CN104766815B - 一种石墨舟外叶片修复方法 - Google Patents

一种石墨舟外叶片修复方法 Download PDF

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CN104766815B
CN104766815B CN201510206712.3A CN201510206712A CN104766815B CN 104766815 B CN104766815 B CN 104766815B CN 201510206712 A CN201510206712 A CN 201510206712A CN 104766815 B CN104766815 B CN 104766815B
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outer leafs
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repairing
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CN104766815A (zh
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杨冬生
杨征
钱小芳
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In building materials jetion science and Technology Co Ltd
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China National Building Materials Group Corp Jetion Solar (china) Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate

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Abstract

本发明公开了一种石墨舟外叶片修复方法，包括如下步骤，步骤一：取替换下来损坏的石墨舟叶片，切割成若干个修补叶片，每个修补叶片至少包含两个陶瓷杆洞；步骤二：选取石墨舟外叶片有损坏的石墨舟，根据石墨舟外叶片破损情况选取合适的步骤一中切割好的修补叶片，将修补叶片固定在石墨舟损坏的石墨舟外叶片处，完成修复。本发明可以将破损的石墨舟叶片进行切割后重复利用，同时使已发生轻微裂纹或裂痕等破损的石墨舟外叶片进行加固处理的同时，不影响其导电性能，提高石墨舟的利用率，大大节约了生产成本。

Description

一种石墨舟外叶片修复方法
技术领域
本发明涉及太阳能电池制造工艺石墨舟修复方法。
背景技术
目前，晶硅太阳电池的主要制造工艺已经标准化，其主要生产过程中，主要是采用等离子增强化学气相沉积(PECVD，Plasma Enhanced Chemical VapourDeposition)工艺对硅片进行氮化硅的真空镀膜，目的是在硅片表面形成一层减反射膜，此减反射膜同样具有钝化表面及保护效果。
PECVD工序的主要过程为：
将待镀膜的硅片插入PECVD真空镀膜设备的石墨舟，然后，将载有硅片的石墨舟放置在PECVD真空镀膜设备腔体内，采用PECVD工艺对硅片进行镀膜。镀膜结束后，从真空镀膜设备腔体内取出石墨舟，然后再将镀过膜的硅片从石墨舟上卸取下来。
现有的真空镀膜设备所使用的石墨舟一般由一片片的石墨叶片组成，石墨材质较软。在生产过程中，如经历轻微碰撞或者在石墨舟搬运转移过程中，其石墨舟外叶片很容易产生破损。而叶片破损后会直接影响其导电性能，进而会影响硅片的镀膜效果，容易产生镀膜不均匀的色差片，且产生的裂纹等会在使用过程中进一步加剧破损程度。而石墨舟叶片破损后只能替换下来报废，由于石墨舟叶片成本很高，其极易损坏，因此石墨舟的使用及维护费用开支非常大。
发明内容
本发明为了解决现有技术中的不足而提供一种石墨舟外叶片修复方法，将损坏的石墨舟外叶片切割呈若干片段，然后根据需要修补其他石墨舟外叶片有损坏的石墨舟，提高石墨舟的利用率，大大节约了生产成本。
为达到上述目的，本发明采用的技术方案为：
一种石墨舟外叶片修复方法，包括如下步骤，
步骤一：取替换下来损坏的石墨舟叶片，切割成若干个修补叶片，每个修补叶片至少包含两个陶瓷杆洞；
步骤二：选取石墨舟外叶片有损坏的石墨舟，根据石墨舟外叶片破损情况选取合适的步骤一中切割好的修补叶片，将修补叶片固定在石墨舟损坏的石墨舟外叶片处，完成修复。
本发明可以将破损的石墨舟叶片进行切割后重复利用，同时使已发生轻微裂纹或裂痕等破损的石墨舟外叶片进行加固处理的同时，不影响其导电性能，提高石墨舟的利用率，大大节约了生产成本。
作为本发明所述的石墨舟外叶片修复方法的一种优选方案，在步骤二中修补时，首先取下临近损坏处的陶瓷杆上石墨螺丝，将修补叶片的沿陶瓷杆洞套在陶瓷杆上，使修补叶片与待修复的石墨舟外叶片紧密接触，然后用石墨螺丝固定。
作为本发明所述的石墨舟外叶片修复方法的一种优选方案，所述的步骤二中石墨舟外叶片有损坏的石墨舟指的是石墨舟外叶片有轻微断裂或裂痕的石墨舟。
作为本发明所述的石墨舟外叶片修复方法的一种优选方案，步骤一中用钢锯切割石墨舟外叶片。
附图说明
图1是一种切割后的修补叶片结构示意图。
图2是一种需要修复的石墨舟部分侧面示意图。
图3为修补后的石墨舟部分侧面示意图。
图4是另一种切割后的修补叶片结构示意图。
其中：1、修补叶片2、石墨舟外叶片3、陶瓷杆洞4、石墨螺丝5、石墨片
具体实施方式
下面结合附图和具体实施方式对本发明作进一步详细说明。
实施例1
一种石墨舟外叶片修复方法，包括如下步骤，
首先取替换下来损坏的石墨舟叶片，根据破损情况用钢锯切割成若干个修补叶片1，每个修补叶片至少包含两个陶瓷杆洞3，修补叶片可以为各种形状，大小也根据需要修补的石墨舟外叶片确定。选取石墨舟外叶片有轻微断裂或裂痕的石墨舟，根据石墨舟外叶片2破损情况选取合适的步骤一中切割好的修补叶片1。如图1、2、3所示，如石墨舟外叶片在某个石墨片5从上到下出现裂痕时，取下该石墨片四个角的陶瓷杆上的石墨螺丝，然后选取包括一个完整石墨片5的修补叶片，将修补叶片安装入陶瓷杆内，然后将四个角上的石墨螺丝4拧紧，这样有裂痕的石墨舟就可以继续使用了。
修补叶片根据破损情况可以切割成各种形状，如三角形、长方形、对角线等。如图4所示，为对角线形状的修补叶片，用于修复石墨舟外片仅在某个陶瓷杆洞附近有裂痕或缺口的石墨舟。
虽然说明书中对本发明的实施方式进行了说明，但这些实施方式只是作为提示，不应限定本发明的保护范围。在不脱离本发明宗旨的范围内进行各种省略、置换和变更均应包含在本发明的保护范围内。

Claims (3)

1.一种石墨舟外叶片修复方法，其特征在于：包括
步骤一：取替换下来损坏的石墨舟叶片，切割成若干个修补叶片，每个修补叶片至少包含两个陶瓷杆洞；
步骤二：选取石墨舟外叶片有损坏的石墨舟，根据石墨舟外叶片破损情况选取合适的步骤一中切割好的修补叶片，将修补叶片固定在石墨舟损坏的石墨舟外叶片处，完成修复；在步骤二中修补时，首先取下临近损坏处的陶瓷杆上石墨螺丝，将修补叶片的沿陶瓷杆洞套在陶瓷杆上，然后用石墨螺丝固定。
2.根据权利要求1所述的石墨舟外叶片修复方法，其特征在于：所述的步骤二中石墨舟外叶片有损坏的石墨舟指的是石墨舟外叶片有轻微断裂或裂痕的石墨舟。
3.根据权利要求1所述的石墨舟外叶片修复方法，其特征在于：步骤一中用钢锯切割石墨舟外叶片。
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CN108257898A (zh) * 2018-01-23 2018-07-06 内蒙古日月太阳能科技有限责任公司 修补破损的石墨舟叶片的方法
CN116535228A (zh) * 2023-03-28 2023-08-04 福建兆元光电有限公司 一种修补石墨盘的方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201012941Y (zh) * 2007-01-29 2008-01-30 刘卓 硅片生产中使用的石墨舟
CN202085397U (zh) * 2011-05-13 2011-12-21 福州瑞华印制线路板有限公司 一种电路板的修补结构
CN202592752U (zh) * 2012-05-10 2012-12-12 山东洁晶药业有限公司 一种塑料热熔封装置
CN104375347A (zh) * 2014-12-04 2015-02-25 合肥鑫晟光电科技有限公司 阵列基板、修补片、显示面板和修复阵列基板的方法
CN204262351U (zh) * 2014-11-21 2015-04-15 四川展祥特种合金科技有限公司 一种组合石墨舟

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201012941Y (zh) * 2007-01-29 2008-01-30 刘卓 硅片生产中使用的石墨舟
CN202085397U (zh) * 2011-05-13 2011-12-21 福州瑞华印制线路板有限公司 一种电路板的修补结构
CN202592752U (zh) * 2012-05-10 2012-12-12 山东洁晶药业有限公司 一种塑料热熔封装置
CN204262351U (zh) * 2014-11-21 2015-04-15 四川展祥特种合金科技有限公司 一种组合石墨舟
CN104375347A (zh) * 2014-12-04 2015-02-25 合肥鑫晟光电科技有限公司 阵列基板、修补片、显示面板和修复阵列基板的方法

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Address after: 214400 No. 1011 Chengcheng Road, Shengang Town, Jiangyin City, Wuxi City, Jiangsu Province

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