CN104819743A - Laser-sensing-based multi-parameter detection method - Google Patents
Laser-sensing-based multi-parameter detection method Download PDFInfo
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- CN104819743A CN104819743A CN201510220401.2A CN201510220401A CN104819743A CN 104819743 A CN104819743 A CN 104819743A CN 201510220401 A CN201510220401 A CN 201510220401A CN 104819743 A CN104819743 A CN 104819743A
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Abstract
The invention relates to a laser-sensing-based multi-parameter detection method. With the method, a problem that simultaneous detection of concentration and vibration can not be realized in the prior art can be solved. According to the invention, on the basis of laser environment sensing, a spectrum detection principle and a laser speckle effect are combined; and a laser beam irradiates a detected area and a laser speckle passes through an optical imaging system and is detected by a two-dimensional photoelectric sensor. With the out-of-focus imaging technology, the speckle information detected by the two-dimensional imaging photoelectric sensor is processed, thereby realizing measurement of the mechanical vibration characteristic of the detected area. An intensity photoelectric sensor is used for detecting a scattered light signal; and a second-harmonic absorption spectrum analysis algorithm is used to obtain gas concentration information at a path where the light beam passes. The provided multi-parameter detection method has the following characteristics: non-destructive testing and telemetering are realized; detection of object concentration and vibration parameters is realized based on different physical detection principles; the sensitivity and signal to noise ratio are high; shapes and materials of detected objects are diversified; the information content is high; the system is easy to construct; the application range is wide; and the functions are easy to expand and the like.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of multi-parameter detecting method, particularly based on a multi-parameter detecting method for laser perception, be mainly used in the multi-parameter detecting method in the fields such as species analysis, environmental monitoring, resource exploration, food security, biological study, life science, medical, process control, national defense safety, engineering test, assessment of risks, environment sensing, Internet of Things, advanced manufacture.
Background technology
Multiparameter detects numerous areas such as being extensively present in species analysis, environmental monitoring, resource exploration, food security, biological study, life science, medical, process control, national defense safety, engineering test, assessment of risks, environment sensing, Internet of Things, advanced manufacture, play an important role, such as, in species analysis, wish to utilize same detection system to test the concentration of Multiple components, bring up to quantity of information, and reduce costs.Multi-parameter detecting method is there is in first technology, multiple parameter is measured based on same pick-up unit, a kind of Tip-Enhanced Raman Spectroscopy technology of Raman spectrum detection technique is there is in first technology, (see United States Patent (USP), patent name: High contrast tip-enhanced Raman spectroscopy, inventor: Alexei P. Sokolov, Alexander Kisliuk, Disha Mehtant, Ryan D. Hartschuh, Nam-Heui Lee, the patent No.: US7656524B2, the license time: on February 2nd, 2010), although there is certain feature, but it is not enough still to there is essence, 1) Tip-Enhanced Raman Spectroscopy Cleaning Principle is adopted, needle point and tested substance is needed closely mutually to rent, therefore, easy pollution tested substance, and affect the correctness of testing result, 2) although can multiparameter detection be carried out, based on thinking the same physics mechanism of action, detect similar physical parameter, system constructing dirigibility is low, and quantity of information is few, detects while cannot realizing vibration characteristics and gas concentration, 3) there is essential requirement to the material behavior of detected material in itself in this detection method, limits range of application.
Summary of the invention
The object of the invention is to the deficiency for above-mentioned technology, multi-parameter detecting method based on laser perception is provided, there is Non-Destructive Testing, remote measurement can be realized, based on different physical detection principle, realize material concentration and vibration parameters detection, high sensitivity, high s/n ratio, detected material form and material is various, quantity of information is high, system is easy to structure, applied range, function are easy to the features such as expansion.
Basic conception of the present invention is: based on laser environment perception, spectral detection principle and laser speckle effect are combined, laser beam irradiation is to detected region, laser speckle is detected by two-dimension photoelectric sensor through optical imaging system, adopt out of focus imaging technique, detect by process two-dimensional imaging photoelectric sensor the speckle information obtained, realize detected zone machines vibration characteristics and measure; Using degree photoelectric sensor detects scattered light signal, utilizes second harmonic absorption spectroanalysis algorithm, obtains light beam gas concentration information on path.
Multi-parameter detecting method based on laser perception of the present invention, its concrete technical scheme is as follows:
The light path of step (1) LASER Light Source outgoing beam is provided with beam shaping parts, and beam shaping parts regulate light beam parameters to obtain measurement laser beam;
Step (2) laser beam irradiation is to detected region, and detected region exists optical interface, and laser beam is scattered at optical interface place, and laser light scattering effect occurs, and forms laser light scattering light field, presents Laser Transmission speckle;
Step (3) laser light scattering light field is through out of focus optical imaging system, be imaged on two-dimensional imaging photoelectric sensor, out of focus laser speckle image is converted into electric image signal by two-dimensional imaging photoelectric sensor, intensity photoelectric sensor detection laser speckle light signal, realizes the photoelectric conversion of laser speckle light intensity signal;
Step (4) detects by process two-dimensional imaging photoelectric sensor the speckle image information obtained, and realizes detected zone machines vibration characteristics and measures; To the light signal that intensity photoelectric sensor collects, by utilizing second harmonic absorption spectroanalysis algorithm, obtain light beam gas concentration information on path.
Beam reflection parts are provided with between described beam shaping parts and detected region, and in the light path of beam reflection components laser light source outgoing beam, beam reflection parts be arranged at the first imaging len towards optical interface side, cause optical system to be coaxial system.
Described LASER Light Source is the one in laser diode, diode laser, gas laser, solid-state laser, dye laser, semiconductor laser.
Described beam shaping parts are the one in lens light beam orthopaedic component, reflected light beams orthopaedic component, liquid crystal beam orthopaedic component, micro-nano structure beam shaping parts.
Described two-dimensional imaging photoelectric sensor is charge-coupled image sensor or complementary metal oxide semiconductor (CMOS) electric transducer.
Described intensity photoelectric sensor is the one in photodiode, phototriode, snowslide pipe, photomultiplier.
Described out of focus optical imaging system is the one in refractive optical imaging system, reflective optic imaging system, hybrid optical imaging system.
Optical Switching System is provided with between described intensity photoelectric sensor and detected region.
There is sharing of partial optical element in described Optical Switching System and out of focus optical imaging system.
In the present invention, speckle principle, image processing techniques, absorption spectrum treatment technology, multi-information merging technology are mature technology.Inventive point of the present invention is based on laser environment perception, spectral detection principle and laser speckle effect combined, provides a kind of Non-Destructive Testing, realize remote measurement, based on different physical detection principle, realize material concentration and vibration parameters detection, high sensitivity, high s/n ratio, detected material form and material is various, quantity of information is high, system is easy to structure, applied range, function are easy to the features such as expansion the multi-parameter detecting method based on laser perception.
Compared with prior art, advantage of the present invention:
1) adopt Tip-Enhanced Raman Spectroscopy Cleaning Principle in first technology, need needle point and tested substance closely mutually to rent, therefore, easily pollute tested substance, and affect the correctness of testing result.The present invention is based on laser environment perception, spectral detection principle and laser speckle effect are combined, given full play to laser far field examine repair, achieve Non-Destructive Testing and remote measurement;
2) although can multiparameter detection be carried out in first technology, based on thinking the same physics mechanism of action, detect similar physical parameter, system constructing dirigibility is low, and quantity of information is few, detects while cannot realizing vibration characteristics and gas concentration.In the present invention, laser speckle is detected by two-dimension photoelectric sensor through optical imaging system, detects the speckle information obtained, realize mechanical vibration performance and measure by process two-dimensional imaging photoelectric sensor; Using degree photoelectric sensor detects scattered light signal, utilize second harmonic absorption spectroanalysis algorithm, obtain light beam gas concentration information on path, have based on different physical detection principle, realize material concentration and vibration parameters detection, high sensitivity, high s/n ratio, detected material form and material is various, quantity of information high;
3) in itself essential requirement is existed to the material behavior of detected material in first technology, limit range of application.The present invention requires low to detected material material behavior, to the form also not requirement of tested substance, adds the range of application of detection method, and system is easy to structures, applied range, function are easy to expansion.
Accompanying drawing explanation
Fig. 1 is a kind of example structure schematic diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, based on the embodiment of the multi-parameter detecting method of laser perception, spectral detection principle and laser speckle effect are combined, laser beam irradiation is to detected region, laser speckle is detected by two-dimension photoelectric sensor through optical imaging system, adopt out of focus imaging technique, detect by process two-dimensional imaging photoelectric sensor the speckle information obtained, realize detected zone machines vibration characteristics and measure; Using degree photoelectric sensor detects scattered light signal, utilizes second harmonic absorption spectroanalysis algorithm, obtains light beam gas concentration information on path.
The specific implementation step of the present embodiment is:
The light path of step (1) LASER Light Source 1 outgoing beam is provided with beam shaping parts 2, and beam shaping parts 2 regulate light beam parameters to obtain measurement laser beam; In the present embodiment, LASER Light Source 1 is the solid state laser of 532 nano wave lengths, beam shaping parts 2 adopt lens light beam orthopaedic component, and the light path of LASER Light Source 1 outgoing beam is provided with beam reflection parts 3, and beam reflection parts 3 are for changing the direction of propagation of LASER Light Source 1 outgoing beam;
Step (2) laser beam irradiation is to detected region, and detected region exists optical interface 10, and laser beam is scattered at optical interface 10 place, and laser light scattering effect occurs, and forms laser light scattering light field, presents Laser Transmission speckle; In the present embodiment, optical interface 10 is gas pipeline wall in industrial process;
Step (3) scattered optical field is through out of focus optical imaging system, be imaged on two-dimensional imaging photoelectric sensor 9, out of focus laser speckle image is converted into electric image signal by two-dimensional imaging photoelectric sensor 9, intensity photoelectric sensor 7 detection laser speckle light signal, realizes the photoelectric conversion of laser speckle light intensity signal; In the present embodiment, two-dimensional imaging photoelectric sensor 9 adopts complementary metal oxide semiconductor (CMOS) electric transducer, and intensity photoelectric sensor 7 adopts photodiode; Out of focus optical imaging system is refractive optical imaging system, and out of focus optical imaging system is made up of the first imaging len 4 and the second imaging len 8; Be provided with Optical Switching System between intensity photoelectric sensor 7 and detected area optical interface 10, Optical Switching System is made up of the first imaging len 4 and convergent lens 6; First imaging len 4 and the second imaging len 8 are provided with light splitting part 5, and scattered optical field is divided into two-way by light splitting part 5, so Optical Switching System and out of focus optical imaging system exist sharing of partial optical element, shares the first imaging len 4;
Step (4) detects by process two-dimensional imaging photoelectric sensor 9 the speckle image information obtained, and realizes detected zone machines vibration characteristics and measures; Utilize second harmonic absorption spectroanalysis algorithm, obtain light beam gas concentration information on path.In the present embodiment, beam reflection parts 3 be arranged at the first imaging len 4 towards optical interface 10 side, optical system is caused to be coaxial system, speckle image carries out the change in location of the intensity maxima detected in speckle image by two dimensional image correlation technique, the vibration frequency at detecting optical interface 10 and amplitude information; To the light signal that intensity photoelectric sensor 7 collects, by wavelength-modulated second harmonic absorption spectroanalysis algorithm, obtain gas in light path and be detected carbon monoxide gas concentration information in region 11.
The present embodiment successfully achieves the carbon monoxide gas concentration of gas pipeline circuit in industrial process and the harmless remote measurement of mechanical vibration.Non-Destructive Testing of the present invention, realize remote measurement, based on different physical detection principle, realize material concentration and vibration parameters detection, high sensitivity, high s/n ratio, detected material form and material is various, quantity of information is high, system is easy to structure, applied range, function are easy to the features such as expansion.
Above-described embodiment has been described in detail technical scheme of the present invention and beneficial effect; be understood that and the foregoing is only most preferred embodiment of the present invention; be not limited to the present invention; all make in spirit of the present invention any amendment, supplement and equivalent to replace, all should be included within protection scope of the present invention.
Claims (9)
1., based on a multi-parameter detecting method for laser perception, it is characterized in that comprising the following steps:
The light path of step (1) LASER Light Source outgoing beam is provided with beam shaping parts, and beam shaping parts regulate light beam parameters to obtain measurement laser beam;
Step (2) laser beam irradiation is to detected region, and detected region exists optical interface, and laser beam is scattered at optical interface place, and laser light scattering effect occurs, and forms laser light scattering light field, presents Laser Transmission speckle;
Step (3) laser light scattering light field is through out of focus optical imaging system, be imaged on two-dimensional imaging photoelectric sensor, out of focus laser speckle image is converted into electric image signal by two-dimensional imaging photoelectric sensor, intensity photoelectric sensor detection laser speckle light signal, realizes the photoelectric conversion of laser speckle light intensity signal;
Step (4) detects by process two-dimensional imaging photoelectric sensor the speckle image information obtained, and realizes detected zone machines vibration characteristics and measures; To the light signal that intensity photoelectric sensor collects, by utilizing second harmonic absorption spectroanalysis algorithm, obtain light beam gas concentration information on path.
2. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: described LASER Light Source is the one in laser diode, diode laser, gas laser, solid-state laser, dye laser, semiconductor laser.
3. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: described beam shaping parts are the one in lens light beam orthopaedic component, reflected light beams orthopaedic component, liquid crystal beam orthopaedic component, micro-nano structure beam shaping parts.
4. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: described two-dimensional imaging photoelectric sensor is charge-coupled image sensor or complementary metal oxide semiconductor (CMOS) electric transducer.
5. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: described intensity photoelectric sensor is the one in photodiode, phototriode, snowslide pipe, photomultiplier.
6. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: described out of focus optical imaging system is the one in refractive optical imaging system, reflective optic imaging system, hybrid optical imaging system.
7. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, it is characterized in that: between described beam shaping parts and detected region, be provided with beam reflection parts, and in the light path of beam reflection components laser light source outgoing beam, beam reflection parts be arranged at the first imaging len towards optical interface side, cause optical system to be coaxial system.
8. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: be provided with Optical Switching System between described intensity photoelectric sensor and detected region.
9. a kind of multi-parameter detecting method based on laser perception as claimed in claim 1, is characterized in that: described Optical Switching System and out of focus optical imaging system exist sharing of partial optical element.
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| DE2228502C3 (en) * | 1972-05-26 | 1981-05-27 | BBC AG Brown, Boveri & Cie., Baden, Aargau | Arrangement for analyzing the vibration state of vibrating objects |
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Effective date of registration: 20190228 Address after: Room 2205, 7th floor, 111 Fengpu Avenue, Fengxian District, Shanghai 201400 Patentee after: Quantitative Sensing Technology (Shanghai) Co., Ltd. Address before: 310018 2 street, Xiasha Higher Education Park, Hangzhou, Zhejiang Patentee before: Hangzhou Electronic Science and Technology Univ |
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