CN103837520B - Optic travelling wave cavity enhanced laser raman gas concentration detection device - Google Patents
Optic travelling wave cavity enhanced laser raman gas concentration detection device Download PDFInfo
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- CN103837520B CN103837520B CN201410074484.4A CN201410074484A CN103837520B CN 103837520 B CN103837520 B CN 103837520B CN 201410074484 A CN201410074484 A CN 201410074484A CN 103837520 B CN103837520 B CN 103837520B
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Abstract
The invention relates to an optic travelling wave cavity enhanced laser raman gas concentration detection device. The device combines a cavity enhanced technology with a laser raman detection technology, and utilizes an optic traveling wave passive cavity; a single curved-surface annular internal reflector forms a high-fineness cavity, and a laser outgoing beam oblique incidence cavity enhanced principle is utilized, so that laser beam is reflected in the cavity for many times and is propagated in a travelling wave manner, the laser beam passes through gas to be detected in an area to generate raman scattering, raman scattered light is collected by a photoelectric detection component after being gathered with the laser beam through a filter plate, and the photoelectric detection component detects the raman frequency shift and the corresponding raman peak intensity of the characteristics of the gas to be detected to obtain the concentration of the gas to be detected. The detection device disclosed by the invention has the characteristics of simple structure, low requirements on mechanical location, good stability and high reliability; meanwhile, the anti-jamming performance of the detection device is improved; the detection device can measure on line in real time to increase the dynamic information of the process and can detect the concentration of nearly all gas, except inert gas; the sensitivity is high; the response speed is high and the response time is short.
Description
Technical field
The present invention relates to a kind of gas concentration detection, more particularly to a kind of optical traveling-wave chamber strengthens LR laser raman gas concentration
Detection means.
Background technology
Trace gas detection demand is widely present in environmental analysis, resource exploration, food security, life science, medical science doctor
Many fields such as treatment, industrial stokehold, national defense safety, and these fields also get over to the sensitivity requirement of Trace gas detection
Come higher.High-fineness cavity absorption spectroscopy techniques due to high with detection sensitivity, more for analyzing trace gas concentration and group
Point, become one of trace materials e measurement technology development trend, obtain extensive concern.
Formerly in technology, there is a kind of high-fineness cavity spectroscopic analysis system（Referring to United States Patent (USP) " Cavity ring down
Arrangement for non-cavity filing samples ", the patent No.：US6,452,680 B1）.The high-fineness
Chamber spectroscopic analysis system have the advantages that it is suitable, but, however it remains some shortcomings：1）Using line style fineness cavity configuration, swash
Light forms optical standing wave in high-fineness cavity, causes light distribution uneven, and the reflected light of light beam incidence end hysteroscope is easily right
Laser instrument produces interference；2）Carry out test analysis flowing material；3）When laser beam incidence and outgoing sample cell, it is intended to Brewster
Angle incidence and outgoing, which adds sample cell machinery positioning and require and beam direction control accuracy requirement；4）High-fineness
Chamber has two or more high reflectivity mirror optical elements to constitute, complex structure.
Formerly in technology, the enhanced trace gas detection device in chamber based on Ramam effect is there is also, referring to the U.S.
The laser gas analyzer product of Atmosphere Recovery companies, and Chinese utility model patent, patent name：One
Plant well logging Raman spectrum gas detecting system, the patent No.：ZL201120284529.2, this laser gas analyzer tool
Have the advantages that it is certain, but, there is also some shortcomings：1）Line style fineness cavity configuration is equally adopted, laser is in high-fineness cavity
Interior formation optical standing wave, causes light distribution uneven, and the reflected light of light beam incidence end hysteroscope easily produces interference to laser instrument；
2）, in intra resonant cavity, system complex is which increased due to using active cavity configuration, i.e. laser working medium and gas compartment
Degree, reduces device anti-interference, affects device onsite application adaptability.
The content of the invention
The present invention be directed to the problem that trace gas detection device is present, it is proposed that a kind of optical traveling-wave chamber strengthens laser and draws
Graceful gas concentration detection apparatus, with strong interference immunity during simple for structure, detection, while detecting that multiple gases, sensitivity are high, ringing
The features such as answering fast speed, site environment adaptability, safeguard easy.
The technical scheme is that：A kind of optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus, including sharp
Radiant, curved surface annular internal reflector high-fineness cavity, light beam convergent component, optical filter, Photoelectric Detection part, speculum, light
Electro-detection part, optical filter, light beam convergent component, curved surface annular internal reflector high-fineness cavity, speculum are sequentially coaxially symmetrical
Place, curved surface annular internal reflector high-fineness cavity is the single high accuracy chamber being made up of curved surface annular internal reflector, high-precision
The reflectivity in the inwall reflecting layer in fineness chamber is more than 98%, and curved surface annular internal reflector high-fineness cavity is in the both sides pair of symmetry axis
Title opens the delivery outlet of formed objects, and side delivery outlet side is provided with light beam convergent component, and opposite side delivery outlet is arranged and compares delivery outlet
Big speculum, detected gas are placed in curved surface annular internal reflector high-fineness cavity central area, LASER Light Source emergent light
Beam through curved surface annular internal reflector high-fineness cavity loophole it is oblique be mapped in curved surface annular internal reflector high-fineness cavity,
Traveling wave is formed in curved surface annular internal reflector high-fineness cavity to be transmitted, in curved surface annular internal reflector high-fineness cavity
Detected zone gas are excited by laser beam traveling wave, launch Raman light, and a Raman light part is anti-in curved surface annular
Mirror high-fineness cavity delivery outlet is penetrated, then after light beam convergent component, filter plate assemble light beam, is received by Photoelectric Detection part
Collection, another part is equally sequentially passed through after another delivery outlet speculum reflection of curved surface annular internal reflector high-fineness cavity
Light beam convergent component, optical filter, focus on Photoelectric Detection part, are finally collected by Photoelectric Detection part.
The curved surface annular internal reflector high-fineness cavity is sphere concave surface annular internal reflector high-fineness cavity or tire
Shape loop concave reflector high-fineness cavity.
Loophole on the curved surface annular internal reflector high-fineness cavity is the manhole for not being coated with reflectance coating.
The optical filter is low transmission to LASER Light Source outgoing beam, and transmitance is less than 5%, and optical filter is to being detected gas
Volumetric laser Raman light is high permeability, and transmitance is more than 95%.
The LASER Light Source is gas laser, solid-state laser, dye laser, semiconductor laser, free electron
Laser instrument, QCL, biolaser, light stream body laser one kind therein.
The light beam convergent component is composite sphere lens, non-spherical lens, convergence reflex mirror one kind therein.
The Photoelectric Detection portion be single sensing element photodetector group, monochromator, linear array photoelectric sensors spectrometer wherein
One kind.
Described speculum is plane mirror, concave mirror, return prism one kind therein.
The beneficial effects of the present invention is：Optical traveling-wave chamber of the present invention strengthens LR laser raman gas concentration detection apparatus, dress
Put middle high-fineness cavity to constitute simply, only optical traveling-wave high-fineness cavity is constituted by an optical element, be internally formed light field row
Ripple, light distribution is uniform, and the reflected light of light beam incidence end hysteroscope is difficult to produce laser instrument interference, the overall structure letter of system
It is single, machinery positioning is required low；Chamber is strengthened into technology in combination with LR laser raman detection technique, using passive cavity, by laser instrument
Outside is arranged on, using laser oblique incidence chamber principle is strengthened, it is to avoid conventional infrared chamber strengthens the complex structure of technology, meanwhile,
Also without the labyrinth of active cavity Raman gas analytical equipment, the characteristics of with simple system, good stability, high reliability,
The anti-interference of detection means is improve simultaneously；Device has the multiple feature that Raman gas detection and high-fineness are detected by force,
Can real-time online measure, improve process multidate information, being beneficial to carries out Optimal Control；Multimetering, typically can survey
Tens kinds of gases of examination, can be analyzed to whole process and monitor；The dense of nearly all gas in addition to the inactive gas can be measured
Degree；Sensitivity is high；Fast response time, the response time is fast；Easily use, it is simple to operate, safeguard easy；This device is employed simultaneously
The lateral reflector reflection Raman light beam that dorsad detection direction is propagated, makes this part Raman to be detected by Photoelectric Detection part
Receive, increased the light intensity collected, further increase gas content detection performance.
Description of the drawings
Fig. 1 is that optical traveling-wave chamber of the present invention strengthens LR laser raman gas concentration detection apparatus structural representation；
Fig. 2 is that optical traveling-wave chamber of the present invention strengthens LR laser raman gas concentration detection apparatus mean camber annular internal reflector height
Fineness chamber sectional view inner light beam traveling wave mode of propagation schematic diagram.
Specific embodiment
Chamber is strengthened technology in combination with LR laser raman detection technique, using optical traveling-wave passive cavity, by single by the present invention
Curved surface annular internal reflector constitutes high-fineness cavity, and using laser emitting light beam oblique incidence chamber principle is strengthened, and the light beam for being exists
With the propagation of traveling wave form, Raman scattering, Raman diffused light in tested gas of the laser beam in region to multiple reflections there is in chamber
After filtered is assembled with light beam, collected by Photoelectric Detection part, Photoelectric Detection part detects the Characteristic Raman frequency of tested gas
Move and correspondence Raman peak intensity, obtain tested gas concentration.
As shown in Figure 1 optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus structural representation, and device includes：Swash
Radiant 1, curved surface annular internal reflector high-fineness cavity 2, light beam convergent component 3, optical filter 4, Photoelectric Detection part 5, reflection
Mirror 6.Curved surface annular internal reflector high-fineness cavity 2, light beam convergent component 3, optical filter 4, Photoelectric Detection part 5 and speculum 6
Rotation axes of symmetry coincide, constituent apparatus symmetry axis O1O2；The outgoing beam of LASER Light Source 1 is high through curved surface annular internal reflector
The loophole 201 in fineness chamber 2 is oblique to be mapped in curved surface annular internal reflector high-fineness cavity 2, in curved surface annular internal reflector
Form traveling wave in high-fineness cavity 2 to be transmitted, curved surface annular internal reflector high-fineness cavity 2 is by curved surface annular internal reflector
The single high accuracy chamber for constituting, the reflectivity in the inwall reflecting layer that curved surface annular internal reflector constitutes high-fineness cavity 2 is more than
98%；The gas of detected region 8 in curved surface annular internal reflector high-fineness cavity 2 is excited by laser beam traveling wave, is launched
Raman light；Curved surface annular internal reflector high-fineness cavity 2 symmetrically opens the delivery outlet of formed objects in the both sides of symmetry axis O1O2, and one
Side delivery outlet is disposed with light beam convergent component 3, optical filter 4, Photoelectric Detection part 5；Opposite side delivery outlet is arranged than output
The big speculum 6 of mouth.Optical filter 4 is low transmission to LASER Light Source outgoing beam, and transmitance is less than 5%, 4 pairs of quilts of optical filter
Detection gas laser Raman light is high permeability, and transmitance is more than 95%.
Curved surface annular internal reflector high-fineness cavity is sphere concave surface annular internal reflector high-fineness cavity and wheel the form of the foetus ring
Shape concave mirror high-fineness cavity one kind therein.Loophole on curved surface annular internal reflector high-fineness cavity is not to be coated with
The manhole of reflectance coating.
LASER Light Source is gas laser, solid-state laser, dye laser, semiconductor laser, free-electron laser
Device, QCL, biolaser, light stream body laser one kind therein.
Light beam convergent component is composite sphere lens, non-spherical lens, convergence reflex mirror one kind therein.
Photoelectric Detection portion is single sensing element photodetector group, monochromator, linear array photoelectric sensors spectrometer therein
Kind.
Described speculum is plane mirror, concave mirror, return prism one kind therein.
LASER Light Source 1 adopts LD pumped solid laser light sources, and it is a diameter of 1 millimeter that laser goes out 1 irradiating light beam, anti-in curved surface annular
It is sphere annular internal reflector high-fineness cavity to penetrate mirror high-fineness cavity 2, and light beam convergent component 3 is apochromatic composite sphere
Lens group, optical filter 4 is 2% to LASER Light Source outgoing beam transmitance, and optical filter 4 is to detected gas LR laser raman light
Rate is crossed for 99%.Photoelectric Detection portion 5 adopts spectrometer.Speculum 6 is concave mirror.
The course of work of the embodiment of the present invention is：The outgoing beam of LASER Light Source 1 is through curved surface annular internal reflector fine
The loophole 201 in degree chamber 2 is oblique to be mapped in curved surface annular internal reflector high-fineness cavity 2, high-precision in curved surface annular internal reflector
Form traveling wave in fineness chamber 2 to be transmitted, curved surface annular internal reflector high-fineness cavity 2 is made up of curved surface annular internal reflector
Single high accuracy chamber, the gas of detected region 8 in curved surface annular internal reflector high-fineness cavity 2 is subject to laser beam row
Ripple inspires Raman light, and a part is collected after light beam convergent component, filter plate assemble light beam by Photoelectric Detection part,
Another part is reflected by speculum 6, equally sequentially passes through light beam convergent component 3, optical filter 4, focuses on Photoelectric Detection part
5, finally collected by Photoelectric Detection part.
Fig. 2 is that mean camber of the present invention annular internal reflector high-fineness cavity sectional view inner light beam traveling wave mode of propagation is illustrated
Figure, the oblique light being mapped in curved surface annular internal reflector high-fineness cavity 2 of loophole 201 can form the biography of closed loop in cavity
Broadcast.Laser goes into closure light path in cavity, can improve intensity and the sensitivity of Raman diffused light.
Raman spectrum principle and Photoelectric Detection part detection Characteristic Raman shift of spectral line and intensive analysis thing in the present invention
The technology of matter content is mature technology.The inventive point of the present invention is mutually to tie chamber enhancing technology with LR laser raman detection technique
Close, using passive cavity, using laser emitting light beam oblique incidence chamber principle strengthened, be given a simple system, good stability, can
By property height, while detecting that the high chamber of multiple gases, sensitivity strengthens LR laser raman gas concentration detection apparatus.
Claims (5)
1. a kind of optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus, it is characterised in that including LASER Light Source, curved surface
Annular internal reflector high-fineness cavity, light beam convergent component, optical filter, Photoelectric Detection part, speculum, Photoelectric Detection part,
Optical filter, light beam convergent component, curved surface annular internal reflector high-fineness cavity, speculum are sequentially coaxially symmetrically placed, curved surface ring
Shape internal reflector high-fineness cavity is by the single high accuracy chamber that constitutes of curved surface annular internal reflector, the inwall of high-fineness cavity
The reflectivity in reflecting layer is more than 98%, and curved surface annular internal reflector high-fineness cavity symmetrically opens formed objects in the both sides of symmetry axis
Delivery outlet, side delivery outlet side is provided with light beam convergent component, and opposite side delivery outlet arranges the speculum bigger than delivery outlet, quilt
Detection gas is placed in curved surface annular internal reflector high-fineness cavity central area, and LASER Light Source outgoing beam is through curved surface annular
The loophole of internal reflector high-fineness cavity is oblique to be mapped in curved surface annular internal reflector high-fineness cavity, anti-in curved surface annular
Penetrate formation traveling wave in mirror high-fineness cavity to be transmitted, the detected zone gas in curved surface annular internal reflector high-fineness cavity
Excited by laser beam traveling wave, launch Raman light, a Raman light part is through curved surface annular internal reflector high-fineness cavity
Delivery outlet, then after light beam convergent component, filter plate assemble light beam, collected by Photoelectric Detection part, another part passes through
After another delivery outlet speculum reflection of curved surface annular internal reflector high-fineness cavity, light beam convergent component, filter are equally sequentially passed through
Mating plate, focuses on Photoelectric Detection part, is finally collected by Photoelectric Detection part.
2. according to claim 1 optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus, it is characterised in that described
Curved surface annular internal reflector high-fineness cavity is that sphere concave surface annular internal reflector high-fineness cavity or wheel the form of the foetus loop concave are anti-
Penetrate mirror high-fineness cavity.
3. according to claim 2 optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus, it is characterised in that described
Loophole on curved surface annular internal reflector high-fineness cavity is the manhole for not being coated with reflectance coating.
4. according to claim 1 optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus, it is characterised in that described
Optical filter is low transmission to LASER Light Source outgoing beam, and transmitance is less than 5%, and optical filter is to detected gas LR laser raman light
For high permeability, transmitance is more than 95%.
5. according to claim 1 optical traveling-wave chamber strengthens LR laser raman gas concentration detection apparatus, it is characterised in that described
LASER Light Source is gas laser, solid-state laser, dye laser, semiconductor laser, free electron laser, quantum stage
Connection laser instrument, biolaser, light stream body laser one kind therein.
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| CN104104008B (en) * | 2014-06-25 | 2017-06-23 | 杭州电子科技大学 | A kind of optical traveling-wave light fluid dye laser of electric field regulation and control |
| CN104597026A (en) * | 2014-12-31 | 2015-05-06 | 苏州优谱德精密仪器科技有限公司 | Device for enhancing raman spectrum |
| CN104730045A (en) * | 2015-03-20 | 2015-06-24 | 杭州电子科技大学 | Method for analyzing cavity enhanced substance |
| CN105548139B (en) * | 2016-01-14 | 2018-06-29 | 上海理工大学 | A kind of LR laser raman gas detecting system that light path is closed based on intersection |
| CN105675581B (en) * | 2016-01-26 | 2019-09-10 | 武汉四方光电科技有限公司 | A kind of free space gas Raman scattering collection device |
| CN106018330B (en) * | 2016-05-10 | 2019-03-22 | 四川长虹电器股份有限公司 | A kind of pocket-type near infrared spectrometer |
| CN109238964B (en) * | 2016-08-30 | 2020-12-01 | 上海理工大学 | Sensing device |
| CN108426871B (en) * | 2018-05-09 | 2021-01-01 | 姚勇 | Gas Raman spectrometer based on enhancement effect |
| CN108535191B (en) * | 2018-06-15 | 2021-03-02 | 上海理工大学 | Laser Raman gas detection device based on rhombus cavity mirror |
| CN109239055B (en) * | 2018-10-16 | 2020-12-25 | 山西大学 | High-sensitivity detection device and method for concentric multi-path cavity enhanced laser-induced breakdown spectroscopy |
| CN111879748B (en) * | 2020-06-15 | 2022-03-11 | 中国原子能科学研究院 | Raman spectrum signal enhancement structure and detection system light path adopting same |
| CN113899727B (en) * | 2021-09-18 | 2022-11-18 | 中山大学 | Device and method for detecting vertical change of concentration of target object in sediment pore water |
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| US599250A (en) * | 1898-02-15 | Nut-lock | ||
| US4939376A (en) * | 1989-04-14 | 1990-07-03 | The United States Of America As Represented By The United States Department Of Energy | Light collection device for flame emission detectors |
| CN102914530A (en) * | 2011-08-05 | 2013-02-06 | 中国石油化工集团公司 | Raman spectrum gas detection system as well as detection method and application thereof |
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