CN110926668A - Pressure sensor for improving measurement accuracy by utilizing total reflection principle and application thereof - Google Patents
Pressure sensor for improving measurement accuracy by utilizing total reflection principle and application thereof Download PDFInfo
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- CN110926668A CN110926668A CN201911354320.6A CN201911354320A CN110926668A CN 110926668 A CN110926668 A CN 110926668A CN 201911354320 A CN201911354320 A CN 201911354320A CN 110926668 A CN110926668 A CN 110926668A
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- 238000005259 measurement Methods 0.000 title claims abstract description 17
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 claims abstract description 22
- 238000006073 displacement reaction Methods 0.000 claims abstract description 11
- 230000008859 change Effects 0.000 claims abstract description 8
- 239000012530 fluid Substances 0.000 claims description 13
- 230000005672 electromagnetic field Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 4
- 230000000452 restraining effect Effects 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
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- 125000006850 spacer group Chemical group 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
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- 230000009471 action Effects 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a pressure sensor for improving measurement accuracy by using a total reflection principle and application thereof, wherein the pressure sensor comprises: the bottom of the shell is provided with an opening, an elastic diaphragm fixed in an inner cavity of the shell, an incident laser generating assembly and a reflected laser detecting assembly; the size of the elastic diaphragm is matched with that of the inner cavity of the shell; the incident laser generating assembly is used for emitting laser to the surface of the elastic diaphragm, the reflected laser detecting assembly comprises a four-quadrant sensor and a rhombic prism arranged in front of the four-quadrant sensor, the four-quadrant sensor is used for receiving the laser reflected by the surface of the elastic diaphragm and obtaining the deformation of the elastic diaphragm caused by pressure change according to the displacement of a reflected laser spot; the rhombic prism is used for expanding the displacement of the reflected laser spot in the four-quadrant sensor. By using the laser reflection principle, the measurement precision, the resolution and the measurement stability are improved.
Description
Technical Field
The invention relates to the field of sensors, in particular to a pressure sensor for improving measurement accuracy by utilizing a total reflection principle and application thereof.
Background
Generally, the structure of the capacitive pressure sensor includes a capacitive structural component, a support structural component, a spring fixing component, and the like, wherein the capacitive structural component forms a capacitor by using a metal conductive diaphragm and a conductive coating on a ceramic substrate, and the metal conductive diaphragm is used as one electrode of the capacitor. When the pressure on the two sides of the metal diaphragm changes and pressure difference is generated, the metal diaphragm deforms, so that the distance between the metal diaphragm and the conductive layer on the ceramic substrate is changed, and the capacitance value is changed. The measurement of the pressure in the measured space is realized by measuring the capacitance value.
In the above-described structure of the capacitive pressure sensor, the distance between the metal conductive diaphragm and the ceramic electrode is determined by the thickness of the spacer or spacers. The control of the spacing is dependent on the machining accuracy of one or more shims. Also, the geometry changes slightly over time or with changes in temperature. The coefficient of thermal expansion of the metal housing is typically greater than the coefficient of thermal expansion of the ceramic electrode. Thus, heating or cooling the capacitive sensor assembly may generate internal stresses within the assembly, thereby affecting the geometry, in particular the distance between the metal diaphragm and the ceramic fixed electrode. Mechanical stresses can build up to a certain extent during heating or cooling, and when the stresses are sufficiently great, the electrode and the housing can move relative to each other to relieve the stresses. This motion is referred to as "stick-slip" or "mechanical hysteresis". These stick-slip motions affect the geometry and can adversely affect the accuracy of the capacitive sensor assembly, are less repeatable, and cannot be predicted and compensated for. In addition, the capacitor structure assembly, the supporting structure assembly and the spring fixing assembly in the capacitor principle are complex in internal structure and assembly, the manufacturing difficulty is increased, and processing errors are easy to occur.
Disclosure of Invention
Technical problem to be solved
The problem of influence caused by hysteresis caused by different thermal expansion rates among components in the capacitance principle, and the problems that the internal structure and the components are complex, the manufacturing difficulty is increased, and the processing error is easy to occur.
(II) technical scheme
In order to solve the above problems, an aspect of the present invention provides a pressure sensor for improving measurement accuracy using a principle of total reflection, the pressure sensor including: the bottom of the shell is provided with an opening, an elastic diaphragm fixed in an inner cavity of the shell, an incident laser generating assembly and a reflected laser detecting assembly;
wherein the size of the elastic diaphragm is matched with that of the inner cavity of the shell, the incident laser generating assembly is used for emitting laser to the surface of the elastic diaphragm,
the reflected laser detection assembly comprises a four-quadrant sensor and a rhombic prism arranged in front of the four-quadrant sensor, the four-quadrant sensor is used for receiving laser reflected by the surface of the elastic diaphragm and obtaining deformation of the elastic diaphragm caused by pressure change according to the displacement of a reflected laser spot; the rhombic prism is used for expanding the displacement of the reflected laser spot in the four-quadrant sensor.
Optionally, the incident laser light generation assembly comprises a laser light source, an optical fiber and a collimation system.
Optionally, the rhombic prism comprises two reflecting surfaces which are parallel to each other and are used for totally reflecting the laser light entering the rhombic prism at least twice.
Optionally, the pressure sensor further comprises: the diaphragm limiting assembly is used for limiting the maximum deformation of the elastic diaphragm, and a through hole through which incident laser and reflected laser can pass is formed in the diaphragm limiting assembly.
Optionally, the elastic diaphragm is disposed between the diaphragm limiting assembly and the opening, and the diaphragm limiting assembly and the elastic diaphragm have the same fixing position in the inner cavity of the housing.
Optionally, the diaphragm limiting assembly is a curved surface.
Optionally, a cavity is formed between the inner surface of the diaphragm limiting assembly and the elastic diaphragm.
Optionally, the diameter of the through hole is 5-10 mm.
Another aspect of the invention provides a use of a pressure sensor as described above for measuring a pressure of a fluid.
A further aspect of the invention provides the use of a pressure sensor as described above for measuring fluid pressure in an environment with an electromagnetic field.
(III) advantageous effects
The invention has at least the following beneficial effects:
(1) the invention utilizes the laser reflection principle, can directly utilize the reflection ray angle of the ray on the diaphragm to represent the deformation quantity of the diaphragm, and does not need a capacitor structure component, a supporting structure component and a spring fixing component in the capacitor principle. Thus, the complex internal results and components required for the capacitive test principle are avoided in a sensor structure for measuring pressure using the laser reflection principle. The accumulation of assembly processing errors is reduced, and the influence caused by delay due to different thermal expansion rates between assemblies is avoided (namely, the stress caused by the difference of the thermal expansion rates between different assemblies is avoided), so that the measurement precision and stability are improved.
(2) Because the pressure sensor is directly communicated with the measured space in a close range, the fluid in the measured environment often has a strong electromagnetic field, and certain influence is brought to the detection of the micro capacitance signal in the pressure sensor. The invention utilizes the principle of laser reflection, so that light rays cannot be interfered by an electromagnetic field, and the anti-interference capability of the sensor is enhanced.
(3) The invention utilizes the diaphragm limiting component to limit and protect the diaphragm. Under the overload condition, the diaphragm is in complete contact with the diaphragm limiting assembly, and friction and tension generated by local contact cannot be caused.
(4) The invention utilizes the rhombic prism to enable the reflected light to be totally reflected for multiple times, increases the optical path and enlarges the angle difference of the light, thereby enlarging the displacement of the reflected light spot on the surface of the four-quadrant sensor. The measurement precision and the resolution ratio are improved.
Drawings
Fig. 1 is a schematic structural diagram of a pressure sensor for improving measurement accuracy by using a total reflection principle according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a rhombic prism structure in a pressure sensor utilizing the total reflection principle to improve measurement accuracy according to an embodiment of the present invention.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. It is to be understood that such description is merely illustrative and not intended to limit the scope of the present invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It is noted that the terms used herein should be interpreted as having a meaning that is consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense.
An embodiment of the present invention provides a pressure sensor for improving measurement accuracy by using the principle of total reflection, which is described below with reference to fig. 1,
the pressure sensor comprises the following 5 parts: the device comprises a shell 1, an elastic diaphragm 2, a diaphragm limiting component 3, an incident laser generating component 4 and a reflected laser detecting component 5.
Specifically, it comprises:
(1) a shell 1 with an opening 101 at the bottom, wherein the opening is arranged to allow fluid to enter;
(2) the elastic diaphragm 2 is fixed in the inner cavity of the shell 1; the size of the elastic diaphragm 2 is matched with the size of the inner cavity of the shell 1, so that fluid entering the inner cavity of the shell 1 through the opening 101 of the shell 1 is intercepted by the elastic diaphragm 2 and prevented from flowing into the inner cavity of the shell 1 on the other side of the elastic diaphragm 2, and therefore the fluid enters the inner cavity of the shell 1 through the opening 101 of the shell 1 and can deform the elastic diaphragm 2 under the action of pressure when contacting with the elastic diaphragm 2.
The shape of the housing 1 and the elastic diaphragm 2 is not limited in the embodiments of the present invention, for example, the housing 1 may be cylindrical, and the elastic diaphragm 2 may be planar and circular, in which case the diameter of the elastic diaphragm 2 matches with the inner diameter of the housing 1, and the elastic diaphragm 2 may be fixed on the inner wall of the housing 1 by welding.
(3) And the diaphragm limiting component 3 is also fixed in the inner cavity of the shell 1 and is used for limiting the maximum deformation amount of the elastic diaphragm 2.
Wherein. The elastic diaphragm 2 and the diaphragm limiting component 3 may be made of the same material, such as a metal material.
The elastic diaphragm 2 is arranged between the diaphragm limiting component 3 and the opening 101, as shown in fig. 1, the incident laser generating component 4 and the reflected laser detecting component 5 of the pressure sensor are both positioned above the diaphragm limiting component 3, namely in the direction away from the opening 101, so that a through hole 301 through which the incident laser and the reflected laser can pass is arranged on the diaphragm limiting component 3; the through hole 301 has a diameter of 5-10mm, and the preferred size allows for the passage of both incident and reflected laser light.
Through the cavity 6 formed between the inner surface of the diaphragm limiting component 3 and the elastic diaphragm 2, the deformation of the elastic diaphragm 2 under the condition of no overload can be realized. And because the diaphragm limiting component 3 is a curved surface, the diaphragm limiting component 3 and the elastic diaphragm 2 are at the same fixed position in the inner cavity of the shell 1, and the centripetal direction of the diaphragm limiting component 3 points to the elastic diaphragm 2. Under overload conditions, the elastic diaphragm 2 is in full contact with the diaphragm limiting assembly 3, and friction and tension generated by local contact cannot be caused. The diaphragm limiting component 3 limits the maximum deformation of the elastic diaphragm 2 and protects the elastic diaphragm 2.
In a possible way, the elastic diaphragm 2 can be fixed on the inner wall of the housing 1 by welding, so that the diaphragm limiting component 3 can be fixed on the inner wall of the housing 1 at the same welding position, and the centripetal direction of the diaphragm limiting component 3 is directed to the elastic diaphragm 2.
(4) And the incident laser generating assembly 4 is used for enabling laser to enter the surface of the elastic membrane 2 through the through hole 301 by the incident laser generating assembly 4. The incident laser light generating assembly 4 comprises a laser light source, an optical fiber and a collimating system. The laser generated by the laser source can be guided into the inner cavity of the shell of the pressure sensor through the optical fiber, and the continuous light beam is shaped through a collimation system arranged in the inner cavity of the shell, wherein the collimation system can be a collimation lens 401. The laser light source and the collimation system are not particularly limited in the embodiments of the present invention, and may be any one of the laser light source and the collimation system that can be applied to the embodiments of the present invention in the prior art. For example, the laser light source may be a laser emitter that emits laser light having a power of 5mW to 20 mW. The collimation system can be a micro optical collimation lens, and shapes the laser beam emitted by the laser emitter to generate a parallel beam with the diameter less than or equal to 1 mm.
(5) And the reflection laser detection component 5 is used for receiving the laser reflected by the surface of the elastic membrane 2 and obtaining the deformation of the elastic membrane 2 caused by the pressure change. The reflected laser detection assembly 5 includes a four-quadrant sensor 501, and a rhombic prism 502 disposed in front of the four-quadrant sensor 501. The four-quadrant sensor is used for receiving the laser reflected by the surface of the elastic diaphragm and obtaining the deformation of the elastic diaphragm caused by pressure change according to the displacement of the reflected laser spot; the rhombic prism is used for expanding the displacement of the reflected laser spot in the four-quadrant sensor.
The structure of the rhombic prism 502 is shown in fig. 2, and the rhombic prism 502 comprises two reflecting surfaces which are parallel to each other and are used for making the laser light reflected by the rhombic prism 502 totally reflect at least twice. That is, after the reflected light enters the rhombic prism 502, the reflected light is totally reflected a plurality of times on two parallel surfaces of the rhombic prism 502. The rhombic prism 502 totally reflects the reflected light for multiple times, increases the optical path, and enlarges the angle difference of the light, thereby enlarging the displacement of the reflected light spot on the surface of the four-quadrant sensor. The measurement precision and the resolution ratio are improved.
The four-quadrant sensor 501 can receive and calculate the offset position of the reflected light spot, so as to obtain the deformation of the elastic diaphragm 2 caused by the pressure change.
During operation, fluid gets into casing 1 inner chamber through opening 101 of casing 1, and when contacting with elastic diaphragm 2, can make elastic diaphragm 2 produce deformation under the pressure effect, during the laser that produces through laser source can lead into pressure sensor's casing 1 inner chamber through optic fibre, through setting up the collimation system to continuous light beam plastic in the casing inner chamber, laser takes place to reflect on elastic diaphragm 2 surface, and reflection angle should elastic diaphragm 2 deformation and change. The reflected laser is reflected for multiple times by the rhombic prism 502 to increase the optical path, and then is received by the high-precision four-quadrant sensor 501 to calculate the offset position of the reflected light spot, so that the deformation of the diaphragm caused by the pressure change is obtained.
In addition, another embodiment of the present invention provides an application of the pressure sensor described above for measuring a pressure of a fluid.
Yet another embodiment of the present invention provides the use of a pressure sensor as described above for measuring fluid pressure in an environment with an electromagnetic field. Because the pressure sensor is directly communicated with the measured space in a close range, the fluid in the measured environment often has a strong electromagnetic field, and certain influence is brought to the detection of the micro capacitance signal in the pressure sensor. The invention utilizes the principle of laser reflection, so that light rays cannot be interfered by an electromagnetic field, and the anti-interference capability of the sensor is enhanced.
In summary, the invention has at least the following beneficial effects:
(1) the invention utilizes the laser reflection principle, can directly utilize the reflection ray angle of the ray on the diaphragm to represent the deformation quantity of the diaphragm, and does not need a capacitor structure component, a supporting structure component and a spring fixing component in the capacitor principle. Thus, the complex internal results and components required for the capacitive test principle are avoided in a sensor structure for measuring pressure using the laser reflection principle. The accumulation of assembly processing errors is reduced, and the influence caused by delay due to different thermal expansion rates between assemblies is avoided (namely, the stress caused by the difference of the thermal expansion rates between different assemblies is avoided), so that the measurement precision and stability are improved.
(2) Because the pressure sensor is directly communicated with the measured space in a close range, the fluid in the measured environment often has a strong electromagnetic field, and certain influence is brought to the detection of the micro capacitance signal in the pressure sensor. The invention utilizes the principle of laser reflection, so that light rays cannot be interfered by an electromagnetic field, and the anti-interference capability of the sensor is enhanced.
(3) The invention utilizes the diaphragm limiting component to limit and protect the diaphragm. Under the overload condition, the diaphragm is in complete contact with the diaphragm limiting assembly, and friction and tension generated by local contact cannot be caused.
(4) The invention utilizes the rhombic prism to enable the reflected light to be totally reflected for multiple times, increases the optical path and enlarges the angle difference of the light, thereby enlarging the displacement of the reflected light spot on the surface of the four-quadrant sensor. The measurement precision and the resolution ratio are improved.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A pressure sensor for improving measurement accuracy using the principle of total reflection, comprising: the device comprises a shell (1) with an opening (101) arranged at the bottom, an elastic diaphragm (2) fixed in an inner cavity of the shell (1), an incident laser generating assembly (4) and a reflected laser detecting assembly (5);
the size of the elastic diaphragm (2) is matched with that of the inner cavity of the shell (1); the incident laser generating component (4) is used for emitting laser to the surface of the elastic membrane (2),
the reflected laser detection assembly (5) comprises a four-quadrant sensor (501) and a rhombic prism (502) arranged in front of the four-quadrant sensor (501), wherein the four-quadrant sensor (501) is used for receiving laser reflected by the surface of the elastic diaphragm (2) and obtaining deformation of the elastic diaphragm (2) caused by pressure change according to the displacement of a reflected laser spot; the rhombic prism (502) is used for expanding the displacement of the reflected laser spot in the four-quadrant sensor (501).
2. A pressure sensor according to claim 1, characterized in that the rhombic prism (502) comprises two reflecting surfaces parallel to each other for total reflection of the reflected laser light entering the rhombic prism (502) at least twice.
3. A pressure sensor according to claim 1, wherein the incident laser light generating assembly (4) comprises a laser light source, an optical fiber and a collimating system.
4. The pressure sensor of claim 1, further comprising: the diaphragm limiting component (3) is used for limiting the maximum deformation amount of the elastic diaphragm (2), and a through hole (301) through which incident laser and reflected laser can pass is formed in the diaphragm limiting component (3).
5. Pressure sensor according to claim 4, characterized in that the elastic diaphragm (2) is arranged between a diaphragm limiting assembly (3) and an opening (101), the diaphragm limiting assembly (3) and the elastic diaphragm (2) being in the same fixed position in the inner cavity of the housing (1).
6. A pressure sensor according to claim 4, wherein the diaphragm limiting assembly (3) is curved.
7. A pressure sensor according to claim 4, wherein a cavity (6) is formed between the inner surface of the diaphragm restraining assembly (3) and the resilient diaphragm (2).
8. A pressure sensor according to claim 4, characterized in that the diameter of the through hole (301) is 5-10 mm.
9. Use of a pressure sensor according to claims 1-8 for measuring the pressure of a fluid.
10. Use of a pressure sensor according to claims 1-8 for measuring fluid pressure in an environment with an electromagnetic field.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911354320.6A CN110926668A (en) | 2019-12-24 | 2019-12-24 | Pressure sensor for improving measurement accuracy by utilizing total reflection principle and application thereof |
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| CN201911354320.6A CN110926668A (en) | 2019-12-24 | 2019-12-24 | Pressure sensor for improving measurement accuracy by utilizing total reflection principle and application thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113405703A (en) * | 2021-06-16 | 2021-09-17 | 哲弗智能系统（上海）有限公司 | Optical sensor and fire alarm device |
| CN114112172A (en) * | 2021-11-15 | 2022-03-01 | 中国航空工业集团公司北京长城计量测试技术研究所 | Micro pressure optical measurement method and calibration device |
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Cited By (4)
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| CN113405703A (en) * | 2021-06-16 | 2021-09-17 | 哲弗智能系统（上海）有限公司 | Optical sensor and fire alarm device |
| CN113405703B (en) * | 2021-06-16 | 2024-04-09 | 哲弗智能系统（上海）有限公司 | Optical sensor and fire alarm device |
| CN114112172A (en) * | 2021-11-15 | 2022-03-01 | 中国航空工业集团公司北京长城计量测试技术研究所 | Micro pressure optical measurement method and calibration device |
| CN114112172B (en) * | 2021-11-15 | 2024-06-04 | 中国航空工业集团公司北京长城计量测试技术研究所 | Micro pressure optical measurement method and calibration device |
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