CN106771377B - Connection structure for vertically fixing probe rod and probe rod fixing method - Google Patents
Connection structure for vertically fixing probe rod and probe rod fixing method Download PDFInfo
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- CN106771377B CN106771377B CN201710149681.1A CN201710149681A CN106771377B CN 106771377 B CN106771377 B CN 106771377B CN 201710149681 A CN201710149681 A CN 201710149681A CN 106771377 B CN106771377 B CN 106771377B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
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Abstract
The invention discloses a connecting structure for vertically fixing a probe rod and a probe rod fixing method, which comprise a conductive plate (5) and a magnet (18), wherein the magnet (18) is adsorbed above the conductive plate (5), the conductive plate (5) is connected with an upper adjusting frame (4), the lower surface of the conductive plate (5) is a plane, and conductive adhesive (19) is coated on the lower surface of the conductive plate (5); the first step: manufacturing a long probe rod with one pointed end; and a second step of: manufacturing a long probe rod with a magnetic end tip; and a third step of: uniformly coating conductive adhesive on the lower surface of the conductive plate; fourth step: vertically fixing a long probe rod with a magnetic end tip on the lower surface of the conductive plate; the problem that the connection structure for fixing the probe rod in the prior art is difficult to realize the verticality of the short probe rod, the verticality of the probe axis is difficult to adjust by means of an instrument through the connection structure for fixing the probe rod or the upper adjusting frame; the probe axis is not vertical to the probe tip of the probe on the probe axis, and the manufacturing quality of the probe tip of the probe is affected.
Description
Technical Field
The invention relates to equipment for manufacturing a scanning tunneling microscope probe, in particular to a connecting structure for vertically fixing a probe rod and a probe rod fixing method.
Background
A common apparatus for fabricating a scanning tunneling microscope probe (see fig. 1) includes a bracket, a lower adjusting bracket, and a lower adjusting tray; the probe rod fixing device comprises an upper adjusting frame, a conductive plate, a probe clamp, a battery, a wire, a conductive ring and a beaker, wherein the conductive plate and the probe clamp form a connecting structure for fixing a probe rod; the lower adjusting frame and the upper adjusting frame are connected with the bracket, the conducting plate is connected with the upper adjusting frame, and the probe clamp is connected with the conducting plate; the conducting ring is arranged in the beaker, a hole is formed in the center of the stainless steel conducting ring, the conducting ring is fixed on the lower adjusting tray, and the lower adjusting tray is connected with the lower adjusting frame; the positive electrode and the negative electrode of the battery are respectively connected with the conductive plate and the conductive ring through leads.
When a common device for manufacturing a scanning tunneling microscope probe is used for manufacturing the scanning tunneling microscope probe, the upper end of a short probe rod is fixed on a conductive plate through a probe clamp, an aqueous solution of NaOH is arranged in a beaker, the lower end of the short probe rod stretches into the aqueous solution of NaOH and penetrates through a hole on a conductive ring, the short probe rod is a tungsten wire with the diameter of 0.1-1.5 mm, and the conductive ring is arranged in the aqueous solution of NaOH and near the liquid level of the aqueous solution of NaOH; after the short probe rod is electrolyzed, the tungsten filament in the conductive ring hole is sharpened, the short probe rod is changed into a short probe with one end tip, and the short probe with one end tip is the probe of the scanning tunneling microscope manufactured by a common device for manufacturing the scanning tunneling microscope probe.
In a common device for manufacturing a scanning tunneling microscope probe, the connection structure of a fixed probe rod is difficult to realize the verticality of a short probe rod, an instrument is generally needed to be used for adjusting the verticality of a probe axis through an upper adjusting frame or the connection structure of the fixed probe rod, and the verticality of the probe axis is difficult to adjust; the axis of the probe is not vertical, so that the tip of the probe is on the axis of the probe, and the manufacturing quality of the tip of the probe is affected.
The invention comprises the following steps:
the invention aims to solve the technical problems that: a coupling structure for vertically fixing a probe rod and a probe rod fixing method are provided, which are used for vertically fixing the probe rod in a device for manufacturing a scanning tunneling microscope probe, and improving the verticality of a probe axis.
The technical scheme of the invention is as follows:
the utility model provides a connection structure of vertical fixation probe stick, it includes current-conducting plate, magnet and conductive adhesive, and magnet adsorbs in the top of current-conducting plate, and current-conducting plate and last alignment jig link, and the lower surface of current-conducting plate is the plane, and conductive adhesive scribbles on the lower surface of current-conducting plate.
The tip of the long probe rod with the magnetic tip is adsorbed on the lower surface of the conductive plate, and conductive adhesive is arranged around the tip of the long probe rod with the magnetic tip; the surface of the needle point is provided with a magnetic material, and the height a of the magnetic material is 1-3 times of the diameter of the tungsten wire for manufacturing the probe.
The height of the conductive adhesive is smaller than the conical height of the tip of the long probe rod with the magnetic tip.
A method of vertically securing a probe rod of a coupling structure of vertically securing the probe rod, comprising:
the first step: manufacturing a long probe rod with one pointed end;
and a second step of: manufacturing a long probe rod with a magnetic end tip;
and a third step of: uniformly coating conductive adhesive on the lower surface of the conductive plate;
fourth step: a long probe rod with a magnetic end tip is vertically fixed on the lower surface of the conductive plate.
The method for manufacturing the long probe rod with one end tip comprises the following steps: taking a straight long probe rod, wherein the material of the long probe rod is the same as that of a probe of a scanning tunneling microscope to be manufactured, the diameter of the long probe rod is the same as that of the probe of the scanning tunneling microscope to be manufactured, the length of the long probe rod is 1-5 mm more than the shortest length required for the subsequent manufacturing of a tip short probe, and the long probe rod is arranged on a common device for manufacturing the probe of the scanning tunneling microscope to manufacture the tip long probe rod.
The method for manufacturing the long probe rod with the magnetic one end tip comprises the following steps: plating the magnetic material on the tip of the long probe rod with one end tip by using an electroplating method, and magnetizing the magnetic material plated on the tip to obtain the long probe rod with one end tip.
The method for uniformly coating the conductive adhesive on the lower surface of the conductive plate comprises the following steps: and uniformly coating the conductive adhesive on the lower surface of the conductive plate, wherein the height of the conductive adhesive is smaller than the conical height of the tip of the long probe rod with the magnetic tip.
The method for vertically fixing the long probe rod with the magnetic one end tip on the lower surface of the conductive plate comprises the following steps: and inserting the tip of the long probe rod with the magnetic one end tip into the conductive adhesive and contacting with the lower surface of the conductive plate, curing the conductive adhesive after the probe axis of the long probe rod with the magnetic one end tip is vertical, and then adding the conductive adhesive at the tip of the long probe rod with the magnetic one end tip and curing successively.
The invention has the beneficial effects that:
on the basis of a common device for manufacturing a scanning tunneling microscope probe, the connecting structure of the fixed probe rod is changed into the connecting structure of the vertical fixed probe rod, so that the device for manufacturing the scanning tunneling microscope probe with the connecting structure of the vertical fixed probe rod is formed; in the device for manufacturing the scanning tunnel microscope probe with the connection structure of the vertical fixing probe rod, the magnet adsorbs the tip of the long probe rod with the magnetic one end tip on the bottom surface of the conductive plate, the long probe rod with the magnetic one end tip is adhered to the bottom surface of the conductive plate by using conductive adhesive around the tip, the tip of the long probe rod with the magnetic one end tip is adsorbed on the bottom surface of the conductive plate and then rotates around the tip to a posture with a heavy straight probe axis under the action of gravity, and the vertical fixing of the probe rod is realized after the conductive adhesive is solidified.
The invention is characterized in that:
1. after the probe rod is vertically fixed, the axis of the probe is vertical to the ground and the liquid level of the NaOH aqueous solution in the beaker, so that the probe tip of the probe obtained by electrolysis is on the axis of the probe.
2. The connection structure of the vertical fixing probe rod is simple, and a special mechanism and instrument for adjusting the vertical posture of the probe rod are not needed when the probe rod is vertically fixed.
3. In the long probe rod with the magnetic one end tip is vertically fixed on the lower surface of the conductive plate, the long probe rod with the magnetic one end tip rotates around the needle tip under the action of gravity, the resistance moment of the needle tip is small, the height of conductive adhesive at the needle tip is small, the resistance moment of the conductive adhesive is small, and the perpendicularity of the probe axis is improved.
Drawings
FIG. 1 is a schematic diagram of a conventional apparatus for fabricating a scanning tunneling microscope probe and a probe with a short tip;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
FIG. 3 is a short probe rod of FIG. 1;
FIG. 4 is a tip short probe;
FIG. 5 illustrates the fabrication of a long probe rod with a tip on a conventional apparatus for fabricating a scanning tunneling microscope probe;
FIG. 6 is a long probe rod of FIG. 5;
FIG. 7 is a long probe rod with one tip;
FIG. 8 is a magnetic one-end-tipped long probe stick;
FIG. 9 is a schematic diagram of an apparatus for fabricating a scanning tunneling microscope probe having a coupling structure for vertically securing a probe rod and a coupling structure for vertically securing a probe rod;
FIG. 10 is a view of a vertically fixed magnetic one-tipped long probe rod on the lower surface of a conductive plate;
FIG. 11 is a schematic illustration of a two-terminal tip probe fabricated with a device for fabricating a scanning tunneling microscope probe having a coupling structure for vertically securing the probe rod;
FIG. 12 is a schematic view of a two-terminal short probe vertically fixed under a conductive plate;
FIG. 13 is a view of the attachment of the two-terminal short probe of FIG. 12 to a conductive plate;
fig. 14 is a view of the two-terminal short probe of fig. 13.
The specific embodiment is as follows:
in the drawings of the specification: 1, a bracket; 2, a lower adjusting frame; 3, adjusting the tray downwards; 4, an adjusting frame is arranged on the upper part; 5 conductive plates; 6, a probe clamp; 7 short probe rod; 8 probe axis; 9, a battery; 10 wires; 11 conductive rings; a 12 beaker; 13 an electrolyte; 14 a tip-short probe; 15 long probe bars; 16 a long probe rod with one pointed end; 17 a long probe rod with a magnetic end tip; 18 magnets; 19 conductive adhesive; 20 two-end tip short probes; a height of the magnetic material.
In the invention, the short probe rod, the long probe rod with one end tip and the long probe rod with one end tip with magnetism are all probe rods, and the short probe with one end tip and the short probe with two ends tip are all probes.
The common device for manufacturing the scanning tunnel microscope probe and the short probe with one end tip are shown in figures 1-4; making a long probe rod with one end tip on a common device for making a scanning tunnel microscope probe, as shown in figures 5-7; the long probe rod with the magnetic one-end tip is shown in fig. 8; an apparatus for fabricating a scanning tunneling microscope probe having a coupling structure of a vertically fixed probe rod and a coupling structure of a vertically fixed probe rod is shown in fig. 9; vertical fixing band on lower surface of conductive plate the magnetic long probe rod with one pointed end is shown in fig. 10; the two-end tip short probe is fabricated using an apparatus for fabricating a scanning tunneling microscope probe having a coupling structure for vertically fixing a probe rod as shown in fig. 11-14.
In the coupling structure and method of the vertically fixed probe rod, the short probe rod 7, the long probe rod 15, the one-end-tip long probe rod 16 and the one-end-tip long probe rod 17 with magnetism are all probe rods, and the one-end-tip short probe 14 and the two-end-tip short probe 20 are all probes.
In the coupling structure and method of the vertical fixing probe rod, the apparatus (see fig. 9) for manufacturing the scanning tunneling microscope probe having the coupling structure of the vertical fixing probe rod comprises a bracket 1, a lower adjusting bracket 2, a lower adjusting tray 3, an upper adjusting bracket 4, a conductive plate 5, a battery 9, a wire 10, a conductive ring 11, a beaker 12, a magnet 18 and a conductive adhesive 19, wherein the conductive plate 5, the magnet 18 and the conductive adhesive 19 form the coupling structure of the vertical fixing probe rod; the lower adjusting frame 2 and the upper adjusting frame 4 are connected with the bracket 1, the magnet 18 is adsorbed above the conductive plate 5, the conductive plate 5 is connected with the upper adjusting frame 4, the lower surface of the conductive plate 5 is a plane, and the conductive adhesive 19 is coated on the lower surface of the conductive plate 5; the center of the stainless steel conducting ring 11 is provided with a hole, the conducting ring 11 is fixed on the lower adjusting tray 3, the lower adjusting tray 3 is connected with the lower adjusting frame 2, and the conducting ring 11 is arranged in the beaker 12; the positive and negative electrodes of the battery 9 are connected to the conductive plate 5 and the conductive ring 11, respectively, via leads 10.
In the connection structure and method of the vertical fixed probe rod, the tip of the long probe rod 17 with a magnetic tip is adsorbed on the lower surface of the conductive plate 5, and the periphery of the tip of the long probe rod 17 with a magnetic tip is provided with adhesive conductive adhesive 19; the long probe rod 17 with a magnetic tip is a tungsten wire with a tip at one end for manufacturing a probe, the surface of the tip is provided with a magnetic material with magnetism, and the height a of the magnetic material is 1-3 times of the diameter of the tungsten wire for manufacturing the probe.
In the coupling structure and method of vertically fixing the probe rod, the height of the conductive paste 19 solidified for the first time is smaller than the conical height of the tip of the long probe rod 17 with one end tip having magnetism.
In a coupling structure and method of vertically fixing a probe rod, a method and steps of vertically fixing a probe rod:
the first step: a long probe rod with one end tip was fabricated on a common apparatus for fabricating a scanning tunneling microscope probe (see FIG. 5).
Taking a straight long probe rod 15, wherein the material of the long probe rod 15 is the same as that of a probe of a scanning tunneling microscope to be manufactured, the diameter of the long probe rod 15 is the same as that of the probe of the scanning tunneling microscope to be manufactured, the length of the long probe rod 15 is 1 mm to 5mm more than the shortest length required for the subsequent manufacturing of the one-end-tip short probe 14, and the long probe rod 15 is installed on a common device for manufacturing the scanning tunneling microscope probe to manufacture the one-end-tip long probe rod 16.
If a probe of a scanning tunneling microscope for manufacturing a tungsten wire with a diameter of 0.5mm is to be manufactured, a long probe rod 15 is taken as a straight tungsten wire with a diameter of 0.5mm, and the length of the long probe rod 15 is 1.5mm more than the shortest length required for subsequently manufacturing a tip-short probe 14.
And a second step of: and manufacturing a long probe rod with a magnetic end tip.
The magnetic material is plated on the tip of the long probe rod 16 with one end tip by electroplating, and the magnetic material plated on the tip is magnetized to obtain the long probe rod 17 with one end tip (see fig. 8).
And a third step of: a conductive paste is uniformly coated on the lower surface of the conductive plate (see fig. 9).
The conductive adhesive 19 is uniformly coated on the lower surface of the conductive plate 5, the height of the conductive adhesive 19 is smaller than the conical height of the tip of the long probe rod 17 with the magnetic tip, and the height of the conductive adhesive 19 is as low as possible.
Fourth step: a long probe rod with a magnetic one-end tip is vertically fixed on the lower surface of the conductive plate (see fig. 10).
The tip of the long probe rod 17 with the magnetic tip is inserted into the conductive adhesive 19 and is contacted with the lower surface of the conductive plate 5, and after the probe axis 8 of the long probe rod 17 with the magnetic tip is vertical, the conductive adhesive 19 is cured, which is the conductive adhesive 19 cured for the first time; after the conductive adhesive 19 is cured for the first time, in order to enhance the connection between the long probe rod 17 with the magnetic tip and the conductive plate 5, the conductive adhesive 19 can be added at the tip of the long probe rod 17 with the magnetic tip and cured, and the conductive adhesive 19 can be added at the tip of the long probe rod 17 with the magnetic tip for multiple times and cured successively.
After vertically fixing the long probe rod 17 with one magnetic end tip on the lower surface of the conductive plate 5, the long probe rod 17 with one magnetic end tip is vertically fixed on the device for manufacturing the scanning tunneling microscope probe with the connection structure of the vertically fixed probe rod, namely, the vertically fixed probe rod is realized.
After the probe rod is vertically fixed, the probe can be manufactured on a device for manufacturing a scanning tunneling microscope probe, which is provided with a connecting structure for vertically fixing the probe rod, and the method and the steps are as follows:
the first step: the two-end tip short probe is manufactured by using a device for manufacturing a scanning tunneling microscope probe, which is provided with a connecting structure for vertically fixing a probe rod.
The electrolyte 13 of aqueous solution of NaOH is added into a beaker 12, a conducting ring is arranged in the electrolyte 13 of aqueous solution of NaOH and near the liquid level of the electrolyte 13 of aqueous solution of NaOH, the lower end of a vertically fixed long probe rod 17 with one magnetic end tip extends into the electrolyte 13 of aqueous solution of NaOH and passes through a hole on the conducting ring 11, after being electrified, a device for manufacturing a scanning tunnel microscope probe with a connection structure of the vertically fixed probe rod is used for manufacturing a short probe 20 with two ends tip (see figure 11), the lower end of the long probe rod 17 with one magnetic end tip and the long probe rod 17 with one magnetic end tip in the hole of the conducting ring 11 are gradually electrolyzed to form a needle tip, the long probe rod 17 with one magnetic end tip is changed into a short probe 20 with two ends tip, and the short probe 20 with two ends tip is vertically fixed below a conducting plate 5 (see figure 12).
And a second step of: and taking out the short probes with the two ends from the device plate with the vertical fixing probe rod connection structure for manufacturing the scanning tunnel microscope probe and adhering the short probes with the conductive plate.
The two-end tip short probes 20 are adhered to the conductive plate 5 through the conductive adhesive 19 to form adhesion between the two-end tip short probes and the conductive plate (see fig. 13), and after the conductive plate 5 is taken out from the device for manufacturing the scanning tunneling microscope probe with the connection structure for vertically fixing the probe rod, adhesion between the two-end tip short probes and the conductive plate is obtained.
And a third step of: and taking out the two-end tip short probes from the conductive plate.
The two-end tip short probes 20 are separated from the conductive plate 5 after the conductive paste 19 is dissolved in an organic solvent to obtain the two-end tip short probes 20 (see fig. 14), and the conductive plate 5 can be reused.
Fourth step: one-end short probe is cut from the two-end short probe.
The end of the two-end tip short probe 20, which is adhered to the conductive plate 5, is magnetic, and the magnetic part of the two-end tip short probe 20 is cut off to obtain one-end tip short probe 14 (see fig. 4), and the one-end tip short probe 14 is the probe of the manufactured scanning tunneling microscope.
The working principle of the vertical fixing probe rod is as follows: after the tip of the long probe rod 17 with the magnetic one end tip is inserted into the conductive adhesive 19 and is contacted with the lower surface of the conductive plate 5, the magnet 18 adsorbs the tip of the long probe rod 17 with the magnetic one end tip on the bottom surface of the conductive plate 5, meanwhile, the conductive adhesive 19 bonds the long probe rod 17 with the magnetic one end tip with the conductive plate 5, the long probe rod 17 with the magnetic one end tip rotates around the tip to a posture that the probe axis 8 is vertical under the action of gravity, the resistance moment of the tip is small, the height of the conductive adhesive 19 at the tip is small, and the resistance moment of the conductive adhesive 19 is also small, so that the probe axis 8 has high verticality; after the conductive adhesive 18 is solidified, the long probe rod 17 with the magnetic tip at one end is vertically fixed below the conductive plate 5, and the vertical fixation of the probe rod is also realized; the conductive paste 19 has conductivity, and the current of the conductive plate 5 flows into the long probe rod 17 with magnetic tip through the tip of the long probe rod 17 with magnetic tip and the conductive paste 19.
Claims (5)
1. A method of vertically fixing a coupling structure of a vertically fixed probe rod, the coupling structure comprising a conductive plate (5), characterized in that: the magnet (18) is adsorbed above the conductive plate (5), the conductive plate (5) is connected with the upper adjusting frame (4), the lower surface of the conductive plate (5) is a plane, and the conductive adhesive (19) is coated on the lower surface of the conductive plate (5); the needle tip of the long probe rod (17) with the magnetic one-end tip is adsorbed on the lower surface of the conductive plate (5), and conductive adhesive (19) is arranged around the needle tip of the long probe rod (17) with the magnetic one-end tip; the surface of the needle point is provided with a magnetic material, and the height a of the magnetic material is 1-3 times of the diameter of the tungsten wire for manufacturing the probe; the method for vertically fixing the probe rod comprises the following steps:
the first step: manufacturing a long probe rod with one pointed end;
and a second step of: manufacturing a long probe rod with a magnetic end tip;
and a third step of: uniformly coating conductive adhesive on the lower surface of the conductive plate;
fourth step: vertically fixing a long probe rod with a magnetic end tip on the lower surface of the conductive plate;
the method for vertically fixing the long probe rod with the magnetic one end tip on the lower surface of the conductive plate comprises the following steps: and inserting the needle tip of the long probe rod (17) with the magnetic one end tip into the conductive adhesive (19) and contacting with the lower surface of the conductive plate (5), curing the conductive adhesive (19) after the probe axis (8) of the long probe rod (17) with the magnetic one end tip is vertical, and adding the conductive adhesive (19) at the needle tip of the long probe rod (17) with the magnetic one end tip and sequentially curing.
2. A method of vertically securing a probe rod in a coupling structure of a vertically secured probe rod as set forth in claim 1, wherein: the height of the conductive adhesive (19) is smaller than the conical height of the tip of the long probe rod (17) with the magnetic tip.
3. A method of vertically securing a probe rod in a coupling structure of a vertically secured probe rod as set forth in claim 1, wherein: the method for manufacturing the long probe rod with one end tip comprises the following steps: taking a straight long probe rod (15), wherein the material of the long probe rod (15) is the same as that of a probe of a scanning tunneling microscope to be manufactured, the diameter of the long probe rod (15) is the same as that of the probe of the scanning tunneling microscope to be manufactured, the length of the long probe rod (15) is 1-5 mm more than the shortest length required for meeting the requirement of subsequently manufacturing an end tip short probe (14), and the long probe rod (15) is installed on a common device for manufacturing the scanning tunneling microscope probe to manufacture an end tip long probe rod (16).
4. A method of vertically securing a probe rod in a coupling structure of a vertically secured probe rod as set forth in claim 1, wherein: the method for manufacturing the long probe rod with the magnetic one end tip comprises the following steps: plating the magnetic material on the tip of the long probe rod (16) with one end tip by using an electroplating method, and magnetizing the magnetic material plated on the tip to obtain the long probe rod (17) with one end tip.
5. A method of vertically securing a probe rod in a coupling structure of a vertically secured probe rod as set forth in claim 1, wherein: the method for uniformly coating the conductive adhesive on the lower surface of the conductive plate comprises the following steps: the conductive adhesive (19) is uniformly coated on the lower surface of the conductive plate (5), and the height of the conductive adhesive (19) is smaller than the conical height of the tip of the long probe rod (17) with the magnetic tip.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710149681.1A CN106771377B (en) | 2017-03-14 | 2017-03-14 | Connection structure for vertically fixing probe rod and probe rod fixing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710149681.1A CN106771377B (en) | 2017-03-14 | 2017-03-14 | Connection structure for vertically fixing probe rod and probe rod fixing method |
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| CN106771377B true CN106771377B (en) | 2023-07-07 |
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| KR102005911B1 (en) * | 2017-11-28 | 2019-07-31 | 서강대학교산학협력단 | Method of producing large size of hydrogel prove and hydrogel prove thereof |
| CN118016377B (en) * | 2024-04-08 | 2024-06-28 | 国开启科量子技术(安徽)有限公司 | Method for preparing needle electrode of ion trap |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3317001B2 (en) * | 1994-03-16 | 2002-08-19 | 富士通株式会社 | Probe manufacturing method |
| JPH1010154A (en) * | 1996-06-20 | 1998-01-16 | Fujitsu Ltd | Manufacture for probe unit |
| KR100366701B1 (en) * | 1999-11-09 | 2003-01-06 | 삼성전자 주식회사 | Probe of scanning probe microscope having a field effect transistor channel and Fabrication method thereof |
| WO2007078316A2 (en) * | 2005-05-10 | 2007-07-12 | The Regents Of The University Of California | Tapered probe structures and fabrication |
| JP4614280B2 (en) * | 2005-10-25 | 2011-01-19 | セイコーインスツル株式会社 | Measuring probe and measuring probe manufacturing method |
| JP2009109411A (en) * | 2007-10-31 | 2009-05-21 | Hitachi Kenki Fine Tech Co Ltd | Probe, its manufacturing method, and probe microscope of scanning type |
| CN203025209U (en) * | 2013-01-09 | 2013-06-26 | 贵州大学 | Device for preparing pure-tungsten probe of tunnel scanning microscope |
| CN203479833U (en) * | 2013-09-30 | 2014-03-12 | 贵州大学 | Modification device for pure metal probe of scanning tunnel microscope |
| JP6261075B2 (en) * | 2014-02-28 | 2018-01-17 | 国立大学法人秋田大学 | Manufacturing method of probe for magnetic force microscope |
| CN104785871B (en) * | 2015-04-17 | 2017-03-15 | 清华大学深圳研究生院 | A kind of preparation method of probe and preparation facilitiess |
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