With TE0Pattern is injected into bus waveguide and almost lossless
The transmission of consumption.
Fig. 6 is the four wavelength silicon substrate wavelength division multiplexers based on taper asymmetrical directional coupler that are provided by embodiment in wave
Long λ1It is lower to emulate obtained light field transmission figure, it can be seen that wavelength X1With the TE being converted to1Pattern bus waveguide almost
Loss-free transmission.
Fig. 7 is the four wavelength silicon substrate wavelength division multiplexers based on taper asymmetrical directional coupler that are provided by embodiment in wave
Long λ2It is lower to emulate obtained light field transmission figure, it can be seen that wavelength X2With the TE being converted to2Pattern bus waveguide almost
Loss-free transmission.
Fig. 8 is the four wavelength silicon substrate wavelength division multiplexers based on taper asymmetrical directional coupler that are provided by embodiment in wave
Long λ3It is lower to emulate obtained light field transmission figure, it can be seen that wavelength X3With the TE being converted to3Pattern bus waveguide almost
Loss-free transmission.
Fig. 9 is the four wavelength silicon substrate wavelength division multiplexers based on taper asymmetrical directional coupler that are provided by embodiment four
A wavelength (λ0、λ1、λ2、λ3) while injecting the light field transmission figure emulated under i.e. four wavelength multiplexings, it can be seen that four
After the light of wavelength is multiplexed with the corresponding pattern being converted to, it is limited in common transport in bus waveguide well.
In summary, four wavelength silicon substrate wavelength-divisions of taper asymmetrical directional coupler based on the embodiment of the present invention are multiple
With device, the multiplexing of four wavelength can be realized under smaller size, and ensures that the light field of four wavelength multiplexings is almost loss-free
It is transmitted in bus waveguide, while there is good design flexibility and scalability.
If it is understood that input wavelength is extended to n+1, taper Asymmetric directional coupler provided by the invention
The silicon substrate wavelength division multiplexer of device equally can realize the multiplexing of n+1 wavelength under smaller size, and ensure n+1 wave
The light field of long multiplexing is almost loss-free to be transmitted in bus waveguide, while having good design flexibility and expansible
Property.
It is the four wavelength silicon substrate wavelength-division multiplex based on taper asymmetrical directional coupler provided by embodiment shown in Figure 10
What device emulated, insertion loss can be analyzed with the relational graph of input waveguide change width from above-mentioned attached drawing, to a certain wave
Long-channel, the four wavelength silicon substrate wavelength division multiplexers based on taper asymmetrical directional coupler are ± 5~10nm range interpolations in Δ w
Enter loss and be less than 2dB, this range of tolerable variance is conducive to the making of device, preferably ensures theoretical and experiment consistency.
It is the four wavelength silicon substrate wavelength-division multiplex based on taper asymmetrical directional coupler provided by embodiment shown in Figure 11
Experimental result picture of the device under four wavelength input conditions；From the figure can analyze and straight wave guide normalization after, four wavelength are logical
The corresponding insertion loss in road respectively may be about 0.1dB, 0.3dB, 0.8dB and 1dB, corresponding crosstalk be respectively -24dB, -23dB, -
24dB and -26dB has low insertion loss and small crosstalk on the whole, and based on the silicon of taper asymmetrical directional coupler
Experimental result and Theoretical Design of the fundamental wave division multiplexer under four wavelength input conditions are almost the same, and there is good making to hold
Difference.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include
Within protection scope of the present invention.
Claims (5)
1. a kind of silicon substrate wavelength division multiplexer based on taper asymmetrical directional coupler, which is characterized in that including：(n+1) a defeated
Enter waveguide, multiple curved waveguides, n different in width tapered transmission line and n tapered coupling；
First input waveguide is connected by first tapered coupling with one end of first tapered transmission line, k-th of taper
The other end of waveguide is connected by one end of+1 tapered transmission line of+1 tapered coupling of kth and kth, 1≤k≤n-1；N
The width of tapered transmission line is incremented by successively, what first input waveguide, n tapered transmission line and n tapered coupling connected
Structure composition bus waveguide；
I-th of input waveguide by least one curved waveguide is coupled to (i-1)-th tapered transmission line, and to form (i-1)-th taper non-right
Directional coupler, the optical signal that (i-1)-th taper asymmetrical directional coupler is used to input i-th of input waveguide is claimed to turn
It changes corresponding higher order mode into and is coupled to the bus waveguide and be transmitted, wherein each taper asymmetrical directional coupler
Corresponding higher order mode is different, 2≤i≤n+1；
(n+1) a input waveguide transmits the optical signal of (n+1) a different wave length respectively, (n+1) a input waveguide, multiple curved
Bent waveguide, the tapered transmission line of n different in width and n tapered coupling are placed in silicon base, described asymmetric based on taper
The multiplexing of (n+1) a different wave length may be implemented in the silicon substrate wavelength division multiplexer of directional coupler.
2. the silicon substrate wavelength division multiplexer according to claim 1 based on taper asymmetrical directional coupler, which is characterized in that
If the head and the tail width of n tapered transmission line is followed successively by w1aAnd w1b, w2aAnd w2b, w3aAnd w3b..., wnaAnd wnb, n tapered transmission line coupling
The midpoint width for closing region is followed successively by w1, w2, w3…wn；
The width of n-th of tapered transmission line passes through n-th of wavelength XnPhase-matching condition and make tolerance Δ wnIt determines, incoming wave
Lead corresponding basic mode TE0With n-th of tapered transmission line coupling regime midpoint wnCorresponding high-order mode TEnMeet phase-matching condition；
N-th of tapered transmission line head end width wnaWith input waveguide width w- Δs wn, aftermost breadth wnbWith input waveguide width w+ Δs
wnMeet phase-matching condition, Δ w respectivelynIt is determined by balance coupling efficiency and coupling length relationship between the two, wherein w
The width of basic mode is supported for input waveguide.
3. the silicon substrate wavelength division multiplexer according to claim 2 based on taper asymmetrical directional coupler, which is characterized in that
The length of the coupling unit of the n taper asymmetrical directional coupler is followed successively by L1, L2, L3…Ln, the length is dry by pattern
Theoretical determination is related to, is that coupling efficiency is made to reach maximum Best Coupling length.
4. the silicon substrate wavelength division multiplexer according to claim 3 based on taper asymmetrical directional coupler, which is characterized in that
The spacing of i-th of input waveguide and (i-1)-th tapered transmission line is 150nm~300nm；In the premise for meeting technique manufacturing conditions
Under, which is conducive to coupling of the light from input waveguide to bus waveguide, and ensures relatively short coupling length as possible.
5. the silicon substrate wavelength division multiplexer according to claim 1 based on taper asymmetrical directional coupler, which is characterized in that
The width value range of a input waveguide cross section (n+1) is 0.4 μm~0.5 μm, to meet single mode condition so that waveguide
In light field only exist basic mode, be conducive to the conversion of pattern when light is coupled from input waveguide to bus waveguide, be conducive to based on cone
The silicon substrate wavelength division multiplexer of shape asymmetrical directional coupler carries out on piece with the waveguide device except it and integrates.
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| CN109283616A (en) * | 2018-12-10 | 2019-01-29 | 中国科学院上海微系统与信息技术研究所 | Temperature-insensitive Mach-Zehnder interferometers |
| CN109709643A (en) * | 2019-01-24 | 2019-05-03 | 浙江大学 | One kind being based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip |
| CN110531462A (en) * | 2019-09-06 | 2019-12-03 | 北京大学 | A kind of pyramidal structure parameter optimization method and system for optical mode division multiplexer |
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| CN114637072A (en) * | 2022-01-18 | 2022-06-17 | 浙江大学 | Shallow etching multimode interference coupled multi-channel flat-top wavelength division multiplexing receiver |
| CN114637072B (en) * | 2022-01-18 | 2023-10-13 | 浙江大学 | Shallow etching multimode interference coupling multichannel flat-top type wavelength division multiplexing receiver |
| WO2023147736A1 (en) * | 2022-02-07 | 2023-08-10 | 苏州湃矽科技有限公司 | On-chip integrated wavelength division multiplexer and chip |
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