CN104819743B - Laser-sensing-based multi-parameter detection method - Google Patents
Laser-sensing-based multi-parameter detection method Download PDFInfo
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- CN104819743B CN104819743B CN201510220401.2A CN201510220401A CN104819743B CN 104819743 B CN104819743 B CN 104819743B CN 201510220401 A CN201510220401 A CN 201510220401A CN 104819743 B CN104819743 B CN 104819743B
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Abstract
The invention relates to a laser-sensing-based multi-parameter detection method. With the method, a problem that simultaneous detection of concentration and vibration can not be realized in the prior art can be solved. According to the invention, on the basis of laser environment sensing, a spectrum detection principle and a laser speckle effect are combined; and a laser beam irradiates a detected area and a laser speckle passes through an optical imaging system and is detected by a two-dimensional photoelectric sensor. With the out-of-focus imaging technology, the speckle information detected by the two-dimensional imaging photoelectric sensor is processed, thereby realizing measurement of the mechanical vibration characteristic of the detected area. An intensity photoelectric sensor is used for detecting a scattered light signal; and a second-harmonic absorption spectrum analysis algorithm is used to obtain gas concentration information at a path where the light beam passes. The provided multi-parameter detection method has the following characteristics: non-destructive testing and telemetering are realized; detection of object concentration and vibration parameters is realized based on different physical detection principles; the sensitivity and signal to noise ratio are high; shapes and materials of detected objects are diversified; the information content is high; the system is easy to construct; the application range is wide; and the functions are easy to expand and the like.
Description
Technical field
The invention belongs to optical technical field, is related to a kind of multi-parameter detecting method, it is particularly a kind of to be perceived based on laser
Multi-parameter detecting method, be mainly used in species analysis, environmental monitoring, resource exploration, food security, biological study, life
Science, medical, process control, national defense safety, engineering test, assessment of risks, environment sensing, Internet of Things, advanced manufacture etc.
Multi-parameter detecting method in field.
Background technology
Multi-parameter detection is widely present in species analysis, environmental monitoring, resource exploration, food security, biological study, life
Science, medical, process control, national defense safety, engineering test, assessment of risks, environment sensing, Internet of Things, advanced manufacture etc.
Numerous areas, play an important role, for example, in species analysis, it is desirable to can using same detecting system test it is various into
The concentration divided, brings up to information content, and reduces cost.Formerly there is multi-parameter detecting method in technology, based on same detection
, there is a kind of Tip-Enhanced Raman Spectroscopy technology of Raman spectrum detection technique in first technology in measurement device multiple parameters,（Referring to
United States Patent (USP), patent name：High contrast tip-enhanced Raman spectroscopy, inventor：Alexei
P. Sokolov, Alexander Kisliuk, Disha Mehtant, Ryan D. Hartschuh, Nam-Heui
Lee, the patent No.：US7656524B2, license time：On 2 2nd, 2010）, although the characteristics of having certain, but still
There is essence not enough, 1) using Tip-Enhanced Raman Spectroscopy Cleaning Principle, need needle point to carry out closely phase with tested substance
Mutually rent, therefore, tested substance is easily polluted, and affect the correctness of testing result；2）Although multi-parameter can be carried out
Detection, but similar physical parameter is detected based on the same physics mechanism of action is thought, and system constructing flexibility is low, and information content is few, nothing
Method is realized being detected while vibration characteristics and gas concentration；3）This detection method is deposited in itself to the material behavior of detected material
In essential requirement, range of application is limited.
The content of the invention
Present invention aims to the deficiency of above-mentioned technology, there is provided based on the multi-parameter detecting method that laser is perceived,
With Non-Destructive Testing, can realize remote measurement, based on different physical detection principles, realize material concentration and vibration parameters detection, high
Sensitivity, high s/n ratio, detected material form and material are various, information content is high, system is easy to structure, applied range, function
It is easy to the features such as expanding.
The present invention basic conception be：Perceived based on laser environment, spectral detection principle is mutually tied with laser speckle effect
Close, laser beam is irradiated to detected region, and laser speckle is detected through optical imaging system by two-dimension photoelectric sensor, adopt
Out of focus imaging technique, by processing the speckle information that the detection of two-dimensional imaging photoelectric sensor is obtained, realizes being detected zone machines
Vibration characteristics is measured；Scattered light signal is detected using intensity photoelectric sensor, using second harmonic absorption spectroanalysis algorithm, is obtained
To light beam on path gas concentration information.
The multi-parameter detecting method perceived based on laser of the present invention, its specific technical scheme is as follows：
Beam shaping part is provided with the light path of step (1) LASER Light Source outgoing beam, beam shaping part adjusts light
Beam parameter obtains measurement laser beam；
Step (2) laser beam is irradiated to detected region, and detected region has optical interface, and laser beam is in light
Learn interface to be scattered, laser light scattering effect occurs, form laser light scattering light field, Laser Transmission speckle is presented；
Step (3) laser light scattering light field is imaged on two-dimensional imaging photoelectric sensor through out of focus optical imaging system,
Out of focus laser speckle image is converted into electric image signal by two-dimensional imaging photoelectric sensor, and intensity photoelectric sensor detection laser dissipates
Spot optical signal, realizes the photoelectric conversion of laser speckle light intensity signal；
Step (4) is realized being detected area by processing the speckle image information that the detection of two-dimensional imaging photoelectric sensor is obtained
Domain mechanical vibration performance measurement；The optical signal that intensity photoelectric sensor is collected, by using second harmonic absorption spectrum point
Analysis algorithm, obtains light beam gas concentration information on path.
Light beam reflection part, and light beam reflection part laser are provided between described beam shaping part and detected region
In the light path of light source outgoing beam, light beam reflection part be arranged at the first imaging len towards optical interface side, cause light
System is coaxial system.
Described LASER Light Source is laser diode, diode laser, gas laser, solid-state laser, dyestuff swash
One kind in light device, semiconductor laser.
Described beam shaping part is lens light beam orthopaedic component, reflected light beams orthopaedic component, liquid crystal beam shaping
One kind in part, micro-nano structure beam shaping part.
Described two-dimensional imaging photoelectric sensor is charge-coupled image sensor or complementary metal oxide semiconductors (CMOS) electric transducer.
Described intensity photoelectric sensor is in photodiode, phototriode, snowslide pipe, photomultiplier
Kind.
Described out of focus optical imaging system is refractive optical imaging system, reflective optic imaging system, hybrid
One kind in optical imaging system.
Optical Switching System is provided between described intensity photoelectric sensor and detected region.
There is sharing for partial optical element in described Optical Switching System and out of focus optical imaging system.
Speckle principle, image processing techniques, absorption spectrum treatment technology, multi-information merging technology are maturation in the present invention
Technology.The inventive point of the present invention is to be perceived based on laser environment, and spectral detection principle and laser speckle effect are combined, and is given
Go out a kind of Non-Destructive Testing, realize remote measurement, based on different physical detection principles, realize material concentration and vibration parameters detection, Gao Ling
It is easy that sensitivity, high s/n ratio, detected material form and material are various, information content is high, system is easy to structure, applied range, function
The multi-parameter detecting method perceived based on laser the features such as expanding.
Compared with prior art, advantages of the present invention：
1）Formerly technology adopts Tip-Enhanced Raman Spectroscopy Cleaning Principle, needs needle point to carry out closely with tested substance
Mutually rent, therefore, tested substance is easily polluted, and affect the correctness of testing result.The present invention is based on laser environment
Perceive, spectral detection principle and laser speckle effect are combined, given full play to laser far field detection characteristic, realize lossless
Detection and remote measurement；
2）Although formerly technology can carry out multi-parameter detection, to be detected similar based on the same physics mechanism of action is thought
Physical parameter, system constructing flexibility is low, and information content is few, it is impossible to realize being detected while vibration characteristics and gas concentration.This
Bright middle laser speckle is detected through optical imaging system by two-dimension photoelectric sensor, is visited by processing two-dimensional imaging photoelectric sensor
The speckle information for measuring, realizes that mechanical vibration performance is measured；Scattered light signal is detected using intensity photoelectric sensor, two are utilized
Subharmonic absorption spectroanalysis algorithm, obtains light beam gas concentration information on path, with former based on different physical detections
Reason, realize material concentration and vibration parameters detection, high sensitivity, high s/n ratio, detected material form and material be various, information content
High the features such as；
3）Formerly there is essential requirement in technology to the material behavior of detected material in itself, limit range of application.This
Invention is low to the requirement of detected material material behavior, and the form of tested substance is not also required, increased answering for detection method
It is easy to structure, applied range, function and is easy to expand with scope, and system.
Description of the drawings
Fig. 1 is a kind of example structure schematic diagram of the present invention.
Specific embodiment
With reference to the accompanying drawings and examples the invention will be further described.
As shown in figure 1, the embodiment of the multi-parameter detecting method perceived based on laser, spectral detection principle and laser are dissipated
Spot effect combines, and laser beam is irradiated to detected region, and laser speckle is through optical imaging system by two-dimension photoelectric sensor
Detection, using out of focus imaging technique, by processing the speckle information that the detection of two-dimensional imaging photoelectric sensor is obtained, realizes tested
Survey the measurement of zone machines vibration characteristics；Scattered light signal is detected using intensity photoelectric sensor, using second harmonic absorption spectrum
Parser, obtains light beam gas concentration information on path.
The step that implements of the present embodiment is：
Beam shaping part 2 is provided with the light path of the outgoing beam of step (1) LASER Light Source 1, beam shaping part 2 is adjusted
Section light beam parameters obtain measurement laser beam；In the present embodiment, LASER Light Source 1 for 532 nano wave lengths solid state laser, light
Beam orthopaedic component 2 adopts lens light beam orthopaedic component, and in the light path of the outgoing beam of LASER Light Source 1 light beam reflection part 3 is provided with,
Light beam reflection part 3 is used to change the direction of propagation of the outgoing beam of LASER Light Source 1；
Step (2) laser beam is irradiated to detected region, and detected region has optical interface 10, and laser beam is in light
It is scattered at educational circles face 10, laser light scattering effect occurs, form laser light scattering light field, Laser Transmission speckle is presented；The present embodiment
In, optical interface 10 is gas pipeline wall in industrial process；
Step (3) scattered optical field is imaged on two-dimensional imaging photoelectric sensor 9 through out of focus optical imaging system, two dimension
Out of focus laser speckle image is converted into electric image signal, the detection laser speckle of intensity photoelectric sensor 7 by imaging photosensor 9
Optical signal, realizes the photoelectric conversion of laser speckle light intensity signal；In the present embodiment, two-dimensional imaging photoelectric sensor 9 is using complementary
Metal-oxide semiconductor (MOS) electric transducer, intensity photoelectric sensor 7 adopts photodiode；Out of focus optical imaging system is refraction
Formula optical imaging system, out of focus optical imaging system is made up of the first imaging len 4 and the second imaging len 8；Intensity photoelectric transfer
Optical Switching System is provided between sensor 7 and detected area optical interface 10, Optical Switching System is by the first imaging len 4
Constitute with convergent lens 6；First imaging len 4 and the second imaging len 8 are provided with light splitting part 5, light splitting part 5 will be scattered
Light field is divided into two-way, so Optical Switching System and out of focus optical imaging system have sharing for partial optical element, shares the
One imaging len 4；
Step (4) is realized being detected by processing the speckle image information that the detection of two-dimensional imaging photoelectric sensor 9 is obtained
Zone machines vibration characteristics is measured；Using second harmonic absorption spectroanalysis algorithm, light beam gas concentration on path is obtained
Information.In the present embodiment, light beam reflection part 3 be arranged at the first imaging len 4 towards the side of optical interface 10, cause light
System is coaxial system, and speckle image carries out detecting that the light intensity in speckle image is very big by two dimensional image correlation technique
The change in location of value, detects the vibration frequency and amplitude information of optical interface 10；The light letter that intensity photoelectric sensor 7 is collected
Number, second harmonic absorption spectroanalysis algorithm is modulated by wavelength, obtain gas in light path and be detected the oxidation in region 11
Carbon gas concentration information.
The present embodiment is successfully realized the carbon monoxide gas concentration of gas pipeline circuit and mechanical oscillation in industrial process
Lossless remote measurement.Non-Destructive Testing of the present invention, realize remote measurement, based on different physical detection principles, realize material concentration and vibration ginseng
Number detections, high sensitivity, high s/n ratio, detected material form and material are various, information content is high, system is easy to build, applies model
Enclose wide, function and be easy to the features such as expanding.
Above-described specific embodiment has been described in detail to technical scheme and beneficial effect, Ying Li
Solution is to the foregoing is only presently most preferred embodiment of the invention, is not limited to the present invention, all principle models in the present invention
Interior done any modification, supplement and equivalent etc. are enclosed, be should be included within the scope of the present invention.
Claims (9)
1. it is a kind of based on laser perceive multi-parameter detecting method, it is characterised in that comprise the following steps：
Beam shaping part is provided with the light path of step (1) LASER Light Source outgoing beam, beam shaping part adjusts light beam ginseng
Number obtains measurement laser beam；
Step (2) laser beam is irradiated to detected region, and detected region has optical interface, and laser beam is in optical interface
Place is scattered, and laser light scattering effect occurs, and forms laser light scattering light field, and Laser Transmission speckle is presented；
Step (3) laser light scattering light field is imaged on two-dimensional imaging photoelectric sensor through out of focus optical imaging system, two dimension into
As out of focus laser speckle image is converted into electric image signal, intensity photoelectric sensor detection laser speckle light letter by photoelectric sensor
Number, realize the photoelectric conversion of laser speckle light intensity signal；
Step (4) is realized being detected region machine by processing the speckle image information that the detection of two-dimensional imaging photoelectric sensor is obtained
Tool vibration characteristics is measured；The optical signal collected to intensity photoelectric sensor, calculates by using second harmonic absorption spectroanalysis
Method, obtains light beam gas concentration information on path.
2. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described laser
Light source is the one kind in gas laser, solid-state laser, dye laser, semiconductor laser.
3. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described light beam
Orthopaedic component is that lens light beam orthopaedic component, reflected light beams orthopaedic component, liquid crystal beam orthopaedic component, micro-nano structure light beam are whole
One kind in shape part.
4. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described two dimension
Imaging photosensor is charge-coupled image sensor or complementary metal oxide semiconductors (CMOS) electric transducer.
5. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described intensity
Photoelectric sensor is the one kind in photodiode, phototriode, snowslide pipe, photomultiplier.
6. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described out of focus
Optical imaging system is in refractive optical imaging system, reflective optic imaging system, hybrid optical imaging system
Kind.
7. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described light beam
Light beam reflection part, and the light path of light beam reflection part LASER Light Source outgoing beam are provided between orthopaedic component and detected region
On, light beam reflection part be arranged at the first imaging len towards optical interface side, cause optical system be coaxial system.
8. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 1, it is characterised in that：Described intensity
Optical Switching System is provided between photoelectric sensor and detected region.
9. a kind of multi-parameter detecting method perceived based on laser as claimed in claim 8, it is characterised in that：Described optics
There is sharing for partial optical element in converting system and out of focus optical imaging system.
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| US6084672A (en) * | 1997-09-16 | 2000-07-04 | Polytec Gmbh | Device for optically measuring an object using a laser interferometer |
| US6134006A (en) * | 1998-02-25 | 2000-10-17 | Becthel Bwxt Idaho, Llc | Imaging photorefractive optical vibration measurement method and device |
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| CN102980600A (en) * | 2012-12-03 | 2013-03-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical system based on double-pulse digital speckle transient measurement |
| CN103557886A (en) * | 2013-10-29 | 2014-02-05 | 东南大学 | Method for simultaneously measuring distribution of high-temperature gas two-dimensional transient temperature field and concentration field based on hyper spectrum |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008017119A1 (en) * | 2008-04-02 | 2009-10-08 | Polytec Gmbh | Vibrometer and method for optical measurement of an object |
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2015
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Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2228502C3 (en) * | 1972-05-26 | 1981-05-27 | BBC AG Brown, Boveri & Cie., Baden, Aargau | Arrangement for analyzing the vibration state of vibrating objects |
| JPH07209169A (en) * | 1994-01-21 | 1995-08-11 | Natl Aerospace Lab | Method and device for measuring spatial distribution of concentration and grain size of floating particle group |
| US6084672A (en) * | 1997-09-16 | 2000-07-04 | Polytec Gmbh | Device for optically measuring an object using a laser interferometer |
| US6134006A (en) * | 1998-02-25 | 2000-10-17 | Becthel Bwxt Idaho, Llc | Imaging photorefractive optical vibration measurement method and device |
| CN1477379A (en) * | 2003-07-11 | 2004-02-25 | 天津大学 | Laser vibration detestion method and its equipment |
| CN102565002A (en) * | 2011-04-08 | 2012-07-11 | 曾春雨 | Equipment for measuring gas particles in pipeline by laser speckle and method thereof |
| CN102980600A (en) * | 2012-12-03 | 2013-03-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical system based on double-pulse digital speckle transient measurement |
| CN103557886A (en) * | 2013-10-29 | 2014-02-05 | 东南大学 | Method for simultaneously measuring distribution of high-temperature gas two-dimensional transient temperature field and concentration field based on hyper spectrum |
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Effective date of registration: 20190228 Address after: Room 2205, 7th floor, 111 Fengpu Avenue, Fengxian District, Shanghai 201400 Patentee after: Quantitative Sensing Technology (Shanghai) Co., Ltd. Address before: 310018 2 street, Xiasha Higher Education Park, Hangzhou, Zhejiang Patentee before: Hangzhou Electronic Science and Technology Univ |