CN104808266B - 微透镜形成方法和固态图像传感器制造方法 - Google Patents
微透镜形成方法和固态图像传感器制造方法 Download PDFInfo
- Publication number
- CN104808266B CN104808266B CN201510031490.6A CN201510031490A CN104808266B CN 104808266 B CN104808266 B CN 104808266B CN 201510031490 A CN201510031490 A CN 201510031490A CN 104808266 B CN104808266 B CN 104808266B
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- Prior art keywords
- microlens
- forming
- etching
- microlenses
- shape
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Links
- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 5
- 239000007787 solid Substances 0.000 title abstract 2
- 238000005530 etching Methods 0.000 claims abstract description 57
- 238000007493 shaping process Methods 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 5
- 239000004925 Acrylic resin Substances 0.000 claims description 2
- 229920000178 Acrylic resin Polymers 0.000 claims description 2
- 238000009826 distribution Methods 0.000 description 14
- 238000002834 transmittance Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 10
- 238000011161 development Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 206010034960 Photophobia Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000004061 bleaching Methods 0.000 description 1
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- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00278—Lenticular sheets
- B29D11/00298—Producing lens arrays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0018—Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0043—Inhomogeneous or irregular arrays, e.g. varying shape, size, height
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-012765 | 2014-01-27 | ||
| JP2014012765 | 2014-01-27 | ||
| JP2014-234005 | 2014-11-18 | ||
| JP2014234005A JP6012692B2 (ja) | 2014-01-27 | 2014-11-18 | マイクロレンズアレイの形成方法および固体撮像装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104808266A CN104808266A (zh) | 2015-07-29 |
| CN104808266B true CN104808266B (zh) | 2017-04-05 |
Family
ID=53679784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510031490.6A Active CN104808266B (zh) | 2014-01-27 | 2015-01-22 | 微透镜形成方法和固态图像传感器制造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9349771B2 (enExample) |
| JP (1) | JP6012692B2 (enExample) |
| CN (1) | CN104808266B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016103430A1 (ja) * | 2014-12-25 | 2016-06-30 | キヤノン株式会社 | ラインセンサ、画像読取装置、画像形成装置 |
| JP2016149417A (ja) | 2015-02-10 | 2016-08-18 | キヤノン株式会社 | 固体撮像装置、固体撮像装置の製造方法及び撮像システム |
| TWI734716B (zh) * | 2015-11-13 | 2021-08-01 | 日商凸版印刷股份有限公司 | 固態攝影元件及其製造方法 |
| JP6801230B2 (ja) * | 2016-05-24 | 2020-12-16 | 凸版印刷株式会社 | 固体撮像素子および電子機器 |
| GB2553559B (en) * | 2016-09-08 | 2022-06-29 | Bae Systems Plc | Diffusers for head up displays |
| JP6911353B2 (ja) * | 2016-12-28 | 2021-07-28 | 凸版印刷株式会社 | 固体撮像素子の製造方法 |
| CN114690282A (zh) * | 2020-12-31 | 2022-07-01 | 中芯集成电路（宁波）有限公司 | 镜片的制造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001174607A (ja) * | 1999-12-16 | 2001-06-29 | Ricoh Opt Ind Co Ltd | 曲面形成方法および光学素子 |
| JP2001201609A (ja) * | 2000-01-19 | 2001-07-27 | Nippon Sheet Glass Co Ltd | 平板状マイクロレンズの製造方法及びこの方法で製造された平板状マイクロレンズ |
| JP2003172804A (ja) | 2001-12-06 | 2003-06-20 | Matsushita Electric Ind Co Ltd | マイクロレンズアレイ及びその製造方法 |
| JP2004079932A (ja) * | 2002-08-22 | 2004-03-11 | Sony Corp | 固体撮像素子及びその製造方法 |
| JP4450597B2 (ja) * | 2003-09-24 | 2010-04-14 | 東京エレクトロン株式会社 | マイクロレンズの形成方法 |
| US7560295B2 (en) * | 2003-10-09 | 2009-07-14 | Aptina Imaging Corporation | Methods for creating gapless inner microlenses, arrays of microlenses, and imagers having same |
| JP4510613B2 (ja) * | 2004-12-28 | 2010-07-28 | パナソニック株式会社 | 固体撮像装置の製造方法 |
| CN100444381C (zh) | 2006-10-13 | 2008-12-17 | 中国科学院上海技术物理研究所 | 背向集成微透镜红外焦平面探测器及微透镜的制备方法 |
| JP4479834B2 (ja) | 2008-01-24 | 2010-06-09 | ソニー株式会社 | マイクロレンズの製造方法および固体撮像装置の製造方法 |
| JP5233404B2 (ja) * | 2008-05-19 | 2013-07-10 | 凸版印刷株式会社 | 濃度分布マスクの製造方法及びマイクロレンズアレイの製造方法 |
| JP2011029277A (ja) | 2009-07-22 | 2011-02-10 | Toshiba Corp | 固体撮像装置の製造方法および固体撮像装置 |
| US8670171B2 (en) | 2010-10-18 | 2014-03-11 | Qualcomm Mems Technologies, Inc. | Display having an embedded microlens array |
| US9765941B2 (en) * | 2011-11-29 | 2017-09-19 | Mitsubishi Chemical Corporation | Optical film, surface light emitting body, and method for producing optical film |
-
2014
- 2014-11-18 JP JP2014234005A patent/JP6012692B2/ja active Active
-
2015
- 2015-01-07 US US14/591,467 patent/US9349771B2/en active Active
- 2015-01-22 CN CN201510031490.6A patent/CN104808266B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6012692B2 (ja) | 2016-10-25 |
| US20150214270A1 (en) | 2015-07-30 |
| US9349771B2 (en) | 2016-05-24 |
| JP2015158663A (ja) | 2015-09-03 |
| CN104808266A (zh) | 2015-07-29 |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |