CN105044905B - Planar waveguide device and installation method for producing higher hamonic wave - Google Patents
Planar waveguide device and installation method for producing higher hamonic wave Download PDFInfo
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Abstract
The invention discloses the planar waveguide device and installation method for producing higher hamonic wave, its core component is the slab guide that two panels flat glass is constituted, two panels flat glass is placed in parallel and the middle spacing that leaves is hundreds of microns of gap, gap is sealed by gas-tight sealing, and inert gas is full of in gap；Femtosecond laser enters slab guide after focusing on, and is propagated forward in the form of glancing incidence in the waveguide, and higher hamonic wave is produced with inert gas effect.The present invention belongs to pioneering using the slab guide of two panels flat glass composition as carrier gas, can effectively produce higher hamonic wave, can easily obtain periodic structure in slab guide again.
Description
Technical field
The present invention relates to ultrafast optical techniques field, and in particular to for produce higher hamonic wave planar waveguide device and its
Installation method.
Background technology
It is currently acquired Table top type coherent extreme ultraviolet light (EUV) light source and relevant that femtosecond laser a driven atom, which produces higher hamonic wave,
The unique channel of grenz ray (Soft-Xray) light source, while being also the prefered method for obtaining Ah 's coherent pulse light.Production at present
The experimental provision of raw higher hamonic wave mainly has three kinds：The first is the generating source by the use of pulse jet valve as higher hamonic wave；The
Two kinds are the generation devices for using gas box as higher hamonic wave；The third is to use hollow capillary waveguide to be carried as gas
Body produces higher hamonic wave.
Because the generation of higher hamonic wave needs to carry out under vacuum conditions, therefore when the inert gas for producing higher hamonic wave enters
Entering can make vacuum change after vacuum, in order that produce higher hamonic wave intensity do not changed by vacuum influenceed, it is necessary to
Certain vacuum is persistently maintained to vacuum chamber pumping.For pulse jet valve and gas box, when gas enters true
After sky, vacuum is changed greatly, and larger load is caused to the molecular pump and mechanical pump for playing air-extraction function；And use hollow hair
Tubule can effectively solve this problem as carrier gas, and this has very important significance for application.On the other hand, it is hollow
Capillary waveguide can effectively suppress laser plasma and defocus compared to first two method, significantly increase laser and gas
Interaction length, considerably increases the intensity for producing signal, but the wavelength of its higher hamonic wave produced is longer, it is impossible to enter one
Step meets the application demand of people；And the periodically variable hollow capillary of verified internal diameter can be more effective for substantial amounts of experiment
Ground produces the higher hamonic wave of short wavelength, the yield of the higher hamonic wave of short wavelength has been reached adaptable rank.
But the technology that the periodically variable hollow capillary of internal diameter needs to use glass-blowing is made at present, this is a kind of pole
Its accurate complicated technology, therefore this just adds great difficulty to obtain the hollow capillary of this special construction.Using fly
It is due to hollow capillary although second laser micro-machining technology can also obtain periodically variable structure in glass surface
Tube wall is curved surface, therefore utilizes the femtosecond laser hardly possible reality of structure that etching period changes on hollow capillary wall
It is existing.
The content of the invention
To solve the above problems, the invention provides planar waveguide device and its installation side for producing higher hamonic wave
Method, in order to can effectively produce higher hamonic wave, can easily obtain periodic structure on device again.
The invention discloses a kind of planar waveguide device for being used to produce higher hamonic wave, including the first flat glass, second
Flat glass, gas-tight sealing, aerating device；
It is hundreds of microns that first flat glass and the second flat glass, which are placed in parallel and spacing left in the middle of the two,
Gap；
The gas-tight sealing includes the first sealing plate and the second sealing plate, for sealing off gap；First sealing plate is consolidated
It is scheduled on the upper surface of the first flat glass and the second flat glass, the first sealing plate and is provided with the filling channel communicated with gap；
Second sealing plate is fixed on the lower surface of the first flat glass and the second flat glass；
The aerating device is fixed on the first sealing plate, by filling channel to the first flat glass and the second plane glass
Inert gas is filled with the gap that glass is constituted；
Femtosecond laser is entered after focusing in the gap that the first flat glass and the second flat glass are constituted and with glancing incidence
Mode propagate forward, with inert gas effect produce higher hamonic wave.
The planar waveguide device also includes plane glass fixing device, pitching adjusting mechanism, displacement governor motion and consolidated
Fixed board；
The plane glass fixing device includes the first plane glass fixing device and the second plane glass fixing device；
The pitching adjusting mechanism include the first stand for optical lens and the second stand for optical lens, for adjust the first flat glass with
The pitching of second flat glass；
The displacement governor motion includes the first translation stage and the second translation stage, for adjusting the first flat glass and second
The spacing in the gap that flat glass is constituted；
First flat glass is fixed in the first plane glass fixing device, and the first plane glass fixing device is fixed
On the pitching rotating shaft of the first stand for optical lens, the first stand for optical lens is fixed on the first translation stage；Second flat glass
It is fixed in the second plane glass fixing device, the second plane glass fixing device is fixed on the pitch rotation of the second stand for optical lens
On axle, the second stand for optical lens is fixed on the second translation stage；First translation stage and the second translation stage are located in fixed plate.
The main component of first flat glass and the second flat glass is silica, and surface is by finishing polish
Reason.
The plane glass fixing device is two blocks of metal derbies, and two blocks of described metal derbies are used to step up flat glass,
Then this two blocks of metal derbies are fixed in stand for optical lens；Described stand for optical lens is used for bowing for convenient regulation two panels flat glass
Face upward, to reach purpose that two panels flat glass is parallel.
The planar waveguide device can be connected by pole with turntable, and femtosecond laser is adjusted by turntable with putting down
Angle between the waveguide of face, when incident laser is vertically into slab guide, slab guide can provide optimal waveguiding effect.
The spacing in the gap that first flat glass and the second flat glass are constituted is 100um-300um.
The invention also discloses a kind of installation method for being used to produce the planar waveguide device of higher hamonic wave, this method bag
Include：
Step one：First flat glass and the second flat glass are installed；
Step 2：Adjust the first flat glass and the second flat glass constitutes the spacing in gap；
Step 3：Adjust the first flat glass and the second flat glass is parallel；
Step 4：Sealing off gap, inert gas is filled with into gap.
The step one includes：
The first flat glass is placed in the middle of the first plane glass fixing device first, fixed using the first flat glass
Device clamps the first flat glass, makes its fixed；The first plane glass fixing device is fixed with the first stand for optical lens again
Connection；Second flat glass is installed according to the first flat glass identical method.
The step 2 includes：
The first stand for optical lens with the first flat glass is arranged on the first translation stage first, the second plane will be carried
Second stand for optical lens of glass is arranged on the second translation stage；Then first is adjusted by the first translation stage and the second translation stage
Flat glass and the second flat glass constitute the spacing in gap, obtain optimal waveguiding effect；Finally again by the first translation stage and
Second translation stage is fixed in fixed plate.
The step 3 includes：
It is parallel to adjust the first flat glass and the second flat glass with diaphragm using He-Ne Lasers：
He-Ne Lasers center is allowed to pass through two contour diaphragms first；Then the first diaphragm is allowed to close to minimum, the second diaphragm
Open completely；He-Ne Lasers after diaphragm successively passes through the first flat glass, four planes of the second flat glass, laser
Reflected light is had when by these planes, to form gap two are allowed by adjusting the first stand for optical lens and the second stand for optical lens
The reflected light of plane is also by diaphragm, so as to ensure that the first flat glass and two planes in the second flat glass composition gap are put down
OK.
The step 4 includes：
Adjusted the first flat glass and the second flat glass it is parallel after, the first sealing plate is fixed on the first flat glass
With the upper surface of the second flat glass, the first sealing plate is provided with filling channel；Second sealing plate is fixed on the first flat glass
With the lower surface of the second flat glass；Then aerating device is fixed on above the filling channel of the first sealing plate, logical by inflation
Road is filled with inert gas into gap.
The inert gas includes the one or more in helium, neon, argon gas, Krypton, xenon.
Compared with prior art, beneficial effects of the present invention are：
The planar waveguide device and its installation method proposed by the present invention for being used to produce higher hamonic wave, using two plate plane glass
The slab guide of glass composition belongs to pioneering as carrier gas, can effectively produce higher hamonic wave, again can be easily in device
It is upper to obtain periodic structure；
Compared with existing capilary-tube wave guide structure, flat glass easily can be assembled into plane wave by apparatus of the present invention
Lead, while the processing that flat glass carries out arbitrary structures to its surface can be dismantled at any time, this be capilary-tube wave guide structure institute not
The characteristics of possessing；The device can arbitrarily change the gap spacing i.e. waveguide spacing of two panels flat glass by adjusting means, have
Help obtain more preferable experiment condition；
Compared with existing pulse jet valve and gas box, the waveguide spacing of planar waveguiding structure is hundreds of microns, energy
Effectively suppress plasma to defocus；By setting sealing device, can bound gas well, reduce gas and spread into vacuum,
With critically important application value.
Brief description of the drawings
Fig. 1 is that femtosecond laser disclosed in one embodiment of the invention enters slab guide and the signal acted on inert gas
Figure；
Fig. 2 is the structure chart of planar waveguide device disclosed in one embodiment of the invention；
Fig. 3 is the parallel schematic diagram of the disclosed regulation two panels flat glass of one embodiment of the invention；
Fig. 4 is the schematic diagram that femtosecond laser disclosed in one embodiment of the invention is coupled into slab guide；
Fig. 5 is the experiment light path schematic diagram for verifying whether to produce higher hamonic wave disclosed in one embodiment of the invention；
Fig. 6 is the higher hamonic wave spectrogram that gas box disclosed in one embodiment of the invention is produced with slab guide.
In figure：1：First flat glass；1-1：First plane of the first flat glass；1-2：The second of first flat glass
Plane；2：Second flat glass；2-1：First plane of the second flat glass；2-2：Second plane of the second flat glass；3：
First plane glass fixing device；4：Second plane glass fixing device；5：First stand for optical lens；6：Second stand for optical lens；7：
First translation stage；8：Second translation stage；9：Fixed plate；10：First sealing plate；11：Second sealing plate；12：Aerating device；13：
First diaphragm；14：Second diaphragm；15：Condenser lens；16：First pole；17：Second pole；18：Turntable；19：3rd is flat
Moving stage；20：4th translation stage；21：Vacuum target chamber；22：Vacuum window；23：First speculum；24：Second speculum；25：Filtering
Device；26：Spectrometer.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill people
The every other embodiment that member is obtained on the premise of creative work is not made, belongs to the scope of protection of the invention.
The present invention is described in further detail below in conjunction with the accompanying drawings：
As shown in figure 1, the invention discloses a kind of planar waveguide device for being used to produce higher hamonic wave, planar waveguide device
Core component be two panels be placed in parallel and the two spacing for hundreds of microns flat glass constitute slab guide, specifically include
The main component of first flat glass 1, the second flat glass 2, the first flat glass 1 and the second flat glass 2 is silica,
Surface is handled by finishing polish；
First flat glass 1 and the second flat glass 2 are placed in parallel and the middle seam for leaving spacing for 100um-300um
Gap；Big arrows inert gas is filled into gap above gap in figure, is internally formed in gap in optically denser medium, figure
Small arrow sign femtosecond laser is entered in the gap that the first flat glass and the second flat glass are constituted after focusing on, then to plunder
Incident mode is propagated forward, and produces higher hamonic wave with the inert gas effect in gap simultaneously；In slab guide exit
Femtosecond laser is emitted from planar waveguide device simultaneously with higher hamonic wave.
As shown in Fig. 2 planar waveguide device also includes plane glass fixing device, pitching adjusting mechanism, displacement regulation machine
Structure, fixed plate 9, gas-tight sealing and aerating device 12；
Plane glass fixing device includes the first plane glass fixing device 3 and the second plane glass fixing device 4；
Pitching adjusting mechanism includes the first stand for optical lens 5 and the second stand for optical lens 6, the first stand for optical lens 5 and the second optics
Mirror holder 6 is provided with pitching rotating shaft；
Displacement governor motion includes the first translation stage 7 and the second translation stage 8, and translation stage is adjusted by the knob on translation stage
Section, knob is provided with scale, and the first translation stage 7 and the second translation stage 8 are oppositely arranged, be located on the same line；Air seal
Device includes the first sealing plate 10 and the second sealing plate 11；
One end of first flat glass 1 is placed between two blocks of metal derbies of the first plane glass fixing device 3, metal derby
Bolt hole is provided with, the first flat glass 1 of clamping is bolted；The fixing device 3 of first flat glass 1 is fixed on the first light
On the pitching rotating shaft for learning mirror holder 5, the pitching for adjusting the first flat glass 1；First stand for optical lens 5 is fixed on the first translation
On platform 7；
One end of second flat glass 2 is placed between two blocks of metal derbies of the second plane glass fixing device 4, metal derby
Bolt hole is provided with, the second flat glass 2 of clamping is bolted；Second plane glass fixing device 4 is fixed on the second light
On the pitching rotating shaft for learning mirror holder 6, the pitching for adjusting the second flat glass 2；Second stand for optical lens 6 is fixed on the second translation
On platform 8；It is made up of mobile first translation stage 7 and the second translation stage 8 to adjust the first flat glass 1 and the second flat glass 2
Gap spacing, so as to obtain optimal laser and the coefficient of coup of slab guide；It is finally that the first translation stage 7 and second is flat
Moving stage 8 is fixed in fixed plate 9；
First sealing plate 10 is fixed on the upper surface of the first flat glass 1 and the second flat glass 2, the first sealing plate and opened
There is the filling channel communicated with gap；Second sealing plate 11 is fixed on the following table of the first flat glass 1 and the second flat glass 2
Face；Gas-tight sealing be used for sealing plane waveguide in inert gas, prevent inert gas it is too fast leak into vacuum target chamber；
Aerating device 12 is fixed on the first sealing plate 10, positioned at the surface of filling channel；Aerating device 12 is by filling
Inert gas is filled with the gap that gas passage is constituted to the first flat glass 1 and the second flat glass 2；Inert gas includes helium
One or more in gas, neon, argon gas, Krypton, xenon.
In order to two panels flat glass can be placed in parallel and two panels flat glass spacing can adjust, the present invention also public affairs
A kind of installation method for being used to produce the planar waveguide device of higher hamonic wave is opened, specific installation regulating step is as follows：
Step one：First flat glass and the second flat glass are installed：
The one end of the first flat glass 1 is placed between two blocks of metal derbies of the first plane glass fixing device 3 first, gold
Belong to block and be provided with bolt hole, be bolted the first flat glass 1 of clamping；The first plane glass fixing device 3 is fixed again
On the pitching rotating shaft of the first stand for optical lens 5；Second flat glass 2 is carried out according to the identical method of the first flat glass 1
Install；First flat glass 1 and the contour fixation of the second flat glass 2.
Step 2：Adjust the first flat glass and the second flat glass constitutes the spacing in gap：
The first stand for optical lens 5 with the first flat glass 1 is arranged on the first translation stage 7 by bolt first, will
The second stand for optical lens 6 with the second flat glass 2 is arranged on 8 on the second translation stage by bolt, 7 on the first translation stage, the
Scale is provided with above the adjusting knob of two translation stages 8, the first translation stage 7 and the second translation stage 8 are oppositely arranged, straight positioned at same
On line；First flat glass 1 is adjusted by mobile first translation stage 7 and the second translation stage 8 and the second flat glass 2 constitutes gap
Spacing, can obtain optimal waveguiding effect by adjusting spacing；Finally the first translation stage 7 and the second translation stage 8 are consolidated again
It is scheduled in fixed plate 9.
Step 3：Adjust the first flat glass and the second flat glass is parallel, regulation light path schematic diagram is as shown in Figure 3：
Arrow represents He-Ne Lasers in figure, allows He-Ne Lasers center to pass through two the first contour diaphragms 13 and second first
Diaphragm 14, the purpose for the arrangement is that allowing He-Ne Lasers in a contour straight above-the-line promotion, the first diaphragm 13, the second diaphragm 14,
One flat glass 1, the second flat glass 2 center on same straight line；Then the first diaphragm 13 is allowed to close to minimum, the second light
Door screen 14 is opened completely；He-Ne Lasers after the first diaphragm 13, the second diaphragm 14 can be successively by the of the first flat glass
One plane 1-1, the second plane 1-2 of the first flat glass, the first plane 2-1 of the second flat glass, the second flat glass
Second plane 2-2, He-Ne Lasers has reflected light when by these planes, by adjusting the first stand for optical lens 5 and the second light
Learn mirror holder 6 allow the second plane 1-2 of the first flat glass and the first plane 2-1 of the second flat glass reflected light also by the
One diaphragm 13, can thus make the first flat glass the second plane 1-2 and the second flat glass the first plane 2-1 this two
Individual face is parallel.Second plane 1-2 of the first parallel flat glass and the first plane 2-1 of the second flat glass just constitute flat
Face waveguide；In general, former and later two surfaces of same glass are not fully parallel, but this has no effect on result, because
Only need to allow the first flat glass the second plane 1-2 and the second flat glass the first plane 2-1 it is parallel.
Step 4：Sealing inflation：
Adjusted the first flat glass 1 it is parallel with the second flat glass 2 after, the first sealing plate 10 is fixed on the first plane
The upper surface of the flat glass 2 of glass 1 and second, the first sealing plate 10 is provided with filling channel；Second sealing plate 11 is fixed on
The lower surface of one flat glass 1 and the second flat glass 2；Then aerating device 12 is fixed on the first sealing plate 10, positioned at filling
The surface of gas passage, aerating device 12 is filled with inert gas into gap by filling channel, completes planar waveguide device
Install and adjust.
After the installation and regulation of planar waveguide device is completed, if wanting, obtaining good wave guiding effect also needs to adjust femtosecond
Angle and distance between laser and waveguide；Fig. 4 is that femtosecond laser disclosed in the embodiment of the present invention is coupled into showing for slab guide
It is intended to, arrow represents femtosecond laser in figure.
Planar waveguide device is fixed on turntable 18 by the first pole 16, and turntable 18 is fixed on the 3rd translation stage 19
On；Condenser lens 15 is fixed on the 4th translation stage 20 by the second pole 17；3rd translation stage 19 and the 4th translation stage 20
The direction of motion is perpendicular.
The process for adjusting angle and distance between femtosecond laser and planar waveguide device is as follows：
Incident femtosecond laser focuses on the porch of planar waveguide device by condenser lens 15；Translated by regulation the 3rd
The relative position of the translation stage 19 of platform 19 and the 4th, it is final to obtain in the minimum hot spot in planar waveguide device porch so that femtosecond
Laser can smoothly enter planar waveguide device.Turntable 18 is used to adjust planar waveguide device plane of inlet and incident femtosecond swashs
The angle of light, when incident femtosecond laser is vertical with the plane of inlet of planar waveguide device, incident femtosecond laser can be with best
State enter.Incident femtosecond laser after the inert gas effect in planar waveguide device with producing higher hamonic wave, femtosecond laser
Emitted simultaneously from slab guide with higher hamonic wave.
Fig. 5 is the experiment light path schematic diagram for verifying whether to produce higher hamonic wave disclosed in the embodiment of the present invention.Femtosecond laser
Incided from vacuum window 22 in vacuum target chamber 21, it is saturating then to incide focusing by the first speculum 23 and the second speculum 24
On mirror 15；First speculum 23 and the one side of the second speculum 24 are used to guide femtosecond laser, on the other hand for adjusting femtosecond
Laser is contour point-blank with planar waveguide device.Condenser lens 15 focuses on femtosecond laser in planar waveguide device,
And higher hamonic wave is produced with inert gas therein (such as helium) effect, the mixed light beam of femtosecond laser and higher hamonic wave is flat
The exit of face waveguide assembly is emitted, after filtering only remaining higher hamonic wave after device 25, and higher hamonic wave utilizes spectrometer 26
Detected.
Fig. 6 is the experiment knot for the higher hamonic wave spectrogram that gas box disclosed in the embodiment of the present invention is produced with slab guide
Fruit comparison diagram；In experiment, the inner gas pressure of two kinds of structures is all 5KPa, and the interaction distance that femtosecond laser and gas are acted on is all
For 20mm, compared to gas box, planar waveguide device possesses suppression plasma and defocused, the advantages of increasing interaction length,
Therefore, the cutoff wavelength of the higher hamonic wave produced in the waveguide is more shorter than in gas box, and this has absolutely proved the program
Feasibility and validity.
The planar waveguide device and its installation method proposed by the present invention for being used to produce higher hamonic wave, using two plate plane glass
The slab guide of glass composition belongs to pioneering as carrier gas；Compared with existing capilary-tube wave guide structure, apparatus of the present invention can
So that flat glass easily is assembled into slab guide, while can dismantle flat glass at any time carries out arbitrary structures to its surface
Processing, the characteristics of this is not available for capilary-tube wave guide structure；The device can arbitrarily change two panels by adjusting means puts down
The gap spacing of surface glass is waveguide spacing, helps to obtain more preferable experiment condition；With existing pulse jet valve and gas
Box is compared, and the waveguide spacing of planar waveguiding structure is hundreds of microns, can effectively suppress plasma and defocus；By setting sealing dress
Put, can bound gas well, reduce gas and spread into vacuum, with critically important application value.
The preferred embodiments of the present invention are these are only, are not intended to limit the invention, for those skilled in the art
For member, the present invention can have various modifications and variations.Any modification within the spirit and principles of the invention, being made,
Equivalent substitution, improvement etc., should be included in the scope of the protection.
Claims (9)
1. a kind of planar waveguide device for being used to produce higher hamonic wave, it is characterised in that including the first flat glass, the second plane
Glass, gas-tight sealing, aerating device；
First flat glass and the second flat glass are placed in parallel and the gap that spacing is hundreds of microns are left in the middle of the two；
The gas-tight sealing includes the first sealing plate and the second sealing plate, for sealing off gap；First sealing plate is fixed on
The filling channel communicated with gap is provided with the upper surface of first flat glass and the second flat glass, the first sealing plate；Second
Sealing plate is fixed on the lower surface of the first flat glass and the second flat glass；
The aerating device is fixed on the first sealing plate, by filling channel to the first flat glass and the second flat glass structure
Into gap in be filled with inert gas；
Femtosecond laser is entered after focusing in the gap that the first flat glass and the second flat glass are constituted and with the side of glancing incidence
Formula is propagated forward, and higher hamonic wave is produced with inert gas effect；
The planar waveguide device also includes plane glass fixing device, pitching adjusting mechanism, displacement governor motion and fixed plate；
The plane glass fixing device includes the first plane glass fixing device and the second plane glass fixing device；
The pitching adjusting mechanism includes the first stand for optical lens and the second stand for optical lens, for adjusting the first flat glass and second
The pitching of flat glass；
The displacement governor motion includes the first translation stage and the second translation stage, for adjusting the first flat glass and the second plane
The spacing in the gap that glass is constituted；
First flat glass is fixed in the first plane glass fixing device, and the first plane glass fixing device is fixed on
On the pitching rotating shaft of one stand for optical lens, the first stand for optical lens is fixed on the first translation stage；Second flat glass is fixed
In the second plane glass fixing device, the second plane glass fixing device is fixed on the pitching rotating shaft of the second stand for optical lens
On, the second stand for optical lens is fixed on the second translation stage；First translation stage and the second translation stage are located in fixed plate.
2. the planar waveguide device as claimed in claim 1 for being used to produce higher hamonic wave, it is characterised in that first plane
The main component of glass and the second flat glass is silica, and surface is handled by finishing polish.
3. the planar waveguide device as claimed in claim 1 for being used to produce higher hamonic wave, it is characterised in that first plane
The spacing in the gap that glass and the second flat glass are constituted is 100um-300um.
4. a kind of installation method as claimed in claim 1 for being used to produce the planar waveguide device of higher hamonic wave, its feature exists
In this method includes：
Step one：First flat glass and the second flat glass are installed；
Step 2：Adjust the first flat glass and the second flat glass constitutes the spacing in gap；
Step 3：Adjust the first flat glass and the second flat glass is parallel；
Step 4：Sealing off gap, inert gas is filled with into gap.
5. the installation method as claimed in claim 4 for being used to produce the planar waveguide device of higher hamonic wave, it is characterised in that institute
Stating step one includes：
The first flat glass is placed in the middle of the first plane glass fixing device first, the first plane glass fixing device is utilized
The first flat glass is clamped, makes its fixed；The first plane glass fixing device is fixedly connected with the first stand for optical lens again；
Second flat glass is installed according to the first flat glass identical method.
6. the installation method as claimed in claim 4 for being used to produce the planar waveguide device of higher hamonic wave, it is characterised in that institute
Stating step 2 includes：
The first stand for optical lens with the first flat glass is arranged on the first translation stage first, the second flat glass will be carried
The second stand for optical lens be arranged on the second translation stage on；Then the first plane is adjusted by the first translation stage and the second translation stage
Glass and the second flat glass constitute the spacing in gap, obtain optimal waveguiding effect；Finally again by the first translation stage and second
Translation stage is fixed in fixed plate.
7. the installation method as claimed in claim 4 for being used to produce the planar waveguide device of higher hamonic wave, it is characterised in that institute
Stating step 3 includes：
It is parallel to adjust the first flat glass and the second flat glass with diaphragm using He-Ne Lasers：
He-Ne Lasers center is allowed to pass through two contour diaphragms first；Then allow the first diaphragm to close and arrive minimum, the second diaphragm is complete
Open；He-Ne Lasers after diaphragm successively passes through the first flat glass, four planes of the second flat glass, and laser is in warp
Reflected light is had when crossing these planes, two planes to form gap by adjusting the first stand for optical lens and the second stand for optical lens to allow
Reflected light also by diaphragm so that ensure the first flat glass and the second flat glass constitute gap two planes it is parallel.
8. the installation method as claimed in claim 4 for being used to produce the planar waveguide device of higher hamonic wave, it is characterised in that institute
Stating step 4 includes：
Adjusted the first flat glass and the second flat glass it is parallel after, the first sealing plate is fixed on the first flat glass and
The upper surface of two flat glass, the first sealing plate is provided with filling channel；Second sealing plate is fixed on the first flat glass and
The lower surface of two flat glass；Then aerating device is fixed on above the filling channel of the first sealing plate, by filling channel to
Inert gas is filled with gap.
9. the installation method as claimed in claim 4 for being used to produce the planar waveguide device of higher hamonic wave, it is characterised in that institute
Stating inert gas includes the one or more in helium, neon, argon gas, Krypton, xenon.
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| US6847660B2 (en) * | 2000-12-28 | 2005-01-25 | Matsushita Electric Industrial Co., Ltd. | Short-wavelength laser module and method of producing the same |
| US9002154B2 (en) * | 2010-07-31 | 2015-04-07 | International Business Machines Corporation | Semiconductor through-wafer electrical signal-carrying virtual waveguide |
| CN101932187B (en) * | 2010-08-10 | 2012-09-05 | 北京工业大学 | Method for generating plesiochronous higher harmonic or X-ray radiation through laser secondary excitation |
| CN102709665B (en) * | 2012-02-29 | 2014-07-16 | 电子科技大学 | Tunable quasi-optical resonant cavity for gyrotron |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1052380A (en) * | 1989-11-30 | 1991-06-19 | 菲利浦光灯制造公司 | Gas tuned fiber waveguide device |
Non-Patent Citations (1)
| Title |
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| 卢志辉.飞秒激光驱动惰性气体产生高次谐波的试验研究.《中国优秀硕士学位论文全文数据库基础科学辑》.2012,(第07期),正文第16页. * |
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