CN104704630B - 噪声衰减壁 - Google Patents

噪声衰减壁 Download PDF

Info

Publication number
CN104704630B
CN104704630B CN201380049912.1A CN201380049912A CN104704630B CN 104704630 B CN104704630 B CN 104704630B CN 201380049912 A CN201380049912 A CN 201380049912A CN 104704630 B CN104704630 B CN 104704630B
Authority
CN
China
Prior art keywords
hole
cross tie
group
tie part
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380049912.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN104704630A (zh
Inventor
克里斯多夫·爱德曼
爱德华·库兰
唐纳恰·罗尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xilinx Inc
Original Assignee
Xilinx Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xilinx Inc filed Critical Xilinx Inc
Publication of CN104704630A publication Critical patent/CN104704630A/zh
Application granted granted Critical
Publication of CN104704630B publication Critical patent/CN104704630B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63Vias, e.g. via plugs
    • H10W70/635Through-vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00Arrangements for protection of devices
    • H10W42/20Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/20Electrical arrangements for controlling or matching impedance at high-frequency [HF] or radio frequency [RF]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/20Electrical arrangements for controlling or matching impedance at high-frequency [HF] or radio frequency [RF]
    • H10W44/203Electrical connections
    • H10W44/209Vertical interconnections, e.g. vias
    • H10W44/212Coaxial feed-throughs in substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/641Adaptable interconnections, e.g. fuses or antifuses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Building Environments (AREA)
CN201380049912.1A 2012-09-25 2013-08-21 噪声衰减壁 Active CN104704630B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/626,829 2012-09-25
US13/626,829 US9054096B2 (en) 2012-09-25 2012-09-25 Noise attenuation wall
PCT/US2013/055993 WO2014051894A2 (en) 2012-09-25 2013-08-21 Noise attenuation wall

Publications (2)

Publication Number Publication Date
CN104704630A CN104704630A (zh) 2015-06-10
CN104704630B true CN104704630B (zh) 2017-03-29

Family

ID=49054941

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380049912.1A Active CN104704630B (zh) 2012-09-25 2013-08-21 噪声衰减壁

Country Status (6)

Country Link
US (1) US9054096B2 (https=)
EP (1) EP2901478B1 (https=)
JP (1) JP6081600B2 (https=)
KR (1) KR102132046B1 (https=)
CN (1) CN104704630B (https=)
WO (1) WO2014051894A2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9343418B2 (en) * 2013-11-05 2016-05-17 Xilinx, Inc. Solder bump arrangements for large area analog circuitry
US10057976B1 (en) 2017-08-31 2018-08-21 Xilinx, Inc. Power-ground co-reference transceiver structure to deliver ultra-low crosstalk
US10665554B2 (en) * 2017-10-30 2020-05-26 Taiwan Semiconductor Manufacturing Company Ltd. Magnetic structure for transmission lines in a package system
CN111312692A (zh) * 2018-12-11 2020-06-19 创意电子股份有限公司 集成电路封装元件及其载板
WO2024062719A1 (en) * 2022-09-22 2024-03-28 Sony Semiconductor Solutions Corporation Semiconductor package, semiconductor module, electronic device, and semiconductor package manufacturing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362525B1 (en) * 1999-11-09 2002-03-26 Cypress Semiconductor Corp. Circuit structure including a passive element formed within a grid array substrate and method for making the same
CN101459178A (zh) * 2007-12-14 2009-06-17 恩益禧电子股份有限公司 半导体器件
CN102104033A (zh) * 2009-12-18 2011-06-22 中国科学院微电子研究所 三维混合信号芯片堆叠封装体及其制备方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03165058A (ja) 1989-11-24 1991-07-17 Mitsubishi Electric Corp 半導体装置
JPH11121643A (ja) * 1997-10-09 1999-04-30 Hitachi Ltd 半導体装置
JP3451038B2 (ja) * 1999-08-27 2003-09-29 シャープ株式会社 誘電体回路基板およびそれを含むミリ波半導体装置
US6486534B1 (en) 2001-02-16 2002-11-26 Ashvattha Semiconductor, Inc. Integrated circuit die having an interference shield
US6686649B1 (en) 2001-05-14 2004-02-03 Amkor Technology, Inc. Multi-chip semiconductor package with integral shield and antenna
JP4057921B2 (ja) * 2003-01-07 2008-03-05 株式会社東芝 半導体装置およびそのアセンブリ方法
EP1775761A4 (en) * 2004-07-06 2007-08-29 Tokyo Electron Ltd SUBSTRATE AND INTERMEDIATE AND METHOD FOR PRODUCING A SUBSTRATE
DE102006022360B4 (de) 2006-05-12 2009-07-09 Infineon Technologies Ag Abschirmvorrichtung
KR100817070B1 (ko) * 2006-10-30 2008-03-26 삼성전자주식회사 다중 그라운드 쉴딩 반도체 패키지, 그 패키지의 제조방법 및 그 그라운드 쉴딩을 이용한 노이즈 방지방법
TWI337399B (en) * 2007-01-26 2011-02-11 Advanced Semiconductor Eng Semiconductor package for electromagnetic shielding
DE602007009375D1 (de) 2007-07-27 2010-11-04 Fujitsu Semiconductor Ltd Rauscharme Flip-Chip-Verpackungen und Flip-Chips dafür
US8169059B2 (en) 2008-09-30 2012-05-01 Infineon Technologies Ag On-chip RF shields with through substrate conductors
JP5189032B2 (ja) * 2009-06-16 2013-04-24 新光電気工業株式会社 半導体装置および多層配線基板
JP2011146519A (ja) 2010-01-14 2011-07-28 Panasonic Corp 半導体装置及びその製造方法
KR101719636B1 (ko) * 2011-01-28 2017-04-05 삼성전자 주식회사 반도체 장치 및 그 제조 방법
US8835226B2 (en) 2011-02-25 2014-09-16 Rf Micro Devices, Inc. Connection using conductive vias

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362525B1 (en) * 1999-11-09 2002-03-26 Cypress Semiconductor Corp. Circuit structure including a passive element formed within a grid array substrate and method for making the same
CN101459178A (zh) * 2007-12-14 2009-06-17 恩益禧电子股份有限公司 半导体器件
CN102104033A (zh) * 2009-12-18 2011-06-22 中国科学院微电子研究所 三维混合信号芯片堆叠封装体及其制备方法

Also Published As

Publication number Publication date
CN104704630A (zh) 2015-06-10
JP6081600B2 (ja) 2017-02-15
JP2016500198A (ja) 2016-01-07
EP2901478B1 (en) 2018-10-10
EP2901478A2 (en) 2015-08-05
WO2014051894A2 (en) 2014-04-03
WO2014051894A3 (en) 2014-09-18
US20140084477A1 (en) 2014-03-27
KR102132046B1 (ko) 2020-07-08
US9054096B2 (en) 2015-06-09
KR20150058201A (ko) 2015-05-28

Similar Documents

Publication Publication Date Title
JP5749854B2 (ja) インダクタを有するインターポーザ
EP3472861B1 (en) Heterogeneous ball pattern package
JP7523352B2 (ja) 抵抗低減型アクティブオンアクティブのダイ積層向けの電力分配
US9337138B1 (en) Capacitors within an interposer coupled to supply and ground planes of a substrate
US10015916B1 (en) Removal of electrostatic charges from an interposer via a ground pad thereof for die attach for formation of a stacked die
CN104704630B (zh) 噪声衰减壁
KR102778388B1 (ko) 프로그래밍 가능 집적 회로를 갖는 다이 상에 스택된 메모리 다이를 포함하는 다중-칩 구조
JP5706521B2 (ja) マルチチップモジュールのダイのための静電放電保護
US7701251B1 (en) Methods and apparatus for implementing a stacked memory programmable integrated circuit system in package
US8084297B1 (en) Method of implementing a capacitor in an integrated circuit
KR102112896B1 (ko) Ic 다이들 및 전압 튜너들을 갖는 반도체 패키지
US9842829B2 (en) Chip package structure and method for forming the same
US10756019B1 (en) Systems providing interposer structures
US9343418B2 (en) Solder bump arrangements for large area analog circuitry
CN104051426A (zh) 用于具有改进的互连的电子组件的装置及相关方法
Li et al. Layout-Aware Optimized Prebond Silicon Interposer Test Synthesis

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant