CN105372816A - Light uniforming method of optical fiber coupling type semiconductor laser - Google Patents
Light uniforming method of optical fiber coupling type semiconductor laser Download PDFInfo
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- CN105372816A CN105372816A CN201410392586.0A CN201410392586A CN105372816A CN 105372816 A CN105372816 A CN 105372816A CN 201410392586 A CN201410392586 A CN 201410392586A CN 105372816 A CN105372816 A CN 105372816A
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- semiconductor laser
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- optical fiber
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Abstract
A light uniforming method of an optical fiber coupling type semiconductor laser is applied through a light uniforming device of the optical fiber coupling type semiconductor laser. The light uniforming device comprises the components of an optical fiber coupling type semiconductor laser source, a collimating lens, a first fly's-eye lens, a second fly's-eye lens, a condenser lens and an irradiation surface. The light uniforming method of the optical fiber coupling type semiconductor laser comprises the following steps of A, forming a parallel light beam which is parallel with an optical axis after light from the optical fiber coupling type semiconductor laser passes through the collimating lens; B, after the parallel light beam passes through small lenses of the first fly's-eye lens, focusing the light beam to the centers of the corresponding small lenses of the second fly's-eye lens; C, imaging images from corresponding small lenses of the first fly's-eye lens on the irradiation surface in an overlapping manner by each small lens of the second fly's-eye lens; and D, obtaining a uniform light spot on the irradiation surface. The light uniforming method can greatly improve uniformity of the light spot which is output from the optical fiber coupling type semiconductor laser, and furthermore satisfies a requirement for photoluminescence detection of a solar cell slice.
Description
Technical field
The present invention relates to optical instrument, particularly relate to the coupling fiber formula semiconductor laser dodging device in a kind of solar cell checkout equipment.
Background technology
May be there is the defect of material itself as crystal defect, fragment, material contamination etc. in solar cell piece, these defects can make the performance degradation of solar cell in the use that solar cell is follow-up, so need to be detected in early stage.At present, the detection method of photoluminescence effectively can detect the defect of the material existed in solar cell piece itself, and the light source that this method adopts is monochromatic laser light source, and the intensity of LASER Light Source needs to reach 150mw/cm
2, solar cell piece is of a size of 156mm × 156mm, considers the loss of laser energy, and the power of LASER Light Source at least needs to reach 50W, therefore needs to adopt coupling fiber formula semiconductor laser.Detection method due to photoluminescence requires that the homogeneity of laser facula is more than 95%, and the hot spot that coupling fiber formula semiconductor laser directly exports is the Gaussian distribution that centre is bright, edge is dark, and its homogeneity only can reach 40%, therefore the research of coupling fiber formula semiconductor laser dodging device is very important.
Summary of the invention
Object of the present invention, exactly in order to provide a kind of even smooth method of coupling fiber formula semiconductor laser, to realize using the detection method of photoluminescence to detect solar cell.
In order to achieve the above object, present invention employs following technical scheme: a kind of even smooth method of coupling fiber formula semiconductor laser, implemented by the dodging device of coupling fiber formula semiconductor laser, the dodging device of this coupling fiber formula semiconductor laser comprise arrange along light path order coupling fiber formula semiconductor laser light resource, collimation lens, the first fly's-eye lens, the second fly's-eye lens, condenser and irradiation face; Coupling fiber formula semiconductor laser light resource is placed in the focus of collimation lens, and in the focus being centrally located at lenslet corresponding to the first fly's-eye lens of each lenslet of the second fly's-eye lens, irradiation face is arranged on the focal plane of condenser;
The even smooth method of described coupling fiber formula semiconductor laser comprises the following steps:
A, coupling fiber formula semiconductor laser light resource form a branch of parallel beam parallel with optical axis after collimation lens;
B, parallel beam focus on the center of the lenslet of each correspondence of the second fly's-eye lens after each lenslet of the first fly's-eye lens;
The image overlap that lenslet corresponding for first fly's-eye lens comes is imaged on irradiation face by each lenslet of C, the second fly's-eye lens;
D, on irradiation face, obtain uniform light spots.
The even smooth method of coupling fiber formula semiconductor laser of the present invention can the homogeneity of improvement coupling fiber formula semiconductor laser output facula of high degree, meets the photoluminescence testing requirement of solar cell piece.
Accompanying drawing explanation
Fig. 1 is the structural representation of the dodging device of the coupling fiber formula semiconductor laser adopted in the present invention.
Embodiment
See Fig. 1, the dodging device of the coupling fiber formula semiconductor laser adopted in the present invention, comprise arrange along light path order coupling fiber formula semiconductor laser light resource 1, collimation lens 2, first fly's-eye lens 3, second fly's-eye lens 4, condenser 5 and irradiation face 6.Coupling fiber formula semiconductor laser light resource 1 is placed in the focus of collimation lens 2, and in the focus being centrally located at the lenslet of the first fly's-eye lens 3 correspondence of each lenslet of the second fly's-eye lens 4, irradiation face 6 is arranged on the focal plane of condenser 5.
The even smooth method of coupling fiber formula semiconductor laser of the present invention is, first by coupling fiber formula semiconductor laser light resource 1 is placed in the focus of collimation lens 2, then the center of each lenslet on the second fly's-eye lens 4 is placed in the focus of lenslet corresponding on the first fly's-eye lens 3, finally irradiation face 6 is placed on the focal plane of condenser 5.Coupling fiber formula semiconductor laser light resource 1 forms a branch of parallel beam parallel with optical axis after collimation lens 2, parallel beam focuses on the center of the lenslet of each correspondence of the second fly's-eye lens after each lenslet of the first fly's-eye lens, namely light source is formed multiple small light source picture and throws light on by the first fly's-eye lens 3, each lenslet of the second fly's-eye lens 4 by the lenslet overlapping imaging of the first fly's-eye lens 3 correspondence on irradiation face.Because the whole angle pencil of ray of light source is divided into multiple light pencil to throw light on by the first fly's-eye lens 3, and the small unevenness within the scope of each light pencil is owing to being in the mutual superposition of symmetric position light pencil, the small unevenness of light pencil is obtained compensate, thus the luminous energy in whole aperture is utilized effectively and uniformly.Be gathered in irradiation face 6 from the hot spot of the second fly's-eye lens 4 outgoing by condenser 5, on irradiation face, the every bit of hot spot is all subject to the irradiation that coupling fiber formula semiconductor laser light resource sends a little, simultaneously, the light beam that on coupling fiber formula semiconductor laser light resource 1, every bit sends again all intersection overlap in the same field range on irradiation face, thus obtaining a uniform irradiation face, the photoluminescence meeting solar cell piece detects will be restrainted.
Claims (1)
1. the even smooth method of a coupling fiber formula semiconductor laser, it is characterized in that: implemented by the dodging device of coupling fiber formula semiconductor laser, the dodging device of this coupling fiber formula semiconductor laser comprise arrange along light path order coupling fiber formula semiconductor laser light resource, collimation lens, the first fly's-eye lens, the second fly's-eye lens, condenser and irradiation face; Coupling fiber formula semiconductor laser light resource is placed in the focus of collimation lens, and in the focus being centrally located at lenslet corresponding to the first fly's-eye lens of each lenslet of the second fly's-eye lens, irradiation face is arranged on the focal plane of condenser;
The even smooth method of described coupling fiber formula semiconductor laser comprises the following steps:
A, coupling fiber formula semiconductor laser light resource form a branch of parallel beam parallel with optical axis after collimation lens;
B, parallel beam focus on the center of the lenslet of each correspondence of the second fly's-eye lens after each lenslet of the first fly's-eye lens;
The image overlap that lenslet corresponding for first fly's-eye lens comes is imaged on irradiation face by each lenslet of C, the second fly's-eye lens;
D, on irradiation face, obtain uniform light spots.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410392586.0A CN105372816A (en) | 2014-08-11 | 2014-08-11 | Light uniforming method of optical fiber coupling type semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410392586.0A CN105372816A (en) | 2014-08-11 | 2014-08-11 | Light uniforming method of optical fiber coupling type semiconductor laser |
Publications (1)
| Publication Number | Publication Date |
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| CN105372816A true CN105372816A (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410392586.0A Pending CN105372816A (en) | 2014-08-11 | 2014-08-11 | Light uniforming method of optical fiber coupling type semiconductor laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020036480A (en) * | 2018-08-30 | 2020-03-05 | 国立大学法人東京工業大学 | Photodetector module and optical feeding system |
| CN116058961A (en) * | 2023-03-06 | 2023-05-05 | 安徽雷彻科技有限公司 | Coupled ultraviolet laser ablation catheter capable of uniformly applying energy |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5594526A (en) * | 1994-05-09 | 1997-01-14 | Nikon Corporation | Optical integrator and projection exposure apparatus using the same |
| CN2685930Y (en) * | 2003-10-27 | 2005-03-16 | 翟金会 | Silicon-base microcrystal single chip type optical engine structure |
| CN101988904A (en) * | 2010-10-15 | 2011-03-23 | 中国电子科技集团公司第十八研究所 | Solar cell defect detection method |
| JP4859311B2 (en) * | 2001-09-17 | 2012-01-25 | 株式会社リコー | Laser illumination optical system, exposure apparatus using the optical system, laser processing machine, and projection apparatus |
| CN103246066A (en) * | 2013-05-17 | 2013-08-14 | 中国科学院光电技术研究所 | Optical system for homogenizing semiconductor laser beam of area array |
| CN103454845A (en) * | 2012-06-04 | 2013-12-18 | 索尼公司 | Illumination unit, projection display unit, and direct-view display unit |
-
2014
- 2014-08-11 CN CN201410392586.0A patent/CN105372816A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5594526A (en) * | 1994-05-09 | 1997-01-14 | Nikon Corporation | Optical integrator and projection exposure apparatus using the same |
| JP4859311B2 (en) * | 2001-09-17 | 2012-01-25 | 株式会社リコー | Laser illumination optical system, exposure apparatus using the optical system, laser processing machine, and projection apparatus |
| CN2685930Y (en) * | 2003-10-27 | 2005-03-16 | 翟金会 | Silicon-base microcrystal single chip type optical engine structure |
| CN101988904A (en) * | 2010-10-15 | 2011-03-23 | 中国电子科技集团公司第十八研究所 | Solar cell defect detection method |
| CN103454845A (en) * | 2012-06-04 | 2013-12-18 | 索尼公司 | Illumination unit, projection display unit, and direct-view display unit |
| CN103246066A (en) * | 2013-05-17 | 2013-08-14 | 中国科学院光电技术研究所 | Optical system for homogenizing semiconductor laser beam of area array |
Non-Patent Citations (1)
| Title |
|---|
| 刘小宇: "光伏缺陷检测激光光源的均匀化设计", 《节能技术与产品》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020036480A (en) * | 2018-08-30 | 2020-03-05 | 国立大学法人東京工業大学 | Photodetector module and optical feeding system |
| JP7210000B2 (en) | 2018-08-30 | 2023-01-23 | 国立大学法人東京工業大学 | Receiver module and optical power supply system |
| CN116058961A (en) * | 2023-03-06 | 2023-05-05 | 安徽雷彻科技有限公司 | Coupled ultraviolet laser ablation catheter capable of uniformly applying energy |
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Application publication date: 20160302 |