CN105277271B - A kind of the phase-shifted fiber grating sensor measuring system and its application of ultrasonic vibration - Google Patents
A kind of the phase-shifted fiber grating sensor measuring system and its application of ultrasonic vibration Download PDFInfo
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Abstract
The present invention provides a kind of phase-shifted fiber grating sensor measuring system of ultrasonic vibration and its applications, belong to ultrasonic activation detection field.The phase-shifted fiber grating sensor measuring system of the ultrasonic vibration includes: narrow line width regulatable laser, circulator, phase-shifted fiber grating sensor and photodetector；The narrow line width regulatable laser is connect with the first port of the circulator, and one end of the phase-shifted fiber grating sensor is connect with the second port of the circulator；The first port of the photodetector is connect with the other end of the phase-shifted fiber grating sensor, and second port is connect with the third port of the circulator；The phase-shifted fiber grating sensor is placed directly against on object under test.
Description
Technical field
The invention belongs to ultrasonic activation detection fields, and in particular to a kind of phase-shifted fiber grating sensing spy of ultrasonic vibration
Examining system and its application.
Background technique
Ultrasonic inspection is also in ultrasound examination, is one kind of non-destructive testing.Non-destructive testing is in not defective work piece or former material
Under the premise of expecting working condition, a kind of detection means that surface and internal soundness to examined component are checked.Ultrasonically
Shake physical model experiment is also the progress supersonic sounding by ultrasonic wave simulation seimic wave propagation, by ultrasonic wave in Geological Model
Propagation observation in type carries out indoor simulation observation to propagation of the seismic wave in various complex geologic bodies, and according to observed result
Carry out study of seismology.
Currently used ultrasonic detection method generally uses piezoelectric ultrasonic probe to carry out ultrasonic wave transmitting and reception.
This probe is usually made of piezoelectric chip or other materials (such as composite material), relatively simple for structure, easy for installation, transmitting-receiving
It is interchangeable.What Fig. 1 was provided is the internal structure chart of electric contact formula probe, including ultrasonic radiation face 101, acoustic matching layer 102, pressure
Electroceramics 103, metal case 104, pedestal 105, shielding material 106, lead terminal 107.
When measuring to solid material, transmitting probe and receiving transducer are close to testee surface.Emitting head will be electric
Signal (generally burst pulse) is converted to ultrasonic signal；And it receives head and ultrasonic signal is then converted into electric signal.
Piezoelectric ultrasonic is popped one's head in when detecting to solid geological model (especially to complex surface model), due to work
The reason of in terms of skill device, detection part contact surface is larger, when being detected to curved surface model, probe and model surface coupling
It is poor to close effect, can not even couple sometimes；Since existing ultrasonic probe can only carry out narrow emission and reception, therefore measure not
It can reflect the received actual conditions of field construction wideband.
With the development of optical fiber sensing technology, in order to excellent using its strong antijamming capability, long transmission distance, sensitivity height etc.
Point, the research in terms of optical profile type vibration measurement is more and more, after fiber-optic grating sensor occurs, vibrating sensing testing field hair
Given birth to very big change, fiber-optic grating sensor due to small in size, strong antijamming capability, to integrate sensing and transmission etc. excellent
Point has become the research hotspot in current vibration-testing field.
Domestic and international researcher successfully has developed many optical fibre vibration sensors at present, overcomes conventional vibration sensing
Many defects of device receive the extensive attention of insider.But optical fiber grating sensing progress vibration detecting is concentrated mainly on low
Frequency signal detection has not yet to see its application achievements for ultrasonic listening.
Summary of the invention
It is an object of the invention to solve above-mentioned problem existing in the prior art, a kind of phase shift light of ultrasonic vibration is provided
Fine grating sensing detection system and its application are realized that ultrasonic vibration is detected using a kind of phase-shifted fiber grating sensor, overcome
Common ultrasonic sensor detects the disadvantages of big volume, narrow bandwidth, improves ultrasonic detection precision, ability, widens application range.
The present invention is achieved by the following technical solutions:
A kind of phase-shifted fiber grating sensor measuring system of ultrasonic vibration, comprising: narrow line width regulatable laser, annular
Device, phase-shifted fiber grating sensor and photodetector；
The narrow line width regulatable laser is connect with the first port of the circulator, the phase-shifted fiber grating sensing
One end of device is connect with the second port of the circulator；
The first port of the photodetector is connect with the other end of the phase-shifted fiber grating sensor, second port
It is connect with the third port of the circulator；
The phase-shifted fiber grating sensor is placed directly against on object under test.
The phase-shifted fiber grating sensor measuring system of the ultrasonic vibration includes A/D conversion and data collecting card and calculating
Machine；
The photodetector is converted with the A/D and data collecting card is connect, A/D conversion and data collecting card with
Computer connection.
It is inputted by the laser that narrow line width regulatable laser issues from the first port of circulator, is exported from second port；
The light exported from circulator second port is directly entered phase-shifted fiber grating sensor, phase-shifted fiber grating sensor
The reflected light of generation enters back into the second port of circulator, exports from the third port of circulator, enters back into photodetector
Second port；
The transmitted light of phase-shifted fiber grating sensor is directly entered the first port of photodetector；
A/D conversion and data collecting card are acquired the output voltage of photodetector, and collected signal is inputted
Processing and the display of vibration signal are carried out to computer.
The narrow line width regulatable laser uses TLS laser.
Phase-shifted fiber grating in the phase-shifted fiber grating sensor line width in reflection band resistance is 5-15pm, reflection
Spectrum slope is 70-80nm-1。
A kind of phase-shifted fiber grating sensor measuring system using the ultrasonic vibration to the ultrasonic wave propagated in object into
Row continuous probe method, comprising:
Phase-shifted fiber grating sensor is fixed on object under test by S1, connects the phase shift optical fiber of the ultrasonic vibration
Each instrument in grating sensing detection system；
S2 adjusts the optical wavelength of narrow line width regulatable laser to the design wavelength of phase-shifted fiber grating, believes in vibration
When number reaching stable state, the output wavelength of fixed narrow line width regulatable laser；
S3, A/D conversion and data collecting card are acquired the output voltage of photodetector, and collected signal is defeated
Enter to computer and carries out processing and the display of vibration signal.
A kind of phase-shifted fiber grating sensor measuring system using the ultrasonic vibration carries out the side of trigger-type real-time detection
Method, comprising:
Phase-shifted fiber grating sensor is fixed on object under test by L1, connects the phase shift optical fiber of the ultrasonic vibration
Each instrument in grating sensing detection system；
L2, ultrasonic excitation source use the high-voltage pulse generator with triggering synchronization signal output, synchronization signal are connect
Enter wherein all the way in channel of A/D conversion and data collecting card, the signal is utilized to carry out triggering collection；
L3 adjusts the optical wavelength of narrow line width regulatable laser to the design wavelength of phase-shifted fiber grating, utilizes acquisition
Card triggering collection obtains real-time ultrasonic vibration signal, and when vibration signal reaches stable state, fixed narrow line width regulatable swashs
The output wavelength of light device；
L4, each triggering collection of phase-shifted fiber grating sensor measuring system of ultrasonic vibration, records the ultrasonic wave measured
Signal, and then obtain the wave pattern changed over time that excitaton source is propagated to receiving point ultrasonic wave.
Compared with prior art, the beneficial effects of the present invention are: the invention overcomes, ultrasonic sensor detection volume is big, band
The disadvantages of width.With on ultrasonic earthquake physical simulation experiment, preferable effect is obtained.It can be also used in nondestructive inspection field,
Have many advantages, such as not by electromagnetic interference, high sensitivity, vibration detecting bandwidth.
Detailed description of the invention
Fig. 1 is the internal structure chart of existing electric contact formula probe.
Fig. 2 is that the present invention is based on the ultrasonic vibration detection system block diagrams of phase-shifted fiber grating sensing.
Fig. 3 is phase-shifted grating reflectance spectrum.
Fig. 4 is ultrasonic detection system and PZT contrast test schematic diagram.
Fig. 5 (a) is the frequency spectrum for the wide band ultrasound signal that PZT driving source generates.
Fig. 5 (b) is the time domain for the wide band ultrasound signal that PZT driving source generates.
Fig. 6 (a) is the ultrasonic signal frequency spectrum that PZT sensor detects.
Fig. 6 (b) is the ultrasonic signal frequency spectrum that phase-shifted grating sensor detects.
Fig. 7 is the time-domain diagram of two kinds of sensor ultrasound detection signals, and dotted line is phase-shifted grating sensor, and solid line is PZT biography
Sensor.
Fig. 8-1 is phase-shifted grating computation model.
Fig. 8-2 is phase-shifted grating reflectance spectrum.
Fig. 8-3 is phase-shifted grating sensing and demodulating principle.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing:
Technical advantage based on optical fiber grating sensing proposes a kind of ultrasonic vibration detection based on phase-shifted fiber grating sensing
System, system include: narrow line width regulatable laser 201, phase-shifted fiber grating sensor 203, circulator 202, photodetection
Device (also known as photoelectricity balanced detector) 204, A/D conversion and data collecting card 205, computer 206 are (for handling and vibrating letter
Number (i.e. ultrasonic signal) display.System configuration block diagram is as shown in Figure 2.
The working principle of present system is as follows:
The TLS narrow linewidth laser of model Santec TSL-710 (such as can be used by TLS narrow linewidth laser 201.
(can also be using the similar laser of other performance, such as Agilent81640A)) laser that issues is from optical fiber circulator 202
First port 1 input, from second port 2 output (working principle of circulator is: if light from first port 1 input, from
Second port 2 exports；If light is inputted from second port 2, exported from third port 3.This experiment is using optical fiber circulator
Purpose is to try to reduce light energy loss, guarantees the effective use of light energy).The light exported from optical circulator second port 2 is straight
It taps into phase-shifted fiber grating (PS-FBG) sensor 203, phase-shifted fiber grating sensor 203 (i.e. PS-FBG sensor) is direct
It is attached on the object for needing to detect vibration, this phase-shifted fiber grating is supersonic sensing head, not only can produce reflected light, but also can be with
Transmitted light is generated, phase-shifted fiber grating is almost without loss, the sum of the reflected light of phase-shifted fiber grating generation and transmitted intensity
It is exactly equal to the intensity of input laser, therefore, the intensity of reflected light and transmitted intensity of phase-shifted fiber grating are just complementary.So
Afterwards, the reflected light that phase-shifted fiber grating generates enters back into the second port 2 of optical fiber circulator, from the third port of optical fiber circulator
3 outputs, entering back into the second port P2 of photodetector 204, (photodetector is located near AD capture card, grating sensing
The optical signal that the optical signal and circulator that device comes return is connected to above).The transmission of phase-shifted fiber grating sensor 203
Light is directly entered photodetector 204 and (such as the photodetector of model New focus2117-FC can be used (can also adopt
With other similar photoelectric converters)) second port P1, the output voltage of photodetector 204 is two input port
Difference in voltage.Then the output voltage of photodetector is acquired using A/D conversion and data collecting card 205, to acquisition
To signal be input to computer disposal and vibration signal shows that 206 carry out processing and the display of vibration signal.
Here ultrasonic exciting source can be generated by arbitrary ultrasound emission source, and stress wave caused by ultrasonic wave is transmitted to light
Fine grating causes fiber grating refractive index to change over time, and therefore, causes the variation of the reflected light and transmitted light of fiber grating,
By designing system function (reflected light of demodulation phase-shifted fiber grating and the intensity of transmitted light change with time), so that it may
Specific as follows measured in real time the ultrasonic wave propagated in object: ultrasonic wave propagates through phase shift optical fiber in object
Grating leads to the variation of the central wavelength of reflection.That is the variation of fiber grating reflection center wavelength of light reflects the external world
The situation of change of measured signal.
Fig. 3 is the phase-shifted fiber grating spectrum of design.When designing phase-shifted fiber grating, phase-shifted grating is designed in reflectance spectrum
Line width is 0.016nm in band resistance, and reflectance spectrum slope is 70nm-1, high spirit can be can get to ultrasonic activation signal in this way
Sensitivity.General line width is in 10pm or so, slope 70-80nm-1It is most suitable, test needs can be met near this value.
Under ultrasonication, approximately linear drift can occur for reflection kernel wavelength (bragg wavelength), when narrow linewidth swashs
The wavelength tuning of light device to phase-shifted fiber grating reflectance spectrum reflective cathetus (the corresponding spectrum of the wavelength of laser, spectrum
Bevel edge it is consistent with phase-shifted fiber grating reflectance spectrum bevel edge when have the tuning effect of a wave, extraneous disturbance will affect reflection
Wavelength keeps spectrum elegant, and grating sensor can perceive this variation), the intensity of light source is by the modulation by ultrasonic signal, at this time
By detect intensity of reflected light variation, i.e., ultrasonic signal cause phase-shifted fiber grating reflect central wavelength variable signal,
Ultrasonic signal can be directly obtained.
The system can continuously monitor the ultrasonic wave propagated in object, and ultrasonic excitation source can also be cooperated to be triggered
Formula acquires in real time.
When to continuous ultrasonic vibration monitoring, it is as follows that ultrasonic vibration detects process:
2. phase-shifted fiber grating sensor is fixed on object under test, each instrument is connected by system block diagram；
2. adjusting TLS laser optical wavelength to the design wavelength of phase-shifted fiber grating, reach stable shape in vibration signal
When state (i.e. computer or oscillograph window show that vibration signal energy reaches maximum, signal-to-noise ratio with higher), fixed laser
Device output wavelength；
3. computer record measure ultrasonic signal (measure be by phase-shifted fiber grating reflect central wavelength
Variation signal by photodetector carry out photoelectric conversion, using AD capture card acquire signal).
Situation is acquired to trigger-type, it is as follows that ultrasonic vibration detects process:
1. phase-shifted fiber grating sensor is fixed on object under test, each instrument is connected by system block diagram；
2. ultrasonic excitation source part is believed using the high-voltage pulse generator with triggering synchronization signal output by synchronous
Wherein all the way in channel of number access A/D conversion and data collecting card, utilizes the signal to carry out triggering collection；
3. adjusting TLS laser optical wavelength to the design wavelength of phase-shifted fiber grating, obtained using capture card triggering collection
It is received to real-time ultrasonic vibration signal, when vibration signal reaches stable state, fixed laser output wavelength；
3. each triggering collection of system, computer records the ultrasonic signal measured, available excitaton source to reception
The wave pattern (and handled and shown by computer) changed over time that point ultrasonic wave is propagated.
Using the invention, pops one's head in piezoelectric supersonic and the signal detected based on phase-shifted fiber grating sensing compares
Experiment, contrast test is as shown in figure 4, TLS is narrow linewidth laser, and PZT1 is ultrasonic excitation source, and PZT2 is to receive piezoelectric supersonic
Wave probe, FG is impulse generator, and PS-FBG is phase-shifted fiber grating sensor, and BPD is photodetector, and O-Scope can be with
It is oscillograph, computer can also be connected by capture card.
Fiber-optic grating sensor is tightly attached on aluminium sheet, and ultrasonic wave is generated by PZT1 driving source, and fiber grating and ultrasonic wave swash
Source is encouraged about at a distance of 5 centimetres.PZT generates ultrasonic wave-coupled into aluminium sheet, and stress wave caused by ultrasonic wave is transmitted to light well
Fine grating causes fiber grating refractive index to change over time, and therefore, causes the variation of the reflected light and transmitted light of fiber grating,
The reflected light of demodulated phase-shifted fiber grating and the intensity of transmitted light change with time, so that it may super to what is propagated in aluminium sheet
Sound wave is measured in real time.
The performance comparison of fiber grating and PZT sensor is as follows under wide band ultrasound signal:
Driving voltage peak-to-peak value: 20V；
Function generator (FG) energisation mode: train of pulse, period 100ms (150Khz sine wave/10cycle)；
Digital filter is set as high pass, cutoff frequency 10KHz.
Fig. 5 (a) and Fig. 5 (b) is the frequency spectrum and time diagram for the wide band ultrasound signal that PZT driving source generates.
Fig. 6 (a) and Fig. 6 (b) is the ultrasonic signal frequency spectrum that PZT and phase-shifted grating sensor is respectively adopted and detects.
Fig. 7 is the time-domain diagram of two kinds of sensor ultrasound detection signals, and dotted line is phase-shifted grating, and solid line is PZT sensor.
It can be seen that PS-FBG and PZT near 150K from spectral response figure, spectral shape is similar, and and driving signal
Frequency spectrum is consistent, but in contrast, and PS-FBG is closer to original signal spectrum.
From time-domain diagram as can be seen that two kinds of sensors are almost detected simultaneously by ultrasonic signal, almost it is overlapped in time domain.
To being described as follows for fiber-optic grating sensor used in the present invention:
The method that the analysis of phase-shifted grating uses transmission matrix, as shown in Fig. 8-1.Phase shiftGrating is divided into two parts,
The a length of L of first part1, a length of L of second part2。
The transmission process of entire grating may be expressed as:
It is the size of phase shift, length L in formula1Transmission matrix can be expressed asHereWherein,
Λ is FBG pitch, and k is the coefficient of coup.
According to its borderline propertiesIt can be calculated:
Then, the reflectivity of phase-shifted grating may be expressed as:
According to formula (0-3), Fig. 8-2 isWhen difference 0 and pi/2, the reflectance spectrum of phase-shifted grating:
Fig. 8-3 is phase-shifted grating demodulation principle schematic diagram.To reach peak response, before measurement, narrow-linewidth laser source
Wavelength need to adjust the position of the reflectance spectrum maximum slope of grating.Under the acoustic pressure effect of ultrasound, the bragg wavelength of grating is sent out
The drift of raw approximately linear, so that intensity modulated of the reflected light by ultrasonic signal, (right by the Strength Changes for monitoring reflected light
Answer the laser power of optical grating reflection light), the ultrasonic signal that can directly extract carrying (changes caused detector from grating wavelength
Output voltage changing value in extract).
The laser power of optical grating reflection may be expressed as:
Δ P=Δ λ GP (0-4)
Δ λ is the variation of grating wavelength caused by ultrasonic wave, and G is grating slope, and P is input optical power.
Then detector output voltage may be expressed as:
VS=Δ PSDg (0-5)
In formula, SDFor detector response coefficient, g is detector amplification factor.
Consider under minimum detectable strain, system signal noise ratio 1, it may be assumed that
VS=VN (0-6)
VNIt is horizontal for maximum noise, and grating wavelength and strain corresponding relationship:
Δ λ=α ε (0-7)
α is constant, about 1.2pm/u ε.
Comprehensive (0-4)-(0-7), minimum strain:
For driving voltage in 0.1V, system signal noise ratio is approximately 1, and noise voltage is 0.0006V, grating slope at this time
70nm-1, detector SDFor 0.98mA/mw, light source power 0.5mw, amplification coefficient 2000, bring into system sensitivity about are as follows:
7.3nε.
Fig. 3 is the reflectance spectrum of phase-shifted grating used in system, and the phase jump of π, leads to its reflectance spectrum among fiber grating
Centre produces a very narrow transmissive window, and line width 0.016nm, common FBG are 0.2nm, and the slope of phase-shifted grating is 70nm-1, it is 140 times (0.5nm) of FBG.According to formula (0-1) as can be seen that under same intensity signal function, it is strong that the former detects signal
Degree will be 140 times of the latter.
Above-mentioned technical proposal is one embodiment of the present invention, for those skilled in the art, at this
On the basis of disclosure of the invention application method and principle, it is easy to make various types of improvement or deformation, be not limited solely to this
Invent method described in above-mentioned specific embodiment, therefore previously described mode is only preferred, and and do not have limitation
The meaning of property.
Claims (5)
1. a kind of phase-shifted fiber grating sensor measuring system of ultrasonic vibration, it is characterised in that: the phase shift light of the ultrasonic vibration
Fine grating sensing detection system includes: narrow line width regulatable laser, circulator, phase-shifted fiber grating sensor and photodetection
Device；
The narrow line width regulatable laser is connect with the first port of the circulator, the phase-shifted fiber grating sensor
One end is connect with the second port of the circulator；
The first port of the photodetector is connect with the other end of the phase-shifted fiber grating sensor, second port and institute
State the third port connection of circulator；
The phase-shifted fiber grating sensor is placed directly against on object under test；
Wherein, the phase-shifted fiber grating sensor measuring system of the ultrasonic vibration includes A/D conversion and data collecting card and calculating
Machine；
The photodetector is converted with the A/D and data collecting card is connect, A/D conversion and data collecting card and calculating
Machine connection；
Wherein, it is inputted by the laser that narrow line width regulatable laser issues from the first port of circulator, is exported from second port；
The light exported from circulator second port is directly entered phase-shifted fiber grating sensor, and phase-shifted fiber grating sensor generates
Reflected light enter back into the second port of circulator, exported from the third port of circulator, enter back into the second of photodetector
Port；
The transmitted light of phase-shifted fiber grating sensor is directly entered the first port of photodetector；
A/D conversion and data collecting card are acquired the output voltage of photodetector, and collected signal is input to meter
Calculation machine carries out processing and the display of vibration signal.
2. the phase-shifted fiber grating sensor measuring system of ultrasonic vibration according to claim 1, it is characterised in that: described narrow
Line width tunable laser uses TLS laser.
3. the phase-shifted fiber grating sensor measuring system of ultrasonic vibration according to claim 1, it is characterised in that: the phase
Phase-shifted fiber grating in the shifting fiber grating sensor line width in reflection band resistance is 5-15pm, and reflectance spectrum slope is 70-
80nm-1。
4. a kind of phase-shifted fiber grating sensor measuring system using any ultrasonic vibration of claims 1 to 33 is in object
The ultrasonic wave of propagation carries out continuous probe method, it is characterised in that: the described method includes:
Phase-shifted fiber grating sensor is fixed on object under test by S1, connects the phase-shifted fiber grating of the ultrasonic vibration
Each instrument in sensor measuring system；
S2 adjusts the optical wavelength of narrow line width regulatable laser to the design wavelength of phase-shifted fiber grating, reaches in vibration signal
When to stable state, the output wavelength of fixed narrow line width regulatable laser；
S3, A/D conversion and data collecting card are acquired the output voltage of photodetector, and collected signal is input to
Computer carries out processing and the display of vibration signal.
5. a kind of phase-shifted fiber grating sensor measuring system using any ultrasonic vibration of claims 1 to 33 is triggered
The method of formula real-time detection, it is characterised in that: the described method includes:
Phase-shifted fiber grating sensor is fixed on object under test by L1, connects the phase-shifted fiber grating of the ultrasonic vibration
Each instrument in sensor measuring system；
L2, ultrasonic excitation source use the high-voltage pulse generator with triggering synchronization signal output, synchronization signal are accessed institute
Wherein all the way in channel of A/D conversion and data collecting card is stated, the synchronization signal is utilized to carry out triggering collection；
L3 is adjusted the optical wavelength of narrow line width regulatable laser to the design wavelength of phase-shifted fiber grating, is turned using the A/D
It changes and data collecting card triggering collection obtains real-time ultrasonic vibration signal, when vibration signal reaches stable state, fixation is narrow
The output wavelength of line width tunable laser；
L4, each triggering collection of phase-shifted fiber grating sensor measuring system of ultrasonic vibration, records the ultrasonic signal measured,
And then obtain the wave pattern changed over time that excitaton source is propagated to receiving point ultrasonic wave.
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| CN105652368B (en) * | 2016-04-01 | 2017-04-12 | 深圳市创鑫激光股份有限公司 | Optical fiber etching monitoring light path and optical fiber etching device |
| CN105890536B (en) * | 2016-04-08 | 2018-09-28 | 北京信息科技大学 | A method of measuring strain is used for based on ultrasonic pulse induction grating deformation |
| CN106813693B (en) * | 2016-12-16 | 2019-05-31 | 清华大学 | A kind of ultrasound three-component probe, the three-component method and apparatus of detection ultrasound |
| CN107907152B (en) * | 2017-12-19 | 2023-11-17 | 江汉大学 | Phase shift fiber bragg grating sensor, flaw detection device and flaw detection method |
| CN108871419B (en) * | 2018-04-20 | 2023-11-07 | 南京航空航天大学 | Multi-physical-quantity optical fiber sensing system, feedback loop control thereof and detection method thereof |
| CN112066901B (en) * | 2020-08-27 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | Ultrasonic adjustable spectrum interference measuring device and measuring method |
| CN113029482B (en) * | 2021-02-25 | 2022-07-26 | 江西师范大学 | Bolt tightness detection method and detection device |
| CN115655771B (en) * | 2022-12-27 | 2023-03-17 | 武汉理工大学 | Phase-shift fiber grating sensitization rotating mechanical equipment fault monitoring system and method |
| CN116558621A (en) * | 2023-04-07 | 2023-08-08 | 南京邮电大学 | Phase shift grating longitudinal acoustic wave sensor and packaging method |
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