CN1050674C - 具有改进光学效率的薄膜驱动反射镜阵列 - Google Patents

具有改进光学效率的薄膜驱动反射镜阵列 Download PDF

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Publication number
CN1050674C
CN1050674C CN94112763A CN94112763A CN1050674C CN 1050674 C CN1050674 C CN 1050674C CN 94112763 A CN94112763 A CN 94112763A CN 94112763 A CN94112763 A CN 94112763A CN 1050674 C CN1050674 C CN 1050674C
Authority
CN
China
Prior art keywords
array
thin film
film actuated
actuated mirrors
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN94112763A
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English (en)
Chinese (zh)
Other versions
CN1115856A (zh
Inventor
尹东善
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of CN1115856A publication Critical patent/CN1115856A/zh
Application granted granted Critical
Publication of CN1050674C publication Critical patent/CN1050674C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN94112763A 1993-11-30 1994-11-30 具有改进光学效率的薄膜驱动反射镜阵列 Expired - Fee Related CN1050674C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019930025880A KR0131570B1 (ko) 1993-11-30 1993-11-30 투사형 화상표시 장치의 광로 조절 장치구조
KR25880/93 1993-11-30

Publications (2)

Publication Number Publication Date
CN1115856A CN1115856A (zh) 1996-01-31
CN1050674C true CN1050674C (zh) 2000-03-22

Family

ID=19369403

Family Applications (1)

Application Number Title Priority Date Filing Date
CN94112763A Expired - Fee Related CN1050674C (zh) 1993-11-30 1994-11-30 具有改进光学效率的薄膜驱动反射镜阵列

Country Status (4)

Country Link
US (1) US5550680A (ko)
JP (1) JPH07199094A (ko)
KR (1) KR0131570B1 (ko)
CN (1) CN1050674C (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970003448B1 (ko) * 1993-07-21 1997-03-18 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 제조방법
US5696618A (en) * 1993-09-23 1997-12-09 Daewoo Electronics Co., Ltd. Electrodisplacive actuated mirror array and method for the manufacture thereof
KR0159416B1 (ko) * 1995-05-26 1999-01-15 배순훈 광로 조절 장치
US5637517A (en) * 1995-05-26 1997-06-10 Daewoo Electronics Co., Ltd. Method for forming array of thin film actuated mirrors
TW357271B (en) * 1996-02-26 1999-05-01 Seiko Epson Corp Light regulator, display and the electronic machine
US5789264A (en) * 1996-03-27 1998-08-04 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuated mirror having a flat light reflecting surface
KR980003662A (ko) * 1996-06-28 1998-03-30 배순훈 큰 구동 각도를 가지는 박막형 광로 조절 장치
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
TW442783B (en) * 1999-07-09 2001-06-23 Ind Tech Res Inst Folding mirror
WO2002086602A1 (en) * 2001-04-17 2002-10-31 M2N, Inc. Micro-actuator and micro-device using the same

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3463572A (en) * 1966-10-21 1969-08-26 Perkin Elmer Corp Optical phase modulation apparatus
US3904274A (en) * 1973-08-27 1975-09-09 Itek Corp Monolithic piezoelectric wavefront phase modulator
US4111538A (en) * 1976-02-25 1978-09-05 Xerox Corporation Projection system of high efficiency
US4985926A (en) * 1988-02-29 1991-01-15 Motorola, Inc. High impedance piezoelectric transducer
JP2815910B2 (ja) * 1989-07-19 1998-10-27 シャープ株式会社 投影形画像表示装置
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5083854A (en) * 1990-02-15 1992-01-28 Greyhawk Systems, Inc. Spatial light modulator with improved aperture ratio
US5140396A (en) * 1990-10-10 1992-08-18 Polaroid Corporation Filter and solid state imager incorporating this filter
US5287215A (en) * 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
JP2798845B2 (ja) * 1992-03-26 1998-09-17 株式会社テック インクジェットプリンタヘッドの製造方法
JP3151644B2 (ja) * 1993-03-08 2001-04-03 日本碍子株式会社 圧電／電歪膜型素子
KR960016286B1 (ko) * 1993-03-31 1996-12-07 대우전자 주식회사 투사형화상표시장치
US5423207A (en) * 1993-12-27 1995-06-13 International Business Machines Corporation Advanced PZT glide head design and implementation for a small slider

Also Published As

Publication number Publication date
KR0131570B1 (ko) 1998-04-16
KR950016311A (ko) 1995-06-17
US5550680A (en) 1996-08-27
JPH07199094A (ja) 1995-08-04
CN1115856A (zh) 1996-01-31

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