CN104785871B - A kind of preparation method of probe and preparation facilitiess - Google Patents
A kind of preparation method of probe and preparation facilitiess Download PDFInfo
- Publication number
- CN104785871B CN104785871B CN201510186082.8A CN201510186082A CN104785871B CN 104785871 B CN104785871 B CN 104785871B CN 201510186082 A CN201510186082 A CN 201510186082A CN 104785871 B CN104785871 B CN 104785871B
- Authority
- CN
- China
- Prior art keywords
- tinsel
- preparation
- probe
- cautery
- galvano
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000523 sample Substances 0.000 title claims abstract description 59
- 238000002360 preparation method Methods 0.000 title claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 29
- 239000010439 graphite Substances 0.000 claims abstract description 29
- 230000007797 corrosion Effects 0.000 claims abstract description 24
- 238000005260 corrosion Methods 0.000 claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 20
- 239000007770 graphite material Substances 0.000 claims abstract description 15
- 238000006243 chemical reaction Methods 0.000 claims abstract description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 36
- 239000000243 solution Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 18
- 229910052697 platinum Inorganic materials 0.000 claims description 18
- 238000006073 displacement reaction Methods 0.000 claims description 15
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 6
- 230000002085 persistent effect Effects 0.000 claims description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 4
- 238000011068 loading method Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 claims description 2
- 239000001110 calcium chloride Substances 0.000 claims description 2
- 229910001628 calcium chloride Inorganic materials 0.000 claims description 2
- 239000008151 electrolyte solution Substances 0.000 claims description 2
- 238000002386 leaching Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011780 sodium chloride Substances 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 3
- 238000006056 electrooxidation reaction Methods 0.000 description 13
- 230000005518 electrochemistry Effects 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000003518 caustics Substances 0.000 description 2
- 238000005660 chlorination reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010892 electric spark Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Abstract
The invention discloses a kind of preparation method of probe and preparation facilitiess, preparation method includes：1) tinsel is immersed in galvano-cautery solution；Wherein, the galvano-cautery solution is mounted in the container that graphite material is made, or is placed with the galvano-cautery solution around the cylindric graphite electrode wiry, and the graphite electrode is higher by liquid level；Wherein, a diameter of 20～75mm of crystal vessel or cylindric graphite electrode；2) between the tinsel and the container, or applied voltage as follows between the tinsel and the cylindric graphite electrode：First apply first sinusoidal voltage of 30～45V, application time guarantees that the corrosion rate of the part under the tinsel immersed in liquid level is 1/30～1/20mm/s；Then apply second sinusoidal voltage of 15～25V, application time is until corrosion reaction terminates；3) lifting tinsel departs from liquid level, completes the preparation of probe.The pattern of probe obtained in of the invention be cylindric, size in submicron order, and with larger draw ratio.
Description
【Technical field】
The present invention relates to the preparation method of probe and preparation facilitiess, more particularly to a kind of submicron order, big L/D ratio
The preparation method of probe and preparation facilitiess.
【Background technology】
Fine probe is widely used in scanning probe imaging, Multi-contact measurement, micro-nano manipulation and electrochemistry micro Process etc.
Field, the size and dimension of needle point directly determine the performance and range of application of probe.By taking electrochemistry micro Process as an example, mesh
The front probe for using mostly is micro fine cylindrical shape probe, by probe and the relative motion of workpiece, needed for electrochemistry Milling Process goes out
Part, therefore the size and shape of probe directly determine the micro-machined machining accuracy of electrochemistry and the minimum process limit.
The at present micro fine cylindrical probe used by electrochemistry micro Process, general prepared by electrochemical etching method.Electrification
The detail for learning corrosion process is had nothing in common with each other, but obtained cylindrical probe size is all more than 3 microns at present, it is impossible to be used for
In the electrochemistry micro Process of submicron or nanoscale structures.And the probe made by some electrochemical corrosive process, although can
Needle point is worked into nanoscale, but probe pattern is cone, and major diameter is smaller, it is impossible to added for electrochemistry micro Process etc.
The larger occasion of work depth.
【Content of the invention】
The technical problem to be solved is：Above-mentioned the deficiencies in the prior art are made up, a kind of preparation of probe is proposed
Method and preparation facilitiess, the pattern of obtained probe be cylindric, size in submicron order, and with larger draw ratio.
The technical problem of the present invention is solved by following technical scheme：
A kind of preparation method of probe, comprises the following steps：1) tinsel is immersed in galvano-cautery solution；Wherein, described
Galvano-cautery solution is mounted in the container that graphite material is made, or is placed with the galvano-cautery solution around described wiry
Cylindric graphite electrode, the graphite electrode are higher by liquid level；Wherein, the diameter of the container that the graphite material is made or described
A diameter of 20～75mm of cylindric graphite electrode；2) between the tinsel and the container, or in the metal
Applied voltage as follows between silk and the cylindric graphite electrode：First apply first sinusoidal ac of 30～45V
Pressure, application time guarantee that the corrosion rate of the part under the tinsel immersed in liquid level is 1/30～1/20mm/s；Then apply
Second sinusoidal voltage of 15～25V, application time is until corrosion reaction terminates；3) by process after tinsel lifting
Depart from liquid level, complete the preparation of probe.
A kind of preparation facilitiess of probe, including electrolyzer, displacement platform, alternating-current voltage source and control circuit；The electrolyzer
For the container that the graphite material of a diameter of 20～75mm is made, for loading galvano-cautery solution；The displacement platform is used for fixing
Preparing raw material tinsel, and scalable makes the tinsel be dipped in the galvano-cautery solution；The one of the alternating-current voltage source is defeated
Go out the end connection tinsel, another outfan connects the container, and control signal receiving terminal connects the control circuit；Described
Control circuit is used for controlling the first sinusoidal voltage that the alternating-current voltage source first exports 30～45V, and the persistent period guarantees institute
The corrosion rate for stating the part under tinsel immersed in liquid level is 1/30～1/20mm/s；Then the second of 15～25V of output is sinusoidal
Alternating voltage, the persistent period is until corrosion reaction terminates.
A kind of preparation facilitiess of probe, including electrolyzer, cylindric graphite electrode, displacement platform, alternating-current voltage source and control
Circuit；The electrolyzer is used for loading galvano-cautery solution；The displacement platform is used for fixing preparing raw material tinsel, and scalable
The tinsel is made to be dipped in the galvano-cautery solution；A diameter of 20～75mm of the cylindric graphite electrode, is placed on institute
State in galvano-cautery solution, and arrange around the tinsel；One outfan of the alternating-current voltage source connects the tinsel, separately
One outfan connects the cylindric graphite electrode, and control signal receiving terminal connects the control circuit；The control circuit is used
In the first sinusoidal voltage that the control alternating-current voltage source first exports 30～45V, the persistent period guarantees the tinsel leaching
The corrosion rate for entering subsurface part is 1/30～1/20mm/s；Then second sinusoidal voltage of 15～25V is exported, is held
The continuous time is until corrosion reaction terminates.
The beneficial effect that the present invention is compared with the prior art is：
The present invention probe preparation method and preparation facilitiess, by conductive wire be placed in cylindrical shape graphite electrode in or
In the container that the cylindric graphite material of person is made, in immersion electrochemical corrosion solution, using alternating current caustic solution, in corrosion
During through two step high-low voltages etch state, and strict control voltage size and etching time, so as to by the conduction
Wire erosion is into big L/D ratio, the cylindrical probe of submicron-scale.After tested, the draw ratio of obtained probe is 20～50
(draw ratio of the probe below existing micron order is generally less than 10), size is in 500nm～1 μm.The present invention can rapidly, easily
The making of the cylindrical needle of submicron order big L/D ratio is realized, process of preparing is simple, low cost, and it is raw to carry out batch
Produce.The size of the cylindrical needle prepared using the present invention is only relevant with electrochemical corrosion applied voltage and time, and processed
In journey, equipment precision is unrelated, relative to essences such as the relative displacements for needing strictly to control in some preparation methoies existing between two electrodes
Degree, the present invention can be easy to control to prepare the cylindrical probe in high-aspect-ratio micro nano structure electrochemistry micro Process.
【Description of the drawings】
Fig. 1 is the structural representation of the preparation facilitiess of the probe of the specific embodiment of the invention；
Fig. 2 be the specific embodiment of the invention embodiment 1 in obtained probe scanning electron microscope (SEM) photograph；
Fig. 3 be the specific embodiment of the invention embodiment 2 in obtained probe scanning electron microscope (SEM) photograph.
【Specific embodiment】
With reference to specific embodiment and compare accompanying drawing the present invention is described in further details.
As shown in figure 1, a kind of preparation facilitiess for preparing submicron order, big major diameter, cylindrical needle, including：Electrolysis
Pond 5, displacement platform 1, adjustable ac source 3 and control circuit (not shown).
Wherein, electrolyzer 5 is used for containing galvano-cautery solution 4.Galvano-cautery solution 4 can be by calcium chloride, sodium chloride, hydrogen-oxygen
Change the electrolytic solution of the electrolytes such as sodium, potassium hydroxide configuration.Electrolyzer 5 using graphite material make a diameter of 20～
The container of 75mm, such as graphite crucible, it is preferable that from high purity graphite crucible.A diameter of 20～75mm of crystal vessel is such as low
In 20mm or higher than 75mm, will be unable to satisfactory probe is obtained.In this embodiment, electrolyzer 5 is both to make
For container containing, simultaneously as using to electrode.
Displacement platform 1 is used for fixing conductive wire 2, and preferably conductive wire 2 is placed in the center of electrolyzer 5, hangs down
Directly in 4 liquid level of galvano-cautery solution.Conductive wire 2 can be the metal materials such as tungsten, platinum, it is preferable that conductive wire 2 is a diameter of
0.1～1mm.
Adjustable ac source 3, adjustable ac source 3 under the control of control circuit, to conductive wire 2 and electrolyzer 5
Between apply sinusoidal voltage so that conductive wire 2 is progressively corroded into big L/D ratio cylindrical probe by galvano-cautery solution 4.
Control circuit is divided into two stages for controlling whole electrochemical corrosion：First stage, control adjustable ac source 3
The virtual value of output sinusoidal voltage U1, sinusoidal voltage U1 persistently processes a period of time T1 in 30～45V；Second-order
Section, the control output sinusoidal voltage U2 of adjustable ac source 3, the virtual value of sinusoidal voltage U2 is in 15～25V, until corruption
Erosion reaction terminates.Wherein, each phase duration of adjustable ac source 3 and switching voltage are controlled automatically complete by control circuit
Into.The duration T 1 of U1 is determined according to the length of the part under tinsel immersed in liquid level, to guarantee the tinsel immersion
The corrosion rate of subsurface part is 1/20～1/30mm/s.For example, the length of the part under tinsel immersed in liquid level is
3mm, then the duration T 1 of the first sinusoidal voltage is 60～90s.
By above-mentioned preparation facilitiess, conductive wire is placed in the container that graphite material is made, and immersion electrochemical corrosion is molten
In liquid, using alternating current caustic solution, in corrosion process through two step high-low voltages etch state, and strict control voltage
Size and etching time so that the first stage occurs electrochemistry+electric spark dual corrosion, and it is rotten that second stage only occurs electrochemistry
Erosion, and circular cylinder graphite material container guarantees that tinsel is uniformly completed in two stage corrosion, the most conductive gold at last
Category silk corrodes into big L/D ratio, the cylindrical probe of submicron-scale.
In above-mentioned embodiment, the container that is made using graphite material had both played the effect of container containing, played to electricity again
The effect of pole.Alternative scheme is that common container selected by container, then using the stone of the cylindrical shape of a diameter of 20～75mm
Electrode ink directly plays the effect to electrode, and correspondingly, the alternating voltage of applying is then applied to tinsel and cylindric graphite electricity
Between pole.By the replacement scheme, big L/D ratio, the cylindrical probe of submicron-scale can be also obtained.
Preferably, above-mentioned graphite material is made container or a diameter of 20～40mm of the graphite electrode of cylindrical shape, when
When within the range, relative to the crystal vessel or graphite electrode of other sizes, preferably, periphery is more for the pattern of obtained probe
Uniformly.
The parameter of probe prepared by this specific embodiment is described with exemplary embodiment below.
Embodiment 1
The present embodiment electrochemical corrosion platinum filament, prepares submicron order big L/D ratio cylindrical probe, specifically includes following steps：
1) long 10～15mm is intercepted first, and the platinum filament of a diameter of 0.3mm is cleaned by ultrasonic respectively with acetone and deionized water,
Then rear clamping is dried up on displacement platform 1 with nitrogen.
2) displacement platform 1 is adjusted, platinum filament 2 is placed in the center of electrolyzer 5 and is immersed in galvano-cautery solution 4, platinum filament end
3mm under portion's immersed in liquid level.The present embodiment carries out the galvano-cautery solution 4 of electrochemical corrosion platinum filament for chlorination that mass fraction is 20%
Calcium solution.Electrolyzer 5 be circular graphitic crucible, a diameter of 40mm of graphite crucible.
3) adjustable ac source 3 is opened, applies sinusoidal voltage between platinum filament 2 and electrolyzer 5, platinum filament 2 is carried out
Electrochemical corrosion.Wherein, alternating current power supply 3 is controlled by control circuit so that specifically electrochemical corrosion condition is：By adjustable exchange
The sinusoidal voltage virtual value of power supply 3 is controlled to 35V, and frequency is 50Hz, persistently processes 60s；Then by adjustable ac source 3
The control of sinusoidal voltage virtual value switch to 20V, until corrosion processing terminates.
4) platinum filament 2 for having corroded is taken out after deionized water cleaning, drying, completes the preparation of cylindrical probe.
As shown in Fig. 2 obtained in the present embodiment probe tip microscopic appearance figure.It can be seen that the shape of probe
For cylindric, external corrosion is more uniform.In this specific embodiment, the size of obtained probe is 0.9 micron, major diameter
Than for 20.
Embodiment 2：The present embodiment is with the difference of embodiment 1：Length under tinsel immersed in liquid level, electrolyte
The parameters of electrochemical corrosion such as the virtual value of mass fraction, the diameter of graphite crucible and sinusoidal voltage different.
The present embodiment electrochemical corrosion platinum filament, prepares submicron order big L/D ratio cylindrical probe, specifically includes following steps：
1) long 10～15mm is intercepted first, and the platinum filament of a diameter of 0.3mm is cleaned by ultrasonic respectively with acetone and deionized water,
Then rear clamping is dried up on displacement platform 1 with nitrogen.
2) displacement platform 1 is adjusted, platinum filament 2 is placed in the center of electrolyzer 5 and is immersed in galvano-cautery solution 4, platinum filament end
3mm under portion's immersed in liquid level.The present embodiment carries out the galvano-cautery solution 4 of electrochemical corrosion platinum filament for chlorination that mass fraction is 30%
Calcium solution.Electrolyzer 5 be circular graphitic crucible, a diameter of 25mm of graphite crucible.
3) adjustable ac source 3 is opened, applies sinusoidal voltage between platinum filament 2 and electrolyzer 5, platinum filament 2 is carried out
Electrochemical corrosion.Wherein, alternating current power supply 3 is controlled by control circuit so that specifically electrochemical corrosion condition is：By adjustable exchange
The sinusoidal voltage virtual value of power supply 3 is controlled to 30V, and frequency is 50Hz, persistently processes 90s；Then by adjustable ac source 3
The control of sinusoidal voltage virtual value switch to 18V, until corrosion processing terminates.
4) platinum filament 2 for having corroded is taken out after deionized water cleaning, drying, completes the preparation of cylindrical probe.
As shown in figure 3, obtained in the present embodiment probe tip microscopic appearance figure.It can be seen that the shape of probe
For cylindric, external corrosion is more uniform.In this specific embodiment, the size of obtained probe is 0.6 micron, major diameter
Than for 24.
Above content is further description made for the present invention with reference to specific preferred implementation, it is impossible to assert
The present invention be embodied as be confined to these explanations.For general technical staff of the technical field of the invention,
Some replacements or obvious modification is made on the premise of without departing from present inventive concept, and performance or purposes are identical, should all be considered as
Belong to protection scope of the present invention.
Claims (10)
1. a kind of preparation method of probe, it is characterised in that：Comprise the following steps：1) tinsel is immersed in galvano-cautery solution；
Wherein, the galvano-cautery solution is mounted in the container that graphite material is made, or is placed with the galvano-cautery solution around institute
Cylindric graphite electrode wiry is stated, the graphite electrode is higher by liquid level；Wherein, the container that the graphite material is made straight
Footpath or a diameter of 20～75mm of the cylindric graphite electrode；2) between the tinsel and the container, or
Applied voltage as follows between the tinsel and the cylindric graphite electrode：First apply the first of 30～45V
Sinusoidal voltage, application time guarantee that the corrosion rate of the part under the tinsel immersed in liquid level is 1/30～1/20mm/
s；Then apply second sinusoidal voltage of 15～25V, application time is until corrosion reaction terminates；3) by described in after process
Tinsel lifting departs from liquid level, completes the preparation of probe.
2. the preparation method of probe according to claim 1, it is characterised in that：The step 1) in, the graphite material
The diameter of the container that makes or a diameter of 20～40mm of the cylindric graphite electrode.
3. the preparation method of probe according to claim 1, it is characterised in that：The step 1) in, the tinsel leaching
The length for entering subsurface part is 3mm；The step 2) in, the application time of first sinusoidal voltage is 60～
90s.
4. the preparation method of probe according to claim 1, it is characterised in that：The step 1) in, described wiry
A diameter of 0.1～1mm.
5. the preparation method of probe according to claim 1, it is characterised in that：The step 1) in, the tinsel is
Tungsten material or alloy platinum material.
6. the preparation method of probe according to claim 1, it is characterised in that：The step 1) in, the galvano-cautery is molten
Liquid is the electrolytic solution configured by calcium chloride, sodium chloride, sodium hydroxide, potassium hydroxide.
7. a kind of preparation facilitiess of probe, it is characterised in that：Including electrolyzer, displacement platform, alternating-current voltage source and control circuit；
The electrolyzer is the container that the graphite material of a diameter of 20～75mm is made, for loading galvano-cautery solution；
The displacement platform is used for fixing preparing raw material tinsel, and scalable makes the tinsel be dipped in the galvano-cautery solution
In；
One outfan of the alternating-current voltage source connects the tinsel, and another outfan connects the container, and control signal connects
Receiving end connects the control circuit；
The control circuit is used for controlling the first sinusoidal voltage that the alternating-current voltage source first exports 30～45V, when continuing
Between guarantee that the corrosion rate of part under the tinsel immersed in liquid level is 1/30～1/20mm/s；Then export 15～25V's
Second sinusoidal voltage, the persistent period is until corrosion reaction terminates.
8. preparation facilitiess of probe according to claim 7, it is characterised in that：The container that the graphite material is made straight
Footpath is 20～40mm.
9. a kind of preparation facilitiess of probe, it is characterised in that：Including electrolyzer, cylindric graphite electrode, displacement platform, alternating voltage
Source and control circuit；
The electrolyzer is used for loading galvano-cautery solution；
The displacement platform is used for fixing preparing raw material tinsel, and scalable makes the tinsel be dipped in the galvano-cautery solution
In；
A diameter of 20～75mm of the cylindric graphite electrode, is placed in the galvano-cautery solution, and around the metal
Silk is arranged；
One outfan of the alternating-current voltage source connects the tinsel, and another outfan connects the cylindric graphite electrode,
Control signal receiving terminal connects the control circuit；
The control circuit is used for controlling the first sinusoidal voltage that the alternating-current voltage source first exports 30～45V, when continuing
Between guarantee that the corrosion rate of part under the tinsel immersed in liquid level is 1/30～1/20mm/s；Then export 15～25V's
Second sinusoidal voltage, the persistent period is until corrosion reaction terminates.
10. preparation facilitiess of probe according to claim 9, it is characterised in that：The diameter of the cylindric graphite electrode
For 20～40mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510186082.8A CN104785871B (en) | 2015-04-17 | 2015-04-17 | A kind of preparation method of probe and preparation facilitiess |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510186082.8A CN104785871B (en) | 2015-04-17 | 2015-04-17 | A kind of preparation method of probe and preparation facilitiess |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104785871A CN104785871A (en) | 2015-07-22 |
| CN104785871B true CN104785871B (en) | 2017-03-15 |
Family
ID=53551301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510186082.8A Expired - Fee Related CN104785871B (en) | 2015-04-17 | 2015-04-17 | A kind of preparation method of probe and preparation facilitiess |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104785871B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106771377B (en) * | 2017-03-14 | 2023-07-07 | 贵州大学 | Connection structure for vertically fixing probe rod and probe rod fixing method |
| CN109709353A (en) * | 2019-01-11 | 2019-05-03 | 中国电子科技集团公司第三十八研究所 | A kind of the electrochemistry preparation facilities and preparation method of metal iridium needle point |
| CN109909569B (en) * | 2019-04-23 | 2021-04-13 | 中南大学 | Method and device for processing high-precision micropores |
| CN113073376B (en) * | 2021-03-03 | 2022-04-12 | 上海伟测半导体科技股份有限公司 | Application of corrosion powder in shaping platinum probe and shaping method of platinum probe |
| CN116543982B (en) * | 2023-03-23 | 2024-01-30 | 清华大学 | Microelectrode preparation method and microelectrode |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02274429A (en) * | 1989-04-18 | 1990-11-08 | Canon Inc | Method and device for manufacturing fine probe |
| JPH0671519A (en) * | 1991-10-22 | 1994-03-15 | Jeol Ltd | Manufacture of sharp tip |
| JPH1010154A (en) * | 1996-06-20 | 1998-01-16 | Fujitsu Ltd | Manufacture for probe unit |
| CN101701352A (en) * | 2008-12-15 | 2010-05-05 | 中国矿业大学(北京) | Method for preparing high-resolution emitter tungsten tip and device thereof |
| CN101696980A (en) * | 2009-10-27 | 2010-04-21 | 北京大学 | Method for preparing pinpoint of nano-tungsten probe |
| CN102181914A (en) * | 2011-03-30 | 2011-09-14 | 浙江大学 | Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio |
| CN102901846B (en) * | 2012-08-30 | 2015-10-28 | 中国科学院苏州纳米技术与纳米仿生研究所 | The device and method of preparation metal needle point |
| CN202989329U (en) * | 2012-12-06 | 2013-06-12 | 东南大学 | Device for preparing tungsten probe for electrical test of nanometer device |
| CN103680760B (en) * | 2013-11-12 | 2016-01-13 | 南京航空航天大学 | Sub-micron ball tip electrode preparation method |
| CN104096932B (en) * | 2014-07-09 | 2016-08-03 | 清华大学深圳研究生院 | The preparation method of a kind of electrochemistry micro Process electrode and preparation facilities |
| CN104101738B (en) * | 2014-07-10 | 2016-08-24 | 华中科技大学 | The preparation facilities of a kind of controlled big L/D ratio nano-probe and preparation method |
-
2015
- 2015-04-17 CN CN201510186082.8A patent/CN104785871B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN104785871A (en) | 2015-07-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104785871B (en) | A kind of preparation method of probe and preparation facilitiess | |
| CN105312692B (en) | Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode | |
| CN104001998B (en) | Array micro group electrode preparation method and the device optimized based on negative electrode | |
| CN107283010A (en) | Rotary ultrasonic electrode micro-electrochemical machining spark cutting processing unit (plant) and method | |
| CN105301288B (en) | A kind of device and method preparing metal needle point | |
| JP2015038242A (en) | Method of synthesizing metal foam, metal foam, method of uses thereof, and device comprising such metal foam | |
| CN108070883A (en) | A kind of method that pure nanometer cobalt array is prepared based on anodic oxidation aluminium formwork method | |
| CN109482990A (en) | The method that sodium nitrate ethylene glycol electrolyte is used for aluminium electrochemical micromachining | |
| CN103940747A (en) | Method for observing TA7 titanium alloy metallographic structure | |
| CN111591953B (en) | Needle-shaped microelectrode and preparation method thereof | |
| CN106637377B (en) | Nickel-base alloy electrolytic polishing liquid and its polishing method | |
| CN102339704A (en) | Alternating-current electrochemical corrosion method of field emission electron source | |
| CN103308371A (en) | Corrosion method for displaying austenitic stainless steel 310S continuous casting dendritic tissue | |
| CN104096932B (en) | The preparation method of a kind of electrochemistry micro Process electrode and preparation facilities | |
| CN109709353A (en) | A kind of the electrochemistry preparation facilities and preparation method of metal iridium needle point | |
| CN107723748B (en) | Application of the hollow plasma electrode of normal pressure in molten-salt electrolysis | |
| CN108866582A (en) | A kind of technique of electrodeposition process preparation roughening nickel foil | |
| CN108588810A (en) | A kind of preparation process of porous tantalum piece | |
| JP2006514712A (en) | Electro-polishing method for nickel-titanium alloy dental instruments | |
| KR101349354B1 (en) | anodic oxidation system using parallel operation process | |
| Choo et al. | Flexible tooling for localized electrochemical deposition with wire-electrodischarge grinding | |
| CN108060436B (en) | A method of nano-wire array is prepared using low-melting-point metal as bridging agent | |
| CN207816682U (en) | A kind of aluminum alloy extrusion section bar microscopic structure prepares metallographic specimen electrode in examining | |
| CN110158140A (en) | The fine hollow electrode side wall insulating layer preparation facilities and method of bipolarity electrophoresis | |
| CN104746122A (en) | Method for preparing high-quality anodized aluminum template by monitoring oxide layer removal time in real time |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170315 |