CN203316913U - Water-jet guided laser path coupling device and water-jet guided laser processing system - Google Patents
Water-jet guided laser path coupling device and water-jet guided laser processing system Download PDFInfo
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- CN203316913U CN203316913U CN2013201846687U CN201320184668U CN203316913U CN 203316913 U CN203316913 U CN 203316913U CN 2013201846687 U CN2013201846687 U CN 2013201846687U CN 201320184668 U CN201320184668 U CN 201320184668U CN 203316913 U CN203316913 U CN 203316913U
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Abstract
The utility model provides a water-jet guided laser path coupling device and a water-jet guided laser processing system. Particularly, the device comprises the following elements: (a), an incidence laser element, (b), an angular adjustment element, (c), a water outlet element, (d), a transmission element, (e), an imaging element and (f), an optional support element, wherein the angular adjustment element is used for adjusting an angle between laser generated by the incidence laser element and the water outlet element, and an image is formed on the imaging element after focused by the water outlet element and transmitted by the transmission element sequentially. According to the device and the system, a structural design of a spray head is simple; visual observation is enough to achieve light path coupling; and the operation is easy, simple and stable.
Description
Technical field
The utility model relate to a kind of just can simple realization laser beam and water jet coupling method of adjustment and device by auxiliary observation optical path and imageing sensor.
Background technology
The Water Jet Guided Laser process technology utilizes light that the principle of total reflection occurs in the water and air two-phase medium, and laser beam is coupled in water jet material is processed.Due to the transient state of pulse laser machining and the water jet cooling flushing action to material surface, make the Water Jet Guided Laser process technology there is unique advantage and receive domestic and international researcher's concern at fragility, the micro-manufacture field of heat-sensitive material.
And a key issue in the Water Jet Guided Laser process technology will make to be optically coupled in water jet exactly, adjustable extent is not very large, and skew will make the outgoing energy loss a little, does not reach processing intensity, seriously also can make shower nozzle scrap.
Only there is in the world at present a Xin Nuowa company can produce complete water and lead process equipment.Description according to its Chinese patent " employing is incorporated to the materials processing device of the laser beam in liquid jet " in (CN1134322C), by the observation hot spot, at the relative position of water jet, adjusted, because spout is generally very little, I reaches 80um, must increase extra micro-light path, illumination path and ccd image acquisition system, cause the nozzle structure complexity bulky.Patents afterwards and document are all to have used for reference this method, just details is slightly different, as patent " is utilized the laser processing device of introducing the laser beam in jet column ", " a kind of micro-Water Jet Guided Laser be coupled and aligned device ", the Li Ling of Harbin Institute of Technology thesis for the doctorate " research of Water Jet Guided Laser Micrometer-Nanometer Processing Technology ", " new type water jet guide laser system of processing optical characteristics and key technology research etc. all be unable to do without this category to the Ye Ruifang of Xiamen University thesis for the doctorate on light path is coupled method of adjustment.In fact, also there are some problems in this method, owing to take plane, spout place, is observed as benchmark, when hot spot is positioned at spout, do not observe flare, can only make it reach orifice rim by the adjustment light path and just can observe reverberation, using this as adjusting foundation.And, in order to couple light into to greatest extent in water jet, must make in hot spot focusing and this plane, the hot spot minimum of observing like this, position is the most accurate.But, using the spout face as focusing surface, when the processing operation, if there is the light path transient-upset, just can make the high-energy focusing hot spot penetrate in orifice rim and cause permanent damages.This point all is noted in patent " hybrid laser processing device ", " a kind of water jet and optical-fiber laser direct-coupling device ", but two patent authors just propose improvement project for device, but all avoid for the contradiction existed on the coupling method of adjustment.
Therefore, this area in the urgent need to develop a kind of laser accurately can be coupled into current and easy to operate, to the undamaged method of shower nozzle and device.
The utility model content
The utility model provides a kind of can accurately be coupled into laser the device of current.
First aspect of the present utility model, provide a kind of Water Jet Guided Laser light path coupling device, and described device comprises following element:
(a) incident laser element;
(b) angle adjustment element;
(c) water outlet element;
(d) transmissive element;
(e) image-forming component; With optional
(f) support component;
Wherein, described angle adjustment element is used for adjusting the laser of incident laser element generation and the angle between the water outlet element, and successively through described water outlet element focusing, described transmissive element transmission, thereby imaging on described image-forming component.
In another preference, described support component is for described angle adjustment element is connected and fixes with described incident laser element or described water outlet element, thus incident laser element or the water outlet element of formation adjustable-angle.
In another preference, described incident laser element also comprises:
(g) incident light source; And/or
(h) light source is adjusted element.
In another preference, described light source is adjusted element and is comprised reflective mirror.
In another preference, shower nozzle and the water column provided thereof are provided described water outlet element, and are provided with a condenser lens in described shower nozzle.
In another preference, described shower nozzle is not containing micro-light path or CCD image-forming component.
In another preference, described transmissive element is a transparent medium, and/or
Described image-forming component comprises for the optical screen of reflector laser or light curtain.
In another preference, described transparent medium comprises glass or other heat-resisting transparent materials.
In another preference, described optical screen or light curtain are paper, plastic sheet, sheet metal.
In another preference, also indicate the sign for identifying or aiming at described independently ring-type hot spot on described optical screen and light curtain.
In another preference, described sign comprises the cross hairs that added the center of circle with the equidistant donut group of scale.
In another preference, the thickness of described transparent medium be 0.5mm～3mm and/or
The diameter of described optical screen or light curtain is 50mm～300mm.
In another preference, described transmissive element is located at described water column delivery port far-end, and is 5～100mm apart from described water column delivery port, preferably, and 10～50mm, more preferably 15-30mm; And/or
Described image-forming component is located at described transmissive element far-end, and is 10～200mm place apart from described transmissive element distance, preferably 30～100mm, more preferably 50-80mm.
In another preference, described angle adjustment element comprises for adjusting the multidimensional adjustment part of the relative angle between described incident light source and described water outlet element.
In another preference, described angle adjustment element also comprises the universal adjustment part for the relative angle with between the described incident light source of arbitrarily angled adjustment and described water outlet element.
In another preference, described multidimensional adjustment part comprises transverse horizontal adjustment part, vertical equity adjustment part and vertical adjustment part.
In another preference, the set of described multidimensional adjustment part is in same module.
In another preference, described device also comprises the light power meter of the laser for measuring the generation of incident laser element.
The utility model second aspect, provide a kind of Water Jet Guided Laser system of processing, and described system comprises the described device of first aspect present invention and the parts of processing for implementing Water Jet Guided Laser.
In another preference, describedly for the parts of implementing Water Jet Guided Laser processing, comprise LASER Light Source, pressurized water supply source and pipeline and waste water reclaiming device.
In should be understood that in the utility model scope, above-mentioned each technical characterictic of the present utility model and can combining mutually between specifically described each technical characterictic in below (eg embodiment), thus form new or preferred technical scheme.As space is limited, tire out and state no longer one by one at this.
The accompanying drawing explanation
Fig. 1 is this method the first example device schematic diagram.
Fig. 2 is this method the second example device schematic diagram.
Fig. 3 is the emulation to coupling optical path with zemax software, and the left side is the emulation light path, and the right is the outgoing hot spot.
Fig. 4 is partial coupling beam pattern figure.
Fig. 5 is the ring-type hot spot figure that in embodiment 1, after coupling, actual photographed obtains.
Fig. 6 is the ring-type hot spot figure that in embodiment 2, after coupling, actual photographed obtains.
Wherein, 10 image-forming components, 12 transmissive elements, 14 water columns, 16 shower nozzles, 20 angle adjustment elements, 22 support members, 24 transverse horizontal adjustment parts, 26 vertical equity adjustment parts, 28 vertical adjustment parts.
The specific embodiment
The inventor is through extensive and deep research, be surprised to find that first, when the coupling of Water Jet Guided Laser light path is adjusted, by at far-end, transmission medium being set, after shielding water column and making laser-transmitting, projection is in image-forming component, thereby adjust the imaging shape of laser to annular, and luminous power is maximized, can complete the coupling of Water Jet Guided Laser light path.The utility model equipment is simple, the production of shower nozzle and assembling is required low, is easy to apply.On this basis, completed the utility model.
Water Jet Guided Laser
Water Jet Guided Laser essence is that light is introduced in water jet, utilizes water/Air Interface to carry out continuous total reflection to light light is locked in to water column inside.And laser beam belongs to Gaussian beam, can not focus on and an ideal point, a but round spot that radius is arranged, and disperse rapidly behind focal plane, after multiple total reflection, pass through the light path at water column center seldom, and most of light energy is all being propagated near section edges, is an annulus so cause final outgoing hot spot.
Can be used for the needs that laser beam is provided of the present utility model and meet energy and absorbed as far as possible littlely by water, wave-length coverage is 150nm～1100nm, forms of radiation can be pulse can be also continuous, YAG laser instrument ripe on market can be satisfied the demand.When adopting high power laser, liquid also can adopt silicone oil to replace water.
Can be used for Water Jet Guided Laser of the present utility model is substantially coincide and is formed by a laser beam and a water column.Wherein, described water column is produced by a shower nozzle.Shower nozzle comprises near the near-end condenser lens of light path and the water chamber that is positioned at transparent, the sealing of light path far-end.
In sprinkler design and manufacture process, in order to reach the substantially identical effect of Water Jet Guided Laser and water column, need the reasonable computation focal position, make the focus theoretical position near spout, and the coupling that processing and alignment error produce imbalance is proofreaied and correct by method of the present utility model.
Before using the utility model method of adjustment, need first observe the hot spot on condenser lens, make hot spot drop on lens inside, usually, the hot spot of substantially identical Water Jet Guided Laser drops on 1/2 radius.Wherein, lens centre is 0 radius, and edge is maximum radius, is to allow hot spot be positioned at any place at not only non-central but also non-edge.
Transmissive element
Can be used for transmissive element of the present utility model and be not particularly limited, can be for anyly making to filter water column, make the water of laser-transmitting and filtration not affect transparent, the heat-resisting medium of laser optical path.
Usually, described transparent medium comprises glass or other heat-resisting transparent material.The thickness of described transparent medium is at 0.5～3mm.
In the utility model, described transmissive element is arranged at the far-end of water column delivery port, and the distance of its setting is not particularly limited, can be at the water column arbitrary section, and can be according to system focus point position water column laminar flow apart from adjustment.Usually, the described water column delivery port of described transmissive element distance 5～100mm, more preferably, 10～50mm, more preferably 15-30mm.
Image-forming component
Can be used for image-forming component of the present utility model and be not particularly limited, can be any optical screen or light curtain that can the projection laser facula.
Usually, clear in order to make projection, described optical screen or light curtain that can the projection laser facula be preferably white, and material comprises paper, plastics, sheet metal etc.
In the utility model, described image-forming component is arranged at the far-end of transmissive element, and the distance of its setting is not particularly limited, and can be arranged on the optional position of transmissive element far-end, and its imaging size is directly proportional to distance.Usually, described image-forming component distance described transmissive element 10～200mm, preferably 30～100mm, more preferably 50-80mm.
In addition, for whether the laser facula that the observer is clearly differentiated be projeced on image-forming component is independently ring-shaped light spot, can also be provided preferably with the various signs with scale, the center of circle or circular arc type on described image-forming component.A kind of preferred sign comprises the cross hairs that added the center of circle with the equidistant donut group of scale.
Light power meter
In the utility model, after laser facula is projeced into image-forming component and is adjusted to independent ring-shaped light spot, can remove image-forming component and use light power meter to carry out luminous power mensuration to projected laser.Can be used for light power meter of the present utility model and be not particularly limited, can be any commercially available light power meter.
Water Jet Guided Laser light path coupling device
Except above-mentioned each element of the utility model device, in another preference, specifically can be used for the utility model Water Jet Guided Laser light path coupling device and can comprise following element:
(a) incident laser element;
(b) angle adjustment element;
(c) water outlet element;
(d) transmissive element;
(e) image-forming component; With optional
(f) support component;
Wherein, described angle adjustment element is used for adjusting the laser of incident laser element generation and the angle between the water outlet element, and successively through described water outlet element focusing, described transmissive element transmission, thereby imaging on described image-forming component;
Described support component is for described angle adjustment element is connected and fixes with described incident laser element or described water outlet element, thus incident laser element or the water outlet element of formation adjustable-angle;
Described incident laser element also comprises:
(g) incident light source; And/or
(h) light source is adjusted element.
Described light source is adjusted element and is comprised reflective mirror; Described water outlet element comprises shower nozzle, and described shower nozzle is provided with a condenser lens, and described shower nozzle is not containing micro-light path or CCD image-forming component;
Described transmissive element is a transparent medium; Described transparent medium comprises glass or other heat-resisting transparent materials; Described transparent medium thickness is 0.5mm～3mm.
Described image-forming component comprises for the optical screen of reflector laser or light curtain; Described optical screen or light curtain are paper, plastic sheet, sheet metal etc.; The diameter of described optical screen or light curtain is 50～300mm.
Described angle adjustment element comprises the multidimensional adjustment part, and for adjusting the relative angle between described incident light source and described water outlet element; Described multidimensional adjustment part comprises transverse horizontal adjustment part, vertical equity adjustment part and vertical adjustment part.
In another preference, the set of described multidimensional adjustment part is in same module.
In addition, described device also comprises (i) light power meter, and described light power meter is for measuring the laser of incident laser element generation.
Water Jet Guided Laser light path coupling process
The Water Jet Guided Laser light path coupling process that the utility model provides, comprise step particularly
(i) provide a Water Jet Guided Laser, the water column of wherein said Water Jet Guided Laser and laser path are substantially identical;
(ii) the Water Jet Guided Laser in (i) is projected to the image-forming component of transmissive element far-end by transmissive element, thereby forms laser facula;
(iii) adjust the angle between water column described in (i) and laser, thereby thereby making described laser facula become independently ring-type hot spot completes coupling; With optional
(iv) described independent ring-shaped light spot is carried out to the luminous power reading, and again adjust described incident laser element or water outlet element, thereby make described laser facula keep free ring shaped laser spot and luminous power reading for maximum and complete coupling.
For the ease of regulating, need first observe the hot spot on condenser lens, make hot spot drop on lens inside, usually, the hot spot of substantially identical Water Jet Guided Laser drops on 1/2 radius.Wherein, lens centre is 0 radius, and edge is maximum radius, is to allow hot spot be positioned at any place at not only non-central but also non-edge.
In addition, step (iii) also comprises aims at the sign on described image-forming component by described laser facula, thereby adjusts extremely independently ring-type hot spot of laser facula.
Step (ii) in, described transmissive element is established described water column delivery port far-end, and the distance described water column delivery port 5mm～100mm, preferably, 10～50mm, more preferably, 15～30mm; Described image-forming component is located at described transmissive element far-end, and is 10～200mm place apart from described transmissive element distance, preferably 30～100mm, more preferably 50-80mm.
Usually, described water column is provided by shower nozzle, and described shower nozzle is not containing micro-light path or CCD image-forming component.
In the utility model, the angle and direction of described Water Jet Guided Laser is not particularly limited, as long as make, can not affect or change for the water of any filtration angle or the direction of laser optical path.Usually, the direction of Water Jet Guided Laser for vertically upward, downwards or horizontal direction.
The angle of adjusting between described water column and laser in step (iii) is completed by the angle adjustment element, and described angle adjustment element comprises mutually orthogonal multidimensional adjustment part, and for adjusting the relative angle between described incident light source and described water outlet element.
When using light power meter, translation adjustment direction is the direction that makes power meter numerical value increase, and runs into numerical value decline explanation and adjusts excessive reverse the adjustment until maximum.
In the utility model, also indicate the sign for identifying or aiming at described independently ring-type hot spot on described optical screen and light curtain.Sign more commonly used comprises the cross hairs that added the center of circle with the equidistant donut group of scale.
Can be used for multidimensional adjustment part of the present utility model and be not particularly limited, can comprise lateral angles adjustment part (along the x axle), translation horizontal adjusting part (along the y axle) and/or vertical adjustment part (along the z axle).In addition, the utility model multidimensional adjustment part also comprises the universal angle adjustment part, makes between the utility model incident light source and shower nozzle to be adjusted with angle arbitrarily.
In the utility model, the adjustment of multidimensional adjustment part sequentially is not particularly limited, and any axle of can take is benchmark, carries out the multidimensional adjustment.
In preferred situation, adjust with the water jet directional correlation, therefore only need carry out bidimensional translation and bidimensional angle adjustment, multidimensional does not comprise that the one dimension identical with water (flow) direction can complete adjustment.
In view of instruction of the present utility model, on the basis of having understood the utility model Water Jet Guided Laser light path coupling process, it may occur to persons skilled in the art that the concrete device of various enforcement the utility model methods and can be used for the concrete element in these devices.Those skilled in the art can be according to these elements of concrete selection, as long as can implement each step in the utility model method or realize the technique effect of the utility model method.In other words, Water Jet Guided Laser light path coupling device of the present utility model is not limited to concrete device mentioned above.
The beneficial effects of the utility model
The device that the utility model provides does not need extra microexamination light path and ccd image acquisition system, only depends on range estimation just can realize.In the utility model, the structural design of shower nozzle is simple, and the stability of a system is high, only need to observe the emergent light shape of spot, and focusing hot spot depth location does not require, and for different focus programs, has consistent applicability.This outer toroid beam pattern is obvious, and method is easily grasped, low to adjustment personnel's specification requirement threshold.
Embodiment 1
1.1 device: as shown in Figure 1, shower nozzle 16 positions are fixed, upwards ejection of water column 14, coupling light sees through transparent medium 12 and shines on optical screen 10, due to the relation of total reflection emission angle, the picture in the outer optical screen of certain distance, for amplifying spot, does not therefore need extra micro-light path.Adjustable mirror 18 is for regulating shower nozzle and the input path relative angle on two orthogonal directions, speculum 18 is fixed on angle adjustment element (two-dimension translational platform) 20, for regulating the relative position on shower nozzle and two orthogonal directions of input path, image-forming component (optical screen) is blank sheet of paper, and transmissive element is slide.
1.2 concrete method of adjustment:
1.2.1 harmonize, prepare: place slide at the about 30mm of system shower nozzle delivery port place, after slide, 180mm is with an external optical screen (blank sheet of paper), then water outlet.Adjust laser output power to minimum rear bright dipping, hoisting power is put visual its of range estimation and is penetrated at the lip-deep hot spot of condenser lens gradually, adjusts light path position or nozzle position, makes hot spot drop on about 1/2 lens radius place.
1.2.2 coarse adjustment: pass through angular adjustment apparatus, adjust the relative angle of input path and shower nozzle, change and adjusted according to hot spot, while adjusting the first axle, occur-the disappearance of hot spot experience, the hot spot observed on optical screen prolong circular arc and move two kinds of variations, hot spot is adjusted to the mid point of two critical localisations that disappear-occur, then adjusts another axle with its quadrature.
1.2.3 fine tuning: remove optical screen, in this position, dispose a light power meter, by the diaxon translation mechanism, adjust the position of incident light on condenser lens, until power meter reading maximum thinks that the coupling adjustment is complete.
1.3 result: as shown in Figure 5, be the actual hot spot figure of the coupled state that utilizes this device to recall, the about 100mm of ring-shaped light spot external diameter.
Embodiment 2
2.1 device: as shown in Figure 2, incident light position is fixed, the horizontal outgoing of water jet, shower nozzle is fixed on turntable 22, for regulating the relative angle of a direction upper nozzle and light path, turntable is fixed on horizontal cross adjustment part 24, for regulating the relative angle of another orthogonal direction upper nozzle and light path, horizontal cross adjustment part (pivot angle platform) is fixed on angle adjustment element (one dimension translation stage) 26, for regulating the relative position of a direction upper nozzle and light path, translation stage is fixed on vertical adjustment part (lifting platform) 28, for regulating the relative position of another orthogonal direction upper nozzle and light path.Image-forming component (optical screen) is blank sheet of paper, and transmissive element is slide.
2.2 concrete method of adjustment:
2.2.1 harmonize to prepare: at the about 10mm of system shower nozzle delivery port place placement slide, after slide, 30mm is usingd the black target of an external tape identification as optical screen, then water outlet.Adjust laser output power to minimum rear bright dipping, hoisting power is put visual its of range estimation and is penetrated at the lip-deep hot spot of condenser lens gradually, adjusts light path position or nozzle position, makes hot spot drop on about 1/2 lens radius place.
2.2.2 coarse adjustment: by angular adjustment apparatus, adjust the relative angle of input path and shower nozzle, according to hot spot, change and adjusted, while adjusting the first axle, the annulus hot spot occurs, directly enter the fine tuning step.
2.2.3 fine tuning: remove optical screen, in this position, dispose a light power meter, by the diaxon translation mechanism, adjust the position of incident light on condenser lens, until power meter reading maximum thinks that the coupling adjustment is complete.
1.3 result: as shown in Figure 6, be the actual hot spot figure of the coupled state that utilizes this device to recall, the about 20mm of ring-shaped light spot external diameter.
Discuss
For focused light passages, incident angle has determined the locus of focus, and incoming position does not change focal position.Therefore, angle has determined whether can be coupled in theory, with the position correlation of incident light be not very large, but because incident light is Gaussian beam, focus is not desirable point but a hot spot that radius is arranged, although incoming position does not change focal position, but can affect the focus cross-sectional sizes, so initial incoming position fixes on a more inclined to one side position, form larger launching spot, can easily find taches vierge while making to adjust, because as long as a part of optically-coupled enters just can observe taches vierge, the partial coupling hot spot is (simulation drawing) as shown in Figure 3, one extra hot spot is arranged outside taches vierge, hot spot (simulation drawing) as shown in Figure 4 is coupled after adjusting.
All documents of mentioning at the utility model are all quoted as a reference in this application, just as each piece of document quoted separately as a reference.Should be understood that in addition those skilled in the art can make various changes or modifications the utility model after having read above-mentioned instruction content of the present utility model, these equivalent form of values fall within the application's appended claims limited range equally.
Claims (10)
1. a Water Jet Guided Laser light path coupling device, is characterized in that, described device comprises following element:
(a) incident laser element;
(b) angle adjustment element;
(c) water outlet element;
(d) transmissive element;
(e) image-forming component; With optional
(f) support component;
Wherein, described angle adjustment element is used for adjusting the laser of incident laser element generation and the angle between the water outlet element, and successively through described water outlet element focusing, described transmissive element transmission, thereby imaging on described image-forming component.
2. device as claimed in claim 1, is characterized in that, described incident laser element also comprises:
(g) incident light source; And/or
(h) light source is adjusted element.
3. device as claimed in claim 1, is characterized in that, shower nozzle and the water column provided thereof are provided described water outlet element, and be provided with a condenser lens in described shower nozzle.
4. device as claimed in claim 1, is characterized in that, described transmissive element is a transparent medium, and/or
Described image-forming component comprises for the optical screen of reflector laser or light curtain.
5. device as claimed in claim 4, is characterized in that, the thickness of described transparent medium be 0.5mm～3mm and/or
The diameter of described optical screen or light curtain is 50mm～300mm.
6. device as claimed in claim 3, is characterized in that, described transmissive element is located at described water column delivery port far-end, and the described water column delivery port of distance is 5～100mm; And/or
Described image-forming component is located at described transmissive element far-end, and the described transmissive element distance of distance is 10～200mm place.
7. device as claimed in claim 2, is characterized in that, described angle adjustment element comprises for adjusting the multidimensional adjustment part of the relative angle between described incident light source and described water outlet element.
8. device as claimed in claim 7, is characterized in that, described multidimensional adjustment part comprises transverse horizontal adjustment part, vertical equity adjustment part and vertical adjustment part.
9. device as claimed in claim 1, is characterized in that, described device also comprises the light power meter of the laser for measuring the generation of incident laser element.
10. a Water Jet Guided Laser system of processing, it is characterized in that, described system comprises device claimed in claim 1 and the parts of processing for implementing Water Jet Guided Laser, wherein, describedly for the parts of implementing Water Jet Guided Laser processing, comprise LASER Light Source, pressurized water supply source and pipeline and waste water reclaiming device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201846687U CN203316913U (en) | 2013-04-11 | 2013-04-11 | Water-jet guided laser path coupling device and water-jet guided laser processing system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201846687U CN203316913U (en) | 2013-04-11 | 2013-04-11 | Water-jet guided laser path coupling device and water-jet guided laser processing system |
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| CN203316913U true CN203316913U (en) | 2013-12-04 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105345282A (en) * | 2015-11-25 | 2016-02-24 | 佛山市国星半导体技术有限公司 | Water guide laser cutting device and method |
| CN110448266A (en) * | 2018-12-29 | 2019-11-15 | 中国科学院宁波工业技术研究院慈溪生物医学工程研究所 | Random Laser is copolymerized focal line and scans three-dimensional ophthalmoscope and imaging method |
| CN114043074A (en) * | 2021-11-25 | 2022-02-15 | 哈尔滨工业大学 | Small water-guide laser processing system and method with flexible processing capacity |
-
2013
- 2013-04-11 CN CN2013201846687U patent/CN203316913U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105345282A (en) * | 2015-11-25 | 2016-02-24 | 佛山市国星半导体技术有限公司 | Water guide laser cutting device and method |
| CN110448266A (en) * | 2018-12-29 | 2019-11-15 | 中国科学院宁波工业技术研究院慈溪生物医学工程研究所 | Random Laser is copolymerized focal line and scans three-dimensional ophthalmoscope and imaging method |
| CN114043074A (en) * | 2021-11-25 | 2022-02-15 | 哈尔滨工业大学 | Small water-guide laser processing system and method with flexible processing capacity |
| CN114043074B (en) * | 2021-11-25 | 2024-05-03 | 哈尔滨工业大学 | Small water-guided laser processing system and method with flexible processing capability |
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