CN110394548A - Three axis one-point type galvanometer systems - Google Patents
Three axis one-point type galvanometer systems Download PDFInfo
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- CN110394548A CN110394548A CN201910742687.9A CN201910742687A CN110394548A CN 110394548 A CN110394548 A CN 110394548A CN 201910742687 A CN201910742687 A CN 201910742687A CN 110394548 A CN110394548 A CN 110394548A
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- Prior art keywords
- mould group
- working mould
- vibration lens
- axis
- lens
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to technical field of laser processing, specifically, it is a kind of three axis one-point type galvanometer systems, including work top, with the work top part mounting table disposed in parallel above work top, X Working mould group and Y Working mould group are installed in part mounting table, there are two be set as X1 Working mould group and X2 Working mould group to X Working mould group quantity, X1 Working mould group and X2 Working mould group are perpendicular to work top, Y Working mould group is in parallel and work top, X1 Working mould group includes X1 galvanometer motor and X1 vibration lens, X2 Working mould group includes X2 galvanometer motor and X2 vibration lens, Y Working mould group Y galvanometer motor and Y vibration lens, field lens is also equipped in part mounting table, field lens is located at immediately below Y vibration lens, it further include fiber coupler, fiber coupler is mounted on erecting bed by fixture On face, the present invention realizes the laser processing of mirror-vibrating large format low distortion by the design of eyeglass optical path compensation and corresponding mechanical structure motion control.
Description
Technical field
The present invention relates to technical field of laser processing, specifically, being a kind of three axis one-point type galvanometer systems.
Background technique
The conventional two-dimensional galvanometer used on the market at present, due to the limitation of mechanical structure and control technique, laser is passing through
When XY lens reflecting, difference is had in two component of a vector of X and Y, when Y galvanometer is swung, incident light is penetrated at scanning lens center
Out, when X galvanometer is swung, incident light injects scanning lens in a line segment along Y vibration lens axial direction, causes two points of XY
Amount effectively processing apart from different, XY distorted by the refraction of lens it is different, cause working face XY component power consistency and
Linear velocity ratio is different from, so that focal beam spot is distorted in XY component, is extremely difficult to high-accuracy Laser Micro-Machining requirement.Together
When, the offset that the effective working region of traditional 2-D vibration mirror is smaller and focal beam spot is from center to edge because of incidence point causes coke
The consistency of spot is poor, and work web edges processing effect is poor.
Summary of the invention
In order to solve the above-mentioned technical problem, the present invention discloses a kind of three axis one-point type galvanometer systems, pass through eyeglass optical path
The laser processing of mirror-vibrating large format low distortion is realized in Compensation Design and corresponding mechanical structure motion control.
The specific technical solution that the present invention uses is as follows:
A kind of three axis one-point type galvanometer systems, including work top, it is disposed in parallel above work top with work top
Part mounting table, X Working mould group and Y Working mould group are installed, there are two sets X Working mould group quantity in part mounting table
It is set to X1 Working mould group and X2 Working mould group, perpendicular to work top, Y Working mould group is parallel for X1 Working mould group and X2 Working mould group
With work top, X1 Working mould group includes X1 galvanometer motor and X1 vibration lens, and X2 Working mould group includes X2 galvanometer motor and X2 vibration
Eyeglass, Y Working mould group Y galvanometer motor and Y vibration lens are also equipped with field lens in part mounting table, and field lens is being located at Y vibration lens just
Lower section, further includes fiber coupler, and fiber coupler is mounted in mounting table by fixture.
The outer cover of further improvement of the present invention, X1 Working mould group, X2 Working mould group and Y Working mould group is close equipped with one
Close device, the top of the sealing device is provided with bottom plate and is used to fix X1 Working mould group and X2 Working mould group, the sealing device with
The opposite one side setting of fiber coupler is debugged to be provided with to cover on hole and be blocked up there are two the equirotal debugging hole for debugging
Head, the sealing device are provided with a debugging hole parallel with Y galvanometer motor fixed Y Working mould group on one side, debug on hole
It is provided with capping plug, which is connected with field lens by adapter ring.
Further improvement of the present invention is provided with a motor spacer ring on bottom plate for padded X2 galvanometer motor, guarantees X2
Vibration lens is on design height.
Further improvement of the present invention, X1 Working mould group, X2 Working mould group and Y Working mould group and the sealing device pass through spiral shell
Nail is fixed, and screw uses hexagon socket cap head screw.
Further improvement of the present invention, X1 Working mould group and X2 Working mould group centerline axis parallel and in the same plane,
X1 Working mould group and Y Working mould group central axis are mutually perpendicular to.
The line of centres distance of further improvement of the present invention, center to the X2 vibration lens of X1 vibration lens is equal to X2 vibration lens
Center to Y vibration lens line of centres distance.
Further improvement of the present invention, field lens use F-Theta field lens, thus it is possible to vary light-beam position focuses light beam.
In the above-mentioned technical solutions, the total track process of optical path is as follows: directional light occurs from fiber coupler first, irradiation
To X1 vibration lens, by X1 vibration lens reflected illumination to X2 vibration lens, then is deflected by Y vibration lens and be irradiated to field lens, field lens will
It is irradiated to work top after parallel light focusing and carries out surface processing.
Relative positional accuracy between each components guarantees that relationship is as follows: opposite between fiber coupler and X1 vibration lens
Position is guaranteed by fixture；X1 Working mould group, X2 galvanometer motor and the X2 vibration lens group of X1 galvanometer motor and X1 vibration lens composition
At X2 Working mould group, the Y Working mould group of Y galvanometer motor and Y vibration lens composition, X1 Working mould group and X2 Working mould group central axis
In parallel and in the same plane, X2 Working mould group and Y Working mould group central axis are mutually perpendicular to line, X1 Working mould group, X2 work
Relative positional accuracy between mould group, Y Working mould group is guaranteed by bottom plate.Relative positional accuracy is by turning between field lens and bottom plate
Connect environmentally friendly card.
Beneficial effects of the present invention: for the present invention compared with traditional 2D galvanometer, the bigger visual field simplifies larger part
Processing.Minimum light spot distortion minimization in the entire visual field process variations of best quality laser processing part.Air and water
Cooling option can provide thermal stability and improve long-term accuracy.By configuring the eyeglass of different plated film wave bands, can be compatible with more
Money laser wavelength.It is designed by optical compensation, increases the effective numerical aperture of galvanometer, effective working (finishing) area is same specification and model
2-3 times of 2D galvanometer, optical quality can thin 30%-40% or so.Prefocusing and rear focusing galvanometer at present on the market simultaneously is big
Polygamy is traditional 2D galvanometer, which can be used as submodule, and compatible design enters prefocusing most on the market and gathers afterwards
Burnt 3D galvanometer system, the efficiency of whole lifting means processing.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is design principle schematic diagram one of the invention.
Fig. 3 is design principle schematic diagram two of the invention.
Fig. 4 is design principle schematic diagram three of the invention.
Fig. 5 is the structural schematic diagram that the present invention has obturator.
Fig. 6 is installation and debugging schematic diagram one of the present invention.
Fig. 7 is installation and debugging schematic diagram two of the present invention.
Fig. 8 is installation and debugging schematic diagram three of the present invention.
Fig. 9 is installation and debugging schematic diagram four of the present invention.
In figure, 1-X2 galvanometer motor, 2-X1 galvanometer motor, 3-X2 vibration lens, 4-Y galvanometer motor, 5-Y vibration lens, 6-X1
Vibration lens, 7- fiber coupler, 8- field lens, 9- optical path, 10- fixture, 11- work top, 12- motor spacer ring, 13- bottom plate, 14-
Cover plug, 15- adapter ring, 6- sensitive film, 17- light modulation machine frame, 18- light modulation machine frame protection cap, 19- screw.
Specific embodiment
In order to deepen the understanding of the present invention, the present invention is done below in conjunction with drawings and examples and is further retouched in detail
It states, the embodiment is only for explaining the present invention, does not constitute and limits to protection scope of the present invention.
Embodiment: as shown in Figure 1, a kind of three axis one-point type galvanometer systems, including work top 11, it is flat with work top 11
The part mounting table of row setting being located above work top, is equipped with X Working mould group and Y Working mould in part mounting table
Group, for X Working mould group quantity there are two X1 Working mould group and X2 Working mould group is set as, X1 Working mould group and X2 Working mould group are vertical
In work top, Y Working mould group is in parallel and work top, X1 Working mould group include X1 galvanometer motor 2 and X1 vibration lens 6, X2 work
Making mould group includes X2 galvanometer motor 1 and X2 vibration lens 3, Y Working mould group Y galvanometer motor 4 and Y vibration lens 5, in part mounting table
It is also equipped with field lens 8, it further includes fiber coupler 7 that field lens 8, which is located at immediately below Y vibration lens 5, and fiber coupler 7 passes through fixture 10
It is mounted in mounting table.
As shown in figure 5, the outer cover of X1 Working mould group, X2 Working mould group and Y Working mould group is equipped with an obturator, it should
The top of sealing device is provided with bottom plate 13 and is used to fix X1 Working mould group and X2 Working mould group, the sealing device and fiber coupling
The opposite one side setting of device 7 debugs there are two the equirotal debugging hole for debugging and is provided with capping plug 14 on hole, should
Sealing device is provided with a debugging hole parallel with Y galvanometer motor fixed Y Working mould group on one side, debugs and is provided on hole
Plug 14 is covered, which is connected with field lens by adapter ring 15.
In the present embodiment, it is provided with a motor spacer ring 12 on bottom plate 13 for padded X2 galvanometer motor 1, guarantees X2 vibration
Eyeglass 3 is on design height；X1 Working mould group, X2 Working mould group and Y Working mould group and the sealing device are fixed by screw 19,
Screw 19 uses hexagon socket cap head screw；X1 Working mould group and X2 Working mould group centerline axis parallel and in the same plane,
X1 Working mould group and Y Working mould group central axis are mutually perpendicular to；The center of X1 vibration lens 6 to X2 vibration lens 3 the line of centres away from
With a distance from the center to 5 line of centres of Y vibration lens for being equal to X2 vibration lens 3；Field lens 8 uses F-Theta field lens, thus it is possible to vary light beam
Position focuses light beam.
The cardinal principle design realization process of the present embodiment is as follows: whole system machining area is work top 11, processing
Area is 4a2(2a multiplied by 2a), definition plane P1 is a reference datum, and Fig. 1 is shown in specific XY coordinate definition.X1 vibration lens 6
The line of centres of center to X2 vibration lens 3 is distance F1, and the line of centres of center to the Y vibration lens 5 of X2 vibration lens 3 is distance
F2, machinery elements design guarantee F1=F2, and light is when F1 and F2 stroke transmits, for X1 vibration lens 6 and X2 vibration lens 3, light path and
The product value of eyeglass pivot angle is definite value.I.e. X1 vibration lens 6 is along B(A) it rotates by a certain angle, X2 vibration lens 3 is along D(C) direction synchronization
Rotation and angular speed is when being 6 twice of X1 vibration lens, light is beaten always at 5 center of Y vibration lens, and only optical path can be due to X2 vibration lens 3
With the difference of 6 synchronous hunting angle of X1 vibration lens, cause optical path can be different from the incident angle of Y vibration lens 5.When original state,
6 mirror surface of X1 vibration lens and datum level P1 are in Z-direction angle at 45 degree, and X2 vibration lens 3 is parallel with X1 vibration lens 6, Y vibration lens 5
With datum level P1 in X-direction angle at 45 degree, this time is projected from 8 center of field lens along Z-direction vertically, such as 9 institute of optical path in figure
Show.When light falls in the position (a, 0) from (0,0) coordinate out, X1 vibration lens 6 is along the direction B rotation β angle to extreme position, X2 vibration
Eyeglass 3 rotates 2 times of β angles to extreme position along the direction D, in rotary course, 6 synchronous rotary of X2 vibration lens 3 and X1 vibration lens, and
The angular speed for meeting X2 vibration lens 3 is 2 times of relationships of 6 angular speed of X1 vibration lens, sees Fig. 2 (coordinate relationship be subject to Fig. 1-1).When
Light is when falling in plane X-axis maximum position, Y-axis zero-bit out, and X1 vibration lens 6 is along the direction A rotation β angle to extreme position, X2 vibration
Eyeglass 3 rotates 2 times of β angles to extreme position along the direction C, in rotary course, 6 synchronous rotary of X2 vibration lens 3 and X1 vibration lens, and
The angular speed of X2 vibration lens 3 is 2 times of relationships of 6 angular speed of X1 vibration lens, sees Fig. 3 (coordinate relationship be subject to Fig. 1).Y vibration lens 5
Rotation be control light in the position of machining area Y-axis, when light falls in position as shown in Figure 3, Y vibration lens 5 is rotated along the direction E
To extreme position, laser processing point fall in coordinate (- a, a), as shown in Figure 4 position (coordinate relationship be subject to Fig. 1).
As stated above, to make X1 vibration lens 6 synchronous always with X2 vibration lens 3, need to guarantee relationship S1:(F1+F2)
The line of centres of the center of x ω 1=F2x ω 2(X1 vibration lens 6 to X2 vibration lens 3 is distance F1, the center of X2 vibration lens 3 to Y
The line of centres of vibration lens 5 is distance F2；ω 1 is the angular velocity of rotation of X1 vibration lens 6, and ω 2 is the rotation angle speed of X2 vibration lens 3
Degree).The design can realize optical path by the movement pivot angle of circuit board linkage control X1 vibration lens 6, X2 vibration lens 3, Y vibration lens 5
It is focused in any position of working face.
Three axis one-point type galvanometer system installation and debugging methods are as follows: the first step consolidates three axis galvanometer seats and connecting bottom board 13
It is scheduled on reliable table top, fiber coupler 7 is connected to by fiber coupler fixture 10 with three axis galvanometer seats and connecting bottom board 13
Together, light modulation machine frame 17 is screwed in three axis galvanometer seats and connecting bottom board 13 at this time, fiber coupler 7 goes out light, in light modulation work
It shelves 17 notches and is put into sensitive film 16, whether observation fiber coupler 7 goes out light in center.Light modulation machine frame 17 is revolved again
Out, other end is screwed in, is put into sensitive film 16 in light modulation 17 notch of machine frame, observation dims 17 surface of machine frame respectively twice
Whether the imaging of " ten " word divides equally, and using one straight line principle of two o'clock, for detecting the concentricity for judging that laser couplers go out light, such as schemes
Shown in 6.The X1 Working mould combined with X1 vibration lens 6 of X1 galvanometer motor 2 is assembled into three after first step detection is qualified by second step
Light modulation machine frame 17 is successively screwed in three axis galvanometer seats and company by two kinds of situations shown in diagram 7 by axis galvanometer seat and connecting bottom board 13
Bottom plate 13 is connect, is powered on to X1 Working mould group, motor self-locking time neutral zero-bit, fiber coupler 7 goes out light, rotates X1 galvanometer motor 2,
Divide equally " ten " the word imaging twice of sensitive film 16, lock-screw 19 after qualification is shown in Fig. 7, this step is used to 1 Working mould group position of corrected X
It sets.The X2 Working mould combined with X2 vibration lens 3 of X2 galvanometer motor 1 after second step detection is qualified, is assembled into the vibration of three axis by third step
Light modulation machine frame 17 is successively screwed in three axis galvanometer seats and connection bottom by two kinds of situations shown in diagram 8 by microscope base and connecting bottom board 13
Plate 13, X1 axis and X2 axle module power on, and motor self-locking time neutral zero-bit, fiber coupler 7 goes out light, rotates X2 galvanometer motor 1, make
" ten " the word imaging twice of sensitive film 16 is divided equally, and corresponding screw is locked after qualified, sees Fig. 2-3, this step is used to 2 Working mould group of corrected X
Position.4th step fixes previously assembled good entirety on the good girder platform of pre-calibration, by Y galvanometer motor 4 and Y vibration lens
Combined Y Working mould is assembled into three axis galvanometer seats and connecting bottom board 13, in X1 Working mould group, X2 Working mould group, Y Working mould group
Electricity, motor self-locking time neutral zero-bit.By rotating Y galvanometer motor 4 along the direction G or H, observes that light is finally fallen in and calibrate in advance
Work top 11 central point on, see Fig. 9.To sum up, debugging is qualified.After being completed, tool part is removed, with capping plug 14
Block testing and measuring technology hole.
Basic principles and main features and advantage of the invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, and the above embodiments and description only describe originals of the invention
Reason, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes and improvements
It all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its equivalent circle
It is fixed.
Claims (8)
1. a kind of three axis one-point type galvanometer systems, which is characterized in that including work top, and work top is disposed in parallel is located at
Part mounting table above work top is equipped with X Working mould group and Y Working mould group, the X in the part mounting table
There are two be set as X1 Working mould group and X2 Working mould group, the X1 Working mould group and the X2 Working mould group to Working mould group quantity
Perpendicular to the work top, for the Y Working mould group in parallel with the work top, the X1 Working mould group includes X1 galvanometer electricity
Machine and X1 vibration lens, the X2 Working mould group include X2 galvanometer motor and X2 vibration lens, the Y Working mould group Y galvanometer motor and Y
Vibration lens is also equipped with field lens in the part mounting table, and it further includes light that the field lens, which is located at immediately below the Y vibration lens,
Fine coupler, the fiber coupler are mounted in the mounting table by fixture.
2. three axis one-point type galvanometer system according to claim 1, which is characterized in that the X1 Working mould group, X2 work
The outer cover of mould group and Y Working mould group is equipped with an obturator, and the top of the sealing device is provided with bottom plate and is used to fix X1
Working mould group and X2 Working mould group, there are two equirotal for the sealing device one side setting opposite with the fiber coupler
It for the debugging hole debugged, debugs and is provided with capping plug on hole, which is provided on one side fixed Y Working mould group
One debugging hole parallel with Y galvanometer motor debugs and is provided with capping plug on hole, and the sealing device and the field lens are by turning
Ring is connect to be connected.
3. three axis one-point type galvanometer system according to claim 2, which is characterized in that be provided with an electricity on the bottom plate
Machine spacer ring is used to padded X2 galvanometer motor, guarantees X2 vibration lens on design height.
4. three axis one-point type galvanometer system according to claim 3, which is characterized in that the X1 Working mould group, X2 work
Mould group and Y Working mould group are fixed with the sealing device by screw.
5. three axis one-point type galvanometer system according to claim 4, which is characterized in that the screw uses interior hexagonal cylindrical
Head screw.
6. three axis one-point type galvanometer system according to claim 1-5, which is characterized in that the X1 Working mould group
With X2 Working mould group centerline axis parallel and in the same plane, the X1 Working mould group and Y Working mould group central axis are mutual
Vertically.
7. three axis one-point type galvanometer system according to claim 6, which is characterized in that the center of the X1 vibration lens to institute
The line of centres of X2 vibration lens is stated apart from the center equal to the X2 vibration lens to the Y vibration lens line of centres distance.
8. three axis one-point type galvanometer system according to claim 7, which is characterized in that the field lens uses F-Theta
Mirror.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910742687.9A CN110394548A (en) | 2019-08-13 | 2019-08-13 | Three axis one-point type galvanometer systems |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910742687.9A CN110394548A (en) | 2019-08-13 | 2019-08-13 | Three axis one-point type galvanometer systems |
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| CN110394548A true CN110394548A (en) | 2019-11-01 |
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Cited By (2)
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| CN113579518A (en) * | 2021-07-27 | 2021-11-02 | 江苏先河激光技术有限公司 | Six-galvanometer group hole machining device and machining method |
| CN114505602A (en) * | 2022-04-19 | 2022-05-17 | 中国工程物理研究院激光聚变研究中心 | Multi-axis rotary cutting scanning system and using method thereof |
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Application publication date: 20191101 |