CN112945370B - All-solid-state Fabry-Perot cavity embedded thin film type vibration sensor and system - Google Patents
All-solid-state Fabry-Perot cavity embedded thin film type vibration sensor and system Download PDFInfo
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- CN112945370B CN112945370B CN202110174088.9A CN202110174088A CN112945370B CN 112945370 B CN112945370 B CN 112945370B CN 202110174088 A CN202110174088 A CN 202110174088A CN 112945370 B CN112945370 B CN 112945370B
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- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Abstract
The application relates to a vibration sensor and a system of an all-solid-state Fabry-Perot cavity embedded film type, in particular to the field of vibration detection. The application provides a vibration sensor of embedded film formula in all solid-state fabry-perot chamber, vibration sensor includes: the cavity structure is a cavity structure, the cavity structure is made of a semi-reflective and semi-transparent material, two opposite surfaces in the cavity of the cavity structure are provided with reflecting films, the vibrating film is arranged in the cavity structure perpendicular to a connecting line of the two reflecting films, and a light hole is formed in the center of the vibrating film; when needs detect the vibration, with the vibration sensor setting of this application on the plane that awaits measuring, the platform vibration that awaits measuring makes vibration sensor take place resonance, and then changes the light transmission quantity of the light of vibration sensor exit end, obtains the change of the inside light transmission quantity of cavity structures through calculating to according to the change through light transmission quantity and the corresponding relation of vibration information, obtain vibration information.
Description
Technical Field
The application relates to the field of vibration detection, in particular to an all-solid-state Fabry-Perot cavity embedded film type vibration sensor and an all-solid-state Fabry-Perot cavity embedded film type vibration system.
Background
Vibration is a phenomenon commonly existing in the universe and is generally divided into macroscopic vibration (such as earthquake and tsunami) and microscopic vibration (thermal motion and brownian motion of basic particles). Some vibrations have a relatively fixed wavelength and frequency, and some vibrations do not. Two objects with the same vibration frequency can make the other object generate vibration with the same frequency when one object vibrates, and the phenomenon is called resonance, and the resonance phenomenon can bring many benefits and hazards to human beings.
The prior art describes the detection of vibration by describing a period T, a frequency f, a circular frequency ω and a rotation speed n, measures any one parameter of the period T, the frequency f, the circular frequency ω and the rotation speed n by using a vibration detection device, and describes vibration by using a measurement result.
However, the vibration detecting device in the prior art has low precision, and is difficult to meet vibration measurement with high precision requirement.
Disclosure of Invention
The invention aims to provide a vibration sensor with a membrane embedded in an all-solid Fabry-Perot cavity and a system thereof aiming at the defects in the prior art, so as to solve the problems that the vibration detection device in the prior art has low precision and is difficult to meet the vibration measurement with higher precision requirement.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, the present application provides an all-solid-state fabry-perot cavity embedded thin film type vibration sensor, including: the cavity structure is a cavity structure, the cavity structure is made of a semi-reflecting and semi-permeable material, two opposite surfaces inside a cavity of the cavity structure are provided with reflecting films, a connecting line of the two reflecting films perpendicular to the vibrating films is arranged inside the cavity structure, and a light hole is formed in the central position of the vibrating films.
Optionally, the material of the cavity structure is glass.
Optionally, the reflective films disposed on two opposite surfaces inside the cavity are reflection increasing films, and the reflection increasing films are made of high-reflection materials.
Optionally, the material of the diaphragm is an elastic material.
Optionally, the two surfaces of the cavity structure, on which the reflective film is disposed, are arc surfaces.
Optionally, the vibration sensor further includes a second diaphragm, and a second light hole is disposed in a central position of the second diaphragm, and is disposed inside the cavity structure and parallel to the diaphragm.
Optionally, the material of the second diaphragm is an elastic material.
In a second aspect, the present application provides an all-solid-state fabry-perot cavity embedded thin film type vibration sensing system, which includes: the optical system comprises a light source, a spectrometer and a vibration sensor with a film embedded in an all-solid-state Fabry-Perot cavity, wherein the light source and the spectrometer are respectively arranged on two sides of the surfaces of two reflecting films of a cavity structure of the vibration sensor, the light source is used for generating optical signals and transmitting the optical signals to the inside of the cavity structure of the vibration sensor, the optical signals are transmitted to the spectrometer through the cavity structure, the spectrometer is used for acquiring the spectrum of the emergent optical signals, the change of the optical transmission quantity inside the cavity structure is obtained through the spectrum of the emergent optical signals, and the vibration information is obtained through the corresponding relation between the change of the optical transmission quantity and the vibration information.
The invention has the beneficial effects that:
the application provides a vibration sensor of embedded film formula in all solid-state fabry-perot chamber, vibration sensor includes: the cavity structure is a cavity structure, the cavity structure is made of a semi-reflective and semi-transparent material, two opposite surfaces in the cavity of the cavity structure are provided with reflecting films, the vibrating film is arranged in the cavity structure perpendicular to a connecting line of the two reflecting films, and a light hole is formed in the center of the vibrating film; because the cavity structure is a cavity structure, the cavity structure is made of a semi-reflecting and semi-permeable material, and two opposite surfaces in the cavity of the cavity structure are provided with the reflecting films, the cavity structure is a Fabry-Perot cavity, when vibration does not occur, light received by the vibration sensor is transmitted in the Fabry-Perot cavity, and light signals form Gaussian rays in the Fabry-Perot cavity through the light transmitting holes of the vibration film, namely, the light signals all pass through the light transmitting holes, the light transmission quantity is detected from the light emitting end of the vibration sensor, when vibration needs to be detected, the vibration sensor is arranged on a plane to be detected, the vibration sensor resonates due to vibration of the platform to be detected, the position of the vibration film is changed, and the light transmission quantity of the light at the light emitting end of the vibration sensor is changed, obtaining the change of the light transmission quantity in the cavity structure through calculation, and obtaining vibration information according to the corresponding relation between the change of the light transmission quantity and the vibration information; because the cavity structure of this application is equivalent to fabry-perot chamber, when this fabry-perot chamber takes place the vibration, it is great to the influence of this vibration sensor's output light, and then makes this application more accurate to the detection of vibration information.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of an all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention;
FIG. 3 is a diagram illustrating a light beam propagation of another all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention;
FIG. 4 is a diagram illustrating another optical beam propagation of another all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention;
FIG. 5 is a diagram illustrating another optical beam propagation of another all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention;
Fig. 6 is a diagram illustrating an influence of a vibration signal on a resonant peak of another all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention.
Icon: 10-a cavity structure; 20-a cavity structure; 21-light hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are one embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In order to make the implementation of the present invention clearer, the following detailed description is made with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of an all-solid fabry-perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention; fig. 2 is a schematic structural diagram of another all-solid fabry-perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention; as shown in fig. 1 and 2, the present application provides an all-solid-state fabry-perot cavity embedded thin film type vibration sensor, which includes: cavity structures 10 and vibrating diaphragm, cavity structures 10 are cavity structures 20, and the material of cavity structures 10 is half anti-translucent material, and all is provided with the reflectance coating on two inside relative faces of cavity structures 10, and the line setting of two reflectance coatings of vibrating diaphragm perpendicular to is inside cavity structures 10, and the central point of vibrating diaphragm puts and is provided with light trap 21.
The shape of the cavity structure 10 of the present application may be a cuboid, or other regular shapes, which is not specifically limited herein, for the sake of clarity, the shape of the cavity structure 10 is described herein as a cuboid, the cavity structure 10 of the cuboid cavity structure 20, and the shape of the cavity inside the cuboid may be a cuboid, or other cylindrical shapes, which is not specifically limited herein, because the material of the cavity structure 10 is a semi-reflective and semi-transparent material, and two opposite surfaces inside the cavity of the cavity structure 10 are both provided with reflective films, the internal cavity of the cavity structure 10 is equivalent to a fabry-perot cavity, inside the cavity, a connecting line perpendicular to the two reflective films with the vibrating film is provided with the vibrating film in a direction perpendicular to the inside of the cavity structure 10, the vibrating film is a film-like structure, that is capable of generating vibration under the action of an external force, if the external force is vibration, the vibration film vibrates under the action of the vibration force, a light transmission hole 21 is arranged in the central position of the vibration film, the light transmission hole 21 is used for transmitting a light signal, the vibration film is equivalent to a diaphragm, the diameter of the light transmission hole 21 of the diaphragm film is equivalent to the diameter of an interference beam waist formed by light transmission in the Fabry-Perot cavity, the interference beam waist is used for limiting the transmission of light beams in the Fabry-Perot cavity and demodulating a sensitive vibration signal, when the external vibration signal needs to be detected, and when the vibration signal is not received, the light signal is used for irradiating the incident end of the light of the vibration sensor, the light signal enters the Fabry-Perot cavity through the wall of the cavity structure 10 and is reflected for multiple times in the Fabry-Perot cavity to form interference light, and the interference light passes through the light transmission hole 21 of the vibration film, then, the light is transmitted from the inside of the cavity structure 10, the light transmission quantity is detected from the light emitting end of the vibration sensor, when the vibration needs to be detected, the vibration sensor is arranged on a plane to be detected, the vibration of a platform to be detected enables the vibration sensor to resonate, the position of the vibration film is changed, the light transmission quantity of the light at the light emitting end of the vibration sensor is changed, the change of the light transmission quantity inside the cavity structure 10 is obtained through calculation, and the vibration information is obtained according to the corresponding relation between the change of the light transmission quantity and the vibration information; since the cavity structure 10 of the present application is equivalent to a fabry-perot cavity, when the fabry-perot cavity vibrates, the influence on the output light of the vibration sensor is large, so that the detection of the vibration information by the present application is more accurate; it should be noted that the correspondence between the change in the light transmission amount and the vibration information is obtained by experimental measurement, and is not specifically limited herein.
The light incident end of the vibration sensor is irradiated by using an optical signal, the optical signal enters the inside of the fabry-perot cavity through the wall of the cavity structure 10 and is reflected for multiple times inside the fabry-perot cavity to form interference light, the interference light passes through the light transmission hole 21 of the vibration film and then is transmitted out from the inside of the cavity structure 10, the light transmission quantity from the light emergent end of the vibration sensor is detected, when vibration needs to be detected, the vibration sensor is arranged on a plane to be detected, the vibration film and the plane to be detected are the best placement positions when being in parallel, the vibration sensitivity is highest, the position of the vibration film is changed under the action of the vibration signal, the light transmission quantity of the light at the emergent end of the vibration sensor is further changed, and the change of the light transmission quantity inside the cavity structure 10 is obtained through calculation, obtaining vibration information according to the corresponding relation between the change of the transmission quantity of the passing light and the vibration information; since the cavity structure 10 of the present application is equivalent to a fabry-perot cavity, when the fabry-perot cavity vibrates, the influence on the output light of the vibration sensor is large, so that the detection of the vibration information by the present application is more accurate; it should be noted that the corresponding relationship between the change in the light transmission amount and the vibration information is obtained by experimental measurement, and is not specifically limited herein.
Alternatively, the light-transmitting hole 21 is a generally circular hole, and the diameter of the hole determines the vibration sensing sensitivity, and specifically, the smaller the diameter of the hole, the higher the vibration sensing sensitivity, and the larger the diameter of the hole, the lower the vibration sensing sensitivity. The thickness of the diaphragm 20 determines the response bandwidth of the vibration sensor, different thicknesses can meet the frequency band requirements under different vibration conditions, and meanwhile, in order to suppress noise in the frequency band of the diaphragm 20, the diaphragm 20 is generally processed to be thin in the middle and thick at the periphery.
FIG. 3 is a diagram illustrating a light beam propagation of another all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention; fig. 4 is a diagram illustrating an influence of a vibration signal on a resonant peak of another all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention; as shown in fig. 3 and 4, there is a light beam in the middle of the cavity structure 10 in fig. 3, when there is no external vibration information, the diameter of the reflected light signal of the light signal passing through the diaphragm is equal to the diameter of the transmitted light signal, and when the diaphragm is deformed toward one end of the emitted light, the diameter of the reflected light signal of the light signal passing through the diaphragm is reduced, and the diameter of the transmitted light signal is reduced; referring to fig. 4, it can be clearly seen that the resonance curve affected by the vibration signal is shifted to the left relative to the resonance curve unaffected by the vibration signal, that is, the vibration sensor of the present application converts the vibration problem into the optical fiber signal shift problem, so that the relatively small vibration information can be measured more accurately and precisely.
FIG. 5 is a diagram illustrating another optical beam propagation of another all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention; FIG. 6 is a diagram illustrating another optical beam propagation of another all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor according to an embodiment of the present invention; as shown in fig. 5 and 6, a light beam is arranged in the middle of the cavity structure 10 in fig. 5 and 6, and in addition, when the whole structure is subjected to external vibration, the vibration sensor of the present application causes the vibration film to shift left and right along with the vibration direction, and the light transmission hole 21 in the center of the vibration film limits the beam waist of the interference light beam at different left and right positions, so as to cause drift of the fabry-perot cavity interference frequency spectrum, thereby demodulating the external vibration signal, the interior of the cavity structure 10 of the present application forms a "glass-air-glass" fabry-perot cavity structure, light is input from one end, after being transmitted into an air region, is reflected in the fabry-perot cavity to form resonance, reflected light is output from an incident end, transmitted light is output from the other end, a reflection film is plated on the wall of the fabry-perot cavity and the air interface, and under the action of the reflection film, the full width at half maximum of a resonance curve in the Fabry-Perot cavity is reduced, the Q value of the Fabry-Perot cavity is increased, and the detection sensitivity is improved. When an external vibration signal acts on the sensitive unit, firstly, the vibration film is deformed, the deformation of the vibration film can drive the small hole in the middle of the thin film to deform, so that the light transmission quantity in the Fabry-Perot cavity is limited, the drift of a Fabry-Perot cavity resonance curve is caused, and the detection of the vibration signal is realized through phase modulation, demodulation and the locking of resonance frequency; in general, referring to fig. 5, when the diaphragm is deformed toward one end of the incident light, the diameter of the reflected light signal of the optical signal passing through the diaphragm is not changed, and the diameter of the transmitted light signal is decreased, as shown in fig. 6.
Optionally, the vibration sensor of the present application may be of multiple specifications, and the vibration sensor of each specification is used for detecting vibrations of different degrees.
Optionally, the material of the cavity structure 10 is glass.
The material of the cavity structure 10 is glass, and the thickness or other geometric dimensions of the cavity structure 10 made of glass are selected according to actual needs, and are not specifically limited herein.
Optionally, the reflective films disposed on two opposite surfaces inside the cavity are reflection increasing films, and the reflection increasing films are made of high-reflection materials.
The reflection increasing film is made of a high-reflection material, is used for further increasing the reflection of the Fabry-Perot cavity light, and improves the accuracy of vibration detection by reducing the loss of optical signals.
Optionally, the material of the diaphragm is an elastic material.
The material of this vibrating diaphragm is elastic material, and elastic material's vibrating diaphragm takes place deformation under the effect of external force, vibrates, can also be when the external force disappears, the reconversion.
Optionally, the two surfaces of the cavity structure 10, which are provided with the reflective film, are arc surfaces.
The centers of the two arc surfaces are both inside the cavity structure 10, and the centers of the two arc surfaces are generally coincident.
Optionally, the vibration sensor further includes a second diaphragm, and a second light hole 21 is disposed in a central position of the second diaphragm, and is disposed inside the cavity structure 10 and parallel to the second diaphragm.
The light signal passing through the light hole 21 of the diaphragm passes through the light hole 21 of the second diaphragm, so that the detection of the vibration is more sensitive, the accuracy is higher, the material and other parameters of the diaphragm and the second vibration are the same, the shape and the radius of the second light hole 21 are selected according to actual needs, and no specific limitation is made here.
Optionally, the material of the second diaphragm is an elastic material.
The application provides a vibration sensor of embedded film formula in all solid-state fabry-perot chamber, vibration sensor includes: the cavity structure 10 is a cavity structure 20, the cavity structure 10 is made of a semi-reflective semi-permeable material, two opposite surfaces in the cavity of the cavity structure 10 are provided with reflecting films, the vibrating film is arranged in the cavity structure 10 perpendicular to a connecting line of the two reflecting films, and a light hole 21 is formed in the center of the vibrating film; because the cavity structure 10 is the cavity structure 20, the cavity structure 10 is made of a semi-reflective and semi-transparent material, and two opposite surfaces inside the cavity of the cavity structure 10 are both provided with the reflective film, the cavity structure 10 is a fabry-perot cavity, when no vibration occurs, light received by the vibration sensor propagates inside the fabry-perot cavity, and passes through the light transmission hole 21 of the vibration film, so that an optical signal forms a gaussian light in the fabry-perot cavity, that is, the optical signal completely passes through the light transmission hole 21, the light transmission quantity is detected from the light outgoing end of the vibration sensor, when the vibration needs to be detected, the vibration sensor is arranged on a plane to be detected, the vibration of the platform to be detected makes the vibration sensor resonate, so that the position of the vibration film is changed, and further the light transmission quantity of the light outgoing end of the vibration sensor is changed, obtaining the change of the light transmission quantity inside the cavity structure 10 through calculation, and obtaining vibration information according to the corresponding relation between the change of the light transmission quantity and the vibration information; because the cavity structure 10 of the present application is equivalent to a fabry-perot cavity, when the fabry-perot cavity vibrates, the influence on the output light of the vibration sensor is large, and further, the detection of the present application on the vibration information is more accurate.
The application provides a vibration sensing system of embedded film formula in all solid-state fabry-perot chamber, the system includes: the optical system comprises a light source, a spectrometer and any one of the above all-solid-state Fabry-Perot cavity embedded film type vibration sensors, wherein the light source and the spectrometer are respectively arranged on two sides of the surfaces of two reflecting films of a cavity structure 10 of the vibration sensor, the light source is used for generating optical signals and transmitting the optical signals to the inside of the cavity structure 10 of the vibration sensor, the optical signals are transmitted to the spectrometer through the cavity structure 10, the spectrometer is used for acquiring the spectrum of the emergent optical signals, the change of the optical transmission quantity inside the cavity structure 10 is obtained through the spectrum of the emergent optical signals, and the vibration information is obtained through the corresponding relation between the change of the optical transmission quantity and the vibration information.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. An all-solid-state fabry-perot cavity embedded thin film type vibration sensor, comprising: the cavity structure is a cavity structure, the material of the cavity structure is a semi-reflecting and semi-permeable material, the two opposite surfaces in the cavity of the cavity structure are provided with reflecting films, the two reflecting films are perpendicular to the vibrating films, the connecting line of the reflecting films is arranged in the cavity structure, and the central position of the vibrating films is provided with a light transmitting hole.
2. The all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to claim 1, wherein the material of the cavity structure is glass.
3. The all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to claim 2, wherein the reflection films disposed on two opposite surfaces inside the cavity are reflection increasing films, and the reflection increasing films are made of high reflection materials.
4. The all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to claim 3, wherein the material of the vibration film is an elastic material.
5. The all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to claim 4, wherein the cavity structure is provided with two arc-shaped surfaces of the reflective film.
6. The all-solid-state fabry-perot cavity embedded film type vibration sensor according to claim 5, wherein the vibration sensor further comprises a second diaphragm, a second light-transmitting hole is arranged at a central position of the second diaphragm, and the second diaphragm is arranged inside the cavity structure and parallel to the diaphragm.
7. The all-solid-state fabry-perot cavity embedded thin film type vibration sensor according to claim 6, wherein the material of the second diaphragm is an elastic material.
8. An all-solid-state fabry-perot cavity thin film embedded vibration sensing system, comprising: the all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor comprises a light source, a spectrometer and the all-solid-state Fabry-Perot cavity embedded thin film type vibration sensor as claimed in any one of claims 1 to 7, wherein the light source and the spectrometer are respectively arranged on two sides of the surfaces of two reflecting films of the cavity structure of the vibration sensor, the light source is used for generating optical signals and transmitting the optical signals to the inside of the cavity structure of the vibration sensor, the optical signals are transmitted to the spectrometer through the cavity structure, the spectrometer is used for obtaining the spectrum of the emergent optical signals and obtaining the change of the light transmission quantity in the cavity structure through the spectrum of the emergent optical signals, and the vibration information is obtained through the corresponding relation between the change of the light transmission quantity and the vibration information.
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| 基于MEMS技术的水平轴光纤加速度传感器;王小伟 等;《光电子·激光》;20150315;第26卷(第3期);第414-421页 * |
| 基于法布里-珀罗干涉技术的电压传感器的研究;张天瑜 等;《激光杂志》;20191025;第40卷(第10期);第1-5页 * |
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