CN109100008B - Broadband and high-sensitivity acoustic sensor with multi-film packaging type waveguide coupling resonant cavity structure - Google Patents
Broadband and high-sensitivity acoustic sensor with multi-film packaging type waveguide coupling resonant cavity structure Download PDFInfo
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- CN109100008B CN109100008B CN201810970032.2A CN201810970032A CN109100008B CN 109100008 B CN109100008 B CN 109100008B CN 201810970032 A CN201810970032 A CN 201810970032A CN 109100008 B CN109100008 B CN 109100008B
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- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
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Abstract
The invention relates to an acoustic sensor, in particular to an acoustic sensor with a multi-film packaging type waveguide coupling resonant cavity structure. The plurality of films are used for isolating the external environment, conducting sound waves and forming a closed cavity, so that the sound waves cause the volume of gas in the closed cavity to change, the density of the gas changes, and the refractive index of the gas in the cavity changes. The gas in the closed cavity exists as a cladding of the waveguide coupling resonant cavity structure, and when the density of the cladding of the waveguide coupling resonant cavity structure changes, the resonant frequency of the waveguide coupling resonant cavity structure shifts, so that external sound waves are detected. The sensor uses a waveguide coupling resonant cavity structure, uses the change of the refractive index of a gas medium totally reflected in a cavity caused by sound waves as a detection principle, has wide sound detection frequency band and high sensitivity, and is suitable for the fields of detection of underwater sound signals, process control in industrial environment, medical diagnosis and the like.
Description
Technical Field
The invention relates to an acoustic sensor, in particular to a broadband and high-sensitivity acoustic sensor with a multi-film packaging type waveguide coupling resonant cavity structure.
Background
An acoustic sensor is a sensor that is capable of sensing acoustic waves and converting them into a usable output signal. The traditional acoustic sensor mainly takes a film or a piezoelectric material as a sensitive structure, collects acoustic signals through mechanical vibration, is influenced by a moving part, and has a frequency band concentrated at the resonance frequency of the moving part, so that the frequency band of the sensor is narrow; based on the detection principle of the movable component, the intrinsic detection sensitivity is not high, and the traditional structure is also easily influenced by the external environment and easily generates serious noise, the signal-to-noise ratio is low, and the sensitivity of the sensor is low.
With the development of new-generation industrial technologies and information technologies, higher requirements are put forward on the bandwidth and the sensitivity of an acoustic signal detection frequency domain, and an ultra-wideband high-sensitivity acoustic signal testing technology is a development requirement of testing equipment for detection, imaging, reconnaissance and the like. The ultra-wideband high-sensitivity acoustic sensing device can acquire more information, realizes more accurate and rapid target identification, analysis and parameter setting, and has wide market prospect in the field of military and civil application. Therefore, ultra-wideband and high-sensitivity acoustic sensors based on new principles and methods have become an important development direction.
Compared with the traditional acoustic signal testing technology based on various acoustic sensing devices, the acoustic signal testing technology based on the acoustic wave-optical signal conversion principle has excellent electromagnetic interference resistance, wide frequency band response range, high sensitivity, long service life, high reliability, simple structure and other excellent performances, and is suitable for extremely severe industrial environments.
The acoustic sensing test technology based on the stress strain of the optical fiber has poor acoustic impedance matching and lower frequency band and sensitivity, and then the diaphragm vibration type acoustic sensing test technology is developed, so that the problems of narrow frequency band and low sensitivity caused by the vibration of mechanical parts still exist; the ultra-wideband high-sensitivity photoacoustic sensor technology is explored, the detection of acoustic signals is realized by detecting the change of light intensity (phase) caused by the change of medium density caused by acoustic waves, the frequency band limited by mechanical resonance of sensitive parts can be avoided, and meanwhile, the sensitivity can be greatly improved by an optical detection method for changing the refractive index of the medium by acoustic pressure.
The sound pressure of the sound wave can influence the density of the medium, namely, the refractive index of the medium is changed, so that the speed of light in the medium is influenced, the light signal carrying sound modulation information can detect the instantaneous sound pressure change through the interference of light, and the purely optical sound detection is realized. The acoustic sensing device allows direct measurement of acoustic pressure without mechanical moving parts, can eliminate sensor distortion due to mechanical characteristics (mechanical susceptibility interference, inherent limited frequency bandwidth, nonlinearity), and has a ten-fold frequency response range compared to the most advanced fiber-optic diaphragm acoustic sensors at present, so that the purely optical acoustic sensing device can achieve a flatter frequency response in a wider frequency band and has higher detection sensitivity. Therefore, the traditional acoustic sensing mode of sound-mechanical-pressure (light) -electricity is converted into a new acoustic signal sensing mode of sound-medium density-light-electricity.
Disclosure of Invention
The invention aims to solve the problems of narrow frequency band and low sensitivity of the existing acoustic sensor, and provides a broadband and high-sensitivity acoustic sensor with a multi-film packaging type waveguide coupling resonant cavity structure.
The invention is realized by adopting the following technical scheme: a wide-band high-sensitivity sound sensor with multi-film packaged waveguide coupled resonant cavity structure is composed of a narrow-line width tunable laser, an optical isolator, an electro-optical modulator, a closed cavity, multiple packaged films for transmitting sound, a coupled structure of straight waveguide and ring resonant cavity, the gas for light reflecting medium, photoelectric detector, signal modem module, low-pass filter module and proportional-integral-derivative feedback control module The low-pass filter module and the proportional-integral-derivative feedback control module are sequentially connected, the proportional-integral-derivative feedback control module is connected with the tuning end of the narrow-linewidth tunable laser to form a closed loop, the signal modulation and demodulation module is connected with the electro-optic modulator and used for generating a modulation signal to drive the electro-optic modulator to realize modulation of transmission light waves, and the signal modulation and demodulation module outputs an acoustic signal.
The working principle of the broadband high-sensitivity acoustic sensor is as follows:
1) the upper portion of sealed cavity adopts a plurality of encapsulation films to encapsulate for isolated external environment, conduction sound wave, wherein, adopts a plurality of film encapsulation, can reduce every encapsulation film diameter, and thickness increases, improves the detection frequency band of sound wave, and simultaneously, a plurality of film encapsulation can realize that the sound wave evenly exerts pressure to intracavity gas, improves sound wave detectivity.
2) The sound sensitive unit consists of a closed cavity, a plurality of packaging films, a straight waveguide, an annular resonant cavity and a light total reflection medium gas. The optical sensing device comprises a straight waveguide, an annular resonant cavity, a packaging film, a sound wave vibration compression or dilution cavity and a sensing module, wherein light is input from one end of the straight waveguide and coupled into the annular resonant cavity in the form of an evanescent field, the light is transmitted in the form of the evanescent field along the surface of the annular resonant cavity under the total reflection of packaging gas, when an external sound wave signal penetrates through the packaging film and acts on a gas medium in the cavity, the sound wave vibration compresses or dilutes the gas in the closed cavity, the density of the gas is changed, the refractive index of the gas is changed, the evanescent field is changed due to the change of the refractive index caused by the sound wave vibration through the density of the medium, the evanescent field is expressed as the drift of the resonant frequency of an. In the process, phonons act on gas molecules to generate an acousto-optic coupling effect, and compared with the traditional principle of detecting sound waves through mechanical deformation of a sensitive unit, the acousto-optic coupling effect has a wider response frequency band and sensitivity.
3) The modulation waveform generation and synchronous demodulation function for driving the electro-optical modulator are realized by a signal modulation and demodulation module, and the function for stably locking the laser frequency to the resonant frequency point of the ring resonator is realized by a low-pass filter and a proportional-integral-derivative control module through the output signal of the signal modulation and demodulation module.
The invention creatively combines a plurality of film packages, a closed cavity and a waveguide resonant cavity coupling structure, transmits light beams through evanescent fields on the surface of the resonant cavity, and causes the refractive index change of total reflection medium gas under the action of external sound waves so as to cause the drift of resonant frequency to extract acoustic signals, thereby being an innovation in the field of broadband and high-sensitivity acoustic sensors.
According to the broadband and high-sensitivity acoustic sensor with the multi-film packaging type waveguide coupling resonant cavity structure, the refractive index of the annular resonant cavity is larger than the refractive index of the gas for the light total reflection medium surrounding the annular resonant cavity, so that light can form total reflection when being transmitted in the annular resonant cavity.
The present invention has the following significant improvements:
1. the ring waveguide cavity with gas as total reflection medium has resonant frequency drift caused by the density change of gas, so as to realize the sensing of sound wave signal.
2. The high-sensitivity detection of the acoustic wave signal is realized due to the sensitive characteristic of the evanescent field resonance mode.
3. Adopt a plurality of film encapsulation, compare traditional diaphragm type acoustic sensor's single film effect, a plurality of film encapsulation can reduce every film diameter, and thickness increases, realizes that the acoustic pressure is exerted on the intracavity gas uniformly, guarantees under the undistorted prerequisite of sensitivity, improves and surveys the bandwidth.
4. A plurality of film packages, closed cavities and waveguide resonant cavity coupling structures are combined, and the environment adaptability of the device can be improved under the condition that the broadband and high-sensitivity detection condition of the acoustic sensor is guaranteed.
Drawings
Fig. 1 is a schematic block diagram of the present invention.
Fig. 2 is a block diagram of a sound-sensitive unit.
Fig. 3 is a schematic top view of a multi-film package.
FIG. 4 is an intrinsic resonance diagram of a waveguide-coupled resonator structure.
FIG. 5 is a diagram illustrating the shift of resonant peak of the waveguide-coupled resonator structure under the influence of external acoustic signals.
In the figure: the tunable laser comprises a 1-narrow linewidth tunable laser, a 2-optical isolator, a 3-electro-optic modulator, a 4-thin film, a 5-closed cavity, a 6-straight waveguide, a 7-gas, an 8-annular resonant cavity, a 9-photoelectric detector, a 10-signal modulation and demodulation module, an 11-low-pass filter module and a 12-proportional-integral-derivative feedback control module.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings, but the present invention is not limited thereto.
As shown in fig. 1, a broadband and high-sensitivity acoustic sensor with a multi-thin-film packaged waveguide coupled resonant cavity structure includes a narrow-linewidth tunable laser 1, an optical isolator 2, an electro-optical modulator 3, a closed cavity 5, a plurality of packaged thin films 4 for transmitting sound right above the closed cavity, a straight waveguide 6 and ring resonant cavity 8 coupled structure inside the closed cavity, a packaged gas 7 for a light total reflection medium, a photodetector 9, a signal modulation and demodulation module 10, a low-pass filter module 11, and a proportional-integral-derivative feedback control module 12. The narrow-linewidth tunable laser 1, the optical isolator 2 and the electro-optic modulator 3 are sequentially connected, light waves output by the electro-optic modulator 3 are connected with optical fibers at one end, thrown out of the closed cavity 5, of the straight waveguide 6, the optical fibers at the other end, thrown out of the closed cavity 5, of the straight waveguide 6 are connected with the photoelectric detector 9 to achieve photoelectric conversion, then the output of the photoelectric detector 9 is sequentially connected with the signal modulation and demodulation module 10, the low-pass filter module 11 and the proportional-integral-derivative feedback control module 12, and finally the proportional-integral-derivative feedback control module 12 is connected with the tuning end of the narrow-linewidth tunable laser 1 to form a closed loop. The signal modulation and demodulation module 10 is connected to the electro-optical modulator 3, and is configured to generate a modulation signal for driving the electro-optical modulator 3, so as to implement modulation on a transmission light wave, and the signal modulation and demodulation module 10 outputs an acoustic signal.
The sound sensitive unit consists of a closed cavity 5, a plurality of packaging films 4, a straight waveguide 6, an annular resonant cavity 8 and a light total reflection medium gas 7. The top plate of the closed cavity 5 is provided with a plurality of packaging openings, and each packaging opening is packaged with a film 4. The refractive index of the ring resonator 8 is greater than that of the gas 7 surrounding it for the medium of total reflection of light, enabling total reflection of light as it propagates within the ring resonator 8. The upper portion of sealed cavity adopts a plurality of encapsulation films 4 to encapsulate for isolated external environment, conduction sound wave, wherein, adopts a plurality of film encapsulation, can reduce every encapsulation film diameter, and thickness increases, improves the detection frequency band of sound wave, and simultaneously, many film encapsulation can realize that the sound wave evenly exerts pressure to intracavity gas, improves sound wave detectivity. This is an innovation over conventional single diaphragm vibration sensors.
Light is input from one end of the straight waveguide 6, and is coupled into the annular resonant cavity 8 in an evanescent field mode, light is transmitted in the annular resonant cavity 8 under the total reflection of the packaging gas 7, when an external sound wave signal penetrates through the packaging film 4 and acts on a gas medium 7 in the cavity, the sound wave vibration compresses or dilutes the gas 7 in the closed cavity, and further the gas density is changed, so that the gas refractive index is changed, the resonant transmission mode of the light in the annular resonant cavity 8 is changed, and the sensing of the external sound signal is realized.
The invention creatively combines a plurality of film packages, a closed cavity and a waveguide resonant cavity coupling structure, transmits light beams through evanescent fields on the surface of the resonant cavity, and causes the refractive index change of total reflection medium gas under the action of external sound waves so as to cause the drift of resonant frequency and extract sound signals. Compared with the traditional acoustic sensing mode of 'sound-machinery-pressure (light) -electricity', the invention is a new acoustic signal sensing mode of 'sound-medium density-light-electricity'.
Claims (2)
1. A broadband and high-sensitivity acoustic sensor with a multi-film packaging type waveguide coupling resonant cavity structure is characterized in that: comprises a narrow-linewidth tunable laser (1), an optical isolator (2), an electro-optic modulator (3), a closed cavity (5), a plurality of packaging films (4) which are arranged right above the closed cavity and used for transmitting sound, a straight waveguide (6) and a ring resonant cavity (8) coupling structure which are arranged in the closed cavity, a gas (7) which is used for optical total reflection medium and packaged in the closed cavity (5), a photoelectric detector (9), a signal modulation and demodulation module (10), a low-pass filter module (11) and a proportional-integral-differential feedback control module (12), wherein the narrow-linewidth tunable laser (1), the optical isolator (2) and the electro-optic modulator (3) are sequentially connected, the light wave output by the electro-optic modulator (3) is connected with the optical fiber at one end of the straight waveguide (6) which is thrown out of the closed cavity (5), the optical fiber at the other end of the straight waveguide (6) which is thrown out of the closed cavity (5), the photoelectric conversion is realized, the output of a photoelectric detector (9) is sequentially connected with a signal modulation and demodulation module (10), a low-pass filter module (11) and a proportional-integral-derivative feedback control module (12), the proportional-integral-derivative feedback control module (12) is connected with a tuning end of a narrow-linewidth tunable laser (1) to form a closed loop, the signal modulation and demodulation module (10) is connected with an electro-optical modulator (3) and used for generating a modulation signal for driving the electro-optical modulator (3) to realize the modulation of transmission light waves, and the signal modulation and demodulation module (10) outputs an acoustic signal.
2. The broadband, high-sensitivity acoustic sensor with multi-thin-film packaged waveguide-coupled resonator structure according to claim 1, wherein: the refractive index of the ring-shaped resonant cavity (8) is larger than that of the gas (7) which surrounds the ring-shaped resonant cavity and is used for the light total reflection medium, so that the light can form total reflection when being transmitted in the ring-shaped resonant cavity (8).
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| CN110631757B (en) * | 2019-10-31 | 2021-10-22 | 苏州市东挺河智能科技发展有限公司 | Gas pressure detector and system based on waveguide structure |
| CN111595432B (en) * | 2020-06-23 | 2022-07-26 | 平瑞安防(深圳)有限公司 | Vibration detection mechanism |
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| CN112763052B (en) * | 2020-12-16 | 2022-04-08 | 华中科技大学 | Broadband acoustic wave sensor for anti-electronic monitoring |
| CN112945370B (en) * | 2021-02-09 | 2022-09-13 | 中北大学 | All-solid-state Fabry-Perot cavity embedded thin film type vibration sensor and system |
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