CN102749676B - Cross waveguide based on linear tapered multimode interference principle - Google Patents

Cross waveguide based on linear tapered multimode interference principle Download PDF

Info

Publication number
CN102749676B
CN102749676B CN201210202023.1A CN201210202023A CN102749676B CN 102749676 B CN102749676 B CN 102749676B CN 201210202023 A CN201210202023 A CN 201210202023A CN 102749676 B CN102749676 B CN 102749676B
Authority
CN
China
Prior art keywords
region
waveguide
taper
wave guide
straight wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201210202023.1A
Other languages
Chinese (zh)
Other versions
CN102749676A (en
Inventor
乐孜纯
李锐
董文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University of Technology ZJUT
Original Assignee
Zhejiang University of Technology ZJUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University of Technology ZJUT filed Critical Zhejiang University of Technology ZJUT
Priority to CN201210202023.1A priority Critical patent/CN102749676B/en
Publication of CN102749676A publication Critical patent/CN102749676A/en
Application granted granted Critical
Publication of CN102749676B publication Critical patent/CN102749676B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention discloses a cross waveguide based on a linear tapered multimode interference principle. The cross waveguide comprises a vertical portion and a horizontal portion, each of the vertical portion and the horizontal portion is composed of a front straight waveguide area, a front tapered waveguide area, a tapered multimode interference area, a rear tapered waveguide area and a rear straight waveguide area which are sequentially connected, the horizontal portion and the vertical portion are perpendicularly crossed, and a crossed area is located in the tapered multimode interference area. The cross waveguide based on the linear tapered multimode interference principle has the advantage of being low in loss and crosstalk and small in size.

Description

A kind of right-angled intersection waveguide based on linear taper multimode interference principle
Technical field
The invention belongs to optical communication technique field, in the optical device that contains right-angled intersection waveguiding structure, as the micro-ring resonant wave filter and the micro-ring resonant wavelength division multiplexer etc. that contain right-angled intersection waveguiding structure.
Technical background
Silicon-based nano waveguide is one of important materials of manufacturing integration type optic communication device, the refringence of its waveguide core district and covering is very large, therefore be conducive to constrain light in core district, the size of waveguide can be made very littlely, more adapts to the superintegrated requirement of large-scale integrated light path.And owing to adopting silica-based waveguides, with the COMS process compatible of current standard.Optical waveguide is basic photonic interconnections device.For the waveguide of sub-micron rank silicon-based nano, its loss is very little, is approximately 1.7dB/cm, but when two waveguides intersect mutually, while forming the waveguide of right-angled intersection framework, because scattering of light meeting in cross architecture brings extra loss.For the waveguide of traditional plane cross decussate texture, we must consider its insertion loss and crosstalk.Particularly for high-index material as SOI(Silicon On Insulator), insertion loss and crosstalk very seriously, the performance that this has not only affected right-angled intersection waveguide, has also restricted its application in optical device field.Therefore, develop and there is low insertion loss and low right-angled intersection waveguide of crosstalking is the actual demand of application, have very important significance.In recent years, some researcher is studied right-angled intersection waveguide, particularly the method that reduces the insertion loss of right-angled intersection waveguide and crosstalk is studied.For example adopt the waveguide of the vertical stratification of multilayer can well reduce the insertion loss of introducing due to right-angled intersection and the (Hatakeyama that crosstalks, Loss-less multilevelcrossing of busline waveguide in vertically coupled microring resonatorfilter, IEEE Photonics Technology Letters, 2004,16 (2): 473-475), but the many of complexity are wanted in the manufacture craft opposite planar waveguide of multilayer vertical stratification waveguide, not only make difficulty and cost high.In addition, in order to reduce the insertion loss of being introduced by criss-cross construction and to crosstalk, the interference by multiple-mode interfence MMI(multimode has been proposed) for right-angled intersection waveguide, existing scheme has the right-angled intersection waveguiding structure (Chen based on rectangle multimode interference principle, H.and A.W.Poon, Low-loss multimode-interference-basedcrossings for silicon wire waveguides, IEEE Photonics TechnologyLetters, 2006, 18 (21): 2260-2262), right-angled intersection waveguiding structure (Fukazawa based on oval multimode interference principle, T., et al., Low loss intersection of Si photonic wirewaveguides, Japanese Journal of Applied Physics, 2004, 43 (2): 646-647).Crosstalk although these schemes can reduce scattering loss and the inhibition of right-angled intersection waveguiding structure, criss-cross construction length is all greater than 10 microns, is unfavorable for that the monolithic of large-scale integrated light path is integrated.
Summary of the invention
In order to overcome, the insertion loss of right-angled intersection waveguiding structure in prior art is large, the serious problem of crosstalking, and physical dimension is large and make difficult deficiency, the right-angled intersection waveguide based on linear taper multimode interference principle that the present invention has provided a kind of low-loss, lowly crosstalks, size is little.
For the technical scheme providing is provided be:
A kind of right-angled intersection waveguide based on linear taper multimode interference principle, described right-angled intersection waveguide comprises vertical portion and lateral part, vertical portion forms by the front straight wave guide region being connected successively, front taper waveguide region, taper multiple-mode interfence region, rear tapered transmission line region and rear straight wave guide region with lateral part, described lateral part and vertical portion square crossing, and intersection region is in taper multiple-mode interfence region.
Further, the one end in the front straight wave guide region of described vertical portion or lateral part is light input end mouth, light successively through front taper waveguide region, taper multiple-mode interfence region, after tapered transmission line region and after straight wave guide region, the one end in described rear straight wave guide region is optical output port.
Further again, described front straight wave guide region, front taper waveguide region, taper multiple-mode interfence region, rear tapered transmission line region and rear straight wave guide region all adopt SOI material, wherein, the refractive index of silicon and silicon dioxide is respectively 3.48 and 1.46, and the refringence of waveguide core district and covering is 2.02.
Technical conceive of the present invention is: the pattern of input light changes in a kind of right-angled intersection waveguiding structure based on linear taper multimode interference principle of the present invention.The input light of single mode is single mode at straight wave guide and tapered transmission line region, but enter into taper multiple-mode interfence region and can occur successively multimode, single mode and multimode situation, and multimode is symmetrical, then entering into tapered transmission line region becomes again single mode, finally with single-mode output.It should be noted that in right-angled intersection center and occur single mode situation.The cross waveguide of linear taper is the reflection certainly from input plane Dao Ta center and output plane based on wave guide mode field.Reflection certainly in right-angled intersection dot center has suppressed the expansion of wavefront, thereby has reduced the scattering loss of point of crossing and crosstalked.Because input field is in waveguide core, it only can excite symmetrical even mould field, thereby in multimode symmetric pattern, reflection is symmetrical the interference certainly.
The invention has the beneficial effects as follows: 1, introduced two square crossing taper multiple-mode interfence regions at the infall of right-angled intersection waveguide, with respect to the waveguide square crossing (as straight wave guide square crossing) of other shape, it has, and scattering loss is little, the low feature of crosstalking.2, two square crossing taper multiple-mode interfence regions of introducing can reduce the size of this waveguide, are conducive to improve light path integrated level.
Brief description of the drawings
Fig. 1 is the structural representation that the present invention is based on the right-angled intersection waveguide of linear taper multimode interference principle.
Fig. 2 is with Finite-Difference Time-Domain Method FDTD(finite-different time-domain) operation wavelength that obtains of simulation at 1500nm between 1600nm, the comparison diagram of crosstalking of a kind of right-angled intersection waveguide based on linear taper multimode interference principle of the straight wave guide of conventional planar criss-cross construction and the present invention.
Fig. 3 be with FDTD simulate the operation wavelength obtaining at 1500nm between 1600nm, the return loss comparison diagram of a kind of right-angled intersection waveguide based on linear taper multimode interference principle of the straight wave guide of conventional planar criss-cross construction and the present invention.
Fig. 4 be with FDTD simulate the operation wavelength obtaining at 1500nm between 1600nm, the crosstalk insertion loss comparison diagram of comparison diagram of a kind of right-angled intersection waveguide based on linear taper multimode interference principle of the straight wave guide of conventional planar criss-cross construction and the present invention.
Embodiment
Further illustrate the present invention below in conjunction with accompanying drawing:
With reference to Fig. 1 ~ Fig. 4, a kind of right-angled intersection waveguide based on linear taper multimode interference principle is made up of two same sections.One of them part is made up of straight wave guide region, tapered transmission line region, taper multiple-mode interfence region, tapered transmission line region and straight wave guide region.Two parts square crossing, and intersection region is in taper multiple-mode interfence region.
All regions module are all based on SOI material, and the refractive index of silicon and silicon dioxide is respectively 3.48 and 1.46.The refringence of its waveguide core district and covering is 2.02, because the refringence of waveguide core district and covering is very large, is therefore conducive to constrain light in core district, and the size of waveguide can be made very littlely, more adapts to the superintegrated requirement of large-scale integrated light path.
As Fig. 1, the width in straight wave guide region is W 1, the small-bore width in tapered transmission line region is W 1, heavy caliber width is W 2, the heavy caliber width in taper multiple-mode interfence region is W 3, length is L 1, small-bore width is W 4, the heavy caliber width in another tapered transmission line region is W 5, length is L 2.
In taper multiple-mode interfence region, the bat length that we can theoretical calculate two lowest-order patterns is:
L π p ( z ) = π ( β 0 - β 1 ) p ( z ) = 4 n r ( W i + W g ) ( W i + W g - 2 kz ) 3 λ - - - ( 1 )
β in formula is propagation constant, and W is caliber size, and z is transmission range, and κ=tan (θ) is for the fade rate in taper multiple-mode interfence region, wherein θ is cone angle, and λ is operation wavelength, n γfor the refractive index size in this region.The cross waveguide of linear taper is the reflection certainly from input plane Dao Ta center and output plane based on wave guide mode field.Reflection certainly in right-angled intersection dot center has suppressed the expansion of wavefront, thereby has reduced the scattering loss of point of crossing and crosstalked.Because input field is in waveguide core, it only can excite symmetrical even mould field, thereby in multimode symmetric pattern, reflection is symmetrical the interference certainly.The condition of reflection certainly that meets this situation is
exp [ j ( β 0 - β 1 ) p z ] = exp [ j υ ( υ + 2 ) π 3 L π p ( z ) z ] , V is even number (2)
For even illumination, when p=1,2,3 ... produce from reflection.
The wavefront of having offset right-angled intersection center just because of the reflection certainly of taper multi-mode interference coupler expands, and has suppressed the scattering loss of infall and has crosstalked.
At physical dimension W 1be 0.3 μ m, W 2be 0.8 μ m, W 3be 1.1 μ m, L 1be 3.9 μ m, W 4be 0.8 μ m, W 5be 0.6 μ m, L 2be 1 μ m, we have carried out emulation under FDTD to the present invention, and the simulation result obtaining is Fig. 2, Fig. 3, Fig. 4.
As shown in Figure 2, operation wavelength is at 1500nm between 1600nm, and the right-angled intersection waveguide of a kind of linearity of the present invention based on taper multimode interference principle is more conducive to suppress to crosstalk than the straight wave guide of conventional planar criss-cross construction, reduced 30dB crosstalking to 22dB.
As shown in Figure 3, operation wavelength is at 1500nm between 1600nm, and a kind of right-angled intersection waveguide based on linear taper multimode interference principle of the present invention has improved 53dB to 20dB return loss than the straight wave guide of conventional planar criss-cross construction.
As shown in Figure 4, operation wavelength is at 1500nm between 1600nm, and a kind of right-angled intersection waveguide based on linear taper multimode interference principle of the present invention has improved the insertion loss of 0.9dB than the straight wave guide of conventional planar criss-cross construction.
In addition, the length in taper multiple-mode interfence region is only 3.9 μ m, and the whole size of xsect of the present invention is 6 μ m × 6 μ m, and this improves light path integrated level greatly.And we with the bandwidth for transmission of FDTD simulation be wavelength be 1500nm between 1600nm, this is also Wave division multiplexing WDM(Wavelength Division Multiplex) the optical signal transmission wave band that adopts of technology.
Content described in this instructions embodiment is only enumerating of way of realization to inventive concept; protection scope of the present invention should not be regarded as only limiting to the concrete form that embodiment states, protection scope of the present invention also and conceive the equivalent technologies means that can expect according to the present invention in those skilled in the art.

Claims (2)

1. the right-angled intersection waveguide based on linear taper multimode interference principle, it is characterized in that: described right-angled intersection waveguide comprises vertical portion and lateral part, vertical portion forms by the front straight wave guide region being connected successively, front taper waveguide region, taper multiple-mode interfence region, rear tapered transmission line region and rear straight wave guide region with lateral part, described lateral part and vertical portion square crossing, and intersection region is in taper multiple-mode interfence region; Described front straight wave guide region, front taper waveguide region, taper multiple-mode interfence region, rear tapered transmission line region and rear straight wave guide region all adopt SOI material, wherein, the refractive index of silicon and silicon dioxide is respectively 3.48 and 1.46, and the refringence of waveguide core district and covering is 2.02.
2. the right-angled intersection waveguide based on linear taper multimode interference principle as claimed in claim 1, it is characterized in that: the one end in the front straight wave guide region of described vertical portion or lateral part is light input end mouth, light successively through front taper waveguide region, taper multiple-mode interfence region, after tapered transmission line region and after straight wave guide region, the one end in described rear straight wave guide region is optical output port.
CN201210202023.1A 2012-06-15 2012-06-15 Cross waveguide based on linear tapered multimode interference principle Active CN102749676B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210202023.1A CN102749676B (en) 2012-06-15 2012-06-15 Cross waveguide based on linear tapered multimode interference principle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210202023.1A CN102749676B (en) 2012-06-15 2012-06-15 Cross waveguide based on linear tapered multimode interference principle

Publications (2)

Publication Number Publication Date
CN102749676A CN102749676A (en) 2012-10-24
CN102749676B true CN102749676B (en) 2014-08-06

Family

ID=47030014

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210202023.1A Active CN102749676B (en) 2012-06-15 2012-06-15 Cross waveguide based on linear tapered multimode interference principle

Country Status (1)

Country Link
CN (1) CN102749676B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104639259B (en) * 2013-11-07 2017-10-17 华为技术有限公司 A kind of frequency mixer, frequency mixing method and photoreceiver
JP6508543B2 (en) * 2014-04-30 2019-05-08 ホアウェイ・テクノロジーズ・カンパニー・リミテッド Inverse tapered waveguide for low loss mode converter
KR101900630B1 (en) * 2014-07-16 2018-09-19 후아웨이 테크놀러지 컴퍼니 리미티드 Cross waveguide
US9709738B1 (en) * 2016-03-11 2017-07-18 Huawei Technologies Co., Ltd. Waveguide crossing
GB201621943D0 (en) * 2016-12-22 2017-02-08 Axenic Ltd An optical waveguide crosspoint
CN108650187B (en) * 2018-06-29 2020-12-25 浙江工商大学 4X 4 non-blocking wavelength selection router based on series double-ring resonator
CN110031934B (en) * 2019-04-24 2020-07-14 清华-伯克利深圳学院筹备办公室 Cross waveguide based on silicon-based waveguide sub-wavelength grating and multi-mode interference principle
CN115308839B (en) * 2022-08-10 2023-07-21 吉林大学 Multi-port waveguide crossing device based on silica/polymer embedded waveguide platform and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101248379A (en) * 2004-03-24 2008-08-20 斯欧普迪克尔股份有限公司 Optical crossover in thin silicon
EP2204679A2 (en) * 2008-12-30 2010-07-07 Das Photonics, S.L. Integrated photonic guide crossing structure
CN202676942U (en) * 2012-06-15 2013-01-16 浙江工业大学 Criss-cross waveguide based on linear taper multimode interference principle

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2002348015A1 (en) * 2001-10-26 2003-05-12 Brent E. Little Low loss lateral optical waveguide intersections

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101248379A (en) * 2004-03-24 2008-08-20 斯欧普迪克尔股份有限公司 Optical crossover in thin silicon
EP2204679A2 (en) * 2008-12-30 2010-07-07 Das Photonics, S.L. Integrated photonic guide crossing structure
CN202676942U (en) * 2012-06-15 2013-01-16 浙江工业大学 Criss-cross waveguide based on linear taper multimode interference principle

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
Chia-Haiang Chiu,ET AL..Taper-integrated multimode-interference based crossings for silicon wire waveguides.《Proc of SPIE》.2010,第7606卷全文.
Highly efficient crossing structure for silicon-on-insulator waveguides;Pablo Sanchis, ET AL.;《OPTICS LETTERS》;20090915;第34卷(第18期);全文 *
Pablo Sanchis, ET AL..Highly efficient crossing structure for silicon-on-insulator waveguides.《OPTICS LETTERS》.2009,第34卷(第18期),全文.
Taper-integrated multimode-interference based crossings for silicon wire waveguides;Chia-Haiang Chiu,ET AL.;《Proc of SPIE》;20101231;第7606卷;全文 *
乐孜纯 等.锥形多模干涉耦合器一般成像特性分析.《光学学报》.2011,第31卷(第6期),全文.
锥形多模干涉耦合器一般成像特性分析;乐孜纯 等;《光学学报》;20110630;第31卷(第6期);全文 *

Also Published As

Publication number Publication date
CN102749676A (en) 2012-10-24

Similar Documents

Publication Publication Date Title
CN102749676B (en) Cross waveguide based on linear tapered multimode interference principle
CN105759355B (en) A kind of on piece integrated-type polarization beam apparatus and its polarization beam splitting method
CN105829933B (en) Wave-guide polarization separation and polarization converter
CN101320111B (en) Parallel mode converter and optical divider composed by the same
CN105093408B (en) A kind of silica-based nanowire polarization beam apparatus based on schema evolution principle
CN101339273B (en) Optical fibre mode converter
CN106980153B (en) A kind of production method of the oval right-angled intersection waveguide based on multimode interference principle
CN103018832B (en) Polarization beam splitter
CN108508539B (en) Silicon fundamental wave division multiplexer based on conical asymmetric directional coupler
US20160033719A1 (en) Few-mode optical fibers
CN109270627A (en) A kind of polarization insensitive directional coupler based on multimode sub-wave length grating
CN105759357A (en) Compact mode order converter based on groove type waveguides
CN102269844B (en) Method for realizing high-download rate photonic crystal demultiplexer with reflection micro-cavity employing implantation technology
CN103513333A (en) Blended crossing device for silicon-based nanowire
CN107092056A (en) A kind of Wavelength division multiplexer/demultiplexer and preparation method thereof
CN106959163A (en) A kind of TE mould analyzers based on symmetrical three guide directional couplers structure
CN101614844A (en) Optical add/drop filter based on 2 D photon crystal band gap and auto-collimation effect
CN102436028A (en) Planar optical waveguide structure and manufacturing method thereof
CN103676006A (en) Tunable dual-purpose photonic crystal fiber coupler
CN113311537B (en) Polymer three-mode multiplexer based on cascade conical coupler
CN103728694B (en) A kind of broadband optical fiber mode converter
CN103645541B (en) A kind of terahertz polarization beam splitter
CN202676942U (en) Criss-cross waveguide based on linear taper multimode interference principle
CN115079345B (en) Double-conical asymmetric directional coupler-based light polarization beam splitting rotator
CN206818909U (en) Oval right-angled intersection waveguide based on multimode interference principle

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20121024

Assignee: Zhejiang Fuchunjiang Photoelectric Science & Technology Co., Ltd.

Assignor: Zhejiang University of Technology

Contract record no.: 2015330000097

Denomination of invention: Cross waveguide based on linear tapered multimode interference principle

Granted publication date: 20140806

License type: Common License

Record date: 20150507

LICC Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model