CN105008990B - Light orientation polarisation irradiation unit - Google Patents
Light orientation polarisation irradiation unit Download PDFInfo
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- CN105008990B CN105008990B CN201480009344.7A CN201480009344A CN105008990B CN 105008990 B CN105008990 B CN 105008990B CN 201480009344 A CN201480009344 A CN 201480009344A CN 105008990 B CN105008990 B CN 105008990B
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- light
- light source
- irradiation unit
- guide rod
- scanning direction
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
Abstract
The present invention provides a kind of light orientation polarisation irradiation unit, good and economical space saving carry out the maintenance of light source of the light orientation in polarisation irradiation unit with workability.Light orientation polarisation irradiation unit (1) possesses illumination part (10), it has the optical component comprising light source (2) and polarizer (4), illumination part (10) possesses while light irradiation position (P1) of the light source (2) on optical component is supported, in the light source supporting guide rod (11) supported from optical component to the remote maintenance position in scanning direction (P2), light source supporting guide rod (11) make light source (2) from light irradiation position (P1) be moved to maintenance position (P2) when, the direction of light source (2) is set to change, so that light irradiation side is along scanning direction.
Description
Technical field
The present invention relates to the light orientation polarisation irradiation unit in a kind of processing for light orientation.
Background technology
The alignment films using liquid crystal cell and the oriented layer of the optical film of ultraviolet hardening liquid crystal etc., have make liquid crystal
Handled in recent years using light orientation in the formation of the film and layer (following, to be referred to as alignment films) of the function that molecule is orientated.Enter
During the processing of row light orientation, specific polarized condition (such as straight line is carried out with polarizing axis to the photosensitive resin film as alignment films
Polarized condition) the selected wavelength (such as ultraviolet light) of irradiation light.
Have known to light orientation processing polarisation irradiation unit, to be formed continuously the alignment films with preset width, along orientation
The width configuration rod type light source (long arc lamp) of film, combines the light source and polarizer and irradiates choosing along the width of alignment films
The polarised light of wavelength is selected, the thing scanned on the direction that the width with alignment films is reported to the leadship after accomplishing a task (refers to following patent documents
1)。
Prior art literature
Patent document
Patent document 1：Japanese Patent Publication 2006-133498 publications
The content of the invention
The invention technical task to be solved
This light orientation is to maintain desired photo-irradiation intensity and wavelength characteristic with polarisation irradiation unit, is used in long-time
When, need periodic maintenance light source.When safeguarding light source, the replacing and cleaning of fluorescent tube are carried out, but be configured with because the lower section of fluorescent tube is close
The optical components such as polarizer, so the workability that lamp tube replacement etc. be present is poor, and if dust and bonded block etc. in operation
Fall the anxiety that the optical component for making or damaging high price dirty on optical component then be present.
In order to avoid this state of affairs, further contemplate and whole light source is drawn out to the direction poor with scanning direction and safeguarded
Operation.But maximization with liquid crystal panel etc., the width of alignment films becomes big, to the light that will be provided on its whole width
Source is drawn out on the outside of scanning area in the width direction, then the space equal with the width of alignment films is needed on the outside of scanning area,
Therefore exist it is difficult to ensure that the problem of space inside light orientation treatment facility.
The present invention is to handle this problem as one of problem.That is, it is good and economical space saving carry out light and take with workability
It is the purpose of the present invention to maintenance with the light source in polarisation irradiation unit etc..
For solving the scheme of technical task
To reach this purpose, light orientation polarisation irradiation unit of the invention at least possesses following structure.
A kind of light orientation polarisation irradiation unit, it is extended in the width of the substrate formed with alignment films light
Irradiation portion, the illumination part possess light source and the optical component comprising polarizer, the width at an edge and the substrate
The substrate or the illumination part are scanned in the scanning direction of intersection, irradiate the polarization of specific wavelength on the substrate on one side
Light, it is characterised in that the illumination part possesses support light irradiation position of the light source on the optical component
Meanwhile supporting guide rod, the light source from the optical component to the light source of the remote maintenance position supporting in the scanning direction
Supporting guide rod make the light source from the light irradiation position be moved to the maintenance position when, become the direction of the light source
Change, so that light irradiation side is along the scanning direction.
Invention effect
The present invention can make light source be moved to optical component to the remote maintenance position in scanning direction by possessing this feature
Put, and on the maintenance position direction of light source can be made to change, so that light irradiation side is along scanning direction, therefore can
It is good and economical space saving carry out the maintenance of light source of the light orientation in polarisation irradiation unit with workability.
Brief description of the drawings
Fig. 1 is the integrally-built theory for representing the light orientation involved by one embodiment of the present invention with polarisation irradiation unit
Bright figure.
Fig. 2 is to represent that the light orientation involved by embodiments of the present invention supports guide rod with the light source in polarisation irradiation unit
Concrete structure explanation figure.
Fig. 3 is to represent that the light orientation involved by another embodiment of the present invention is supported with the light source in polarisation irradiation unit
The explanation figure of the concrete structure of guide rod.
Fig. 4 is to represent light orientation involved by embodiments of the present invention with the polarizer used in polarisation irradiation unit
Illustrate to scheme ((a) is top view, and (b) is side view).
Fig. 5 is the curve map for representing to be incident in the relation of the wavelength of the light of polarizer and extinction ratio.
Embodiment
Embodiments of the present invention are illustrated with following refer to the attached drawing side.In the following drawings, scanning direction is shown as Y-direction, erects
Directly upwardly toward Z-direction is shown as, X-direction is shown as with scanning direction and straight up towards orthogonal direction.Fig. 1 is to represent this hair
Light orientation involved by a bright embodiment integrally-built explanation figure of polarisation irradiation unit.
Light orientation polarisation irradiation unit 1 possesses illumination part 10 and Substrate table 20.Illumination part 10 possesses light source 2 and bag
Optical component containing polarizer, these are extended to the width (diagram X-direction) for the substrate W for being formed with alignment films.
Substrate W is placed with Substrate table 20.Illumination part 10 is with Substrate table 20 along scanning direction S-phase to moving.Thus, light orientation is with partially
The scanning direction S scanning substrates W or illumination part 10 that the one side of light irradiation device 1 is reported to the leadship after accomplishing a task along the width with substrate W, on one side
The polarised light of specific wavelength is irradiated on substrate W.
In example shown in Fig. 1, the light source 2 of illumination part 10 possesses long arc lamp 2P.Long arc lamp 2P possesses extended setting
Length on substrate W whole width, the direction reported to the leadship after accomplishing a task with long arc lamp 2P long side direction are set to scanning direction.
Illumination part 10 possesses the light source supporting guide rod 11 of supporting light source 2.Also, illumination part 10 possesses and made as needed
The travel mechanism 12 that light source 2 moves on light source supporting guide rod 11.Travel mechanism 12 can be made up of electric cylinder or motor etc..No
When possessing travel mechanism 12, it is moved through realizing manually on the light source supporting guide rod 11 of light source 2.
Fig. 2 is that (Fig. 2 (a) be top view, and Fig. 2 (b) is shows light for the explanation figure of the concrete structure for representing light source supporting guide rod
The side view of the mobile status in source).Light source supports guide rod 11 by light source 2 in optical component (wavelength selection filter 3 and polarizer
4 etc.) while the light irradiation position P1 on is supported, from optical component to scanning direction (diagram Y-direction) remote maintenance
Position P2 is supported.In example illustrated, light source 2 is movably supported on light source supporting guide rod 11 via directive wheel 13,
The directive wheel 13A of scanning direction rear side is supported on guide rod 11A is moved horizontally, the directive wheel 13B in front of scanning direction
It is supported on inclination movement guide rod 11B.
When typically using scan exposure substrate W, light source 2 is supported on light source supporting guide rod 11 in light irradiation position P1,
It is irradiated onto in this condition from the light that light source 2 projects through wavelength selection filter 3 and polarizer 4 on substrate W.
Relative to light source 2 change etc. when safeguarding, the maintenance position for making light source 2 be moved in light source supporting guide rod 11
P2.Maintenance position P2 is to be set at and selected away from wavelength to the remote position in scanning direction relative to light irradiation position P1
On the position of filter 3 and the grade optical component of polarizer 4.
Make light source 2 from light irradiation position P1 be moved to maintenance position P2 when, existed by the directive wheel 13A at scanning direction rear
Move horizontally and moved on guide rod 11A, and the directive wheel 13B in front of scanning direction is moved on inclination movement guide rod 11B, light source 2
Direction changed in a manner of light irradiation side is along scanning direction.
Fig. 3 is the example for the illumination part for representing that form is different.Fig. 3 (a) is top view, and Fig. 3 (b) is the shifting of display light source
The side view of dynamic state.In the example, the light source 2 of illumination part 10 has been collocated multiple light sources unit 2U.Each light
The long arc lamp 2P1, each long arc lamp 2P1 that source unit 2U possesses short size are configured to make its long side direction towards scanning direction.And
And the light source cell 2U being collocated is configured to multistage (2 sections), the 1st section of light source cell 2U and the 2nd section of light source cell
2U position is configured on the position of displacement.
Support the one supporting multiple light sources unit 2U of light source supporting guide rod 11 of this light source 2.Also, omit the shifting of diagram
Motivation is configured to the structure for making multiple light sources unit 2U integratedly move.
Example shown in Fig. 3 also possesses supports guide rod 11 with Fig. 2 identicals light source, and light source supporting guide rod 11 exists light source 2
While light irradiation position P1 supportings on optical component (wavelength selection filter 3 and polarizer 4 etc.), from optical component
The maintenance position P2 remote to scanning direction (diagram Y-direction) is supported.Light source 2 is movably supported on via directive wheel 13
On light source supporting guide rod 11, the directive wheel 13A of scanning direction rear side, which is supported in, to be moved horizontally on guide rod 11A, scanning direction
The directive wheel 13B in front is supported on inclination movement guide rod 11B.
Also, make light source 2 from light irradiation position P1 be moved to maintenance position P2 when, pass through the directive wheel at scanning direction rear
13A is moved on guide rod 11A is moved horizontally, and the directive wheel 13B in front of scanning direction is moved on inclination movement guide rod 11B,
The direction of light source 2 changes, so that light irradiation side is along scanning direction.
Light orientation polarisation irradiation unit 1 as described above, involved according to the embodiment of the present invention, due to safeguarding
Shi Guangyuan 2 fluorescent tube etc. turns into towards scanning direction front, so replacing of fluorescent tube etc. can be carried out easily.Also, it is provided with
Maintenance position P2 space space required when being scanning substrate platform 20, so being used as without adding space in addition for setting
The space of light orientation polarisation irradiation unit 1.Thereby, it is possible to economical space saving enter the upkeep operation of line light source 2.
Fig. 4 is to represent light orientation involved by embodiments of the present invention with the polarizer used in polarisation irradiation unit
Illustrate to scheme ((a) is top view, and (b) is side view).When long arc lamp 2P, 2P1 is used in light source 2, polarizer 4 is special using polarisation
Property relative to the incident angle of light the less wire grid polarizer of dependence.The polarizer 4 is in the certain wave relative to irradiation
There is long light the substrate 4a of permeability surface to configure multiple grid 4g side by side.Grid 4g is by length relative to width quite length
Line-shaped conductive body is formed, and these are arranged in parallel at a predetermined interval and is configured to multiple row.Grid 4g interval is according to progress polarisation
Light wavelength and be set properly.
Grid 4g materials'use molybdenum-silicon alloy (MoSix).In the past, the grid material as wire grid polarizer all the time
Material uses aluminium (Al) and titanium oxide (TiOx).Though aluminum grid has polarized light property in wider wavelength region, because of oxidation
And deteriorate, it is therefore desirable to used in the environment of anaerobism.Though titanium oxide grid resistance to oxidation, due to only about 240nm~
300nm wavelength region has polarized light property, therefore the problem of can not being used in more than 300nm wavelength be present.
On the other hand, the polarizer 4 for possessing molybdenum-silicon alloy grid 4g deteriorates due in the absence of caused by oxidation, so
It can be used in clean room environment fully under non-anaerobic environment.Also, due to the wide wavelength region relative to more than 240nm
Light holds polarized light property, therefore various photosensitive material sheets that can be different to wavelength photoreceptor implement light orientation processing.
Fig. 5 is the curve map for representing to be incident in the relation of the wavelength of the light of polarizer and extinction ratio.Titanium oxide (TiOx) is made
Wavelength near 285nm is set to peak value and the characteristic that extinction ratio declines is shown in wavelength more than it by the polarizer of grid,
Become to cannot get polarized light property near 360nm.Therefore, it is impossible to carry out light orientation in the light of irradiation more than 360nm wavelength
It is applicable in the alignment films of processing.The polarizer of aluminium (Al) grid processed extinction ratio in 240~300nm wavelength region is relatively low, because
This is difficult to be applicable in the alignment films that the light for irradiating the glistening light of waves region near it carries out light orientation processing.On the other hand, possess
Molybdenum-silicon alloy grid 4g polarizer 4 obtains the polarizer phase with titanium oxide grid in 240~280nm wavelength region
Deng extinction ratio, obtain the higher extinction ratio of polarizer compared with aluminum grid in more than 280nm wavelength region in addition.
As can be seen here, possess molybdenum-silicon alloy grid 4g polarizer 4 in wide wavelength region compared to titanium oxide He Lv System grids it is inclined
The device that shakes can obtain higher polarized light property.
More than, refer to the attached drawing has been described in detail to embodiments of the present invention, but concrete structure is not limited to these realities
Mode is applied, is also included in the present invention even if in the presence of design alteration of scope of purport for not departing from the present invention etc..On also,
As long as state each embodiment does not have special contradictory and problem in its purpose and structure etc., it becomes possible to is carried out using technology each other
Combination.
Description of reference numerals
1- light orientations polarisation irradiation unit；2- light sources；3- wavelength selection filters；4- polarizers；4a- substrates；4g- grid
Pole；10- illumination parts；11- light sources support guide rod；12- travel mechanisms；20- Substrate tables；W- substrates.
Claims (4)
1. a kind of light orientation polarisation irradiation unit, it is extended in the width of the substrate formed with alignment films illumination
Portion is penetrated, the illumination part possesses light source and the optical component comprising polarizer, and the width at an edge and the substrate is handed over
The substrate or the illumination part are scanned in the scanning direction of fork, irradiate the polarised light of specific wavelength on the substrate on one side,
Characterized in that,
The illumination part possesses while light irradiation position of the light source on the optical component is supported, from institute
State the light source that optical component supports to the remote maintenance position in the scanning direction and support guide rod,
Light source supporting guide rod make the light source from the light irradiation position be moved to the maintenance position when, make the light source
Direction change so that light irradiation side is along the scanning direction.
2. light orientation according to claim 1 polarisation irradiation unit, it is characterised in that
The illumination part possesses the travel mechanism for making the light source be moved to the maintenance position from the light irradiation position.
3. light orientation according to claim 2 polarisation irradiation unit, it is characterised in that
The light source has been collocated multiple light sources unit,
The light source supporting guide rod integrally supports multiple light source cells
The travel mechanism makes multiple light source cells integratedly move.
4. according to light orientation according to any one of claims 1 to 3 polarisation irradiation unit, it is characterised in that
The polarizer is the wire grid polarizer for configuring multiple grids side by side, and the grid is formed by molybdenum-silicon alloy.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-045995 | 2013-03-07 | ||
| JP2013045995 | 2013-03-07 | ||
| JP2014044257A JP6308816B2 (en) | 2013-03-07 | 2014-03-06 | Polarized light irradiation device for photo-alignment |
| JP2014-044257 | 2014-03-06 | ||
| PCT/JP2014/055945 WO2014136934A1 (en) | 2013-03-07 | 2014-03-07 | Polarized-light emission device for optical alignment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105008990A CN105008990A (en) | 2015-10-28 |
| CN105008990B true CN105008990B (en) | 2018-03-30 |
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ID=51491441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480009344.7A Active CN105008990B (en) | 2013-03-07 | 2014-03-07 | Light orientation polarisation irradiation unit |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6308816B2 (en) |
| KR (1) | KR20150127064A (en) |
| CN (1) | CN105008990B (en) |
| WO (1) | WO2014136934A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6428171B2 (en) * | 2013-11-13 | 2018-11-28 | 大日本印刷株式会社 | Polarizer, polarizer substrate and optical alignment apparatus |
| JP6409295B2 (en) * | 2013-12-20 | 2018-10-24 | 大日本印刷株式会社 | Polarizer and optical alignment device |
| KR101919210B1 (en) * | 2014-01-15 | 2018-11-15 | 다이니폰 인사츠 가부시키가이샤 | Polarizer, polarizer manufacturing method, optical alignment device and mounting method of polarizer |
| JP6554768B2 (en) * | 2014-07-08 | 2019-08-07 | 大日本印刷株式会社 | Polarizer, laminated substrate, and photo-alignment apparatus |
| JP6884501B2 (en) * | 2015-08-25 | 2021-06-09 | 大日本印刷株式会社 | Polarizer |
| JP6870391B2 (en) * | 2017-03-06 | 2021-05-12 | ウシオ電機株式会社 | Light irradiation device |
| CN110554536A (en) * | 2018-05-31 | 2019-12-10 | 上海微电子装备（集团）股份有限公司 | Optical alignment equipment and replacement method of lamp tube in optical alignment equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW417166B (en) * | 1998-10-12 | 2001-01-01 | Ushio Electric Inc | Proximity exposure method by oblique irradiation with light |
| CN1769981A (en) * | 2004-11-05 | 2006-05-10 | 优志旺电机株式会社 | Polarization light emitting apparatus for light orientation |
| CN103376598A (en) * | 2012-04-25 | 2013-10-30 | 岩崎电气株式会社 | Polarized ultraviolet irradiation device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6844913B2 (en) * | 2003-04-24 | 2005-01-18 | Eastman Kodak Company | Optical exposure apparatus for forming an alignment layer |
| JP4506412B2 (en) * | 2004-10-28 | 2010-07-21 | ウシオ電機株式会社 | Polarizing element unit and polarized light irradiation device |
| JP2006323060A (en) * | 2005-05-18 | 2006-11-30 | Ushio Inc | Polarized-light irradiating device |
| WO2008022099A2 (en) * | 2006-08-15 | 2008-02-21 | Api Nanofabrication And Research Corp. | Polarizer films and methods of making the same |
| WO2008022097A2 (en) * | 2006-08-15 | 2008-02-21 | Api Nanofabrication And Research Corp. | Methods for forming patterned structures |
-
2014
- 2014-03-06 JP JP2014044257A patent/JP6308816B2/en active Active
- 2014-03-07 WO PCT/JP2014/055945 patent/WO2014136934A1/en active Application Filing
- 2014-03-07 CN CN201480009344.7A patent/CN105008990B/en active Active
- 2014-03-07 KR KR1020157023876A patent/KR20150127064A/en not_active Application Discontinuation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW417166B (en) * | 1998-10-12 | 2001-01-01 | Ushio Electric Inc | Proximity exposure method by oblique irradiation with light |
| CN1769981A (en) * | 2004-11-05 | 2006-05-10 | 优志旺电机株式会社 | Polarization light emitting apparatus for light orientation |
| CN103376598A (en) * | 2012-04-25 | 2013-10-30 | 岩崎电气株式会社 | Polarized ultraviolet irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6308816B2 (en) | 2018-04-11 |
| CN105008990A (en) | 2015-10-28 |
| WO2014136934A1 (en) | 2014-09-12 |
| JP2014197189A (en) | 2014-10-16 |
| KR20150127064A (en) | 2015-11-16 |
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