CN104944160B - Conveying device and transportation system - Google Patents
Conveying device and transportation system Download PDFInfo
- Publication number
- CN104944160B CN104944160B CN201510143784.8A CN201510143784A CN104944160B CN 104944160 B CN104944160 B CN 104944160B CN 201510143784 A CN201510143784 A CN 201510143784A CN 104944160 B CN104944160 B CN 104944160B
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- holding section
- conveying device
- guiding mechanism
- maintaining part
- workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J5/00—Manipulators mounted on wheels or on carriages
- B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Machine Tool Units (AREA)
Abstract
The present invention provides the conveying device for being able to extend the service life.Conveying device includes guiding mechanism (2) and is guided mechanism (2) guidance and carries out mobile moving body (4), moving body (4) includes: the first supporting mass (41A), it has the first holding section (411A) engaged with guiding mechanism (2), and X is movably guided mechanism (2) bearing along a first direction；Second supporting mass (41B) has the second holding section (411B) engaged with guiding mechanism (2), and (X) is movably guided mechanism (2) bearing along a first direction；Maintaining part (45), it is supported by the first supporting mass (41A) and the second supporting mass (41B), for keeping workpiece (89), at the first holding section (411A), load has the first opposing torque (M12) due to the deformation of moving body (4), the first opposing torque (M12) be in the case where workpiece (89) is held in maintaining part (45) due to the load of workpiece (89) the load torque reversed in the torque (M11) of the first holding section (411A).
Description
Technical field
The present invention relates to conveying devices and transportation system.
Background technique
In semiconductors manufacture or liquid crystal display panel manufacturing process, workpiece to processing chamber housing move out move in use can be with straight line
The transfer robot of shape conveying workpieces.In recent years, due to the enlargement of semiconductor wafer and liquid crystal display panel, in order to realize accurately
Move linearly process, proposes the technology using linear guide conveying workpieces (referring for example to patent document 1).It is being set in parallel
Two linear guides (hereinafter, as guide rail) each on, including the multiple blocks that can be moved along guide rail,
Handle is installed via connecting component etc. on block, workpiece is positioned on handle and workpiece is linearly conveyed.
When workpiece is positioned on handle, applying moment around guide rail axis direction due to inclined load on block.
It is thereby possible to cause the early damage of block and its neighbouring component.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2005-125479 bulletin
Summary of the invention
Invention technical problem to be solved
The present invention has been made in view of the above-described circumstances, and project is to provide a kind of conveying dress for being able to extend the service life
It sets.
According to the first aspect of the invention, a kind of conveying device is provided comprising: guiding mechanism；With by above-mentioned vectoring aircraft
Structure guides and carries out mobile moving body, and above-mentioned moving body includes: the first supporting mass, with what is engaged with above-mentioned guiding mechanism
First holding section is movably supported by above-mentioned guiding mechanism along a first direction；Second supporting mass has and above-mentioned guidance
Second holding section of mechanism engaging, is movably supported by above-mentioned guiding mechanism along above-mentioned first direction；And maintaining part, quilt
Above-mentioned first supporting mass and the bearing of above-mentioned second supporting mass, for keeping workpiece, in above-mentioned first holding section because of above-mentioned moving body
Deformation and load has the first opposing torque, above-mentioned first opposing torque is to be held in above-mentioned maintaining part in above-mentioned workpiece
In the case of due to the load of above-mentioned workpiece the reversed torque of torque of the load in above-mentioned first holding section.
It is preferred that: in above-mentioned second holding section, load has the second opposing torque due to the deformation of above-mentioned moving body, and above-mentioned second
Opposing torque be in the case where above-mentioned workpiece is held in above-mentioned maintaining part due to the load of above-mentioned workpiece load in above-mentioned
The reversed torque of the torque of second holding section.
It is preferred that: above-mentioned moving body is kept in the state of flexible deformation.
It is preferred that: above-mentioned guiding mechanism includes the first guide portion extended each along above-mentioned first direction and the second guidance
Portion, above-mentioned first guide portion and above-mentioned second guide portion leave each other in the second direction orthogonal with above-mentioned first direction, above-mentioned
First guide portion engages with above-mentioned first holding section, and above-mentioned second guide portion engages with above-mentioned second holding section.
It is preferred that: the supporting portion of the above-mentioned maintaining part in above-mentioned first supporting mass, the direction gravity direction from gravity direction
When lower section is seen, positioned at the position different from above-mentioned first holding section, the supporting part of the above-mentioned maintaining part in above-mentioned second supporting mass
Position, when being seen below the gravity direction of direction from gravity direction, positioned at the position different from above-mentioned second holding section.
It is preferred that: above-mentioned guiding mechanism includes the first guide portion extended along above-mentioned first direction, above-mentioned first holding section
Engage with above-mentioned first guide portion with above-mentioned second holding section.
It is preferred that: above-mentioned first supporting mass has the first mounting plate and the first spacer, and above-mentioned second supporting mass has second
Mounting plate and the second spacer, above-mentioned first mounting plate are installed in above-mentioned first holding section, in above-mentioned first spacer member supports
When stating maintaining part, and being seen below the gravity direction of direction from gravity direction, installed in the position different from above-mentioned first holding section
In on above-mentioned first mounting plate, above-mentioned second mounting plate is installed in above-mentioned second holding section, in above-mentioned second spacer member supports
When stating maintaining part, and being seen below the gravity direction of direction from gravity direction, installed in the position different from above-mentioned second holding section
In on above-mentioned second mounting plate.
It is preferred that: further include: first bearing, between above-mentioned first holding section and above-mentioned guiding mechanism；With the second axis
It holds, between above-mentioned second holding section and above-mentioned guiding mechanism.
It is preferred that: further include the matrix for supporting above-mentioned guiding mechanism, between above-mentioned first holding section and above-mentioned maintaining part or
The first inclined surface is formed between above-mentioned guiding mechanism and above-mentioned matrix, between above-mentioned second holding section and above-mentioned maintaining part or
The second inclined surface is formed between above-mentioned guiding mechanism and above-mentioned matrix.
It is preferred that: further include the matrix for supporting above-mentioned guiding mechanism, between above-mentioned first holding section and above-mentioned maintaining part or
First step portion is formed between above-mentioned guiding mechanism and above-mentioned matrix, between above-mentioned second holding section and above-mentioned maintaining part or
Second step portion is formed between above-mentioned guiding mechanism and above-mentioned matrix.
It is preferred that: above-mentioned maintaining part has holder and keeps the end device of above-mentioned workpiece, and above-mentioned holder is supported in
The first supporting mass and above-mentioned second supporting mass are stated, above-mentioned end actuator is connect with above-mentioned holder, and along above-mentioned first party
To extension.
According to the second aspect of the invention, a kind of transportation system is provided comprising: it is provided by the first aspect of the present invention
Conveying device；The workpiece accommodating mechanism of the workpiece conveyed with storage by the conveying device.
Other features and advantages of the present invention, it is more clear by the detailed description of following progress referring to attached drawing.
Detailed description of the invention
Fig. 1 is the perspective view of the transportation system of first embodiment of the invention.
Fig. 2 is the perspective view of the conveying device of first embodiment of the invention.
Fig. 3 is the cross-sectional view for schematically showing the section of the III-III line along Fig. 2.
Fig. 4 is the cross-sectional view for indicating a process of manufacturing process for conveying device shown in Fig. 3.
Fig. 5 is the cross-sectional view for schematically showing the conveying device of first variation of first embodiment of the invention.
Fig. 6 is the cross-sectional view for indicating a process of manufacturing process for conveying device shown in fig. 5.
Fig. 7 is the cross-sectional view for schematically showing the conveying device of the second variation of first embodiment of the invention.
Fig. 8 is the cross-sectional view for indicating a process of manufacturing process for conveying device shown in Fig. 7.
Fig. 9 is the cross-sectional view for schematically showing the conveying device of the 3rd variation of first embodiment of the invention.
Figure 10 is the manufacturing process for schematically showing the conveying device of the 4th variation of first embodiment of the invention
A process cross-sectional view.
Figure 11 is the cross-sectional view for schematically showing the conveying device of second embodiment of the present invention；
Figure 12 is the cross-sectional view for indicating a process of manufacturing process for conveying device shown in Figure 11.
Description of symbols
1 matrix
100,101,102,103,104,200 conveying device
The first inclined surface 18A
The second inclined surface 18B
2 guiding mechanisms
The first guide portion of 2A
The second guide portion of 2B
4 moving bodys
The first supporting mass of 41A
The first holding section 411A
The first mounting plate of 413A
414A supporting portion
The first spacer of 415A
The first intermediate member of 416A
The first inclined surface 417A, 418A
419A first step portion
The second supporting mass of 41B
The second holding section 411B
The second mounting plate of 413B
414B supporting portion
The second spacer of 415B
The second intermediate member of 416B
The second inclined surface 417B, 418B
419B second step portion
45 maintaining parts
451 holders
453 end effectors
6A first bearing
6B second bearing
7 bodies
800 transportation systems
830 workpiece accommodating mechanisms
831,832 workpiece storages
89 workpiece
M11, M21 torque
The first opposing torque of M12
The second opposing torque of M22
The direction N1, N2, Z1, Z2
X first direction
Y second direction
Specific embodiment
In the following, embodiments of the present invention are concretely demonstrated referring to attached drawing.
(first embodiment)
Using FIG. 1 to FIG. 4, first embodiment of the invention is illustrated.
Fig. 1 is the perspective view of the transportation system of first embodiment of the invention.
Transportation system 800 shown in the figure includes that conveying device 100 (a part of incomplete structure in Fig. 1) and workpiece store machine
Structure 830.
Conveying device 100 is the transfer robot for conveying workpieces 89.Workpiece 89 is plate, for example, being glass panel
Or liquid crystal FPD substrate.
Workpiece accommodating mechanism 830 is the mechanism for storing workpiece 89, in the present embodiment, workpiece accommodating mechanism 830
Including multiple workpiece storages 831,832.
Multiple workpiece storages 831 are the devices respectively for storage workpiece 89.It is multiple (4) in present embodiment
Workpiece storage 831 is chamber.More specifically, multiple workpiece storages 831 are processing chamber housing.Processing chamber housing exists
Processing such as CVD (Chemical Vapor Deposition), etching are carried out to workpiece 89 inside it.Multiple (2) workpiece storages
Device 832 is load locking room respectively.Load locking room is will remain vacuum in processing chamber housing without being to atmosphere opening
Purpose, in order to carry out before the processing of processing chamber housing, the discrepancy of treated workpiece 89 and the vacuum chamber being arranged.
Fig. 2 is the perspective view of the conveying device of first embodiment of the invention.Fig. 3 is schematically shown along Fig. 2
III-III line section cross-sectional view.In addition, in the present embodiment, direction Z1 is towards above gravity direction, direction Z2
Below towards gravity direction.
Fig. 2, conveying device shown in Fig. 3 100 include matrix 1, guiding mechanism 2, moving body 4, first bearing 6A, the second axis
Hold 6B and body 7.
Matrix 1 is supported on body 7.Matrix 1 for example consists of metal.
Guiding mechanism 2 is the mechanism guided for the movement to moving body 4.Guiding mechanism 2 is supported and is fixed on
On matrix 1.In the present embodiment, guiding mechanism 2 has the first guide portion 2A and the second guide portion 2B.First guide portion 2A and
Second guide portion 2B extends respectively along first direction X.First guide portion 2A and the second guide portion 2B are orthogonal with first direction X
Second direction Y leave each other.First guide portion 2A and the second guide portion 2B are supported and are fixed on matrix 1.In this implementation
In mode, the first guide portion 2A and the second guide portion 2B are the guide rail of straight line guidance.
Moving body 4 is moved by being moved it by mobile mechanism's (diagram is omited) relative to body 7.Moving body 4 along
When first direction X is mobile, guided by guiding mechanism 2.Specifically, moving body 4 is by the first guide portion 2A and the second guide portion 2B
It guides and is moved.It, can be relative in addition, moving body 4 is by multiple arms and rotating mechanism (detailed description is omitted) etc.
Body 7 rotates.Moving body 4 plays the role of keeping workpiece 89.
As shown in figure 3, moving body 4 includes the first supporting mass 41A, the second supporting mass 41B and maintaining part 45.
Fig. 2, maintaining part shown in Fig. 3 45 are the components for keeping workpiece 89.Maintaining part 45 is across the first supporting mass 41A
It is supported in the state of the second supporting mass 41B by the first supporting mass 41A and the second supporting mass 41B.It is protected on one side by maintaining part 45
It holds workpiece 89 to move on one side, workpiece 89 is transported to desired position.In the present embodiment, maintaining part 45 passes through mounting work
Part 89 and conveying workpieces 89.Different from present embodiment, maintaining part 45 is not limited to the mode of mounting workpiece 89.For example, keeping
Portion 45 is also possible to by way of adsorbing workpiece 89 from the upper surface of workpiece 89 and keeping workpiece 89.Maintaining part 45 is by rigid body structure
At as this rigid body, such as the metals such as stainless steel, aluminium or iron can be enumerated.
As shown in Fig. 2, in the present embodiment, maintaining part 45 has holder 451 and two end effectors 453.It protects
Gripping member 451 is connect with mobile mechanism (diagram is omited).Each end effector 453 is the narrow boards shape extended along a direction.Each end
Actuator 453 is connect with holder 451.Two end effectors 453 are by loading 89 conveying workpieces 89 of workpiece.
X is movably guided the bearing of mechanism 2 to first supporting mass 41A along a first direction.In the present embodiment, first
X is movably supported on the first guide portion 2A to supporting mass 41A along a first direction.As described above, the first supporting mass 41A branch is accepted insurance
Hold portion 45.The supporting portion 414A of maintaining part 45 in first supporting mass 41A, from gravity direction below the gravity direction of direction
When, it is located at the position different from first holding section 411A (aftermentioned).In the present embodiment, supporting portion 414A is from gravity side
When being seen below upward direction gravity direction, positioned at the outside in the region clipped by the first guide portion 2A and the second guide portion 2B.?
Can be different from present embodiment, supporting portion 414A is located at when seeing below the gravity direction of direction from gravity direction by the
In the region that one guide portion 2A and the second guide portion 2B are clipped.
First supporting mass 41A is made of rigid body.As this rigid body, such as the metals such as stainless steel, aluminium or iron can be enumerated.
Maintaining part 45 is installed on the first supporting mass 41A, the first supporting mass 41A and maintaining part 45 are mutually fixed as a result,.First
Bolt can be used for example in the fixation for holding body 41A and maintaining part 45, or welding also can be used.
First supporting mass 41A has the first holding section 411A, the first mounting plate 413A and the first spacer 415A.
First holding section 411A engages with guiding mechanism 2.In the present embodiment, the guidance of the first holding section 411A and first
Portion 2A engaging.In the state that the first holding section 411A and guiding mechanism 2 engage, by the first holding section 411A along first party
Mobile to X, X is mobile along a first direction for moving body 4.In present embodiment, the first holding section 411A is the block of linear guide.
First mounting plate 413A is installed on the first holding section 411A.In present embodiment, the cardinal extremity of the first mounting plate 413A
The position of side is installed on the first holding section 411A.Installation from first mounting plate 413A to the first holding section 411A for example it is preferable to use
Bolt.In the present embodiment, the front end side of the first mounting plate 413A is located remotely from the direction of the second holding section 411B (aftermentioned).
First spacer 415A supports maintaining part 45, and when seeing below the gravity direction of direction from gravity direction, with the
One holding section 411A different positions is installed on the first mounting plate 413A.Such as in the present embodiment, the first spacer 415A
It is installed on the position of the front end side of the first mounting plate 413A.
X is movably guided the bearing of mechanism 2 to second supporting mass 41B along a first direction.In the present embodiment, second
X is movably supported on the second guide portion 2B to supporting mass 41B along a first direction.As described above, the second supporting mass 41B branch is accepted insurance
Hold portion 45.The supporting portion 414B of maintaining part 45 in second supporting mass 41B, from gravity direction below the gravity direction of direction
When, it is located at the position different from second holding section 411B (aftermentioned).In present embodiment, the direction gravity direction from gravity direction
When lower section is seen, supporting portion 414B is located at by the outside in the region clipped the first guide portion 2A and the second guide portion 2B.It can also be with
Different from present embodiment, when seeing below the gravity direction of direction from gravity direction, supporting portion 414B is located at by the first guidance
In the region that portion 2A and the second guide portion 2B are clipped.
Second supporting mass 41B is made of rigid body.As this rigid body, such as the metals such as stainless steel, aluminium or iron can be enumerated.
Maintaining part 45 is installed on the second supporting mass 41B, the second supporting mass 41B and maintaining part 45 are fixed to each other as a result,.Second bearing
Bolt can be used for example in the fixation of body 41B and maintaining part 45, or welding also can be used.
Second supporting mass 41B has the second holding section 411B, the second mounting plate 413B and the second spacer 415B.
Second holding section 411B engages with guiding mechanism 2.In present embodiment, the second holding section 411B and the second guide portion
2B engaging.In the state that the second holding section 411B and guiding mechanism 2 engage, X is moved the second holding section 411B along a first direction
Dynamic, X is mobile along a first direction for moving body 4 as a result,.In the present embodiment, the second holding section 411B is the gear of linear guide
Block.
Second mounting plate 413B is installed on the second holding section 411B.In present embodiment, the cardinal extremity of the second mounting plate 413B
The position of side is installed on the second holding section 411B.Second mounting plate 413B can be used for example to the installation of the second holding section 411B
Bolt.In present embodiment, the front end side of the second mounting plate 413B is located remotely from the direction of the first holding section 411A.
Second spacer 415B supports maintaining part 45, and when seeing below the gravity direction of direction from gravity direction, with the
Two holding section 411B different positions is installed on the second mounting plate 413B.Such as in the present embodiment, the second spacer 415B
It is installed on the position of the front end side of the second mounting plate 413B.
In conveying device 100, the first inclined surface 418A is formed between the first holding section 411A and maintaining part 45.This reality
It applies in mode, is formed with the first inclined surface 418A on the first spacer 415A of the first supporting mass 41A.Fig. 4 is to indicate Fig. 3 institute
The cross-sectional view of one process of the manufacturing process for the conveying device 100 shown.As shown in the drawing, maintaining part 45 is fixed in first
Before holding body 41A, top surface inclination of the first inclined surface 418A relative to the first holding section 411A.In present embodiment, with first
The mode of the opposite side of the side of the second holding section 411B of direction N1 direction arrangement of the normal L direction of inclined surface 418A, first
Top surface inclination of the inclined surface 418A relative to the first holding section 411A.First inclined surface 418A is relative to the first holding section 411A's
The gradient of first inclined surface 418A of top surface is, for example, 1/100~5/100.
Equally, in conveying device 100, the second inclined surface is formed between the second holding section 411B and maintaining part 45
411B.In present embodiment, the second inclined surface 418B is formed on the second spacer 415B of the second supporting mass 41B.Such as Fig. 4
Shown, maintaining part 45 is fixed in front of the second supporting mass 41B, top of the second inclined surface 418B relative to the second holding section 411B
Face inclination.In present embodiment, with the first holding section 411A of direction N2 direction arrangement of the normal direction of the second inclined surface 418B
Side opposite side mode, top surface inclination of the second inclined surface 418B relative to the second holding section 411B.Second inclined surface
418B is, for example, 1/100~5/100 relative to the gradient of the top surface of the second holding section 411B.
As shown in figure 3, when using conveying device 100, in the case where workpiece 89 is held in maintaining part 45, first
Holding section 411A load moment M11 due to the load of workpiece 89.Equally, it when using conveying device 100, is kept in workpiece 89
In the case where maintaining part 45, in the second holding section 411B due to the load of workpiece 89 load moment M21.
Moreover, in conveying device 100, by forming the first inclined surface 418A and the second inclined surface 418B, moving body 4
(the first supporting mass 41A, the second supporting mass 41B, maintaining part 45) be maintained at flexible deformation state (Fig. 3 exaggerate indicate moving body 4
The state of flexible deformation).For example, maintaining part 45 is maintained at the elasticity in a manner of to going above gravity direction (minutely) curved
The state of deformation.In the first holding section 411A, load has the first opposing torque M12 due to the deformation of moving body 4 as a result,.First is anti-
It is the torque reversed with above-mentioned torque M11 to torque M12.Equally, it is carried in the second holding section 411B because of the deformation of moving body 4
Lotus has the second opposing torque M22.Second opposing torque M22 is the torque reversed with above-mentioned torque M21.
First bearing 6A is between the first holding section 411A and guiding mechanism 2.Specifically, first bearing 6A is between
Between one holding section 411A and the first guide portion 2A.Equally, second bearing 6B between the second holding section 411B and guiding mechanism 2 it
Between.Specifically, second bearing 6B is between the second holding section 411B and the second guide portion 2B.In addition, first bearing 6A and
Second bearing 6B not necessarily includes conveying device 100.
Then, the function and effect of present embodiment are illustrated.
In the present embodiment, in the first holding section 411A, load has the first opposing torque due to the deformation of moving body 4
M12.First opposing torque M12 be in the case where workpiece 89 is held in maintaining part 45 due to the load of workpiece 89 load in
The torque M1l of one holding section 411A reversed torque.According to this structure, the first opposing torque M12 is reversed with torque Ml1
Torque, so the load generated to the torque of the first holding section 411A can be reduced.Thereby, it is possible to prevent the first holding section 411A
Breakage, be able to extend the service life of conveying device l00.
Equally, in the present embodiment, in the second holding section 411B, load has second reversed due to the deformation of moving body 4
Torque M22.Second opposing torque M22 be in the case where workpiece 89 is held in maintaining part 45 due to the load of workpiece 89 load
In the reversed torque of the torque M21 of the second holding section 411B.According to this structure, the second opposing torque M22 is anti-with torque M21
To torque, so can reduce to the torque of the second holding section 411B generate load.Thereby, it is possible to prevent the second holding section
The breakage of 411B is able to extend the service life of conveying device 100.
If reducing the load generated to the torque of the first holding section 411A and the second holding section 411B, can ensure to convey
The load resistance of device 100 can more freely determine the distance of the first guide portion 2A and the second guide portion 2B.As a result, for example,
Such as present embodiment, the more small conveying device of distance of the first guide portion 2A and the second guide portion 2B can be realized
100.Or can also be different from present embodiment, the first guide portion 2A and second is located at using supporting portion 414A, 414B and is drawn
The bigger structure of the distance of the first guide portion 2A and the second guide portion 2B in the region that the portion 2B of leading is clipped.
If reducing the load generated to the torque of the first holding section 411A and the second holding section 411B, can prevent to the
One bearing 6A and second bearing 6B applies the load of part.Thus, it is possible to prevent from peeling off, first bearing 6A and second can be realized
The long lifetime of bearing 6B.
(first variation of first embodiment)
It is illustrated using the first variation of Fig. 5, Fig. 6 to first embodiment of the invention.
In addition, in the following description, attached drawing mark same as described above is added for structure same as described above or similar
Note, suitably omits the description.
Fig. 5 is the cross-sectional view for schematically showing the conveying device of first variation of first embodiment of the invention.
Fig. 6 is the cross-sectional view for indicating a process of manufacturing process for conveying device shown in fig. 5.
In the conveying device 101 of this variation, the first inclined surface 418A is not formed on the first spacer 415A, but
The first inclination is formed on the first intermediate member 416A being set between the first holding section 411A and the first mounting plate 413A
Face 417A.Equally, the second inclined surface 418B is not formed on the second spacer 415B, but is being set to the second holding section 411B
And the second inclined surface 417B is formed on second the second intermediate member 416B between mounting plate 413B.
By forming the first inclined surface 417A and the second inclined surface 417B in conveying device 101, moving body 4 (first
Hold body 41A, the second supporting mass 41B, maintaining part 45) being maintained at the state of flexible deformation, (Fig. 5, which exaggerates, indicates the elasticity of moving body 4
The state of deformation).For example, shape of the maintaining part 45 in the flexible deformation in a manner of to going above gravity direction (minutely) curved
It is kept under state.The first opposing torque M12 is born because of the deformation of moving body 4 on the first holding section 411A as a result,.First is reversed
Torque M12 is the torque reversed with above-mentioned torque Ml1.Equally, it is carried on the second holding section 411B because of the deformation of moving body 4
Lotus has the second opposing torque M22.Second opposing torque M22 is the torque reversed with above-mentioned torque M21.
According to this modification, function and effect same as the function and effect described in conveying device 100 are also functioned to.
(the second variation of first embodiment)
Using Fig. 7, Fig. 8, the second variation of first embodiment of the invention is illustrated.
Fig. 7 is the cross-sectional view for schematically showing the conveying device of the second variation of first embodiment of the invention.
Fig. 8 is the cross-sectional view for indicating a process of manufacturing process for conveying device shown in Fig. 7.
In the conveying device 102 of this variation, the first inclined surface 418A is not formed on the first spacer 415A, but
The first inclined surface 18A is formed on matrix 1.That is, in this case, being formed with the first inclination between guiding mechanism 2 and matrix 1
Face 18A.Equally, the second inclined surface 418B is not formed on the second spacer 415B, but the second inclination is formed on matrix 1
Face 18B.That is, in this case, being formed with the second inclined surface 18B between guiding mechanism 2 and matrix 1.
In conveying device 102, by being formed with the first inclined surface 18A and the second inclined surface 18B, moving body 4 (first
Hold body 41A, the second supporting mass 41B, maintaining part 45) being maintained at the state of flexible deformation, (Fig. 7, which exaggerates, indicates the elasticity of moving body 4
The state of deformation).For example, maintaining part 45 is maintained at the flexible deformation in a manner of to going above gravity direction (minutely) curved
State.As a result, load has the first opposing torque M12 due to the deformation of moving body 4 on the first holding section 411A.First is reversed
Torque M12 is the torque reversed with above-mentioned torque M11.Equally, it is carried on the second holding section 411B because of the deformation of moving body 4
Lotus has the second opposing torque M22.Second opposing torque M22 is the torque reversed with above-mentioned torque M21.
According to this modification, function and effect same as the function and effect described in conveying device 100 are also functioned to.
(the 3rd variation of first embodiment)
Using Fig. 9, the third variation of first embodiment of the invention is illustrated.
Fig. 9 is the cross-sectional view for schematically showing the conveying device of third variation of first embodiment of the invention.
In the conveying device 103 of this variation, the first supporting mass 41A (the first holding section 411A) is relative to the first guidance
The positional relationship of portion 2A and the second supporting mass 41B (the second holding section 411B) relative to the second guide portion 2B positional relationship with
Conveying device 100 is different.According to this structure, it also functions to and is similarly acted on the function and effect described in conveying device 100
Effect.
(the 4th variation of first embodiment)
Using Figure 10, the 4th variation of first embodiment of the invention is illustrated.
Figure 10 is the manufacturing process for showing schematically the conveying device of the 4th variation of first embodiment of the invention
A process cross-sectional view.
In the conveying device 104 of this variation, the first inclined surface 418A is not formed on the first spacer 415A, and
It is that first step portion 419A is formed on the first spacer 415A.Equally, second is not formed in the second spacer 415B to incline
Inclined-plane 418B, but second step portion 419B is formed on the second spacer 415B.In this variation, first step portion 419A
Be formed as a component (the first spacer 415A), but the method for forming stage portion is not limited to this.For example, by using multiple
Component (such as multiple shims) can also form above-mentioned first step portion 419A.It is also the same about second step portion 419B.
In conveying device 104, by being formed with first step portion 419A and second step portion 419B, moving body 4 (first
Supporting mass 41A, the second supporting mass 41B, maintaining part 45) it is maintained at the state of flexible deformation.As a result, in the first holding section 411A
Load has the first opposing torque M12 (not shown in this variation due to the deformation of moving body 4.Referring to Fig. 3).First opposing torque
M12 is the torque reversed with above-mentioned torque M11.Equally, in the second holding section 411B, load has due to the deformation of moving body 4
Two opposing torque M22.Second opposing torque M22 is (not shown in this variation.Referring to Fig. 3) it is reversed with above-mentioned torque M21
Torque.
According to this modification, function and effect same as the function and effect described in conveying device 100 are also functioned to.
In addition, as the variation of conveying device 100, illustrating instead of inclined surface in this variation and stage portion being arranged
Example, but also can replace the inclined surface of conveying device 101 or conveying device 102 or conveying device 103 and stage portion be set.
(second embodiment)
Using Figure 11, Figure 12, second embodiment of the present invention is illustrated.
Figure 11 is the cross-sectional view for schematically showing the conveying device of second embodiment of the present invention.Figure 12 is to indicate figure
The cross-sectional view of one process of the manufacturing process of conveying device shown in 11.
In the conveying device 200 of present embodiment, the first supporting mass 41A and the second supporting mass 41B are relative to same
X is movably supported one guide portion 2A along a first direction, different from above-mentioned conveying device 100 in this respect, Qi Tafang
Face and conveying device 100 are same.
According to this structure, function and effect same as the function and effect described in conveying device 100 are also functioned to.Separately
Outside, two the first supporting mass 41A and the second supporting mass 41B are only represented in Figure 11, but supporting mass also can be set three with
On.In addition, in the present embodiment, also can replace inclined surface and the stage portion illustrated in conveying device 104 be arranged in.Separately
It outside, can also be by the structure of present embodiment and conveying device 100, conveying device 101, conveying device 102 and conveying device 103
Structure combination.In addition, as other variations, can also in certain conveying device combination settings about conveying device 100
And the inclined surface illustrated and the stage portion illustrated about conveying device 104.
The present invention is not limited to above-mentioned embodiments.The specific structure in each portion of the invention can be carried out freely respectively
Kind design alteration.
In the above description, illustrate that guiding mechanism includes two guide portions (in above-mentioned embodiment and variation
Guide rail) example, the present invention is not limited thereto.For example, the guide portion that guiding mechanism also may include three or more (such as is led
Rail).
In order to generate the first opposing torque M12 and the second opposing torque M22, it is equipped with so illustrating in the above description
The example of inclined surface or stage portion, but the present invention is not limited thereto.For example, the height of the first spacer 415A by making Fig. 3
It is different with the height of the second spacer 415B, the first opposing torque M12 and the second opposing torque M22 also can be generated.
It is different from above-mentioned embodiment and variation, inclined surface or stage portion can also be formed in maintaining part 45.
Claims (12)
1. a kind of conveying device characterized by comprising
Guiding mechanism；With
It is guided by the guiding mechanism and carries out mobile moving body,
The moving body includes:
First supporting mass has the first holding section engaged with the guiding mechanism, along a first direction movably by institute
State guiding mechanism bearing；
Second supporting mass has the second holding section engaged with the guiding mechanism, movably along the first direction
It is supported by the guiding mechanism；With
Maintaining part is supported by first supporting mass and second supporting mass, for keeping workpiece,
In the case where the workpiece is held in the maintaining part, carried due to the load of the workpiece in first holding section
Lotus has workpiece load torque,
In the case where the workpiece is not held in the maintaining part, in first holding section because of the deformation of the moving body
And load has first opposing torque reversed with the workpiece load torque.
2. conveying device as described in claim 1, it is characterised in that:
In second holding section, load has the second opposing torque due to the deformation of the moving body, and second opposing torque is
With in the case where the workpiece is held in the maintaining part due to load of the workpiece load in second holding section
The reversed torque of torque.
3. conveying device as claimed in claim 1 or 2, it is characterised in that:
The moving body is kept in the state of flexible deformation.
4. conveying device as claimed in claim 1 or 2, it is characterised in that:
The guiding mechanism includes the first guide portion and the second guide portion extended each along the first direction,
First guide portion and second guide portion leave each other in the second direction orthogonal with the first direction,
First guide portion engages with first holding section, and second guide portion engages with second holding section.
5. conveying device as claimed in claim 1 or 2, it is characterised in that:
The supporting portion of the maintaining part in first supporting mass, when being seen below the gravity direction of direction from gravity direction,
Positioned at the position different from first holding section,
The supporting portion of the maintaining part in second supporting mass, when being seen below the gravity direction of direction from gravity direction,
Positioned at the position different from second holding section.
6. conveying device as claimed in claim 1 or 2, it is characterised in that:
The guiding mechanism includes the first guide portion extended along the first direction,
First holding section and second holding section engage with first guide portion.
7. conveying device as claimed in claim 1 or 2, it is characterised in that:
First supporting mass has the first mounting plate and the first spacer, and second supporting mass has the second mounting plate and the
Two spacers,
First mounting plate is installed in first holding section,
Maintaining part described in first spacer member supports, and when being seen below the gravity direction of direction from gravity direction, with it is described
The different position in first holding section is installed on first mounting plate,
Second mounting plate is installed in second holding section,
Maintaining part described in second spacer member supports, and when being seen below the gravity direction of direction from gravity direction, with it is described
The different position in second holding section is installed on second mounting plate.
8. conveying device as claimed in claim 1 or 2, which is characterized in that further include:
First bearing, between first holding section and the guiding mechanism；With
Second bearing, between second holding section and the guiding mechanism.
9. conveying device as claimed in claim 1 or 2, it is characterised in that:
It further include the matrix for supporting the guiding mechanism,
Between first holding section and the maintaining part or first is formed between the guiding mechanism and described matrix to incline
Inclined-plane,
Between second holding section and the maintaining part or second is formed between the guiding mechanism and described matrix to incline
Inclined-plane.
10. conveying device as claimed in claim 1 or 2, it is characterised in that:
It further include the matrix for supporting the guiding mechanism,
First is formed between first holding section and the maintaining part or between the guiding mechanism and described matrix
Rank portion,
Second is formed between second holding section and the maintaining part or between the guiding mechanism and described matrix
Rank portion.
11. conveying device as claimed in claim 1 or 2, it is characterised in that:
The maintaining part has holder and keeps the end effector of the workpiece,
The holder is supported in first supporting mass and second supporting mass,
The end effector is connect with the holder, and is extended along the first direction.
12. a kind of transportation system characterized by comprising
Conveying device described in any one of claim 1~11；With
Store the workpiece accommodating mechanism of the workpiece conveyed by the conveying device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-071917 | 2014-03-31 | ||
| JP2014071917A JP6276090B2 (en) | 2014-03-31 | 2014-03-31 | Transport device, transport system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104944160A CN104944160A (en) | 2015-09-30 |
| CN104944160B true CN104944160B (en) | 2019-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510143784.8A Active CN104944160B (en) | 2014-03-31 | 2015-03-30 | Conveying device and transportation system |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9550296B2 (en) |
| JP (1) | JP6276090B2 (en) |
| KR (1) | KR102229722B1 (en) |
| CN (1) | CN104944160B (en) |
| TW (1) | TWI628131B (en) |
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|---|---|---|---|---|
| TWI637418B (en) * | 2017-03-31 | 2018-10-01 | 群光電子股份有限公司 | Grabbing device and plug-in method of plug-in machine |
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Also Published As
| Publication number | Publication date |
|---|---|
| US20150273699A1 (en) | 2015-10-01 |
| KR20150113833A (en) | 2015-10-08 |
| JP2015195257A (en) | 2015-11-05 |
| US20170087727A1 (en) | 2017-03-30 |
| TW201604110A (en) | 2016-02-01 |
| US9550296B2 (en) | 2017-01-24 |
| KR102229722B1 (en) | 2021-03-18 |
| TWI628131B (en) | 2018-07-01 |
| CN104944160A (en) | 2015-09-30 |
| US10160118B2 (en) | 2018-12-25 |
| JP6276090B2 (en) | 2018-02-07 |
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