CN101932187B - Method for generating plesiochronous higher harmonic or X-ray radiation through laser secondary excitation - Google Patents
Method for generating plesiochronous higher harmonic or X-ray radiation through laser secondary excitation Download PDFInfo
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Abstract
The invention relates to a method for generating higher harmonic or soft X-ray, in particular to a method for generating plesiochronous higher harmonic or soft X-ray radiation through laser secondary excitation. In the method, secondary focusing is performed on a focused incident laser beam by using an ellipsoidal reflection cavity; a hollow capillary which is filled with flowing working media is collinearly fixed along with a long axis of the ellipsoidal reflection cavity; an incident driving laser beam is focused at one focus of the ellipsoidal cavity and then is secondarily focused at another focus of the ellipsoidal cavity after being reflected by the inner surface of the ellipsoidal cavity, so the driving laser excites higher harmonic relational radiation in the soft X-ray range for two times in the working media at the two focuses of the ellipsoidal cavity; at the same time, the propagation time of the driving laser between the two focuses is as same as that of the higher harmonic between the two focuses, so coherent reinforced output under the condition that the quasi-phase speed of the driving laser is matched with that of the radiation light is realized; and the separated transmission of the higher harmonic or soft X-ray beam and the driving laser beam at the output end is realized in a laser beam large-angle incident laterally driving mode.
Description
Technical field
The present invention relates to a kind of method that produces accurate high order harmonic component synchronously or relevant soft X-ray radiation through the laser secondary excitation; The relevant soft X-ray radiation that is produced is more than tens electronvolt to a kiloelectron-volt, and the relevant soft X-ray bundle (source) of this scope can be applied to the analysis of engineering industry, biomedicine and material science such as micro-nano photoetching or micro-nano processing and the numerous areas and the industries such as basic research of diagnosis, the ultrafast dynamics of atom and molecule and high time-resolved spectroscopy.
Background technology
In recent years; High order harmonic component by the ultrashort pulse driving and generating; Peculiar properties such as its radiated time is short, frequency band is narrow, wavelength-tunable; Be to produce ultrashort pulsewidth and high spatial, the extreme ultraviolet (EUV) of time coherence and the utmost point effective way of soft X-ray, make it in various fields, have a wide range of applications, obtained the scientific worker and paid close attention to greatly.Particularly; The high order harmonic component of utilizing ultrashort, ultra-intense laser pulse and inert gas medium interaction to produce has at present successfully got into " water window " wave band; This makes high order harmonic component in the high time of needs and the microcosmic ultrafast process research field of spatial discrimination great application potential arranged; At meticulous spectrum analysis, the EUV light clock of high-resolution imaging, material behavior, and produced huge advantage with the science and technology field such as micro-imaging of the corresponding biological cell structure of water window wave section.
Equally, as one of Driving technique of modern civilization, the microelectronic chip technology is ubiquitous for the influence of modern civilization, and this differs and belong to the product of photoetching technique, and wherein the photoetching light source is in conclusive status again.Present photoetching light source is that wavelength is the ultraviolet ray of 157nm, and the wavelength of the required light source of photoetching technique of future generation will foreshorten to 13.5nm (that is extreme ultraviolet EUV wave band).Therefore, the development of EUV coherent source technology then must become the key link of micro-nano photoetching of future generation or chip manufacture technology.Especially succinct, cheap, easy operating of EUV light source and the good characteristics of coherence make it obtaining great development aspect the processing of mesa surface laser, thereby the photoetching technique in semi-conductor industry uses, and its advantage is considerably beyond synchrotron radiation source.
Further, because electronics is 24 * 10 around the orbital period of nuclear motion
-18S, that is, and 24 Ah seconds; In case break through Ah second's boundary; Human just might realize time-resolved dream in the atomic scale, the measuring range of ultrafast process is expanded to electronic motion process in the various physical forms, like the motion state of valence electron in the electric charge transition in the complicated molecule, the molecule etc.And high field high order harmonic component radiation spectrum presents platform area and platform area harmonic wave equifrequent distinct advantages spaced apart regularly, is for breaking through the preferred light source of Ah second's boundary, and the realization of Ah second's technology will have extremely great and irreplaceable using value.Just as, the Nature comment is said: we are getting into the frontier of a supper-fast measurement, and the epoch of Ah second's physics have begun.
In view of the requirement of scientific research field to high order harmonic component and soft X-ray, people are still deepening continuously for the research that utilizes high order harmonic component to produce soft X-ray.The main target of research concentrates on the platform area and the cut-off region of high order harmonic component; Research at technical elements mainly concentrates on two: the one, how to improve the single photon energy technically; The single photon energy is forced into water window wave section, though it is this has successful experience, not mature enough; The 2nd, how to improve the harmonic wave transformation efficiency, this is to be related to the key whether high order harmonic component has practical value, is the current targets of mainly assaulting fortified position of people.The factor that influences the harmonic wave transformation efficiency mainly be since plasma to the absorption of EUV light, the phase mismatch of laser and harmonic wave, free electron defocus influence etc.Its key point is to solve the phase matched problem of driving laser ionization medium in the high order harmonic component production process, and method commonly used has two kinds in the experiment at present:
(1) it is intrafascicular that the employing femtosecond pulse directly focuses on the inert gas spray, and the key condition of its realization phase matched depends on the focusing configuration and gas sprays the configuration of restrainting, still; Be the phase matched that obtains to optimize; Require the confocal parameter of light beam very short, and gas spray bundle configuration difficulty strengthen; Need to explore laser and gas interaction length with the expansion confocal parameter, people have introduced guide technology for this reason increases interaction length.
(2) introduce the capillary ripple guide-tube structure, this structure is that gas is strapped in the capillary and reaches the stable equilibrium of air pressure, and laser excites the inert gas in the pipe from an end incident capillaceous, produces high order harmonic component.This structure not only can overcome the focusing effect that laser pulse occurs in transmission, and the selectivity of geometry chromatic dispersions can the improvement harmonic wave of waveguide, propagates with free space and compares, and waveguide has quickened the phase velocity of guiding mould.Simultaneously, the waveguide configuration can help to set up extraordinary radially consistent zlasing mode, and the EUV light beam of generation has all characteristics of laser beam, and for example, the total space is relevant etc.Compare with gas jet; Another advantage that adopts waveguiding structure is can the extend order of magnitude of laser and gas medium interphase interaction length of waveguide, this means and can use lower laser energy can obtain the high order harmonic field similar with gas jet with air pressure.Therefore; The high order harmonic component experiment that solves phase matched at present all is fully to work hard from waveguide; Through changing the inner geometric configuration of waveguide, or, realize the phase matched or the accurate phase matched of driving laser and high order harmonic component by the partial function of waveguide configuration.Compare typical protocols, have following several kinds:
1, waveguide for modulation geometry reaches accurate phase matched.Like A.Paul&Margaret.M at " Quasi-phase-matched generation of coherent extreme-ultravioletlight " (Nature Vol 421; 2003) used modulation waveguide; The diameter of waveguide modulating part periodically is modulated near sinusoidal, and like this with laser focusing in gassiness hollow wave guide pipe the time, laser intensity is also by periodically modulation; And then can modulate the phase shifts between the harmonious wave field of driving laser again; Experimental result shows that modulation optical fiber has improved at least two than the order of the high order harmonic component that hollow wave guide obtains, and brightness has more significantly raising.Similar approach; And for example Ivan P.Christov is in " Dispersion-controlled hollow core fiber for phase matched harmonicgeneration " (9November 1998/Vol.3, No.10/OPTICS EXPRESS 360) used waveguide inner modulation structure.Experimental technique with waveguide acquisition high order harmonic component is a lot of now; But; Further optimize the modulating wave guide structure and obtain accurate phase matched and need more complicated method, the optical loss of driving laser, make from problems such as phase modulated, mode beatings and to optimize the modulation period of difficulty more.Finally, be shorter than waveguide diameter modulation period, cause the laser intensity modulation to reduce fast, the coherence length short with accurate phase techniques compensating pole becomes challenge.
2, introduce reverse laser pulse and come modulated laser intensity.These class methods have Xiaoshi Zhang; " Quasi-phase-matching and quantum-path control of high-harmonicgeneration using counter propagating light " (Nature-Phys; 3; 270; 2007) introducing backpropagation pulse train, and U.S. Pat 7664147B2 " Phase matching of highorder harmonic generation using dynamic phase modulation caused by anon-collinear modulation pulse " is introduced the continuous propagation field of weak reverse standard etc., and the purpose of introducing weak backpropagation light is to overcome the difficulty that the further periodicity of modulation waveguide is optimized; Let the backpropagation field that lasting amplitude and phase place that driving laser causes are modulated; At the special area that focuses on, adopt the quantum phase of disturbing light beam to remove the short-wavelength light that disturbance produces, constrain the emission that departs from the phase place zone, reach accurate phase matched; Emission to high order harmonic component produces humidification, and the brightness of high order harmonic component is improved significantly.
The above-mentioned invention of mentioning and technology have certain contribution improving in the harmonic wave brightness, but plasma is to the absorption of EUV light or soft X-ray, and the phase matched between harmonic fields and the driving laser still needs further to optimize, and the transformation efficiency of harmonic wave is not high all the time; And the harmonic wave exit direction is identical with driving laser, need filter the EUV light that driving laser just can detect generation with filter, and this has increased cost and difficulty to experiment.Therefore, break through the bottleneck of harmonic wave transformation efficiency, reduce the difficulty that harmonic wave produces, will produce huge meaning and value scientific research and practical application.
Summary of the invention
The present invention aims to provide a kind of completely new approach that produces accurate high order harmonic component synchronously or relevant soft X-ray radiation through the laser secondary excitation; This method adopts the ellipsoid reflection cavity that the laser beam that focuses on incident is carried out focusing on the second time, has realized that driving laser successively excites the high order harmonic component correlation radiation of soft X-ray scope for twice in the working media at ellipsoidal cavity bifocal place; Simultaneously, driving laser is identical with high order harmonic component propagation time between bifocal, has realized the relevant enhancing output of the accurate phase velocity coupling of driving laser and radiant light; Adopt the side direction type of drive of laser beam wide-angle incident, realize that output high order harmonic component or soft X-ray bundle transmit with different angular separation with drive laser beam.
Content of the present invention comprises: use the ellipsoid reflection cavity driving laser that focuses on incident is carried out the method for focusing second time; The method that driving laser carries out secondary excitation to the flowing gas that is full of in the straight hollow capillary or plasma (being referred to as working media); Ellipsoid reflection cavity focal length and semi-minor axis length produce phase difference to driving laser in the time interval of twice focusing, thereby obtain the method for the synchronous coherent radiation of standard of high order harmonic component or soft X-ray radiation.It is characterized in that: the major axis that 1) is full of mobile working media and center line capillaceous and ellipsoid reflection cavity in the hollow broad wool tubule is coaxial; A branch of driving laser with respect to major axis incident at a certain angle successively focuses on and excites the high order harmonic component of soft X-ray scope (tens electronvolt to a kiloelectron-volt more than) in the working media that ellipsoid reflection cavity bifocal (A, B) is located, the soft X-ray radiation that the mode through the output high order harmonic component obtains to be concerned with; 2) output soft X-ray bundle and drive laser beam are separately with the different angles separated transmission.
Concrete implementation method of the present invention is following: this method is used the ellipsoid reflection cavity and the driving laser that focuses on incident is carried out secondary focusing and excite working media to produce high order harmonic component or soft X-ray radiation; Be specially: the hollow capillary that will be full of the working media that flows is positioned in the ellipsoid reflection cavity; And the major axis of hollow center line capillaceous and ellipsoid reflection cavity is coaxial, and the hollow capillary is through the focus A and the focus B of ellipsoid reflection cavity; Driving laser in ellipsoid reflection cavity one side with respect to major axis from side capillaceous oblique incidence; The incident direction of driving laser only otherwise get final product with axis; The general angle incident that becomes 10～80 degree with major axis; Focus in the working media of the driving laser of incident in ellipsoid reflection cavity focus A place hollow capillary and inspire high order harmonic component for the first time, and after the reflection of ellipsoidal cavity inner surface, focus on and inspire for the second time high order harmonic component in the working media in focus B place hollow capillary; The high order harmonic component that excites is for the first time propagated to focus B place by focus A place along long axis direction; Driving laser arrives used time of focus B and the high order harmonic component that excites for the first time from focus A, and to transfer to the used time of focus B from focus A equal through ellipsoid reflection back; The high order harmonic component at the high order harmonic component focusing B place that excites at focus A place produces the accurate synchronous effect of being excited, and produces relevant soft x-ray emission with the mode of exporting high order harmonic component; Wherein high order harmonic component is along the long axis direction output of ellipsoid reflection cavity; Driving laser is the side capillaceous output from focus B from hollow after the reflection of ellipsoid reflection cavity, transmits with different angular separation with drive laser beam in hollow output high order harmonic component capillaceous or soft X-ray bundle; This method realizes under vacuum environment.
The ellipsoid reflection cavity that the present invention designed is the hollow ellipsoidal cavity along the major axis both ends open, its inner surface be meticulous polishing or plated film driving laser is had the surface of high reflectance; Distance between two focuses of ellipsoid reflection cavity | AB| is determined by the phase velocity of focus A, B two place's high order harmonic components and driving laser coupling and the working media absorption characteristic to high order harmonic component jointly; The high order harmonic component that the length of ellipsoid reflection cavity semi-minor axis is produced by focus A place transfers to the time decision at focus B place, and its transmission time equates with the time interval that driving laser focuses at A, B two places or be equal basically; The length of ellipsoid reflection cavity major semiaxis is determined by the ellipsoid equation; The width d of ellipsoid reflection chamber, condition of incidence (focal length of incidence angle and focus lamp), driving laser spot size and the ellipsoid reflecting surface of looking driving laser requires the reflection of incoming laser beam and decides, and satisfy driving laser is all reflected.
The hollow capillary that the present invention adopted is that tube wall is justified straight tube to the transparent internal diameter of driving laser in any hollow of micron dimension; Be used to transmit the mobile working media of radiation high order harmonic component; Working media flows into from the end that the medium source device links to each other with the hollow capillary, flows out from hollow openend capillaceous (output) again.
Driving laser among the present invention with respect to major axis with the angle of 10～80 degree from the oblique incidence of capillary side, in the working media at ellipsoid reflection cavity focus A place, focus on, excite high order harmonic component the first time; After the reflection of ellipsoidal cavity inner surface, in the working media at another focus of ellipsoid reflection cavity B place, converge (focusing on for the second time) then and excite high order harmonic component.The high order harmonic component at the high order harmonic component focusing B place that excites at focus A place produces the accurate synchronous effect of being excited, and produces relevant soft x-ray emission with the mode of exporting high order harmonic component.
The driving laser that the present invention adopted be can be successively at ellipsoid reflection cavity bifocal A, B place with any kind of working media ionization and the laser of parameter.
The working media that the present invention adopted be can by laser excitation produce soft X-ray scope high order harmonic component and to high order harmonic component absorb lower any kind of gas or etc. prefabricated gas ions.
The present invention has the following advantages:
Adopt high order harmonic component or soft X-ray that this method produced, need not change the capillary pipe structure of micron dimension, internal structure capillaceous and dissipation effect capillaceous are to not influence of driving laser; Driving laser is not propagated along working media, can optical loss not take place because of the absorption of working media; Driving laser has carried out secondary excitation to working media, has increased the transformation efficiency of high order harmonic component, has improved the transformation efficiency of high order harmonic component; Driving laser and soft X-ray have been realized separated transmission, can be directly survey and need not other means of filtering the soft X-ray that produces.Technological realization approach of the present invention is simple, and the transformation efficiency that produces high order harmonic component is high, and energy is high, and research and production are used has very practical effect.
Description of drawings
Fig. 1: utilize the ellipsoid reflection cavity driving laser secondary excitation to be produced the technology path figure of accurate high order harmonic component synchronously or relevant soft X-ray radiation;
Fig. 2: the sectional axonometric drawing of ellipsoid reflection cavity;
Wherein: the 1-vacuum chamber; 2-driving laser inlet; 3-working media inlet; 4-vacuum chamber molecular pump interface; 5-ellipsoid cavity; 6-ellipsoid reflection cavity focus A; 7-ellipsoid reflection cavity focus B; 8-ellipsoid reflection cavity long axis; 9-hollow capillary; The 10-tube connector; The 11-working media; The 12-driving laser; The 13-focus lamp; 14-ellipsoidal cavity reflecting surface; The 15-soft X-ray; The 16-shoot laser; The width of d-ellipsoid cavity
Embodiment
Explain further details below in conjunction with the accompanying drawing specific embodiments of the invention.
In the process that the present invention implements; The ellipsoid reflection cavity of being mentioned in the invention, the hollow capillary of placing along the ellipsoid long axis and the focus lamp of driving laser all are positioned in the vacuum chamber, and the medium source device that is connected with the hollow capillary then is positioned over outside the vacuum chamber.
Method in the present embodiment is used the ellipsoid reflection cavity driving laser that focuses on incident is carried out secondary focusing; As shown in Figure 1; Be specially: in the ellipsoid reflection cavity, place the hollow capillary; The major axis that is full of mobile working media and hollow center line capillaceous and ellipsoid reflection cavity in the hollow capillary is coaxial, and the hollow capillary is through the focus A and the focus B of ellipsoid reflection cavity; The driving laser of a branch of incident is with respect to major axis; From side capillaceous oblique incidence; Focus on and inspire for the first time high order harmonic component in the working media in the hollow capillary at the focus A place of ellipsoid reflection cavity; The high order harmonic component that excites is for the first time propagated to focus B place by focus A place, and the driving laser of incident is reflected in by the ellipsoid reflection cavity behind overfocus A that focusing also inspires high order harmonic component the second time in the working media in the hollow capillary at focus B place; Driving laser arrives used time of focus B and high order harmonic component for the first time from focus A, and to transfer to the used time of focus B from focus A equal through ellipsoid reflection back; The high order harmonic component at the high order harmonic component focusing B place that excites at focus A place produces the accurate synchronous effect of being excited, and produces relevant soft X-ray emission with the mode of exporting high order harmonic component; This method realizes under vacuum environment.
In the implementation process of this method; Driving laser is in bifocal A, twice focusing successively of B place of ellipsoid reflection cavity; And the working media at the bifocal place excites high order harmonic component respectively; And the high order harmonic component at the high order harmonic component focusing B place that excites, focus A place produces the accurate synchronous effect of being excited, and satisfies time that high order harmonic component in focus A place's radiation is transferred to focus B place and driving laser simultaneously and equates or equal basically in the gathering time of 2 of A, B; High order harmonic component that produces or soft X-ray bundle are propagated along the major axis of ellipsoidal cavity; Driving laser then with the angle of separating from the side direction outgoing; Thereby realize output high order harmonic component or soft X-ray and driving laser light beam separated transmission, but direct detection soft X-ray and need not other filtration means like this with different angles.
The ellipsoid reflection cavity that is designed among the present invention is the hollow ellipsoidal cavity along the major axis both ends open, and is as shown in Figure 2, its inner surface be meticulous polishing or plated film driving laser is had the surface of high reflectance; And the size of ellipsoid reflection cavity need design according to the transmission of driving laser and high order harmonic component; Distance between bifocal A, the B | AB| is determined by the phase velocity of focus A, B two place's high order harmonic components and driving laser coupling and the working media absorption characteristic to high order harmonic component jointly; The length of semi-minor axis is determined in time and the transmission speed that A, B bifocal focus on by driving laser; The length of major semiaxis can be got by the ellipsoid Equation for Calculating; Its housing width d will be satisfied driving laser is all reflected by the size decision of driving laser hot spot.
The hollow capillary that present embodiment adopted is that tube wall is justified straight tube to the transparent internal diameter of driving laser in any hollow of micron dimension, is used to transmit the mobile working media of radiation high order harmonic component.In the implementation process of present technique, the hollow capillary links to each other with the medium source device, and working media flows into the hollow capillary from medium source, and the focus of flowing through earlier A flows through focus B again, flows out from hollow openend capillaceous (output) again.
Be the femtosecond laser of 800nm below with driving laser centre wavelength, working media is the specific embodiments that example is explained inventive method for Ar gas, and other technology implementation process of extending with institute's extracting method in the specification similarly.
The vacuum degree of used vacuum chamber is 10 in the present embodiment
-5, the working media of employing is an Ar gas, and the hollow capillary is to be the quartz capillary of 800nm femtosecond laser through centre wavelength, and bore is 200 microns.The hollow capillary links to each other with the Ar source of the gas, and along the long axis fixed placement of ellipsoidal cavity, and guarantee that hollow center line capillaceous overlaps with the long axis of ellipsoid cavity.Gas pressure intensity is clocklike, and to guarantee that the Ar gas that flows in the hollow capillary 9 is continuous, stable air-flow, gas is kept and is about 1.3 * 10
18Atoms/cm
3Constant density, simultaneously vacuum molecular pump 4 guarantees in time will take away from capillary openend effluent air, the air pressure of keeping in the whole capillary keeps balance, stable always, and guarantees the vacuum degree of vacuum chamber.
12 femtosecond laser centre wavelengths are that 800nm, power density are 3 * 10
15Wcm-2, repetition rate are 1KHz.
Among the figure label be 5 be the ellipsoid reflection chamber, its material is a copper material, and its reflecting surface 14 is carried out meticulous polishing, the reflectivity that is reached is 95%.
In the implementation process of this method; Femtosecond laser gets into vacuum chamber from the inlet 2 of vacuum chamber 1, after focusing on through condenser lens 13, becomes 45 incident to converge to 6 ellipsoidal cavity focus A places with major axis; Excite the Ar gas radiation high order harmonic component at A place; The high order harmonic component of A place radiation is promptly propagated forward along hollow capillary 9 like this, and the driving laser 12 then former direction in continuation edge propagates into the reflecting surface 14 of ellipsoidal cavity and is reflected, because the geometrical property of ellipsoid; Can be so that the driving laser that is reflected converges to second focus B place of 7 ellipsoidal cavities just; Just can excite the Ar gas radiation high order harmonic component at focus B place once more, meanwhile the high order harmonic component that produces of focus A place synchronously or basic synchronization reach focus B place, the high order harmonic component of A place generation is excited synchronous effect to B place high order harmonic component generation standard like this; Reach accurate phase velocity coupling, give off more high-octane high order harmonic component or soft X-ray.The energy of the high order harmonic component that produces is higher than the energy of driving laser single-shot Ar gas far away.Because soft X-ray is propagated along centerline direction; And driving laser becomes 45 ° of incidents with central axis; And from output end capillaceous to output; Therefore high order harmonic component or soft X-ray and driving laser so need not to separate soft X-ray and driving laser with filter (filter), can directly carry out spectrographic detection with X-ray ccd detector to the soft X-ray that produces with the different angles separated transmission.
Claims (6)
1. the laser secondary excitation produces the method for accurate high order harmonic component synchronously or x-ray radiation; It is characterized in that: this method is used the ellipsoid reflection cavity and the driving laser that focuses on incident is carried out secondary focusing and excite the working media that flows to produce accurate high order harmonic component or x-ray radiation synchronously; Be specially: the hollow capillary that will be full of the working media that flows is positioned in the ellipsoid reflection cavity; And the major axis of hollow center line capillaceous and ellipsoid reflection cavity is coaxial, and the hollow capillary is through the focus A and the focus B of ellipsoid reflection cavity; Driving laser with respect to major axis from side capillaceous oblique incidence; Focus in the mobile working media in ellipsoid reflection cavity focus A place hollow capillary and inspire high order harmonic component for the first time; For the second time focus on and inspire high order harmonic component in the mobile working media in the ellipsoidal cavity inner surface is reflected in focus B place hollow capillary then, driving laser is from side capillaceous outgoing; The high order harmonic component that excites is for the first time propagated to focus B place by focus A place along long axis direction; Driving laser arrives used time of focus B and the high order harmonic component that excites for the first time from focus A, and to transfer to the used time of focus B from focus A equal through ellipsoid reflection back; The high order harmonic component at the high order harmonic component focusing B place that excites at focus A place produces the accurate synchronous effect of being excited, and produces the X-ray emission to export the accurate mode of high order harmonic component synchronously; At near the hollow output that is positioned at the focus B capillaceous, accurate high order harmonic component synchronously or X-beam transmit with different angular separation with drive laser beam; This method realizes under vacuum environment.
2. laser secondary excitation according to claim 1 produces the method for accurate high order harmonic component synchronously or x-ray radiation; It is characterized in that: described ellipsoid reflection cavity is the hollow ellipsoidal cavity along the major axis both ends open, and its inner surface is the surface that can reflect driving laser of meticulous polishing or plated film.
3. laser secondary excitation according to claim 1 produces the method for accurate high order harmonic component synchronously or x-ray radiation, it is characterized in that: described ellipsoid reflection cavity, its housing width d will satisfy driving laser is all reflected.
4. laser secondary excitation according to claim 1 produces the method for certainly synchronous high order harmonic component or x-ray radiation, it is characterized in that: described hollow capillary is that tube wall is transparent to driving laser, internal diameter is justified straight tube in any hollow of micron dimension.
5. laser secondary excitation according to claim 1 produces the method for accurate high order harmonic component synchronously or x-ray radiation, it is characterized in that: driving laser is can successively will flow at ellipsoid reflection cavity bifocal A, B the place any kind of working media ionization and the laser of parameter.
6. laser secondary excitation according to claim 1 produces the method for accurate high order harmonic component synchronously or x-ray radiation, it is characterized in that: mobile working media is to be excited the gas of any kind of that produces soft X-ray scope high order harmonic component or prefabricated plasma by driving laser.
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| CN105044905B (en) * | 2015-08-28 | 2017-08-25 | 北京工业大学 | Planar waveguide device and installation method for producing higher hamonic wave |
| EP3874914A1 (en) * | 2018-11-02 | 2021-09-08 | Technische Universiteit Eindhoven | Tunable source of intense, narrowband, fully coherent, soft x-rays |
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| CN109901182B (en) * | 2019-02-18 | 2021-08-03 | 杭州电子科技大学 | Laser ranging device and method based on second-order intensity correlation function |
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| JP2000098100A (en) * | 1998-09-21 | 2000-04-07 | Nikon Corp | Soft x-ray parallel flux forming device |
| JP2008185891A (en) * | 2007-01-31 | 2008-08-14 | Matsushita Electric Ind Co Ltd | Wavelength conversion laser beam source and laser wavelength conversion method |
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| CN1918667A (en) * | 2004-02-12 | 2007-02-21 | 独立行政法人科学技术振兴机构 | Soft x-ray processing device and soft x-ray processing method |
| US7664147B2 (en) * | 2006-12-15 | 2010-02-16 | Rugents of the University of Colorado a body corporate | Phase matching of high order harmonic generation using dynamic phase modulation caused by a non-collinear modulation pulse |
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