CN211577194U - STM probe batch preparation device - Google Patents

Abstract

The utility model discloses an STM probe batch preparation device, which comprises an installation bottom plate, a metal rod assembly and a metal ring assembly, wherein the metal rod assembly and the metal ring assembly are both arranged on the installation bottom plate, the metal rod assembly comprises a chuck fixing member and a plurality of metal rod chucks, the chuck fixing member is fixedly connected with the installation bottom plate, one end of each metal rod chuck is fixed on the chuck fixing member, a metal rod inserting hole is arranged in each metal rod chuck, a metal rod which can be used as an anode can be inserted and fixed in each metal rod inserting hole, the metal ring assembly comprises a metal ring fixing member and a plurality of metal rings which can be used as a cathode, the metal rings are fixedly connected with the metal ring fixing member, the number of the metal rings is equal to that of the metal rod chucks, the metal rod chucks and the metal rings are arranged in a one-to-one correspondence, the metal rods inserted into the metal rod chucks can, the metal ring fixing piece is fixedly connected with the mounting bottom plate. The probe can be prepared in batches, and the probe is time-saving, labor-saving and convenient to install and use.

Description

STM probe batch preparation device

Technical Field

The utility model belongs to the micro-machining field, concretely relates to STM probe batch preparation facilities.

Background

Scanning Tunneling Microscope (STM) is an instrument for detecting the surface structure of a substance by using the tunneling effect of quantum theory. The main principle is to measure the surface structure of a substance by the interaction between the probe tip and the atoms on the surface of the substance. Its discovery enables scientists to observe and manipulate individual atoms because its powerful functions make it of great significance and broad application prospects in the fields of surface science, material science, life science, and the like. Currently, there are various methods of making STM probes, such as electrochemical etching, mechanical cutting, and the like. Although numerous, the methods are all single preparation, time and labor consuming, and rely primarily on the experience of the operator. In order to solve the problem, a batch preparation device for mass production of STM probes is urgently needed.

SUMMERY OF THE UTILITY MODEL

In order to solve the problems that the existing STM probes mentioned in the background art are prepared separately, consume time and labor and mainly depend on the experience of an operator, the embodiment of the application realizes batch preparation by providing the STM probe batch preparation device.

The embodiment of the application provides an STM probe batch preparation device, which comprises an installation bottom plate, a metal rod assembly and a metal ring assembly, wherein the metal rod assembly and the metal ring assembly are both arranged on the installation bottom plate,

the metal rod assembly comprises a chuck fixing piece and a plurality of metal rod chucks, the chuck fixing piece is fixedly connected with the mounting base plate, one ends of the metal rod chucks are all fixed on the chuck fixing piece, a metal rod inserting hole is formed in each metal rod chuck, a metal rod which can be used as an anode can be inserted and fixed in each metal rod inserting hole,

the metal ring assembly comprises a metal ring fixing piece and a plurality of metal rings capable of being used as cathodes, the metal rings are fixedly connected with the metal ring fixing piece, the number of the metal rings is equal to that of the metal rod chucks, the metal rod chucks and the metal rings are arranged in a one-to-one opposite mode, metal rods inserted into the metal rod chucks can penetrate through the corresponding metal rings, and the metal ring fixing piece is fixedly connected with the installation bottom plate.

After the scheme is adopted, the metal ring is immersed into the electrolyte to form a liquid film, the metal rod is connected with the anode of a power supply, the metal ring is connected with the cathode of the power supply, the metal rod positioned at the liquid film is gradually thinned in electrochemical corrosion until the metal rod section positioned below the liquid film falls off due to gravity, and the fallen metal rod section is the probe to be prepared.

The improvement is further carried out, and the fluid infusion subassembly is located between bar assembly and the metal ring subassembly, and fixes in the corresponding metal ring that stretches into the metal ring subassembly of the corresponding income of bar assembly in the bar assembly insertion hole, and the fluid infusion subassembly includes the fluid infusion board, has seted up electrolyte in the fluid infusion board and has held the groove, and electrolyte holds and has seted up a plurality of fluid infusion holes one-to-one with the metal ring in the groove. The liquid supplementing assembly is arranged, so that electrolyte can be supplemented to the metal ring assembly in time.

In a further improvement, the distance between the metal ring component and the liquid supplementing component relative to the metal rod component is adjustable. So set up, when the preparation obtains lower floor's probe, can reduce the distance of metal ring subassembly and fluid infusion subassembly for the metal rod subassembly, continue to carry out electrochemical corrosion to the metal rod for can obtain many probes with the metal rod preparation.

The metal ring assembly is further improved, the metal ring assembly further comprises a metal ring assembly supporting piece and a metal ring sliding piece, the bottom of the metal ring assembly supporting piece is fixed on the installation bottom plate, a first sliding groove is formed in the metal ring assembly supporting piece, one end of the metal ring sliding piece is fixedly connected with the metal ring fixing piece, the other end of the metal ring sliding piece can slide up and down in the first sliding groove, and the metal ring sliding piece can be fixed on the metal ring assembly supporting piece through a metal ring assembly fastening piece. Through the arrangement of the first sliding groove and the metal ring sliding piece capable of sliding up and down in the first sliding groove, the distance between the metal ring component and the metal rod component can be adjusted through sliding the metal ring sliding piece.

The improved liquid supplementing assembly further comprises a liquid supplementing assembly supporting piece and a liquid supplementing plate sliding piece, the bottom of the liquid supplementing assembly supporting piece is fixed on the mounting bottom plate, a second sliding groove is formed in the liquid supplementing assembly supporting piece, one end of the liquid supplementing plate sliding piece is fixedly connected with the liquid supplementing plate, the other end of the liquid supplementing plate sliding piece can slide up and down in the second sliding groove, and the liquid supplementing assembly can be fixed on the liquid supplementing assembly supporting piece through a liquid supplementing assembly fastening piece. Through setting up the second spout and can be in the second spout gliding fluid infusion board slider from top to bottom to can adjust the distance of the relative metal bar subassembly of fluid infusion subassembly through slip fluid infusion board slider.

In a further improvement, the metal rod assembly further comprises a metal rod assembly supporting piece, the bottom of the metal rod assembly supporting piece is fixed on the installation bottom plate, and the chuck fixing piece is fixed on the metal rod assembly supporting piece.

In a further improvement, the probe collecting box is also included and is positioned below the metal ring component. The probe collecting box positioned below the metal ring component is arranged, so that the prepared probes can be directly collected in the probe collecting box when falling.

Compared with the prior art, the utility model discloses beneficial effect that can realize is at least as follows:

through setting up the metal bar chuck that a plurality of can fix the metal bar, set up the becket relative with metal bar chuck, a fixed metal bar in every metal bar chuck, the metal bar is as the positive pole, and the becket carries out electrochemical corrosion as the negative pole in electrolyte to realize preparing the probe in batches, labour saving and time saving, continuously add electrolyte to the becket through setting up the fluid infusion board, guarantee that electrochemical corrosion's lasts going on, guarantee the smooth preparation of probe. The preparation device is convenient to install and use.

Drawings

Fig. 1 is an overall structure schematic diagram of an STM probe batch fabrication apparatus provided by an embodiment of the present invention.

Fig. 2 is a schematic view of a metal bar clamp and a clamp mount in a metal bar assembly according to an embodiment of the present invention.

Fig. 3 is a schematic structural view of an inner metal ring assembly according to an embodiment of the present invention.

Fig. 4 is a schematic structural diagram of a metal ring, a metal ring fixing member and a metal ring sliding member of a metal ring assembly in a metal rod assembly according to an embodiment of the present invention.

Fig. 5 is a schematic structural diagram of a fluid infusion plate and a fluid infusion plate sliding member of a fluid infusion assembly in a metal rod assembly according to an embodiment of the present invention.

Fig. 6 is an enlarged view at a in fig. 1.

Fig. 7 is a schematic view of a mounting base plate according to an embodiment of the present invention.

Detailed Description

For a better understanding of the present invention, the following examples are provided to further illustrate the present invention, but the present invention is not limited to the following examples.

Example 1

Referring to fig. 1-7, the embodiment of the utility model provides a pair of STM probe batch preparation device, including mounting plate 1, metal rod subassembly 2, metal ring subassembly 3 and fluid infusion subassembly 4 all set up on mounting plate 1. The distance of metal ring subassembly 3 and fluid infusion subassembly 4 for metal rod subassembly 2 is adjustable for after will fixing in metal rod subassembly 2 the metal rod lower extreme obtains the probe through the electrochemical corrosion preparation, can be close to metal ring subassembly 3 and fluid infusion subassembly 4 toward metal rod subassembly 2 direction, continue to pass through the electrochemical corrosion preparation probe to the metal rod, so can only obtain many probes with every metal rod preparation through adjustment metal ring subassembly 3 and fluid infusion subassembly 4, and the simple operation.

The installation bottom plate 1 is placed on the ground or a workbench and used for bearing the metal rod assembly 2, the metal ring assembly 3 and the liquid supplementing assembly 4.

Referring to fig. 1, 2 and 6, the metal rod assembly 2 includes a clamp fixing member 21, a plurality of metal rod clamps 22 and a metal rod assembly supporting member 23, the metal rod assembly supporting member 23 is a cylindrical structure, a lower section of the metal rod assembly supporting member 23 is a square cylinder, an upper section is a cylinder, an outer diameter of the upper section is smaller than that of the lower section, the bottom of the metal rod assembly supporting member 23 is fixed on the mounting base plate 1 by bolts, the clamp fixing member 21 is a plate-shaped structure, a fixing through hole 211 is processed at one end of the clamp fixing member 21, an inner diameter of the fixing through hole 211 is slightly larger than that of the upper section of the metal rod assembly supporting member 23, and an inner diameter of the fixing through hole 211 is smaller than that of the lower section of the metal rod assembly supporting member 23, the clamp fixing member 21 is sleeved into the metal rod assembly supporting member 23 from top to bottom through the fixing through hole, i.e., to secure the collet fixture 21 to the metal rod assembly support 23. The metal rod chucks 22 are all cylindrical, one ends of all the metal rod chucks 22 are fixed on the chuck fixing member 21, a metal rod insertion hole is formed in the center of each metal rod chuck 22 along the axis direction of the metal rod chuck 22, and a metal rod 5 which can be used as an anode can be respectively inserted and fixed into each metal rod insertion hole. In this embodiment, the number of the metal rod clamps 22 is 32, the metal rod clamps 22 are distributed in the clamp fixing member 21 in an array of 4 rows and 8 columns, and the metal rod clamps 22 are arranged in an array, so that the metal rod clamps 22 and the clamp fixing member 21 can be conveniently processed. The metal rod assembly support 23 is made of a non-conductive non-metallic material, the clip fixing member 21 and the metal rod clip 22 are made of a conductive metallic material, in this embodiment, made of copper, and the anode of the power source is connected to the clip fixing member 21 and communicates with the metal rod via the metal rod clip 22.

Referring to fig. 1, 3, 4 and 6, the metal ring assembly 3 is located below the metal rod assembly 2, the metal ring assembly 3 includes a metal ring fixing member 31, a metal ring assembly supporting member 33, a metal ring sliding member 34, a plurality of metal rings 32 which can be one-to-one opposite to the metal rod chuck 22 and can be used as a cathode, and 4 metal ring fixing rods 35, 8 metal rings 32 are distributed on each metal ring fixing rod 35 at equal distances, one end of each of the 4 metal ring fixing rods 35 is fixed on the metal ring fixing member 31 at equal distances, and one end of each of the metal ring sliding members 34 is fixedly connected with the metal ring fixing member 31. The bottom of the metal ring assembly support 33 is fixed on the mounting base plate 1 through bolts, a plurality of first positioning holes 332 are formed in the metal ring assembly support 33 from top to bottom at equal intervals, a first sliding groove 331 is formed in the metal ring assembly support 33 along the length direction of the metal ring assembly support 33, the first positioning holes 332 are communicated with the first sliding groove 331, the other end of the metal ring sliding piece 34 can slide up and down in the first sliding groove 331, and the metal ring sliding piece 34 can be fixed on the metal ring assembly support 33 through the matching of the metal ring assembly fastener 36 and the first positioning holes 332, so that the metal ring 32 is fixed below the metal rod assembly 2. In this embodiment, the first runner 331 and the metal ring sliding member 34 are both T-shaped, and the metal ring assembly fastening member 36 is a bolt and a nut. The metal ring assembly support 33 is made of a non-conductive non-metallic material, and the metal ring fixing bar 35 and the metal ring fixing member 31 are made of a conductive metallic material, in this embodiment made of copper, and the cathode of the power source is connected to the metal ring fixing member 31 and communicates with each metal ring 32 through the metal ring fixing bar 35.

The metal rings 32 are disposed opposite to the metal rod holders 22 so that the bottom of the metal rod 5 fixed in each metal rod holder 22 can be inserted into one metal ring 32, so that electrochemical corrosion can be performed subsequently to prepare a probe.

The distance between the metal ring assembly and the metal rod assembly can be adjusted by fixing the metal ring sliding part 34 in the first positioning hole 332 at different positions, so that after the metal rod is positioned at the lower position part and is manufactured into a probe, the metal ring sliding part 34 is adjusted towards the top of the metal ring assembly supporting part 33, and the metal rod can be continuously subjected to electrochemical corrosion to prepare the probe of the next batch.

First locating hole 332's quantity is 5 in this embodiment, can carry out 5 electrochemical corrosion to every metal bar 5 through the fixed position of adjustment becket slider 34, fixes becket slider 34 when being located the first locating hole 332 of below, and what go on is first layer probe preparation, from down up, carries out second floor, third layer, fourth layer, fifth layer probe preparation in proper order. After each layer of probe preparation, 32 probes were obtained.

The metal rod may be made of tungsten, gold, silver, nickel, or the like, and in this embodiment, the metal rod is made of tungsten. The metal ring may be made of tungsten, nickel, gold, platinum, or the like, and the material used in this embodiment is tungsten, which is the same as the metal wire, so that the performance-price ratio is higher.

Referring to fig. 1, 5 and 6, the fluid infusion assembly 4 is used to add electrolyte to the metal ring 32 located below. The liquid supplementing assembly 4 is positioned between the metal rod assembly 2 and the metal ring assembly 3, and a metal rod fixed in the metal rod insertion hole can penetrate through the liquid supplementing assembly 4 and correspondingly extend into the metal ring 32 of the metal ring assembly 3. The fluid infusion assembly 4 comprises a fluid infusion plate 41, a fluid infusion assembly supporting piece 42 and a fluid infusion plate sliding piece 43, the bottom of the fluid infusion assembly supporting piece 42 is fixed on the mounting base plate 1 through bolts, a plurality of second positioning holes 422 are formed in the fluid infusion assembly supporting piece 42 from top to bottom at equal intervals, a second sliding groove 421 is formed in the fluid infusion assembly supporting piece 42 along the length direction of the fluid infusion assembly supporting piece 42, the second positioning holes 422 are communicated with the second sliding groove 421, one end of the fluid infusion plate sliding piece 43 is fixedly connected with the fluid infusion plate 41, the other end of the fluid infusion plate sliding piece 43 can slide up and down in the second sliding groove 421, and the fluid infusion plate sliding part 43 can be fixed on the fluid infusion assembly supporting part 42 through the matching of the fluid infusion assembly fastening part 44 and the second positioning hole 422, thereby securing the caul plate 41 between the metal rod assembly 2 and the metal ring assembly 3, the caul assembly fasteners 44 being bolts and nuts in this embodiment. The position, opposite to each metal rod chuck 22, of the liquid supplementing plate 41 is provided with a metal rod passing through groove 412, each metal rod 5 can pass through the metal rod correspondingly positioned below the metal rod passing through groove 412 and then extend into the corresponding metal ring 32, the liquid supplementing plate 41 is provided with an electrolyte containing groove 411, the electrolyte containing groove 411 and the metal rod passing through groove 412 are not communicated, a plurality of liquid supplementing holes 413 one-to-one corresponding to the metal rings 32 are formed in the electrolyte containing groove 411, a communicating dropper 45 is fixedly connected to the lower surface of the liquid supplementing plate 41 and positioned at each liquid supplementing hole, and the length of the communicating dropper 45 is slightly smaller than the distance between the metal rod assembly 2 and the metal ring assembly 3. The liquid supplementing assembly 4 is arranged on the metal rod assembly 2 and the metal ring assembly 3, so that the liquid supplementing assembly can conveniently add electrolyte to the metal ring assembly 3, and the electrochemical corrosion can be normally carried out. Electrolyte holds groove 411 is used for holding electrolyte, and the electrolyte of this embodiment is KOH solution. The distance between the fluid infusion assembly 4 and the metal rod assembly 2 can be adjusted by fixing the fluid infusion plate sliding piece 43 on the second positioning hole 422 located at different positions, so that when the metal ring sliding piece 34 needs to be fixed in the first positioning hole 332 located at different positions, the fixing position of the fluid infusion plate sliding piece 43 can be adjusted accordingly, and the fluid infusion assembly 4 can be located above the metal ring assembly 3 all the time.

Referring to fig. 1, the present embodiment further includes a probe collecting box 6, the probe collecting box 6 is located below the metal ring assembly 3 and placed on the mounting base plate 1, and the probe collecting box 6 is configured to receive the prepared probe. In another embodiment, a probe collecting box positioning frame 11 is fixedly arranged on the mounting base plate 1, referring to fig. 7, the shape of the probe collecting box positioning frame 11 is consistent with that of the probe collecting box 6, but the size of the probe collecting box positioning frame is larger than that of the probe collecting box 6, the probe collecting box positioning frame 11 is arranged to position the probe collecting box 6, the probe collecting box 6 only needs to be directly placed in the probe collecting box positioning frame 11 during use, and a prepared probe can just fall into the probe collecting box 6 when falling.

The sponge is laid in the probe collecting box 6, the falling probe can be buffered, the probe is prevented from being damaged when falling to the probe collecting box, the sponge can absorb residual electrolyte on the probe, and the subsequent influence of the electrolyte on the probe tip is reduced.

In the preparation apparatus provided in this embodiment, when a probe is prepared, the metal rings are first soaked in the electrolyte, so that a liquid film is formed in each metal ring 32, the metal ring sliding member 34 is fixed in the first positioning hole 332 located at the lowest position in the metal ring assembly supporting member 33, so as to fix the metal ring 32, the fluid infusion plate sliding member 43 is fixed in the second positioning hole 422 located at the lowest position, so as to fix the fluid infusion plate above the metal ring assembly 3, the tops of the 32 metal rods 5 are correspondingly inserted and fixed in the metal rod chuck 22, the chuck fixing member 21 is fixed on the metal rod assembly supporting member 23 in a sleeved manner, the bottom of each metal rod 5 sequentially penetrates through the corresponding metal rod, passes through the through groove 412 and the metal ring 32, passes through the anode for the metal rod 5, passes through the cathode for the metal ring, and is electrochemically etched, the metal rods in the liquid film are gradually thinned, until the metal rod section located below the liquid film falls off due to gravity and, completing the preparation of the first layer of probes, and turning off the power supply; moving the liquid supplementing plate sliding part 43 upwards to be fixed in the last second positioning hole 422, moving the metal ring sliding part 34 upwards to be fixed in the last first positioning hole 332, switching on a power supply to prepare a second layer of probes, and turning off the power supply after the preparation is finished; and sequentially completing the preparation of the probes of the third layer, the fourth layer and the fifth layer, and after the preparation of the probe of the fifth layer is completed, pulling out the rest metal rod from the metal rod chuck to obtain the probe of the sixth layer. The preparation device that this embodiment provided installs, dismantles conveniently, through setting up a plurality of metal rod chucks that can fix the metal rod and a plurality of becket that is relative with metal rod chuck, realizes the batch preparation to the probe.

The electrolyte in this example is a KOH solution of 0.5mol/L to 2 mol/L.

The utility model discloses the part that does not relate to all is the same with prior art or adopts prior art to realize.

The foregoing is only a preferred embodiment of the present invention and is not intended to limit the invention in any way. Various equivalent changes and modifications can be made by those skilled in the art based on the above embodiments, and all equivalent changes and modifications within the scope of the claims should fall within the protection scope of the present invention.

Claims (7)

1. The utility model provides a STM probe batch preparation facilities which characterized in that: comprises an installation bottom plate (1), a metal rod component (2) and a metal ring component (3), wherein the metal rod component (2) and the metal ring component (3) are both arranged on the installation bottom plate (1),

the metal rod assembly (2) comprises a clamp fixing piece (21) and a plurality of metal rod clamps (22), the clamp fixing piece (21) is fixedly connected with the mounting base plate (1), one ends of the metal rod clamps (22) are fixed on the clamp fixing piece (21), a metal rod inserting hole is formed in each metal rod clamp (22), a metal rod (5) which can be used as an anode can be inserted and fixed in each metal rod inserting hole,

the metal ring assembly (3) comprises a metal ring fixing piece (31) and a plurality of metal rings (32) capable of being used as cathodes, the metal rings (32) are fixedly connected with the metal ring fixing piece (31), the number of the metal rings (32) is equal to that of the metal rod chucks (22), the metal rod chucks (22) and the metal rings (32) are arranged in a one-to-one opposite mode, metal rods (5) inserted into the metal rod chucks (22) can penetrate through the corresponding metal rings (32), and the metal ring fixing piece (31) is fixedly connected with the installation bottom plate (1).

2. An STM probe batch fabrication apparatus as claimed in claim 1, wherein: still include fluid infusion subassembly (4), fluid infusion subassembly (4) are located between bar subassembly (2) and the metal ring subassembly (3), and fix in the corresponding becket (32) that stretches into the metal ring subassembly (3) of fluid infusion subassembly (4) can be passed to the bar in the bar insert hole, fluid infusion subassembly (4) are including fluid infusion board (41), it holds groove (411) to have seted up electrolyte in fluid infusion board (41), and electrolyte holds and has seted up in groove (411) a plurality of fluid infusion holes (413) one-to-one with becket (32).

3. An STM probe batch fabrication apparatus as claimed in claim 2, wherein: the distance between the metal ring component (3) and the liquid supplementing component (4) relative to the metal rod component (2) is adjustable.

4. An STM probe batch fabrication apparatus as claimed in claim 3, wherein: the metal ring assembly (3) further comprises a metal ring assembly support (33) and a metal ring sliding piece (34), the bottom of the metal ring assembly support (33) is fixed on the installation base plate (1), a first sliding groove (331) is formed in the metal ring assembly support (33), one end of the metal ring sliding piece (34) is fixedly connected with the metal ring fixing piece (31), the other end of the metal ring sliding piece (34) can slide up and down in the first sliding groove (331), and the metal ring assembly can be fixed on the metal ring assembly support (33) through a metal ring assembly fastening piece (36).

5. An STM probe batch fabrication apparatus as claimed in claim 3, wherein: fluid infusion subassembly (4) still include fluid infusion subassembly support piece (42) and fluid infusion board slider (43), fluid infusion subassembly support piece (42) bottom is fixed on mounting plate (1), second spout (421) have been seted up on fluid infusion subassembly support piece (42), fluid infusion board slider (43) one end and fluid infusion board (41) fixed connection, the other end of fluid infusion board slider (43) can slide from top to bottom in second spout (421), and accessible fluid infusion subassembly fastener (44) are fixed on fluid infusion subassembly support piece (42).

6. An STM probe batch fabrication apparatus as claimed in claim 1, wherein: the metal rod assembly (2) further comprises a metal rod assembly supporting piece (23), the bottom of the metal rod assembly supporting piece (23) is fixed on the installation bottom plate (1), and the chuck fixing piece (21) is fixed on the metal rod assembly supporting piece (23).

7. An STM probe batch fabrication apparatus as claimed in claim 1, wherein: the probe collecting box (6) is further included, and the probe collecting box (6) is located below the metal ring component (3).

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