CN109709643A - One kind being based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip - Google Patents

One kind being based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip Download PDF

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CN109709643A
CN109709643A CN201910070179.0A CN201910070179A CN109709643A CN 109709643 A CN109709643 A CN 109709643A CN 201910070179 A CN201910070179 A CN 201910070179A CN 109709643 A CN109709643 A CN 109709643A
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polarization
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CN109709643B (en
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戴道锌
叶超超
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Zhejiang University ZJU
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Abstract

The invention discloses one kind to be based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip.Two input terminals of each polarization beam combiner are connect with respective input single mode waveguide respectively, the connection of the input terminal of output end and spot-size converter, the output end of spot-size converter is connected with the one end for connecting waveguide, and the other end for connecting waveguide is then connect through pattern multiplexer with output multimode waveguide;As multiplexer, optical signal is exported from the input of input single mode waveguide and from output multimode waveguide;As demultiplexer, optical signal is exported from the input of output multimode waveguide and from input single mode waveguide.Multiple signals can be respectively loaded on N number of eigen mode in same multimode waveguide by the present invention, and formation mode multiplexing expands transmission capacity in combination with polarization multiplexing, have convenient for outstanding advantages of connecting, be coupled with less fundamental mode optical fibre on piece optical interconnection system.

Description

One kind being based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip
Technical field
The present invention relates to multiplexing-demultiplexers, are based on single chip integrated dual-polarization mode multiplexing-solution more particularly to one kind Multiplexing chip.
Background technique
It is well known that long-distance optical communication has been achieved with immense success.Similarly, optical interconnection is as a kind of new interconnection side Formula can overcome traditional electricity to interconnect existing bottleneck problem, attract wide attention.Current optical interconnection is constantly interconnected to very-short-reach It promotes, traffic capacity demands are growing.For the big feature of optical interconnection system volume of transmitted data, most straightforward approach is to borrow With wavelength-division multiplex (WDM) technology common in long-distance optical fiber communication system.
However, wavelength-division multiplex system needs the expensive element such as multiple path laser or tunable laser or module, Thus cost is very high, will largely limit its extensive use in optical interconnection system.Therefore, it is badly in need of developing new multiplexing Technology, to reduce the cost of wavelength-division multiplex system.Mode multiplexing technology is suggested very early in multimode fibre communication, but by It is allowed to make slow progress in fiber mode control (such as conversion, excitation) technical problem.Recently, it has been proposed that using less fundamental mode optical fibre skill Message capacity can be promoted several times, and effectively overcome intermode crosstalk by art, thus become current research hotspot.For based on few The mode multiplexing system of mode fiber, core devices are mode (solution) multiplexers, for realizing each rank mode conjunction/point.Document 【Daoxin Dai,Jian Wang,and Yaocheng Shi,“Silicon mode (de)multiplexer enabling high capacity photonic networks-on-chip with a single-wavelength-carrier Light, " Opt.Let.38,1422-1424,2013] give a kind of multi-pass trace gather based on cascade asymmetrical directional coupler At optical waveguide mode multiplexing-demultiplexer, it is easy to extend, it can be achieved that multichannel.On this basis, document [Jian Wang, Sailing He,and Daoxin Dai,“On-chip silicon 8-channel hybrid (de)multiplexer enabling simultaneous mode- and polarization-division-multiplexing.”Laser& Photonics Reviews.8 (2): L18-L22,2014] a kind of realization dual-polarization pattern multiplexer is given, it can be achieved that two groups The conjunction of the basic mode of orthogonal polarisation state and high-order mode/point.However this design requirement asymmetrical directional coupler has significantly partially Vibration sensibility need to usually use Super Hi-Index difference optical waveguide that can realize, therefore be relatively more suitable on piece optical interconnection system, but It is coupled with less fundamental mode optical fibre, there are certain difficulties.Document [Nobutomo Hanzawa etc., " Two-mode PLC-based mode multi/demultiplexer for mode and wavelength division multiplexed Transmission. it " (22) Opt. Express.21: 25752-25760,2013] gives a kind of based on SiO2Optical waveguide Asymmetrical directional coupler, it can be achieved that coupling with less fundamental mode optical fibre, but there are polarization insensitive characteristics, and it is multiple to be difficult to realize polarization With, and SiO2Waveguide dimensions are larger to be not suitable on piece optical interconnection system.Therefore, the prior art, which lacks, a kind of is both suitable on piece Optical interconnection system is convenient for the multichannel integrated light guide dual-polarization mode multiplexing-demultiplexer being of coupled connections with less fundamental mode optical fibre again.
Summary of the invention
The problem of for background technique, the purpose of the present invention is to provide one kind to be based on single chip integrated dual-polarization Multiple signals can be respectively loaded on N number of eigen mode in same multimode waveguide by mode multiplexing-demultiplexing chip, form mould Formula multiplexing expands transmission capacity in combination with polarization multiplexing, convenient for connecting on piece optical interconnection system, with less fundamental mode optical fibre It is coupled.
The technical solution used to solve the technical problems of the present invention is that:
The present invention include: 2N+2 item input single mode waveguide, N+1 polarization beam combiner, N+1 item connect waveguide, pattern multiplexer with Export multimode waveguide, and N > 0;Further include: N+1 spot-size converter;
Two input terminals of each polarization beam combiner are connect with respective input single mode waveguide respectively, output end and spot-size converter Input terminal connection, the output end of spot-size converter are then connected with the one end for connecting waveguide, connect the other end of waveguide then through mode Multiplexer is connect with output multimode waveguide;When as multiplexer, optical signal from input single mode waveguide input and from output multimode wave Lead output;When as demultiplexer, optical signal is exported from the input of output multimode waveguide and from input single mode waveguide.
The 2N+2 item input single mode waveguide and N+1 polarization beam combiner are strong limitation small bore type of optical waveguide, Sectional dimension is nanometer scale, and Polarization-Sensitive, i.e., waveguide birefringence is greater than 10-4
The N+1 item connection waveguide, pattern multiplexer and output multimode waveguide are the weak big section type of optical waveguide of limitation, Its sectional dimension is micron dimension, and polarization insensitive, i.e., waveguide birefringence is less than 10-4
The N+1 spot-size converter is back taper optical waveguide structure, can be by local in limitation small bore optical waveguide by force Hot spot the hot spot in the big section optical waveguide of weak limitation is adiabatically converted to by inverted cone-shaped structure;
The output end of polarization beam combiner by spot-size converter by its transverse electric basic mode and horizontal magnetic basic mode the adiabatically company of being converted into respectively The transverse electric basic mode and horizontal magnetic basic mode in waveguide are connect, vice versa.
The pattern multiplexer includes: the connection waveguide of N+1 item, N coupled waveguide, bus waveguide and output multimode waveguide;
Wherein the input terminal of a connection waveguide and bus waveguide connects, remaining connection waveguide is connect with respective coupled waveguide, coupling Multiplex is led to be of coupled connections to form each Mode Coupling area, the output end of bus waveguide and output with the multimode waveguide in bus waveguide Multimode waveguide connection.
The bus waveguide, comprising: N number of conical optical waveguide, N number of multimode lightguide, or again include N number of mode rotator, It is insulated and is connected by conical optical waveguide between two adjacent multimode waveguides, the smallest multimode waveguide input terminal of width is through cone of light Waveguide, connection waveguide are connect with spot-size converter output end, the maximum multimode lightguide of width as end, output end with it is defeated Multimode lightguide connects out.
N number of Mode Coupling area, using the structure of asymmetrical directional coupler.
The pattern multiplexer, on being multiplexed short transverse there are two or more than two peak high-order mode when, it is asymmetric fixed Into coupler, the height of multimode lightguide and coupled zone optical waveguide is unequal or asymmetrical directional coupler in multimode light wave And multimode lightguide output end equal with the height of coupled zone optical waveguide is led to connect with mode rotator.
N number of mode rotator is that a groove is introduced in multimode lightguide, will laterally there is the high-order mode at multiple peaks Formula is converted to longitudinal higher order mode for having multiple peaks.
N-th of multimode lightguide supports at least n+1 eigen mode.
The invention has the advantages that:
1) multipath light signal can be respectively loaded on N number of eigen mode in same multimode waveguide by the present invention, formation mode multiplexing, In combination with polarization multiplexing, expand transmission capacity, is suitable for mode multiplexing system;
2) it is strong limitation small bore type of optical waveguide using input waveguide, realization and on piece light source, modulator, detector can be facilitated Deng the extensive single-chip integration of other optoelectronic components, it is suitable for optical interconnection system;
3) it is the weak big section type of optical waveguide of limitation using output waveguide, the efficient coupling of realization and less fundamental mode optical fibre can be facilitated.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is strong limitation small bore lightguide cross section schematic diagram.
Fig. 3 is the weak big section lightguide cross section schematic diagram of limitation.
Fig. 4 is polarization beam combiner structural schematic diagram.
Fig. 5 (a) is spot-size converter structural schematic diagram.
Fig. 5 (b) is spot-size converter tip cross-sectional view.
Fig. 6 is multiplexing TE10、TM10The corresponding Mode Coupling area schematic cross-section of mode.
Fig. 7 is multiplexing TE01、TM01The corresponding Mode Coupling area schematic cross-section of mode.
Fig. 8 is mode rotator cross-sectional view.
Specific embodiment
The present invention is described further with reference to the accompanying drawings and examples.
As shown in Figure 1, the present invention include: 2N+2 item input single mode waveguide 10a, 10b ..., 1na, 1nb ..., 1Na, 1Nb, N+1 polarization beam combiner 20 ..., 2n ..., 2N, N+1 item connect waveguide 40 ..., 4n ..., 4N, pattern multiplexer 5 and output Multimode waveguide 6, and N > 0;Further include: N+1 spot-size converter 30 ..., 3n ..., 3N.
Two input terminals of each polarization beam combiner are connect with respective input single mode waveguide respectively, and output end and mould spot are converted The input terminal of device connects, and the output end of spot-size converter is then connected with the one end for connecting waveguide, and the other end for connecting waveguide then passes through Pattern multiplexer is connect with output multimode waveguide;When as multiplexer, optical signal from input single mode waveguide 1na, 1nb input and from Multimode waveguide 6 is exported to export;When as demultiplexer, optical signal from output multimode waveguide 6 input and from input single mode waveguide 1na, 1nb output.
2N+2 item input single mode waveguide 10a, 10b ..., 1na, 1nb ..., 1Na, 1Nb and N+1 polarization beam combiners 20 ..., 2n ..., 2N be strong limitation small bore type of optical waveguide, sectional dimension is nanometer scale, and Polarization-Sensitive, i.e. wave It leads and birefringent is greater than 10-4
N+1 item connection waveguide 40 ..., 4n ..., 4N, pattern multiplexer 5 and output multimode waveguide 6 are weak limitation Big section type of optical waveguide, sectional dimension is micron dimension, and polarization insensitive, i.e. waveguide birefringence are less than 10-4.
As shown in Figure 1, forming n-th pair of input waveguide with two input waveguides 1na, 1nb, and end is inclined with n-th respectively Two input terminals of vibration bundling device 2n are connected.
The N+1 spot-size converter is back taper optical waveguide structure, can be by local in limitation small bore optical waveguide by force Hot spot the hot spot in the big section optical waveguide of weak limitation is adiabatically converted to by inverted cone-shaped structure.
The output end of polarization beam combiner is adiabatically converted its transverse electric basic mode and horizontal magnetic basic mode by spot-size converter respectively For the transverse electric basic mode and horizontal magnetic basic mode in connection waveguide, vice versa.
The pattern multiplexer 5 includes: the connection waveguide of N+1 item, N coupled waveguide, bus waveguide and output multimode waveguide 6;In a connection waveguide 40 connect with the input terminal of bus waveguide, remaining connection waveguide connect with respective coupled waveguide, coupling Multimode waveguide in waveguide and bus waveguide is of coupled connections to form each Mode Coupling area, and the output end of bus waveguide and output are more Mould waveguide 6 connects,
The bus waveguide, comprising: N number of conical optical waveguide 81 ..., 8n ..., 8N, N number of multimode lightguide 91 ..., 9n ..., 9N, or again comprising N number of mode rotator 101 ..., 10n ..., 10N, pass through taper light wave between two adjacent multimode waveguides Insulation connection is led, the smallest multimode waveguide input terminal of width connects through conical optical waveguide, connection waveguide and spot-size converter output end It connects, the maximum multimode lightguide of width is connect as end, output end with output multimode lightguide.
N number of Mode Coupling area, using the structure of asymmetrical directional coupler.
The pattern multiplexer 5, on being multiplexed short transverse there are two or more than two peak high-order mode when, it is asymmetric fixed Into coupler, the height of multimode lightguide and coupled zone optical waveguide is unequal or asymmetrical directional coupler in multimode light wave And multimode lightguide output end equal with the height of coupled zone optical waveguide is led to connect with mode rotator.
N number of mode rotator is that a groove is introduced in multimode lightguide, will can laterally be had by certain length The higher order mode at multiple peaks is converted to longitudinal higher order mode for having multiple peaks.
N-th of multimode lightguide supports at least n+1 eigen mode.
Here be the present invention as multichannel integrated light guide pattern multiplexer when work process:
2N+2 item input single mode waveguide 10a, 10b ..., 1na, 1nb ..., 1Na, 1Nb, be respectively loaded with an optical signal, wherein Input waveguide 10a ..., 1na ..., 1Na input be horizontal magnetic basic mode, input waveguide 10b ..., 1nb ..., 1Nb input It is transverse electric basic mode.
N-th couple of input waveguide 1na, two optical signals that 1nb is loaded are combined by the n-th polarization beam combiner 2n, It is exported from the output end of the n-th polarization beam combiner 2n.
The optical signal exported from the n-th polarization beam combiner 2n output end enters the input terminal of the n-th spot-size converter 3n, from n-th The output end of spot-size converter 3n exports, and enters in connection waveguide 4n, n=0 ..., N.
The two ways of optical signals loaded in 0th connection waveguide 40 successively passes through the first conical optical waveguide 81, the first multimode light Waveguide 91 or comprising first mode rotator 101 ..., the n-th conical optical waveguide 8n, the n-th multimode lightguide 9n or include the n-th mould Formula rotator 10n ..., N conical optical waveguide 81, N multimode lightguide 91 or comprising N mode rotator 10N, it is last defeated Out be loaded into output multimode lightguide 6 basic mode optical signal.In this transmission process, two paths of signals loads respectively always On the transverse electric basic mode and horizontal magnetic basic mode of optical waveguide, and keep polarization state constant.
The two ways of optical signals loaded in n-th connection waveguide 4n enters the n-th coupled waveguide 7n, the side coupled by evanescent wave Formula is coupled to n-th of high-order mode of the n-th multimode lightguide 9n from the basic mode of coupled waveguide 7n, and keeps polarization state constant.Then Successively pass through or comprising the n-th mode rotator 10n, the (n+1)th conical optical waveguide 8n+1, the (n+1)th multimode lightguide 9n+1 or comprising (n+1)th mode rotator 10n+1 ..., N conical optical waveguide 8N+1, N+1 multimode lightguide 9N+1 or include N+1 mode Rotator 10N+1, what is finally exported is the n-th order transverse electric high-order mode and the horizontal magnetic height of n-th order for being loaded into output multimode lightguide 6 The two ways of optical signals of rank mould, and keep inputting the two ways of optical signals polarization state phase that single mode waveguide 1na, 1nb are loaded with n-th pair Together, n=1 ..., N.
The specific embodiment of a multichannel integrated light guide pattern multiplexer for mode multiplexing system is given below, Otherwise it can realize pattern demultiplexer function.
Selection service band central wavelength is 1550nm.Consider mode passageway number 2(N+1)=6 situation, the mode being related to For two groups of polarization modes of TE, TM, every group of mode respectively contains 3 modes, respectively TE00、TE01、TE10、TM00、TM01、 TM10.Here, subscript 00 indicates basic mode (its mould field only one equal peak in transverse direction, short transverse), subscript 01 indicates that mould field exists In transverse direction only have a peak and in short transverse there are two peak high-order mode, subscript 10 indicate mould field horizontally there are two peak, And only has the high-order mode at a peak in short transverse.
Si is selected for limiting small bore optical waveguide by force3N4Burial type optical waveguide, cross section are as shown in Figure 2: where core Layer 112 is Si3N4Material, with a thickness of 250nm, refractive index 2;Its under-clad layer 111 is pure Si02Material, with a thickness of 8um, refraction Rate is 1.444;Its top covering 113 is to mix germanium Si02Material, with a thickness of 10um, refractive index 1.4586;Also covering one topmost Layer 114 is pure Si02Material, with a thickness of 10um, refractive index 1.444.
SiO is selected for the weak big section optical waveguide of limitation2Burial type optical waveguide, cross section are as shown in Figure 3: where core Layer 113 is to mix germanium Si02Material, with a thickness of 10um, refractive index 1.4586;Its under-clad layer 111 is pure Si02Material, with a thickness of 8um, refractive index 1.444;Its top covering 114 is pure Si02Material, with a thickness of 10um, refractive index 1.444;Its sandwich layer covering Refringence is 1%.
Single chip integrated dual-polarization mode multiplexing-demultiplexing chip is based on for one kind, the method designed using sub-module.
1, the design of polarization beam combiner
For polarization beam combiner, using two cascade modes of asymmetrical directional coupler.Its top view is as shown in Figure 4.Each ginseng Number is as follows: single mode waveguide width W1=1, multimode waveguide width W2=2.9, waveguide spacing Wg=1, S type bent lightguide length Lx= 100, transversal displacement Lz=5, clutch range straight wave guide length LcThe vertical misalignment amount L of=40, two clutch range straight wave guides0=50.It is single The width W of mould waveguide1With the width W of multimode waveguide2It is selected according to phase matched principle, makes the TM in single mode waveguide0Mode and TM in multimode waveguide1Modal phase matching.The thus TM in single mode waveguide0Mode can be coupled to multimode waveguide completely In TM1In mode, and the TE in single mode waveguide0TE in mode and multimode waveguide1Mode is since phase mismatches, only A small amount of coupling, passes through waveguide spacing WgOptimum choice can make this part coupling energy ignore.For the optimization design, when TE0 、TM0When being inputted respectively from two input ports of the polarization beam combiner, it both will export, that is, realize from its output port The function of polarization coupling.
2, the design of spot-size converter:
For spot-size converter, using back taper optical waveguide structure.Shown in its structural schematic diagram such as Fig. 5 (a), tip cross section Figure is as shown in Fig. 5 (b).Each parameter is as follows: Si3N4 head end duct width W1=1, the tip Si3N4 duct width Wtip=0.15, SiO2 duct width Wa=4, length L=2000 of height 10, tapered transmission line.
The selection of tip width should make basic mode mode and SiO at tip2The overlap integral of waveguide basic mode mode is sufficiently large, The loss that reduction mode mismatch introduces, is selected as 0.15 herein, can make the overlap integral of transverse electric basic mode and horizontal magnetic basic mode be respectively 99.1% and 98.6%;The selection of tapered transmission line length should be such that mode converts without loss as far as possible, be selected as 2000 herein, can make The transfer efficiency of transverse electric basic mode and horizontal magnetic basic mode respectively reaches 97.5% and 99.8%;Therefore the mould of total transverse electric basic mode and horizontal magnetic basic mode Spot transfer efficiency is 96.6% and 98.4%:
3, the design of pattern multiplexer:
S type bent lightguide parameter in coupled waveguide is selected as: lateral shift 20, length 800;According to adiabatic condition, first The taper of conical optical waveguide 81 and the second conical optical waveguide 82 is 1/20 radian.
3.1 multiplexing TE10And TM10Mode:
According to phase matched principle, the width and height of Rational choice multimode lightguide and corresponding coupled zone optical waveguide, so that The basic mode TE of coupled zone optical waveguide00With the high-order mode TE of multimode lightguide10Match.At the same time, due to weak limitation optical waveguide Polarization insensitive, the coupled structure are also polarization insensitive, therefore the basic mode TM of coupled zone optical waveguide00With the height of multimode lightguide Rank mould TM10Also Auto-matching.According to calculating, the width of multimode lightguide is highly respectively as follows: 10.56,10, and corresponds to coupled zone The width of optical waveguide is highly respectively as follows: 4,10, as shown in Figure 6.Selecting two waveguide spacing is 4, straight wave guide optimization length in coupled zone Degree is 2580, so that the basic mode TE in the optical waveguide of coupled zone00And TM00Respectively with the high-order mode TE in multimode lightguide10And TM10 Coupling completely.
3.2 multiplexing TE01And TM01Mode:
Technical solution 1:
TE is multiplexed using the inconsistent asymmetrical directional coupler of height01And TM01Mode.According to phase matched principle, rationally select The width and height of multimode lightguide and corresponding coupled zone optical waveguide are taken, so that the basic mode TE of coupled zone optical waveguide00With multimode The high-order mode TE of optical waveguide01Match.At the same time, due to weak limitation optical waveguide polarization insensitive, which is also inclined It shakes insensitive, therefore the basic mode TM of coupled zone optical waveguide00With the high-order mode TM of multimode lightguide01Also Auto-matching.According to meter Calculate, the width of multimode lightguide is highly respectively as follows: 5.65,10, and correspond to the width of coupled zone optical waveguide, be highly respectively as follows: 4, 5, as shown in Figure 7.Selecting two waveguide spacing is 4, and straight wave guide optimization length is 4640 in coupled zone, so that in the optical waveguide of coupled zone Basic mode TE00And TM00Respectively with the high-order mode TE in multimode lightguide01And TM01Coupling completely.
Technical solution 2:
TE is multiplexed using the consistent asymmetrical directional coupler of height and the cascade mode of mode rotator01And TM01Mode.First TE is multiplexed with the consistent asymmetrical directional coupler of height10And TM10Then mode connects as 3.1 after multimode lightguide A mode rotator is connect, then can make TE10And TM10Mode is converted to TE01And TM01Mode, to realize multiplexing TE01And TM01 The function of mode.The cross-sectional view of mode rotator is as shown in figure 8, pass through Rational choice groove offset t's and recess width s Value breaks the symmetry of waveguide and guarantees to introduce lesser crosstalk, and depth of groove d's is selected as the TE made in multimode waveguide10Mode It is equal with the mode overlap integral of the first transverse electric high-order mode and the second transverse electric high-order mode in mode rotator, due to weak limitation light Wave-guide polarization is insensitive, so the TM in multimode waveguide10The first horizontal magnetic high-order mode and second in mode and mode rotator is horizontal The mode overlap integral of magnetic high-order mode is also automatic equal.The width and height of multimode lightguide are followed successively by w=10.56, h=10, root According to calculating, groove offset, width and depth are followed successively by t=0, s=1.5 and d=4.3, and the optimization length of mode rotator takes 1435, E can be made10And TM10Mode is converted to TE01And TM01Mode.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention, in spirit of the invention and In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.

Claims (8)

1. one kind is based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, comprising: 2N+2 item inputs single mode waveguide (10a, 10b ..., 1na, 1nb ..., 1Na, 1Nb), N+1 polarization beam combiner (20 ..., 2n ..., 2N), N+1 item connects wave Lead (40 ..., 4n ..., 4N), pattern multiplexer (5) and output multimode waveguide (6), and N > 0;It is characterized by further comprising: N+1 A spot-size converter (30 ..., 3n ..., 3N);
Two input terminals of each polarization beam combiner are connect with respective input single mode waveguide respectively, output end and spot-size converter Input terminal connection, the output end of spot-size converter are then connected with the one end for connecting waveguide, connect the other end of waveguide then through mode Multiplexer is connect with output multimode waveguide;When as multiplexer, optical signal from input single mode waveguide input and from output multimode wave Lead output;When as demultiplexer, optical signal is exported from the input of output multimode waveguide and from input single mode waveguide;
The 2N+2 item input single mode waveguide and N+1 polarization beam combiner are strong limitation small bore type of optical waveguide, section Having a size of nanometer scale, and it is Polarization-Sensitive, i.e., waveguide birefringence is greater than 10-4
The N+1 item connection waveguide, pattern multiplexer (5) and output multimode waveguide (6) are the weak big section optical waveguide class of limitation Type, sectional dimension are micron dimension, and polarization insensitive, i.e., waveguide birefringence is less than 10-4
2. according to claim 1 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In: the N+1 spot-size converter is back taper optical waveguide structure, can be by hot spot of the local in limitation small bore optical waveguide by force The hot spot in the weak big section optical waveguide of limitation is adiabatically converted to by inverted cone-shaped structure;
The output end of polarization beam combiner by spot-size converter by its transverse electric basic mode and horizontal magnetic basic mode the adiabatically company of being converted into respectively The transverse electric basic mode and horizontal magnetic basic mode in waveguide are connect, vice versa.
3. according to claim 1 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In: the pattern multiplexer (5) include: N+1 item connection waveguide (40 ..., 4n ..., 4N), N coupled waveguide (71 ..., 7n ..., 7N), bus waveguide and output multimode waveguide (6);
Wherein the input terminal of a connection waveguide and bus waveguide connects, remaining connection waveguide is connect with respective coupled waveguide, coupling Multiplex is led to be of coupled connections to form each Mode Coupling area, the output end of bus waveguide and output with the multimode waveguide in bus waveguide Multimode waveguide (6) connection.
4. according to claim 4 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In the bus waveguide, comprising: N number of conical optical waveguide (81 ..., 8n ..., 8N), N number of multimode lightguide (91 ..., 9n ..., 9N), or again comprising N number of mode rotator (101 ..., 10n ..., 10N), pass through cone of light between two adjacent multimode waveguides Waveguide insulation connection, the smallest multimode waveguide input terminal of width is through conical optical waveguide, connection waveguide and spot-size converter output end Connection, the maximum multimode lightguide of width are connect as end, output end with output multimode lightguide.
5. according to claim 4 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In: N number of Mode Coupling area, using the structure of asymmetrical directional coupler.
6. according to claim 3 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In the pattern multiplexer (5), on being multiplexed short transverse there are two or more than two peaks high-order mode when, asymmetric orientation The height of multimode lightguide and coupled zone optical waveguide is unequal in coupler or asymmetrical directional coupler in multimode lightguide And multimode lightguide output end equal with the height of coupled zone optical waveguide is connect with mode rotator.
7. according to claim 4 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In: N number of mode rotator is that a groove is introduced in multimode lightguide, and the higher order mode for laterally having multiple peaks is converted For longitudinal higher order mode for having multiple peaks.
8. according to claim 4 a kind of based on single chip integrated dual-polarization mode multiplexing-demultiplexing chip, feature exists In: n-th of multimode lightguide supports at least n+1 eigen mode.
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CN114966969A (en) * 2022-05-27 2022-08-30 师大海能应急科技(清远)有限公司 Parallel multimode cross structure based on asymmetric directional coupler
WO2023147736A1 (en) * 2022-02-07 2023-08-10 苏州湃矽科技有限公司 On-chip integrated wavelength division multiplexer and chip

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