JPH0671519A - Manufacture of sharp tip - Google Patents
Manufacture of sharp tipInfo
- Publication number
- JPH0671519A JPH0671519A JP27408091A JP27408091A JPH0671519A JP H0671519 A JPH0671519 A JP H0671519A JP 27408091 A JP27408091 A JP 27408091A JP 27408091 A JP27408091 A JP 27408091A JP H0671519 A JPH0671519 A JP H0671519A
- Authority
- JP
- Japan
- Prior art keywords
- tip
- electropolishing
- voltage
- manufacturing
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、走査型トンネル顕微鏡
（ＳＴＭ）の探針等のような先鋭チップの製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a sharpened tip such as a probe of a scanning tunneling microscope (STM).
【０００２】[0002]
【従来の技術】従来、ＳＴＭの探針は電解研磨により製
造されている。図６は従来の製造方法の例を示す図であ
り、線径 0.1〜 1ｍｍのタングステン等からなる線材１
をステンレス製の環２に通し、この環２が水酸化カリウ
ム１Ｎ〜２Ｎ水溶液３の液面につかるように配置し、電
源４を接続して電解研磨を行う。このとき線材１は環２
の近傍で集中的に研磨され、最終的に先端の尖った針と
なって水溶液中に切れ落ちる。この切れ落ちた針もしく
は残った方の針をＳＴＭの探針として使用している。2. Description of the Related Art Conventionally, the STM probe is manufactured by electrolytic polishing. FIG. 6 is a diagram showing an example of a conventional manufacturing method, which is a wire rod 1 made of tungsten or the like having a wire diameter of 0.1 to 1 mm.
Is passed through a ring 2 made of stainless steel, and the ring 2 is placed so as to come in contact with the liquid surface of an aqueous solution 3 of potassium hydroxide 1N to 2N, and a power source 4 is connected to perform electrolytic polishing. At this time, the wire rod 1 is the ring 2
Is intensively polished in the vicinity of, and eventually becomes a sharp-pointed needle, which falls into the aqueous solution. The broken needle or the remaining needle is used as the STM probe.
【０００３】[0003]
【発明が解決しようとする課題】ところで、探針の形状
は、図７に示すように主として線材１の切れ落ちる部分
１′に切断時にかかる下向きの荷重ｗと、電解研磨電流
ｉとによって決定され、図８に示すように探針の先端の
曲率半径ｒは下向きの荷重ｗが小さい程小さく、また収
束角θは電解研磨電流ｉが小さい程小さくなる。そし
て、ＳＴＭの探針としては、探針自体の共振周波数を上
げるために、根元では収束角θが大きく先端近くで収束
角θが小さくなっている形状が望ましく、また先端の曲
率半径ｒはなるべく小さくすることが必要である。By the way, the shape of the probe is determined mainly by the downward load w applied to the cut-off portion 1'of the wire 1 at the time of cutting and the electrolytic polishing current i as shown in FIG. As shown in FIG. 8, the radius of curvature r of the tip of the probe is smaller as the downward load w is smaller, and the convergence angle θ is smaller as the electrolytic polishing current i is smaller. In order to increase the resonance frequency of the probe itself, the STM probe preferably has a shape in which the convergence angle θ is large at the root and the convergence angle θ is small near the tip, and the radius of curvature r of the tip is as small as possible. It needs to be small.
【０００４】しかしながら、従来の製造方法において
は、切れ落ちる寸前での電解研磨電流の制御を手動で行
っているので、先端部の形状を常に一定にすることが非
常に困難であり、それに加えて線材１の線径はまちまち
であるばかりでなく、線材１の電解液３に浸漬される長
さも必ずしも一定ではないので、切れ落ちる際の下向き
の加重ｗはその都度異なるものであり、従って先端の曲
率半径ｒを小さくすることは非常に困難なものであっ
た。However, in the conventional manufacturing method, since the electropolishing current is controlled manually on the verge of being cut off, it is very difficult to always keep the shape of the tip portion constant. Not only are the wire diameters of the wire rod 1 different, but the length of the wire rod 1 immersed in the electrolytic solution 3 is not always constant, so the downward load w at the time of cutting off is different each time, and therefore the tip end It was very difficult to reduce the radius of curvature r.
【０００５】また、電解研磨においては線材１の研磨さ
れる部分の近傍に泡が発生するが、線材１′が切れ落ち
るときには線材１，１′に泡により横方向の応力が加わ
り、図９に示すように先端部が曲がってしまうという問
題も生じていた。Bubbles are generated in the vicinity of the portion to be polished of the wire rod 1 in the electrolytic polishing, but when the wire rod 1'cuts off, lateral stress is applied to the wire rods 1 and 1'by the bubbles, and as shown in FIG. There is also a problem that the tip portion is bent as shown.
【０００６】これに対して、小さな電解研磨電流を使用
して電解研磨を行えば、線材は非常にゆっくりした速度
で研磨されることになるので、先端の曲率半径ｒが小さ
い探針を製造することはできるが、その場合には探針の
先端部は細長の形状となり、その結果共振周波数が小さ
なものとなるので、望ましい探針を得ることはできない
ものである。On the other hand, if electropolishing is performed using a small electropolishing current, the wire rod is polished at a very slow speed, so that a probe tip having a small radius of curvature r is manufactured. However, in that case, the tip of the probe has an elongated shape, and as a result, the resonance frequency becomes small, so that the desired probe cannot be obtained.
【０００７】本発明は、上記の課題を解決するものであ
って、先端の曲率半径が小さく、且つ共振周波数の高い
探針を製造できる先鋭チップの製造方法を提供すること
を目的とするものである。An object of the present invention is to solve the above problems, and an object thereof is to provide a method for manufacturing a sharpened tip capable of manufacturing a probe having a small radius of curvature at the tip and a high resonance frequency. is there.
【０００８】[0008]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明の先鋭チップの製造方法は、第１には、金
属製線材の電解研磨により先鋭チップを製造する先鋭チ
ップの製造方法において、前記金属製線材の電解液に浸
漬される部分の先端部に浮きを取り付けた状態で当該線
材を電解研磨することを特徴とし、また、第２には、金
属製線材の電解研磨により先鋭チップを製造する先鋭チ
ップの製造方法において、電解研磨の開始後電解研磨電
流が所定の値まで低下したときに電解研磨用電源電圧を
最初に印加する電解研磨用電源電圧より小さい所定の電
圧に変更することを特徴とする。In order to achieve the above object, the method for manufacturing a sharpened tip of the present invention is, firstly, a method for manufacturing a sharpened tip for manufacturing a sharpened tip by electrolytic polishing a metal wire rod. In the above, the wire rod is electropolished in a state in which a float is attached to the tip of the portion of the metal wire rod that is immersed in the electrolytic solution. Secondly, the metal wire rod is sharpened by electropolishing. In the method of manufacturing a sharpened tip for manufacturing a tip, when the electropolishing current has decreased to a predetermined value after the start of electropolishing, the electropolishing power supply voltage is changed to a predetermined voltage that is smaller than the electropolishing power supply voltage that is initially applied It is characterized by doing.
【０００９】[0009]
【作用】電解研磨により探針を製造するに際して、研磨
される線材の電解液に浸漬される部分の先端部には浮き
が取り付けられる。これにより切れ落ちる線材部にかか
る下向きの加重を低下させることができるので、先端の
曲率半径ｒが小さい探針を製造することができる。When manufacturing the probe by electrolytic polishing, a float is attached to the tip of the portion of the wire to be polished that is immersed in the electrolytic solution. As a result, the downward load applied to the broken wire rod portion can be reduced, so that it is possible to manufacture a probe with a small radius of curvature r at the tip.
【００１０】また、電解研磨の開始時には電解研磨用電
源として所定の電源電圧が印加されるが、電解研磨電流
が所定の値まで低下したときには電解研磨用電源電圧を
最初に印加する電圧より小さい所定の電圧に変更され
る。これによって線材は、最初は大きな電流で急速に研
磨され、最後は小さな電流で徐々に研磨されることにな
って、収束角θが根元では大きく、先端近くでは小さ
い、共振周波数の高い探針を得ることができる。A predetermined power supply voltage is applied as a power supply for electropolishing at the start of electropolishing, but when the electropolishing current drops to a predetermined value, the power supply voltage for electropolishing is lower than a voltage initially applied. Is changed to the voltage of. As a result, the wire is polished rapidly with a large current at first, and gradually with a small current at the end, and a probe with a high resonance frequency with a large convergence angle θ at the base and small near the tip is used. Obtainable.
【００１１】[0011]
【実施例】以下、図面を参照しつつ実施例を説明する。Embodiments will be described below with reference to the drawings.
【００１２】図１は本発明に係る先鋭チップの製造方法
の一実施例を示す図であり、図中、９は電極、１０は浮
き、１１は電解研磨回路を示す。なお、図１において図
６に示すものと同じものに対しては同一の符号を付す。FIG. 1 is a diagram showing an embodiment of a method for manufacturing a sharpened tip according to the present invention. In the figure, 9 is an electrode, 10 is a float, and 11 is an electrolytic polishing circuit. In FIG. 1, the same components as those shown in FIG. 6 are designated by the same reference numerals.
【００１３】図１において、タングステン等からなる線
材１の電解液３に浸漬される部分の先端部には浮き１０
が取り付けられている。浮き１０は、電解液３中に切れ
落ちる線材部分の下向きの加重ｗを小さくし、以て先端
の曲率半径ｒを小さくするために取り付けられるもので
ある。浮き１０の構成例を図２に示す。図２において
は、タングステン等の適当な材料からなる棒状重り２
０、テフロン（登録商標）からなるチューブ２２、２３
及び浮力を有する部材からなる浮き部２１で構成され、
チューブ２２は浮き部２１の中心を貫通し、棒状重り２
０はチューブ２３の中心を貫通している。そして、チュ
ーブ２２の図２の下端の穴部には棒状重り２０の先端部
が挿入されている。また、図２においてチューブ２２の
上端の穴部には研磨される線材１が挿入され、これによ
って線材１において不所望な部分が研磨されることを防
止している。この構成によれば、棒状重り２０の材料、
長さ、あるいは浮き部２１の体積等を調整することによ
って浮き１０の浮力を調整することができる。なお、当
該浮き１０の重心は、切れ落ちた線材部が浮き１０に取
り付けられた状態でそのまま真っ直ぐ下に沈降するよう
に、下部に置くようにする。In FIG. 1, a float 10 is formed at the tip of the portion of the wire 1 made of tungsten or the like which is immersed in the electrolyte solution 3.
Is attached. The float 10 is attached in order to reduce the downward weight w of the wire rod portion cut off into the electrolytic solution 3 and thus reduce the radius of curvature r of the tip. A configuration example of the float 10 is shown in FIG. In FIG. 2, a bar-shaped weight 2 made of a suitable material such as tungsten is used.
0, tubes 22 and 23 made of Teflon (registered trademark)
And a floating portion 21 made of a member having buoyancy,
The tube 22 penetrates the center of the floating portion 21, and the bar-shaped weight 2
0 penetrates the center of the tube 23. The tip of the bar-shaped weight 20 is inserted into the hole at the lower end of the tube 22 shown in FIG. Further, in FIG. 2, the wire rod 1 to be polished is inserted into the hole at the upper end of the tube 22 to prevent the unwanted portion of the wire rod 1 from being polished. According to this configuration, the material of the rod-shaped weight 20,
The buoyancy of the float 10 can be adjusted by adjusting the length or the volume of the float 21. The center of gravity of the float 10 is placed in the lower part so that the cut wire portion attached to the float 10 sinks straight down.
【００１４】このように、線材１の電解液３に浸漬され
る部分の先端部には浮き１０を取り付けることによって
切れ落ちる線材部にかかる下向きの加重ｗを低下させる
ことができるので、例えば従来は線材１の自重による下
向きの加重ｗがかかることによって図３の破線２５で示
す状態で切れ落ちていたのを、実線２６で示すように、
それより細いところまで研磨を行うことができるので、
先端の曲率半径ｒが小さい探針を製造することができ
る。As described above, by attaching the float 10 to the tip of the portion of the wire 1 which is immersed in the electrolytic solution 3, it is possible to reduce the downward load w applied to the broken wire, so that, for example, in the prior art. As indicated by the solid line 26, the wire rod 1 is cut off in the state shown by the broken line 25 in FIG.
Since you can polish even thinner areas,
A probe with a small radius of curvature r at the tip can be manufactured.
【００１５】次に、図４を参照して電解研磨回路１１に
ついて説明する。図４において研磨部１５は図１の線材
１、電解液３及び環２で構成される電流路を含む回路で
あり、この研磨部１５を流れる電解研磨電流は電流／電
圧（Ｉ／Ｖ）変換回路１２で電圧に変換され、比較器１
３において基準電圧Ｖref と比較される。そして、研磨
部１５に印加する電解研磨用電源電圧としては最初はス
イッチＳＷ１４は図４に示す状態となされて電圧Ｖ1 が
印加されるが、電解研磨の進行に伴って電解研磨電流が
基準電圧Ｖref に相当する所定の値になると比較器１３
からは所定のレベルの信号が出力され、これによりＳＷ
１４は電圧Ｖ2 （＜Ｖ1 ）側に切り替えられる。なお、
基準電圧Ｖref は電解研磨電流の最大値の80〜85％程度
の電流値に相当する電圧に設定される。Next, the electrolytic polishing circuit 11 will be described with reference to FIG. 4, the polishing section 15 is a circuit including a current path composed of the wire rod 1, the electrolytic solution 3 and the ring 2 of FIG. 1, and the electrolytic polishing current flowing through the polishing section 15 is converted into current / voltage (I / V). It is converted into a voltage by the circuit 12 and the comparator 1
At 3, the reference voltage V ref is compared. As the electropolishing power supply voltage applied to the polishing section 15, the switch SW14 is initially set to the state shown in FIG. 4 and the voltage V 1 is applied. However, as the electropolishing progresses, the electropolishing current becomes the reference voltage. When it reaches a predetermined value corresponding to V ref , the comparator 13
Outputs a signal of a predetermined level, which causes the SW
14 is switched to the voltage V 2 (<V 1 ) side. In addition,
The reference voltage V ref is set to a voltage corresponding to a current value of about 80 to 85% of the maximum value of the electrolytic polishing current.
【００１６】このように電解研磨用電源電圧を２段階に
切り替えるのは次の理由による。電解研磨を行ったとき
の電解研磨電流ｉは図５の３０で示すように時間と共に
減少し、電解研磨電流ｉが最大値の60〜70％程度になっ
たときに切れ落ちることが知られている。そこで、本発
明においては線材１が切れ落ちる以前、例えば電解研磨
電流ｉが最大値の80〜85％程度になったとき、電解研磨
用の電源電圧を最初のＶ1 からそれより低いＶ2 に切り
替え、電源電圧切り替えの後は図５の３１で示すように
小さな電解研磨電流により徐々に電解研磨を行うように
する。これにより線材１は、最初は大きな電流で急速に
研磨され、最後は小さな電流で徐々に研磨されるので、
収束角θが根元では大きく、先端近くでは小さい、共振
周波数の高い探針を得ることができるのである。The reason why the electrolytic polishing power source voltage is switched in two steps is as follows. It is known that the electropolishing current i during electropolishing decreases with time as shown by 30 in FIG. 5, and falls off when the electropolishing current i reaches about 60 to 70% of the maximum value. There is. Therefore, in the present invention, before the wire rod 1 is cut off, for example, when the electropolishing current i reaches about 80 to 85% of the maximum value, the power supply voltage for electropolishing is changed from the initial V 1 to V 2 lower than that. After the switching and the switching of the power supply voltage, electrolytic polishing is gradually performed with a small electrolytic polishing current as indicated by 31 in FIG. As a result, the wire 1 is rapidly polished with a large current at first, and gradually with a small current at the end.
It is possible to obtain a probe with a high resonance frequency in which the convergence angle θ is large at the root and small near the tip.
【００１７】なお、電圧Ｖ1,Ｖ2 をどのような値とする
かは線材１の種類、その線径等を考慮して適宜設定する
ことができるものである。The values of the voltages V 1 and V 2 can be appropriately set in consideration of the type of the wire rod 1 and its wire diameter.
【００１８】以上、本発明の一実施例について説明した
が、本発明は上記実施例に限定されるものではなく種々
の変形が可能であることは当業者に明かである。例えば
上記実施例においては、本発明を走査型トンネル顕微鏡
の探針を製造する場合に適用したが、本発明は電子顕微
鏡用電子銃等の電界放出型エミッターチップを製造する
場合にも適用できるものである。Although one embodiment of the present invention has been described above, it is obvious to those skilled in the art that the present invention is not limited to the above embodiment and various modifications can be made. For example, in the above embodiment, the present invention is applied to the case of manufacturing the probe of the scanning tunneling microscope, but the present invention is also applicable to the case of manufacturing a field emission type emitter tip such as an electron gun for an electron microscope. Is.
【００１９】また、上記実施例においては、設定した基
準電圧Ｖref との比較で電圧をＶ1からＶ2 に切り替え
るようにしたが、電流／電圧変換回路１２の出力信号の
初期値を保持しておき、この値の85％値を算出し、電流
／電圧変換回路１２の出力信号がこの算出値より小さく
なったときに前記切り替えを行うように制御することに
より、前記初期値の変動に対処できるようにしてもよ
い。Further, in the above embodiment, the voltage is switched from V 1 to V 2 in comparison with the set reference voltage V ref , but the initial value of the output signal of the current / voltage conversion circuit 12 is held. It is possible to cope with the fluctuation of the initial value by calculating 85% of this value and controlling the switching so that the output signal of the current / voltage conversion circuit 12 becomes smaller than the calculated value. You may allow it.
【００２０】[0020]
【発明の効果】以上の説明から明らかなように、本発明
によれば、電解研磨電流の制御を自動的に行うことがで
きるため、常に一定の形状の探針を製造することができ
る。As is apparent from the above description, according to the present invention, since the electrolytic polishing current can be automatically controlled, it is possible to always manufacture a probe having a constant shape.
【００２１】また、下部に重心のある浮きを使用して探
針が切れ落ちるときの下向きの荷重を低下させることが
できるので、先端の曲率半径ｒの小さい探針を製造する
ことができる。Further, since the downward load when the probe breaks down can be reduced by using the float having the center of gravity at the lower part, it is possible to manufacture a probe having a small radius of curvature r at the tip.
【図１】 本発明の一実施例を示す図である。FIG. 1 is a diagram showing an embodiment of the present invention.
【図２】 浮きの構成例を示す図である。FIG. 2 is a diagram showing a configuration example of a float.
【図３】 浮きを使用する効果を説明するための図であ
る。FIG. 3 is a diagram for explaining an effect of using a float.
【図４】 電解研磨回路の構成例を示す図である。FIG. 4 is a diagram showing a configuration example of an electrolytic polishing circuit.
【図５】 電解研磨電源電圧の切り替えを説明するため
の図である。FIG. 5 is a diagram for explaining switching of electrolytic polishing power supply voltage.
【図６】 従来の探針の製造方法を示す図である。FIG. 6 is a diagram showing a conventional method for manufacturing a probe.
【図７】 電解研磨を説明するための図である。FIG. 7 is a diagram for explaining electropolishing.
【図８】 望ましい探針の形状を説明するための図であ
る。FIG. 8 is a diagram for explaining a desirable shape of the probe.
【図９】 従来の製造方法の問題点を説明するための図
である。FIG. 9 is a diagram for explaining a problem of the conventional manufacturing method.
９…電極、１０…浮き、１１…電解研磨回路。 9 ... Electrode, 10 ... Float, 11 ... Electropolishing circuit.
Claims (2)
を製造する先鋭チップの製造方法において、前記金属製
線材の電解液に浸漬される部分の先端部に浮きを取り付
けた状態で当該線材を電解研磨することを特徴とする先
鋭チップの製造方法。1. A method for manufacturing a sharpened tip, comprising manufacturing a sharpened tip by electropolishing a metal wire rod, wherein the wire rod is electrolyzed in a state in which a float is attached to a tip portion of a portion of the metal wire rod immersed in an electrolytic solution. A method for manufacturing a sharpened tip, which comprises polishing.
を製造する先鋭チップの製造方法において、電解研磨の
開始後電解研磨電流が所定の値まで低下したときに電解
研磨用電源電圧を最初に印加する電解研磨用電源電圧よ
り小さい所定の電圧に変更することを特徴とする先鋭チ
ップの製造方法。2. A sharpened tip manufacturing method for manufacturing a sharpened tip by electropolishing a metal wire rod, wherein a power supply voltage for electropolishing is first applied when the electropolishing current drops to a predetermined value after the start of electropolishing. The method for manufacturing a sharpened tip is characterized in that the voltage is changed to a predetermined voltage lower than the power supply voltage for electropolishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27408091A JPH0671519A (en) | 1991-10-22 | 1991-10-22 | Manufacture of sharp tip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27408091A JPH0671519A (en) | 1991-10-22 | 1991-10-22 | Manufacture of sharp tip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0671519A true JPH0671519A (en) | 1994-03-15 |
Family
ID=17536703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27408091A Withdrawn JPH0671519A (en) | 1991-10-22 | 1991-10-22 | Manufacture of sharp tip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0671519A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006114892A (en) * | 2004-09-21 | 2006-04-27 | Aeg Svs Power Supply Systems Gmbh | Arrangement for variable loading power feeding |
| JP2011073091A (en) * | 2009-09-30 | 2011-04-14 | Mitsutoyo Corp | Processing machine |
| JP2013501227A (en) * | 2009-08-07 | 2013-01-10 | スペックス サーフェス ナノ アナリシス ゲーエムベーハー | Metal probe for scanning probe and manufacturing method thereof |
| CN104785871A (en) * | 2015-04-17 | 2015-07-22 | 清华大学深圳研究生院 | Probe manufacturing method and device |
-
1991
- 1991-10-22 JP JP27408091A patent/JPH0671519A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006114892A (en) * | 2004-09-21 | 2006-04-27 | Aeg Svs Power Supply Systems Gmbh | Arrangement for variable loading power feeding |
| JP2013501227A (en) * | 2009-08-07 | 2013-01-10 | スペックス サーフェス ナノ アナリシス ゲーエムベーハー | Metal probe for scanning probe and manufacturing method thereof |
| JP2011073091A (en) * | 2009-09-30 | 2011-04-14 | Mitsutoyo Corp | Processing machine |
| CN104785871A (en) * | 2015-04-17 | 2015-07-22 | 清华大学深圳研究生院 | Probe manufacturing method and device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990107 |