CN201821563U - Device for generating quasi-synchronous higher harmonics or X-ray radiation through multiple laser excitations - Google Patents
Device for generating quasi-synchronous higher harmonics or X-ray radiation through multiple laser excitations Download PDFInfo
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- CN201821563U CN201821563U CN2010202865605U CN201020286560U CN201821563U CN 201821563 U CN201821563 U CN 201821563U CN 2010202865605 U CN2010202865605 U CN 2010202865605U CN 201020286560 U CN201020286560 U CN 201020286560U CN 201821563 U CN201821563 U CN 201821563U
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Abstract
The utility model relates to a device for generating higher harmonics or soft X-rays, in particular to a device for generating quasi-synchronous higher harmonics or X-ray radiation through multiple laser excitations. The device comprises a hollow-core capillary tube, a media source device full of flowing working media and ellipsoidal reflection cavities, wherein the hollow-core capillary tube is connected with the media source device; the central line of the hollow-core capillary tube coincides with long axes of the ellipsoidal reflection cavities and the hollow-core capillary tube passes through each focal point of the ellipsoidal reflection cavities; each ellipsoidal reflection cavities is a hollow ellipsoidal cavity with openings at two ends; the drive laser obliquely enters from the side of the hollow-core capillary tube relative to the long shafts, is reflected to other focal points by ellipsoidal surfaces and focuses after focusing at the first focal point and then is output; the laser excites higher harmonics at each focal point where the laser focuses; and the device works in the vacuum environment. The device has the following advantages: the implementation approach of the technique is simple; the conversion efficiency and energy of the generated higher harmonics are high; and the device has high application value.
Description
Technical field
The utility model relates to a kind of device that produces accurate high order harmonic component synchronously or relevant soft X-ray radiation that repeatedly excites by laser, the relevant soft X-ray radiation that is produced is more than tens electronvolt to a kiloelectron-volt, and the relevant soft X-ray bundle (source) of this scope can be applied to the analysis of engineering industry, biomedicine and material science such as micro-nano photoetching or micro-nano processing and the numerous areas and the industries such as basic research of diagnosis, the ultrafast dynamics of atom and molecule and high time-resolved spectroscopy.
Background technology
In recent years, drive the high order harmonic component that produces by ultrashort pulse, peculiar properties such as its radiated time is short, frequency band is narrow, wavelength-tunable, be to produce ultrashort pulsewidth and high spatial, the extreme ultraviolet (EUV) of time coherence and the utmost point effective way of soft X-ray, make it in various fields, have a wide range of applications, obtained the scientific worker and paid close attention to greatly.Particularly, the high order harmonic component of utilizing ultrashort, ultra-intense laser pulse and inert gas medium interaction to produce has at present successfully entered " water window " wave band, this makes high order harmonic component in the high time of needs and the microcosmic ultrafast process research field of spatial discrimination great application potential be arranged, at meticulous spectrum analysis, the EUV light clock of high-resolution imaging, material behavior, and produced huge advantage with the science and technology field such as micro-imaging of the corresponding biological cell structure of water window wave section.
Equally, as one of Driving technique of modern civilization, the microelectronic chip technology is ubiquitous for the influence of modern civilization, and this differs and belong to the product of photoetching technique, and wherein the photoetching light source is in conclusive status again.Present photoetching light source is that wavelength is the ultraviolet ray of 157nm, and the wavelength of the required light source of photoetching technique of future generation will foreshorten to 13.5nm (that is extreme ultraviolet EUV wave band).Therefore, the development of EUV coherent source technology then must become the key link of micro-nano photoetching of future generation or chip manufacture technology.Especially succinct, cheap, easy operating of EUV light source and the good characteristics of coherence make it obtaining great development aspect the processing of mesa surface laser, thereby the photoetching technique in semi-conductor industry uses, and its advantage is considerably beyond synchrotron radiation source.
Further, because electronics is 24 * 10 around the orbital period of nuclear motion
-18S, that is, and 24 Ah seconds, in case break through Ah second's boundary, the human interior time-resolved dream of atomic scale that just might realize expands to electronic motion process in the various physical forms with the measuring range of ultrafast process, as the motion state of valence electron in the electric charge transition in the complicated molecule, the molecule etc.And high field high order harmonic component radiation spectrum presents platform area and platform area harmonic wave equifrequent distinct advantages spaced apart regularly, is to be the preferred light source that breaks through Ah second's boundary, and the realization of Ah second's technology will have extremely great and irreplaceable using value.Just as, the Nature comment is described: we are entering the frontier of a supper-fast measurement, and the epoch of Ah second's physics have begun.
In view of the requirement of scientific research field to high order harmonic component and soft X-ray, people are still deepening continuously for the research that utilizes high order harmonic component to produce soft X-ray.The main target of research concentrates on the platform area and the cut-off region of high order harmonic component, research at technical elements mainly concentrates on two: the one, how to improve the single photon energy technically, the raising of single photon energy is entered water window wave section, though it is this has successful experience, not mature enough; The 2nd, how to improve the harmonic wave transformation efficiency, this is to be related to the key whether high order harmonic component has practical value, is the current targets of mainly assaulting fortified position of people.The factor that influences the harmonic wave transformation efficiency mainly be since plasma to the absorption of EUV light, the phase mismatch of laser and harmonic wave, free electron defocus influence etc.Its key point is to solve the phase matched problem of driving laser ionization medium in the high order harmonic component production process, and method commonly used has two kinds in the experiment at present:
(1) adopting femtosecond pulse directly to focus on inert gas sprays intrafascicular, it realizes that the key condition of phase matched depends on the configuration that focuses on configuration and gas spray bundle, but, be the phase matched that obtains to optimize, require the confocal parameter of light beam very short, and gas spray bundle configuration difficulty strengthen, need to explore laser and gas interaction length with the expansion confocal parameter, people have introduced guide technology for this reason increases interaction length.
(2) introduce the capillary ripple guide-tube structure, this structure is the stable equilibrium who is strapped in gas in the capillary and reaches air pressure, and laser excites the interior inert gas of pipe from an end incident capillaceous, produces high order harmonic component.This structure not only can overcome the focusing effect that laser pulse occurs in transmission, and the selectivity of geometry chromatic dispersions can the improvement harmonic wave of waveguide, propagates with free space and compares, and waveguide has quickened the phase velocity of guiding mould.Simultaneously, the waveguide configuration can help to set up extraordinary radially consistent zlasing mode, and the EUV light beam of generation has all characteristics of laser beam, and for example, the total space is relevant etc.Compare with gas jet, another advantage that adopts waveguiding structure is can the extend order of magnitude of laser and gas medium interphase interaction length of waveguide, this means and can obtain the high order harmonic field similar to gas jet with air pressure with lower laser energy.Therefore, the high order harmonic component experiment that solves phase matched at present all is fully to work hard from waveguide, by changing the geometric configuration of waveguide inside, or, realize the phase matched or the accurate phase matched of driving laser and high order harmonic component by the partial function of waveguide configuration.More typical scheme has following several:
1, waveguide for modulation geometry reaches accurate phase matched.As A.Paul﹠amp; Margaret.M is at " Quasi-phase-matched generation of coherent extreme-ultraviolet light " (Nature Vol 421,2003) used modulation waveguide, the diameter of waveguide modulating part periodically is modulated near sinusoidal, like this with laser focusing in gassiness hollow wave guide pipe the time, laser intensity is also periodically modulated, and then can modulate phase shifts between driving laser and the harmonic fields again, experimental result shows, modulation optical fiber has improved at least two than the order of the high order harmonic component that hollow wave guide obtains, and brightness has more obvious raising.Similar approach, and for example Ivan P.Christov is in " Dispersion-controlled hollow core fiber for phase matched harmonicgeneration " (9November 1998/Vol.3, No.10/OPTICS EXPRESS 360) used waveguide inner modulation structure.Experimental technique with waveguide acquisition high order harmonic component is a lot of now, but, further optimize the modulating wave guide structure and obtain accurate phase matched and need more complicated method, the optical loss of driving laser, make from problems such as phase modulated, mode beatings that to optimize modulation period more difficult.Finally, be shorter than waveguide diameter modulation period, cause the laser intensity modulation to reduce fast, the coherence length short with accurate phase techniques compensating pole becomes challenge.
2, introduce reverse laser pulse and come modulated laser intensity.These class methods have Xiaoshi Zhang, " Quasi-phase-matching and quantum-path control of high-harmonicgeneration using counter propagating light " (Nature-Phys, 3,270,2007) introduce the backpropagation pulse train, and U.S. Pat 7664147B2 " Phase matching of highorder harmonic generation using dynamic phase modulation caused by anon-collinear modulation pulse " introduces weak reverse quasi-continuous propagation field etc., the purpose of introducing weak backpropagation light is to overcome the difficulty that the modulation waveguide is further periodically optimized, allow the backpropagation field that lasting amplitude and phase place that driving laser causes are modulated, the special area that is focusing on, adopt to disturb light beam to go the quantum phase of the short-wavelength light that disturbance produces, constrain and depart from the emission in phase place zone, reach accurate phase matched, emission to high order harmonic component produces humidification, and the brightness of high order harmonic component is improved significantly.
Above-mentioned invention of mentioning and technology have certain contribution improving in the harmonic wave brightness, but plasma is to the absorption of EUV light or soft X-ray, and the phase matched between harmonic fields and the driving laser still needs to be optimized, and the transformation efficiency of harmonic wave is not high all the time; And the harmonic wave exit direction is identical with driving laser, need filter the EUV light that driving laser just can detect generation with filter, and this has increased cost and difficulty to experiment.Therefore, break through the bottleneck of harmonic wave transformation efficiency, reduce the difficulty that harmonic wave produces, will produce huge meaning and value scientific research and practical application.
The utility model content
The utility model aims to provide a kind of device that produces accurate high order harmonic component synchronously or relevant soft x-ray radiation that repeatedly excites by laser, this device adopts the ellipsoid reflection cavity that the laser beam that focuses on incident is repeatedly focused on, implement the correlation radiation of high order harmonic component, realized the relevant enhancing output of the accurate phase velocity coupling of driving laser and radiant light; Simultaneously, adopt the side direction type of drive of laser beam wide-angle incident, realization output high order harmonic component or soft X ray beam are transmitted with different angular separation with drive laser beam.
Content of the present utility model comprises: use single ellipsoid reflection cavity the driving laser that focuses on incident is carried out the method for focusing second time; The method that driving laser carries out secondary excitation to the flowing gas that is full of in the straight hollow capillary or plasma (being referred to as working media); Ellipsoid reflection cavity focal length and semi-minor axis length produce phase difference to driving laser in the time interval of twice focusing, thereby obtain the accurate method of coherent radiation synchronously of high order harmonic component or grenz ray.It is characterized in that: the major axis that 1) is full of mobile working media and center line capillaceous and ellipsoid reflection cavity in the hollow broad wool tubule is coaxial, a branch of driving laser with respect to major axis incident at a certain angle successively focuses on and excites the high order harmonic component of grenz ray scope (tens electronvolt to a kiloelectron-volt more than) in the working media that ellipsoid reflection cavity bifocal (A, B) is located, the soft x-ray radiation that the mode by the output high order harmonic component obtains to be concerned with; 2) output soft X ray beam and drive laser beam are separately with the different angles separated transmission.
The utility model has been taked following technical scheme: comprise the hollow capillary, be full of the medium source device and the ellipsoid reflection cavity of the working media that flows; Wherein: the ellipsoid reflection cavity is the hollow ellipsoidal cavity along the major axis both ends open, the hollow capillary links to each other with the medium source device, each focus that hollow center line capillaceous overlaps with the major axis of ellipsoid reflection cavity and the hollow capillary passes through the ellipsoid reflection cavity, driving laser is gone into respect to major axis from hollow side capillaceous oblique incidence in ellipsoidal cavity one side, after focusing on, focus A place all focuses on output then at other focus places of ellipsoidal cavity through ellipsoid reflection back; Laser all excites high order harmonic component in the working media at each focusing focus place; This device is worked under vacuum environment.
Described ellipsoid reflection cavity is one or two and plural serial connection, serial connection successively for a plurality of ellipsoid reflection cavities, adopt the focus of adjacent ellipsoid reflection cavity to coincide, promptly the right focus B of the left focus A of second ellipsoid reflection cavity and first ellipsoid reflection cavity overlaps, the left focus A of the right focus B of second ellipsoid reflection cavity and the 3rd ellipsoid reflection cavity overlaps, by that analogy.After the laser line focus, focus on first focus A of the ellipsoidal cavity of serial connection, after the reflection of ellipsoidal cavity reflecting surface, focus on second focus B place for the second time then, and focus on the 3rd focus C place, D place successively ... laser all excites high order harmonic component at each focus place that focuses on.
The ellipsoid reflection cavity that the utility model adopted is the hollow ellipsoidal cavity along the major axis both ends open, its inner surface be meticulous polishing or plated film driving laser is had the surface of high reflectance; Distance between two focuses of ellipsoid reflection cavity | AB| is determined jointly by the phase velocity of focus A, B two place's high order harmonic components and driving laser coupling and the working media absorption characteristic to high order harmonic component; The high order harmonic component that the length of ellipsoid reflection cavity semi-minor axis is produced by focus A place transfers to the time decision at focus B place, and its transmission time equates with the time interval that driving laser focuses at A, B two places or be equal substantially; The length of ellipsoid reflection cavity major semiaxis is determined by the ellipsoid equation; The width d of ellipsoid reflection chamber decides the reflection requirement of incoming laser beam on condition of incidence (focal length of incidence angle and focus lamp), driving laser spot size and the ellipsoid reflecting surface of driving laser, satisfy driving laser is all reflected.
The hollow capillary that the utility model adopted is that tube wall is justified straight tube to the transparent internal diameter of driving laser in any hollow of micron dimension, be used to transmit the mobile working media of radiation high order harmonic component, working media flows into from the end that the medium source device links to each other with the hollow capillary, flows out from hollow openend capillaceous (output) again.
Driving laser in the utility model with respect to major axis with the angles of 10～80 degree from hollow side capillaceous oblique incidence, in the working media at ellipsoid reflection cavity focus A place, focus on, excite high order harmonic component the first time; After the reflection of ellipsoidal cavity inner surface, in the working media at another focus of ellipsoid reflection cavity B place, converge (focusing on for the second time) then and excite high order harmonic component.Driving laser equated with the transmission time of high order harmonic component at the bifocal place, had realized the relevant enhancing output of the accurate phase velocity coupling of driving laser and radiant light; The high order harmonic component at the high order harmonic component focusing B place that excites at focus A place produces standard and is excited synchronous effect, produces relevant soft x-ray emission in the mode of output high order harmonic component.
The driving laser that the utility model adopted be can be successively at ellipsoid reflection cavity focus place with any kind of working media ionization and the laser of parameter.
The working media that the utility model adopted be can by laser excitation produce grenz ray scope high order harmonic component and to high order harmonic component absorb lower any kind of gas or etc. prefabricated gas ions.
The utlity model has following advantage:
Adopt this device to produce high order harmonic component or soft X-ray, need not change the capillary pipe structure of micron dimension, internal structure capillaceous and dissipation effect capillaceous are to not influence of driving laser; Driving laser is not propagated along working media, can optical loss not take place because of the absorption of working media; Driving laser has carried out repeatedly exciting to working media, has increased the transformation efficiency of high order harmonic component, has improved the transformation efficiency of high order harmonic component; Driving laser and soft X-ray have been realized separated transmission, can be directly survey and need not other means of filtering the soft X-ray that produces.Technology of the present utility model realizes that approach is simple, produces the transformation efficiency height of high order harmonic component, and the energy height has very practical effect to the research and production application.
Description of drawings
Fig. 1: utilize the ellipsoid reflection cavity driving laser secondary excitation to be produced the technology path figure of accurate high order harmonic component synchronously or relevant soft x-ray radiation
Fig. 2: the sectional axonometric drawing of ellipsoid reflection cavity
Wherein: the 1-vacuum chamber; 2-driving laser inlet; 3-working media inlet; 4-vacuum chamber molecular pump interface; 5-ellipsoid cavity; 6-ellipsoid reflection cavity focus A; 7-ellipsoid reflection cavity focus B; 8-ellipsoid reflection cavity long axis; 9-hollow capillary; The 10-tube connector; The 11-working media; The 12-driving laser; The 13-focus lamp; 14-ellipsoidal cavity reflecting surface; The 15-soft X-ray; The 16-shoot laser; The width of d-ellipsoid cavity
Embodiment
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further details.
In the process that the utility model is implemented, the ellipsoid reflection cavity of being mentioned in the utility model, the hollow capillary of placing along the ellipsoid long axis and the focus lamp of driving laser all are positioned in the vacuum chamber, and the medium source device that is connected with the hollow capillary then is positioned over outside the vacuum chamber.
Present embodiment comprises the hollow capillary, is full of the medium source device and the ellipsoid reflection cavity of the working media that flows; Wherein: the hollow capillary links to each other with the medium source device, hollow center line capillaceous overlap with the major axis of ellipsoid reflection cavity and the hollow capillary through focus A, the focus B place of ellipsoid reflection cavity; The ellipsoid reflection cavity is the hollow ellipsoidal cavity of both ends open, the driving laser driving laser ellipsoidal cavity one side with respect to major axis from hollow side capillaceous oblique incidence emission converges in focus B place again and focuses on for the second time through the ellipsoid reflection cavity after focus A focuses on, export then; Laser all excites high order harmonic component at each focus place that focuses on; This device is worked under vacuum environment.
Described ellipsoid reflection cavity is one or two and plural serial connection, for the serial connection successively of a plurality of ellipsoid reflection cavities, adopts the focus of adjacent ellipsoid reflection cavity to coincide.After the laser line focus, focus on first focus A of the ellipsoidal cavity of serial connection, after the reflection of ellipsoidal cavity reflecting surface, focus on second focus B place for the second time then, and focus on the 3rd focus C place, D place successively ... laser all excites high order harmonic component at each focus place that focuses on.
In the implementation process of this method, with single ellipsoidal cavity is example, driving laser is in bifocal A, twice focusing successively of B place of ellipsoid reflection cavity, and the working media at the bifocal place excites high order harmonic component respectively, and the high order harmonic component at the high order harmonic component focusing B place that excites, focus A place produces standard and is excited synchronous effect, satisfies time that high order harmonic component in focus A place's radiation is transferred to focus B place and driving laser simultaneously and equates or equal substantially in the gathering time of 2 of A, B; High order harmonic component that produces or soft X-ray bundle are propagated along the major axis of ellipsoidal cavity, driving laser then with the angle of separating from the side direction outgoing, thereby realize output high order harmonic component or grenz ray and driving laser light beam separated transmission, but direct detection soft X-ray and need not other filtration means like this with different angles.
Designed ellipsoid reflection cavity is the hollow ellipsoidal cavity along the major axis both ends open in the utility model, as shown in Figure 2, its inner surface be meticulous polishing or plated film driving laser is had the surface of high reflectance; And the size of ellipsoid reflection cavity need design according to the transmission of driving laser and high order harmonic component, bifocal A, distance between the B | AB| is by focus A, the phase velocity coupling of B two place's high order harmonic components and driving laser and working media determine jointly to the absorption characteristic of high order harmonic component, the length of semi-minor axis by driving laser at A, time that the B bifocal focuses on and transmission speed decision, the length of major semiaxis can be got by the ellipsoid Equation for Calculating, and the overall dimensions of whole ellipsoid reflection cavity will be adjusted according to the driving laser of incident, the width d of ellipsoid reflection chamber, look the condition of incidence (focal length of incidence angle and focus lamp) of driving laser, driving laser spot size and ellipsoid reflecting surface require the reflection of incoming laser beam and decide, and satisfy driving laser is all reflected.
The hollow capillary that present embodiment adopted is that tube wall is justified straight tube to the transparent internal diameter of driving laser in any hollow of micron dimension for seeing through the hollow capillary, is used to transmit the mobile working media of radiation high order harmonic component.In the implementation process of present technique, the hollow capillary links to each other with the medium source device, and working media flows into the hollow capillary from medium source, and the focus of flowing through earlier A flows through focus B again, flows out from hollow openend capillaceous (output) again.
Adopt single ellipsoid reflection cavity below, with driving laser centre wavelength is the femtosecond laser of 800nm, working media is the specific embodiments that example illustrates the utility model method for Ar gas, and other technology implementation process of extending with institute's extracting method in the specification similarly.
The vacuum degree of used vacuum chamber is 10 in the present embodiment
-5, the working media of employing is an Ar gas, and the hollow capillary is to be the quartz capillary of 800nm femtosecond laser through centre wavelength, and bore is 200 microns.The hollow capillary links to each other with the Ar source of the gas, and along the long axis fixed placement of ellipsoidal cavity, and guarantee that hollow center line capillaceous overlaps with the long axis of ellipsoid cavity.Gas pressure intensity is clocklike, and to guarantee that the Ar gas that flows in the hollow capillary 9 is continuous, stable air-flow, gas is kept and is about 1.3 * 10
18Atoms/cm
3Constant density, simultaneously vacuum molecular pump 4 guarantees in time will take away from capillary openend effluent air, the air pressure of keeping in the whole capillary keeps balance, stable always, and guarantees the vacuum degree of vacuum chamber.
12 femtosecond laser centre wavelengths are that 800nm, power density are 3 * 10
15Wcm-2, repetition rate are 1KHz.
Number in the figure be 5 be the ellipsoid reflection chamber, its material is a copper material, and its reflecting surface 14 is carried out meticulous polishing, the reflectivity that is reached is 95%.
In the implementation process of this method, femtosecond laser enters vacuum chamber from the inlet 2 of vacuum chamber 1, after condenser lens 13 focusing, converge to 6 ellipsoidal cavity focus A places with major axis angle at 45 incident, excite the Ar gas radiation high order harmonic component at A place, the high order harmonic component of A place radiation is promptly propagated forward along hollow capillary 9 like this, driving laser 12 then continuation propagates into the reflecting surface 14 of ellipsoidal cavity and is reflected along former direction, because the geometrical property of ellipsoid, can be so that the driving laser that is reflected converges to second focus B place of 7 ellipsoidal cavities just, just can excite the Ar gas radiation high order harmonic component at focus B place once more, meanwhile the high order harmonic component that produces of focus A place synchronously or basic synchronization reach focus B place, the high order harmonic component that produces of A place is excited synchronous effect to B place high order harmonic component generation standard like this, reach accurate phase velocity coupling, give off more high-octane high order harmonic component or soft X-ray.The energy of the high order harmonic component that produces is higher than the energy of driving laser single-shot Ar gas far away.Because soft X-ray is propagated along centerline direction, and the incident at 45 of driving laser and central axis, at output end capillaceous to output, therefore high order harmonic component or soft X-ray and driving laser are with the different angles separated transmission, so need not to separate soft X-ray and driving laser, can directly carry out spectrographic detection to the soft X-ray that produces with X-ray ccd detector with filter (filter).
Claims (8)
1. laser repeatedly excites the device that produces accurate high order harmonic component synchronously or x-ray radiation, it is characterized in that: comprise the hollow capillary, be full of the medium source device and the ellipsoid reflection cavity of the working media that flows; Wherein: the ellipsoid reflection cavity is the hollow ellipsoidal cavity along the major axis both ends open, the hollow capillary links to each other with the medium source device, hollow center line capillaceous overlap with the major axis of ellipsoid reflection cavity and the hollow capillary through focus A, the focus B place of ellipsoid reflection cavity, driving laser in ellipsoidal cavity one side with respect to major axis from hollow side capillaceous oblique incidence, after focusing on, focus A place, exports then through focusing on focus B place once more after the reflection of ellipsoid reflection cavity inner surface; Laser all excites high order harmonic component in the working media at each focusing focus place; This device is worked under vacuum environment.
2. laser according to claim 1 repeatedly excites the device that produces accurate high order harmonic component synchronously or x-ray radiation, and it is characterized in that: described ellipsoid reflection cavity is one.
3. laser according to claim 1 repeatedly excites the device that produces accurate high order harmonic component synchronously or x-ray radiation, it is characterized in that: described ellipsoid reflection cavity is at least two, each ellipsoid reflection cavity is connected in series successively, the focus of adjacent ellipsoid reflection cavity coincides, and driving laser all focuses at each focus place after the reflection of ellipsoidal cavity inner surface reflecting surface.
4. repeatedly excite the device that produces accurate high order harmonic component synchronously or x-ray radiation according to claim 1 or claim 2 or the described laser of claim 3, it is characterized in that: described ellipsoid reflection cavity is the hollow ellipsoidal cavity along the major axis both ends open, and its inner surface is the surface that can reflect driving laser of meticulous polishing or plated film.
5. repeatedly excite the device that produces accurate high order harmonic component synchronously or x-ray radiation according to claim 1 or claim 2 or the described laser of claim 3, it is characterized in that: described ellipsoid reflection cavity, its housing width d will satisfy driving laser is all reflected.
6. repeatedly excite the device that produces accurate high order harmonic component synchronously or x-ray radiation according to claim 1 or claim 2 or the described laser of claim 3, it is characterized in that: described hollow capillary is that tube wall is transparent to driving laser, internal diameter is at any hollow circle straight tube of micron dimension.
7. repeatedly excite the device that produces accurate high order harmonic component synchronously or x-ray radiation according to claim 1 or claim 2 or the described laser of claim 3, it is characterized in that: described driving laser be can be successively at ellipsoid reflection cavity focus place with any kind of working media ionization and the laser of parameter.
8. repeatedly excite the device that produces accurate high order harmonic component synchronously or x-ray radiation according to claim 1 or claim 2 or the described laser of claim 3, it is characterized in that: described working media is can be driven laser excitation to produce the gas of any kind of of soft X-ray scope high order harmonic component or prefabricated plasma.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103209536A (en) * | 2013-03-22 | 2013-07-17 | 中国科学院上海光学精密机械研究所 | Method for producing soft X ray |
| CN103946694A (en) * | 2011-07-05 | 2014-07-23 | 开普敦大学 | Sample presentation device for radiation-based analytical equipment |
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2010
- 2010-08-10 CN CN2010202865605U patent/CN201821563U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103946694A (en) * | 2011-07-05 | 2014-07-23 | 开普敦大学 | Sample presentation device for radiation-based analytical equipment |
| CN103209536A (en) * | 2013-03-22 | 2013-07-17 | 中国科学院上海光学精密机械研究所 | Method for producing soft X ray |
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