CN201788317U - Galvanometer scanning module beam-focusing center adjusting device - Google Patents
Galvanometer scanning module beam-focusing center adjusting device Download PDFInfo
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- CN201788317U CN201788317U CN2010202318020U CN201020231802U CN201788317U CN 201788317 U CN201788317 U CN 201788317U CN 2010202318020 U CN2010202318020 U CN 2010202318020U CN 201020231802 U CN201020231802 U CN 201020231802U CN 201788317 U CN201788317 U CN 201788317U
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Abstract
The utility model relates to a galvanometer scanning module beam-focusing center adjusting device, which comprises a galvanometer scanning module and a focus lens beam-focusing sleeve disc. The galvanometer scanning module comprises a light incident opening and a light emergent opening, the light incident opening is provided with a galvanometer beam-focusing cross, the focus lens beam-focusing sleeve disc is provided with a focus lens beam-focusing cross, and central axes of the light incident opening and the light emergent opening of the galvanometer scanning module are perpendicular mutually. Compared with the prior art, the galvanometer scanning module beam-focusing center adjusting device can improve light path debugging efficiency in laser equipment by the aid of the galvanometer beam-focusing cross and the focus lens beam-focusing cross, and increases accuracy of a galvanometer scanning module beam-focusing center.
Description
Technical field
The utility model relates to the laser application field, relates in particular to a kind of device of regulating the vibration mirror scanning module to light center.
Background technology
At present, quick in order to realize, precision machined purpose, various laser equipments such as mark machine, cutting machine, drilling machine etc. use the method for vibration mirror scanning, if will place laser optical path to use the vibration mirror scanning module, need be with the center of lens position of laser calibration, to guarantee the accuracy of scanning position in the vibration mirror scanning module.And according to the operating position of existing product, the vibration mirror scanning module all is a body structure, if utilize the method for eye-observation merely, be difficult to directly to carry out center of lens to light work, low and inaccurate to optical efficiency.
The utility model content
The technical problems to be solved in the utility model is to overcome above-mentioned the deficiencies in the prior art, and proposes a kind of device of regulating the vibration mirror scanning module to light center, and this device can improve the accuracy of calibration light path fast to light.
The technical scheme in the invention for solving the above technical problem comprises: a kind of device of regulating the vibration mirror scanning module to light center is provided, comprise that vibration mirror scanning module and focus lamp are to light cover dish, wherein: described galvanometer module comprises light inlet and light-emitting window, this light inlet is provided with galvanometer to the light cross, described focus lamp is provided with focus lamp to the light cross to light cover dish, and the light inlet on the described galvanometer module is vertical mutually with the axis of light-emitting window.
Compare with prior art, the utility model by be provided with galvanometer to light cross and focus lamp to the light cross, can be lifted at the efficient of debugging light path in the laser equipment, improve the accuracy of vibration mirror scanning module to light center.
Description of drawings
Fig. 1 is the spatial structure decomposing schematic representation of the utility model embodiment;
Fig. 2 is the plane assembly structure synoptic diagram of the utility model embodiment;
Fig. 3 is the plane decomposition texture synoptic diagram of the utility model embodiment.
Embodiment
The most preferred embodiment that below is the utility model is described in further detail.
As depicted in figs. 1 and 2, the utility model embodiment provides a kind of device of regulating the vibration mirror scanning module to light center, comprise that vibration mirror scanning module 100 and focus lamp are to light cover dish 30, wherein: described galvanometer module 100 comprises light inlet 101 and light-emitting window 102, this light inlet 101 is provided with galvanometer to light cross 10, described focus lamp is provided with focus lamp to light cross 20 to light cover dish 30, and this focus lamp is to be installed on light-emitting window 102 by the mode that is threaded to light cover dish 30.Light inlet 101 on the described galvanometer module 100 is vertical mutually with the axis of light-emitting window 102, forms the cruciform light path.
The described galvanometer of present embodiment is installed on light inlet 101 places to light cross 10, and described focus lamp is installed on focus lamp to position in the center of light cover dish 30 to light cross 20.If laser vertical is incident in vibration mirror scanning module 100, described galvanometer is to 10 pairs of cross hot spots that are imaged as symmetry by vibration mirror scanning module 100 on surface level of light cross; Imaging on surface level also is the cross hot spot of symmetry to described focus lamp to light cross 20; And two hot spots should be overlapping.。
As depicted in figs. 1 and 2, the utility model embodiment is before vertical and positive center enters vibration mirror scanning module 100 at calibration laser, galvanometer is installed on the light inlet 101 of vibration mirror scanning module 100 to light cross 10, the calibration light path makes laser be symmetrical cross hot spot by galvanometer to light cross 10 imagings, and this hot spot is the circle hot spot.Focus lamp is installed on vibration mirror scanning piece 100 with screw thread to light cover dish 30 to the focus lamp of light cross 20 light-emitting window 102 then will be installed.Calibrating the galvanometer that light path makes laser pass through light inlet 101 repeatedly overlaps to light cross 10 and by the two right-angled intersection pictures that light-emitting window 102 is become, after coincidence finishes, disassemble this cover light modulation instrument, can scanning mirror be installed at vibration mirror scanning module 100 light-emitting windows 102, finish the light path of vibration mirror scanning module 100 parts and regulate.
The enforcement of the utility model is not limited to the disclosed mode of above most preferred embodiment, and is all based on above-mentioned mentality of designing, simply deduces and replace, and all belongs to enforcement of the present utility model.
Claims (5)
1. device of regulating the vibration mirror scanning module to light center, comprise that vibration mirror scanning module and focus lamp are to light cover dish, it is characterized in that: described galvanometer module comprises light inlet and light-emitting window, this light inlet is provided with galvanometer to the light cross, described focus lamp is provided with focus lamp to the light cross to light cover dish, and the light inlet on the described galvanometer module is vertical mutually with the axis of light-emitting window.
2. adjusting vibration mirror scanning module according to claim 1 is to the device of light center, and it is characterized in that: described galvanometer is installed on light inlet to the light cross, and described focus lamp is installed on the center of focus lamp to light cover dish to the light cross.
3. adjusting vibration mirror scanning module according to claim 2 is to the device of light center, it is characterized in that: described galvanometer is symmetrical cross hot spot to the light cross to the laser imaging, described focus lamp is imaged as symmetrical cross hot spot to light cross 20 on surface level, these two hot spots are overlapping.
4. adjusting vibration mirror scanning module according to claim 3 is characterized in that the device of light center: the orthogonal cross overlaid of described two cross hot spots and light inlet and light-emitting window axis.
5. adjusting vibration mirror scanning module according to claim 2 is characterized in that the device of light center: described focus lamp is to be installed on light-emitting window by being threaded to light cover dish.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010202318020U CN201788317U (en) | 2010-06-21 | 2010-06-21 | Galvanometer scanning module beam-focusing center adjusting device |
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CN2010202318020U CN201788317U (en) | 2010-06-21 | 2010-06-21 | Galvanometer scanning module beam-focusing center adjusting device |
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CN201788317U true CN201788317U (en) | 2011-04-06 |
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CN2010202318020U Expired - Lifetime CN201788317U (en) | 2010-06-21 | 2010-06-21 | Galvanometer scanning module beam-focusing center adjusting device |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103064189A (en) * | 2012-12-14 | 2013-04-24 | 青岛镭创光电技术有限公司 | Laser device beam expander adjusting device and laser device beam expander adjusting method |
CN105215544B (en) * | 2014-06-19 | 2017-02-15 | 大族激光科技产业集团股份有限公司 | Collimation method of three-dimensional galvanometer and collimation system adopted by collimation method |
CN107153244A (en) * | 2017-06-26 | 2017-09-12 | 大族激光科技产业集团股份有限公司 | The debugging apparatus and its adjustment method of galvanometer |
CN109375383A (en) * | 2018-11-25 | 2019-02-22 | 武汉吉事达科技股份有限公司 | A kind of debugging galvanometer concentric light modulation cylinder and adjustment method |
CN110394548A (en) * | 2019-08-13 | 2019-11-01 | 苏州菲镭泰克激光技术有限公司 | Three axis one-point type galvanometer systems |
CN112676699A (en) * | 2020-12-08 | 2021-04-20 | 广东宏石激光技术股份有限公司 | Multi-lens-group optical path correction method |
CN113182671A (en) * | 2021-03-23 | 2021-07-30 | 深圳市大族数控科技股份有限公司 | Vibrating mirror dimming tool, method and device |
-
2010
- 2010-06-21 CN CN2010202318020U patent/CN201788317U/en not_active Expired - Lifetime
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103064189A (en) * | 2012-12-14 | 2013-04-24 | 青岛镭创光电技术有限公司 | Laser device beam expander adjusting device and laser device beam expander adjusting method |
CN103064189B (en) * | 2012-12-14 | 2017-12-26 | 青岛镭创光电技术有限公司 | The method of adjustment of laser beam expanding lens adjusting apparatus and laser beam expanding lens |
CN105215544B (en) * | 2014-06-19 | 2017-02-15 | 大族激光科技产业集团股份有限公司 | Collimation method of three-dimensional galvanometer and collimation system adopted by collimation method |
CN107153244A (en) * | 2017-06-26 | 2017-09-12 | 大族激光科技产业集团股份有限公司 | The debugging apparatus and its adjustment method of galvanometer |
CN107153244B (en) * | 2017-06-26 | 2019-09-17 | 大族激光科技产业集团股份有限公司 | The debugging apparatus and its adjustment method of galvanometer |
CN109375383A (en) * | 2018-11-25 | 2019-02-22 | 武汉吉事达科技股份有限公司 | A kind of debugging galvanometer concentric light modulation cylinder and adjustment method |
CN110394548A (en) * | 2019-08-13 | 2019-11-01 | 苏州菲镭泰克激光技术有限公司 | Three axis one-point type galvanometer systems |
CN112676699A (en) * | 2020-12-08 | 2021-04-20 | 广东宏石激光技术股份有限公司 | Multi-lens-group optical path correction method |
CN112676699B (en) * | 2020-12-08 | 2022-04-15 | 广东宏石激光技术股份有限公司 | Multi-lens-group optical path correction method |
CN113182671A (en) * | 2021-03-23 | 2021-07-30 | 深圳市大族数控科技股份有限公司 | Vibrating mirror dimming tool, method and device |
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Granted publication date: 20110406 |
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