CN104674216B - One kind is multi-functional to ooze stove and plating plated film integral method - Google Patents
One kind is multi-functional to ooze stove and plating plated film integral method Download PDFInfo
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- CN104674216B CN104674216B CN201510078227.2A CN201510078227A CN104674216B CN 104674216 B CN104674216 B CN 104674216B CN 201510078227 A CN201510078227 A CN 201510078227A CN 104674216 B CN104674216 B CN 104674216B
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Abstract
The present invention relates to ooze stove and plating plated film integral method, the stove that oozes includes upper furnace body and lower furnace body, frame, electrically-controlled component, temperature control component, water circulation component and vacuum provisioning component, upper furnace body interior insulation is fixed with metallic cementation source electrode and plated film negative electrode, multigroup metallic cementation target is provided with metallic cementation source electrode, plated film negative electrode is provided with multigroup coated target, lower furnace body interior insulation is fixed with plating negative electrode, multigroup work rest for being used to install material to be infiltrated is provided with plating negative electrode, electrically-controlled component includes plating cathode power, plated film power supply and plating source electrode power supply, hygrosensor is additionally provided with through furnace main body is oozed, vacuum interface tube in argon gas interface tube and stove, the plating plated film integral method includes the synchronous composite cementation of ionic nitriding metallic cementation, the step such as the processing of high vacuum metallic cementation and high vacuum coating processing；Can be realized using the present invention can carry out the synchronous composite cementation of low vacuum ionic nitriding metallic cementation, high vacuum metallic cementation, the function of high vacuum ion film plating in a stove.
Description
Technical field
A kind of heat treatment method realized the present invention relates to annealing device and with the device, particularly one kind is applied to
The multi-functional of clock and watch part oozes stove and a kind of plating plated film integral method.
Background technology
Clock and watch part is manufactured as gauge stand, watchband etc. using austenitic stainless steel material, is generally required and is used ionic nitrogen
Change, metallic cementation is handled to improve its case hardness, also need to be coloured using ion film plating, realizes its decoration functions.At present, clock
When table part carries out ionic nitriding, metallic cementation, coating film treatment, generally require using different heat-treatment furnaces, process is more, time-consuming
Long, energy consumption is big；Also, using ionic nitriding again after metallic cementation or metallic cementation again after ionic nitriding, it may all cause stainless steel
The content of chromium declines in tissue, so as to cause significantly reducing for stainless steel antiseptic property, the stainless steel parts after plating occurs
Get rusty.
The content of the invention
In order to solve the deficiencies in the prior art, an object of the present invention is to provide a kind of many work(suitable for clock and watch part
Stove can be oozed；It is a further object to provide a kind of with multi-functional oozing plating, the plated film integral method that stove matches；With
Realization can carry out the synchronous composite cementation of low vacuum ionic nitriding-metallic cementation, high vacuum metallic cementation, high vacuum ion in a stove
The function of plated film.
In order to realize first purpose of the present invention, the multi-functional stove that oozes of the present invention is by following technical sides
What case was realized：
One kind is multi-functional to ooze stove, including oozes furnace main body, frame, electrically-controlled component, temperature control component, water circulation component and vacuum confession
Answer component；
The furnace main body that oozes includes upper furnace body and lower furnace body, and the upper furnace body is fixed on above frame, and lower furnace body activity is even
It is connected to below frame, the drive component for driving lower furnace body to be fastened with upper furnace body, the upper furnace body is provided with the frame
The binding site of lower furnace body is provided with caulking gum；
The upper furnace body interior insulation is fixed with metallic cementation source electrode and plated film negative electrode, and the metallic cementation source electrode is close to lower furnace body
Side is provided with multigroup metallic cementation target, and the plated film negative electrode is being provided with multigroup coated target, the upper stove close to lower furnace body side
External to be provided with metallic cementation source electrode interface and plated film negative electrode interface, the metallic cementation source electrode interface is through upper furnace body body wall and oozes gold
Belong to source electrode connection, the plated film negative electrode interface is connected through upper furnace body body wall with plated film negative electrode, the metallic cementation source electrode interface, plating
Film negative electrode interface insulate and sealed with upper furnace body body wall；
The furnace wall of the upper furnace body is welded by three-layer metal material, and furnace wall forms not connected top from outside to inside
Exocoel and upper lumen, the top exocoel are provided with and communicated with the first water inlet interface and the first water outlet mouthpiece with upper furnace body outer wall,
First water inlet interface and the first water outlet mouthpiece are connected with the export and import of water circulation component respectively, the upper lumen with
Upper furnace body outer wall is provided with and communicated with upper lumen vacuum interface；
The lower furnace body interior insulation is fixed with plating negative electrode, and the plating negative electrode is provided with multigroup in close upper furnace body side
Plating negative electrode interface is provided with outside work rest for installing material to be infiltrated, the lower furnace body, the plating negative electrode interface is worn
Cross lower furnace body body wall to be connected with plating negative electrode, the plating negative electrode interface insulate and sealed with lower furnace body body wall；
The furnace wall of the lower furnace body is welded by three-layer metal material, formed from outside to inside in furnace wall it is not connected under
Portion's exocoel and lower lumen, the bottom exocoel is provided with and communicated with the second water inlet interface with lower furnace body outer wall and the second water outlet connects
Mouthful, second water inlet interface and the second water outlet mouthpiece are connected with the export and import of water circulation component respectively, in the bottom
Chamber is provided with and communicated with lower lumen vacuum interface with lower furnace body outer wall；
The electrically-controlled component includes plating cathode power, plated film power supply and plating source electrode power supply, the plating cathode power
Positive pole turn on and be grounded with the positive pole of plating source electrode power supply, the positive pole of the negative pole of plating cathode power and plated film power supply is turned on,
And be connected with plating negative electrode interface, the negative pole of the plated film power supply is connected with plated film negative electrode interface, the negative pole of plating source electrode power supply
It is connected with metallic cementation source electrode interface；
Hygrosensor, argon gas interface tube, vacuum tube in nitrogen interface tube and stove are additionally provided with through the furnace main body that oozes
Vacuum interface tube is with oozing the insulation of furnace main body body wall simultaneously in interface, the hygrosensor, argon gas interface tube, nitrogen interface tube and stove
Sealing, the hygrosensor is connected with temperature control component, argon tanks is connected with the argon gas interface tube, with the nitrogen
Interface tube is connected with nitrogen pot；
Vacuum interface tube is supplied with the vacuum in the upper lumen vacuum interface, lower lumen vacuum interface and stove
Component is connected.
As a kind of specific embodiment, the drive component includes a pair of drive screws vertically set, is arranged
In the drive nut in drive screw, and for driving above and below the synchronous motor of drive screw turns, the drive screw
Two ends are fixed by rolling bearing units respectively, and the synchronous driving motor is connected by one end of shaft coupling and drive screw, it is described under
Body of heater is fixedly connected with the drive nut.
As a kind of specific embodiment, the drive component also includes guider, and the guider is included along vertical
Line slideway that direction is arranged in pairs and the linear slider being fixed on lower furnace body, the linear slider are movably set in straight line and led
On rail.
As a kind of specific embodiment, the metallic cementation source electrode and plated film negative electrode are arranged in parallel, the metallic cementation source
Pole includes two horizontal donuts of mutual conduction, and the metallic cementation target protrusion is arranged at donut close to lower furnace body one
Some through holes are offered on side, the tube wall of metallic cementation target；The plated film negative electrode includes two horizontal donuts of mutual conduction,
The metallic cementation target protrusion is arranged at plated film negative electrode close to lower furnace body side.
As a kind of specific embodiment, the metallic cementation target is cylindrical, tube wall bus of the through hole along metallic cementation target
Direction is arranged.
As a kind of specific embodiment, the through hole is circular hole, and through-hole diameter is 10-12mm.
As a kind of specific embodiment, the plating negative electrode is in annular shape, and the work rest is along plating negative electrode circumferencial direction
Uniform arrangement.
As a kind of specific embodiment, the vacuum provisioning component includes vavuum pump and vacuum storage tank, the vacuum storage tank
It is connected by the first valve with vacuum interface tube in stove, is connected by the second valve with upper lumen vacuum interface, passes through the 3rd
Valve is connected with lower lumen vacuum interface, is connected with the upper lumen vacuum interface and is additionally provided with the first pressure relief valve, institute
The opposite side and atmosphere of the first pressure relief valve are stated, the second relief valve is connected with the upper lumen vacuum interface
Door, the opposite side and atmosphere of second pressure relief valve.
In order to realize second purpose of the present invention, plating plated film integral method of the present invention includes following
Step is realized：
S1, replacement metallic cementation target and coated target material are default target, and workpiece to be processed is put into work rest.
S2, close up upper furnace body and lower furnace body, the voltage of adjustment plating cathode power is between 400-500V, to adjust plating source
The voltage of pole power supply is 600V-700V, opens vacuum provisioning component and upper lumen, lower lumen and furnace interior are evacuated
S3, when in-furnace temperature reaches 500 DEG C -600 DEG C, open water circulation component and make it that top exocoel, lower lumen are realized
Water circulation, and the vacuum of release upper lumen and lower lumen；
S4, inject vacuum in nitrogen and argon gas to stove into body of heater and reach 1Pa-10Pa, close vacuum provisioning component, and
3-4h is kept, the synchronous composite cementation of ionic nitriding-metallic cementation is carried out；
S5, continue by vacuum provisioning component to be evacuated to 10 into stove-1Pa-10-3Pa, and 2-3h is kept, carry out Gao Zhen
Empty metallic cementation processing；
S6, closing plating cathode power, closing plating source electrode power supply, open plated film power supply and simultaneously adjust its voltage for 700V-
Vacuum 10 in 1000V, holding furnace-1Pa-10-3Pa, carries out high vacuum coating processing.
Compared with prior art, the beneficial effects of the present invention are：
(1) in same body of heater it is continuous realize the synchronous composite cementation of low vacuum ionic nitriding-metallic cementation, high vacuum metallic cementation,
High vacuum ion film plating, saves man-hour, the energy, improves efficiency.
(2) the synchronous composite cementation of low vacuum ionic nitriding-metallic cementation is realized, when containing chromium in material is set in target, can be made stainless
The content of chromium will not significantly decrease in the tissue of steel workpiece, can both improve the hardness of stainless steel, may insure again stainless
The antiseptic property of steel.
(3) furnace wall uses three layers structure, during heating, and furnace wall inner chamber is vacuumized, exocoel water circulation, furnace heat loss
Small, quick heating, furnace wall temperature is low, and work-yard environment temperature is not significantly higher, and improves the operating environment of workman；Insulation
Stage, furnace wall inner chamber sheds vacuum, exocoel water circulation, can take away unnecessary heat, keeping temperature it is constant；So both can be with
Shorten the heating-up time, improve production efficiency, the stabilization of parameter when plating, plated film can be ensured again, it is ensured that product quality.
(4) technique is simple, it is easy to is adjusted and controls.
(5) mode that low vacuum is combined with high vacuum, product appearance smooth finish, stay in grade are employed.
Brief description of the drawings
Fig. 1 is the multi-functional assembling relationship figure for oozing stove.
Fig. 2 is Fig. 1 A direction views.
Fig. 3 is Fig. 1 B direction views.
Fig. 4 is Fig. 1 C-C direction views.
Fig. 5 is the multi-functional schematic diagram for oozing stove.
In figure, I. upper furnace body components；II. lower furnace body component；III. housing assembly.
The water inlet interfaces of 1- first, 2- argon gas interface tubes, 3- hygrosensors, 4- upper lumen vacuum interfaces, 5- upper furnace bodies,
6- synchronous motors, 7- shaft couplings, 8- rolling bearing units I, 9- attaching nut, 10- drive screws, 11- rolling bearing units II, 12- frame,
The water inlet interfaces of 13- second, 14- plating negative electrodes, 15- nitrogen interface tubes, 16- lower furnace bodies, 17- lower lumen vacuum interfaces, 18-
Two water outlet mouthpieces, 19- caulking gums, 20- work rests, the water outlet mouthpieces of 21.- first, 22- metallic cementation targets, 23- coated targets, 24- platings
Vacuum interface tube in film negative electrode, 25- metallic cementation source electrodes, 26- stoves, 27- metallic cementation source electrode interfaces, 28- plated film negative electrode interfaces, 29-
Linear slider, 30- plating negative electrode interfaces, 31- line slideways, 3-. vavuum pumps, 33- total valves, 34- vacuum storage tanks, 35- second
Valve, the pressure relief valve of 36- pressure gauges I, 37- pressure gauge II, 38- first, the valves of 39- first, 40. pressure gauge III, 41- the 3rd
Valve, the pressure relief valves of 42- second, 43- nitrogen pots, 44- plating cathode powers, 45- plated film power supplys, 46- plating source electrode power supplys,
47- argon tanks, 48- temperature control devices.
Embodiment
Below in conjunction with the accompanying drawings, technical scheme is described further：
Referring to Fig. 1-Fig. 5, it is of the present invention it is multi-functional ooze stove, including ooze furnace main body, frame, electrically-controlled component, temperature control group
Part 48, water circulation component and vacuum provisioning component.
The furnace main body that oozes includes upper furnace body 5 and lower furnace body 16, and the upper furnace body 5 is fixed on the top of frame 12, lower stove
Body 16 is movably connected on the drive being provided with the lower section of frame 12, the frame 12 for driving lower furnace body 16 to be fastened with upper furnace body 5
Dynamic component, the binding site of the upper furnace body 5 and lower furnace body 16 is provided with caulking gum 19.
The interior insulation of upper furnace body 5 is fixed with metallic cementation source electrode 25 and plated film negative electrode 24, the metallic cementation source electrode 25 by
The nearly side of lower furnace body 16 is provided with multigroup metallic cementation target 22, and the plated film negative electrode 24 is provided with multigroup in the close side of lower furnace body 16
Coated target 23；Metallic cementation source electrode interface 27 and plated film negative electrode interface 28 are provided with outside the upper furnace body 5, the metallic cementation source electrode connects
Mouth 27 is connected through the body wall of upper furnace body 5 with metallic cementation source electrode 25, and the plated film negative electrode interface 28 runs through the body wall of upper furnace body 5 and plated film
Negative electrode 24 is connected, and the metallic cementation source electrode interface 25, plated film negative electrode interface 28 and hygrosensor insulate with the body wall of upper furnace body 5
And seal.
The furnace wall of the upper furnace body 5 is welded by three-layer metal material, forms not connected in furnace wall from outside to inside
Top exocoel and upper lumen, the top exocoel are provided with and communicated with the first water inlet interface 1 and the first water outlet with the outer wall of upper furnace body 5
Interface 21, the water outlet mouthpiece 21 of the first water inlet interface 1 and first is connected with the export and import of water circulation component respectively, described
Upper lumen is provided with and communicated with upper lumen vacuum interface pipe 4 with the outer wall of upper furnace body 5；
The interior insulation of lower furnace body 16 is fixed with plating negative electrode 14, and the plating negative electrode 14 is set close to the side of upper furnace body 5
It is equipped with outside multigroup work rest 20 for being used to install material to be infiltrated, the lower furnace body 16 and is provided with plating negative electrode interface 30, it is described
Plating negative electrode interface 30 is connected through the body wall of lower furnace body 16 with plating negative electrode 14, the plating negative electrode interface 30 and the body of lower furnace body 16
Wall insulate and sealed, and the plating negative electrode 14 is in annular shape, and the work rest 20 is uniformly distributed in (the simultaneous plated film sun of plating negative electrode 14
Pole) on.
The furnace wall of the lower furnace body 16 is welded by three-layer metal material, forms not connected in furnace wall from outside to inside
Bottom exocoel and lower lumen, the bottom exocoel are provided with and communicated with the second water inlet interface 13 and the second water outlet with lower furnace body outer wall
Interface 18, the water outlet mouthpiece 18 of the second water inlet interface 13 and second is connected with the export and import of water circulation component respectively, institute
State lower lumen and be provided with and communicated with lower lumen vacuum interface 17 with the outer wall of lower furnace body 16.
The electrically-controlled component includes plating cathode power 44, plated film power supply 45 and plating source electrode power supply 46, and the plating is cloudy
The positive pole of pole power supply 44 is turned on and is grounded with the positive pole of plating source electrode power supply 46, negative pole and the plated film power supply of plating cathode power 44
45 positive pole conducting, and be connected with plating negative electrode interface 30, the negative pole of the plated film power supply 45 is connected with plated film negative electrode interface 28,
The negative pole of plating source electrode power supply 46 is connected with metallic cementation source electrode interface 27.
It is additionally provided with through the furnace main body that oozes in hygrosensor 3, argon gas interface tube 2, nitrogen interface tube 15 and stove very
Vacuum interface tube 26 is with oozing stove master in blank pipe interface 26, the hygrosensor 3, argon gas interface tube 2, nitrogen interface tube 15 and stove
Body body wall is insulated and sealed, and the hygrosensor 3 is connected with temperature control component 48, is connected with the argon gas interface tube 2
Argon tanks 47, nitrogen pot 43 is connected with the nitrogen interface tube 15.
In the upper lumen vacuum interface 4, lower lumen vacuum interface 17 and stove vacuum interface tube 26 with it is described true
Empty provisioning component connection.
The temperature control component 48 is used for the value of feedback for receiving hygrosensor 3, and instructs startup water circulation system work, institute
Stating water circulation component includes water pump, cools for forming water circulation system to stove is oozed.
In the present embodiment, the drive component includes the drive screw 10 vertically set for a pair, is sheathed on drive
Drive nut 9 on dynamic screw rod 10, and the synchronous motor 6 for driving drive screw 10 to rotate, the drive screw 10
Upper and lower ends are fixed by rolling bearing units 8 and rolling bearing units 11 respectively, and the synchronous driving motor 6 passes through shaft coupling 7 and driving spiral shell
One end connection of bar 10, the lower furnace body 16 is fixedly connected with the drive nut 9.
The drive component also includes guider, and the straight line that the guider includes being arranged in pairs on vertical direction is led
Rail 31 and and the linear slider 29 that is fixed on lower furnace body 16, the linear slider 29 is movably set on line slideway 31.
The metallic cementation source electrode 25 and plated film negative electrode 24 are arranged in parallel, and the metallic cementation source electrode 25 includes mutual conduction
Two horizontal donuts, the metallic cementation target 22 protrusion is arranged at donut close to the side of lower furnace body 16, described to ooze gold
Belong to target 22 cylindrical, some through holes are offered along generatrix direction on the tube wall of metallic cementation target 22, it is in the present embodiment, described to ooze
Metallic target 22 is cylindrical, and the through hole is preferably circular hole, and is arranged along the tube wall generatrix direction of metallic cementation target 22, through-hole diameter
Preferably 10-12mm；The plated film negative electrode 24 includes two horizontal donuts of mutual conduction, and the protrusion of coated target 23 is set
Plated film negative electrode 24 is placed in close to the side of lower furnace body 16, coated target 23 is in arcuation, two in plated film negative electrode 24 of multiple coated targets 23
Installed on concentric circles.
Above-mentioned plating negative electrode 24 is uniformly arranged in annular shape, the work rest 20 along the circumferencial direction of plating negative electrode 14.
Above-mentioned vacuum provisioning component includes vavuum pump 32 and vacuum storage tank 34, has one between vavuum pump 32 and vacuum storage tank 34
Total valve 33 is installed on bar connecting pipeline, pipeline, there are 2 connecting pipelines between vacuum storage tank 34 and upper furnace body 5, wherein one
Pipeline makes the vacuum storage tank 34 be connected by the first valve 39 and pressure gauge II37 with vacuum interface tube 26 in stove, for realizing
Vacuumized in body of heater；Another pipeline is connected by the second valve 35 and pressure gauge I36 with upper lumen vacuum interface 4, is used for
Realize that upper lumen is vacuumized.The first pressure relief valve 38 is connected with the upper lumen vacuum interface, described first lets out
The opposite side and atmosphere of pressure valve 38, when evacuated, the second valve 35 are opened, and the first pressure relief valve 38 is closed, when unloading
During pressure, the second valve 35 is closed, and the first pressure relief valve 38 is opened；
There is 1 connecting pipeline between vacuum storage tank 34 and lower furnace body 16 so that vacuum storage tank 34 passes through the He of the 3rd valve 41
Pressure gauge III40 is connected with lower lumen vacuum interface 17, and being connected with second with the lower lumen vacuum interface 17 lets out
Pressure valve 42, the opposite side and atmosphere of second pressure relief valve 42；When evacuated, the 3rd valve 41 is opened, and second
Pressure relief valve 42 is closed, when release, and the 3rd valve 41 is closed, and the second pressure relief valve I42 is opened.
Based on said structure and setting, a kind of plating plated film integral method comprises the following steps realization：
S1, replacement metallic cementation target and coated target material are default target, and workpiece to be processed is put into work rest.
In this step, the material of metallic cementation target (hollow cathode) 22 is replaced with to required metallic cementation material, by coated target
23 material is replaced with required Coating Materials；Workpiece is loaded onto into work rest 20.
S2, close up upper furnace body and lower furnace body, the voltage of adjustment plating cathode power is between 400-500V, to adjust plating source
The voltage of pole power supply is 600V-700V, opens vacuum provisioning component and is pumped into upper lumen, lower lumen and furnace interior very
It is empty.
In this step, start synchronous motor 6, upper furnace body 5 is closed up and is sealed with lower furnace body 16, start plating cathode power
44, adjustment voltage to 400V-500V starts plating source electrode power supply 46, adjustment voltage to 600V-700V；Start temperature control device, open
Dynamic vavuum pump 32, opens total valve 33, the first valve 39, the second valve 35, the 3rd valve 41, realizes upper lumen, in bottom
Vacuumized simultaneously in chamber, body of heater, its main purpose is the temperature rise period to reduce stove heat conduction so that in-furnace temperature is rapidly achieved institute
Need temperature requirement.
S3, when in-furnace temperature reaches 500 DEG C -600 DEG C, open water circulation component and make it that top exocoel, lower lumen are realized
The vacuum of water circulation, destruction upper lumen and lower lumen.
In this step, when hygrosensor 3, which detects in-furnace temperature, reaches 500 DEG C -600 DEG C, water circulation component is opened,
Realize that the water circulation of top exocoel, bottom exocoel, so as to be incubated, simultaneously closes off the second valve 35 and the 3rd valve 41, opened
First pressure relief valve 38 and the second pressure relief valve 42, to allow the water circulation of upper furnace body exocoel and lower furnace body exocoel to take away unnecessary heat
Amount.
S4, inject vacuum in nitrogen and argon gas to stove into body of heater and reach 1Pa-10Pa, close vacuum provisioning component, and
3-4h is kept, the synchronous composite cementation of ionic nitriding-metallic cementation is carried out；
In this step, nitrogen and argon gas are injected into body of heater by nitrogen pot 43 and argon tanks 47 respectively, when vacuum in stove
When degree reaches 1Pa-10Pa, vavuum pump 32 and whole valves are closed, and keeps 3-4h, realizes that ionic nitriding-metallic cementation is synchronously multiple
Conjunction is oozed.
S5, continue by vacuum provisioning component to be evacuated to 10 into stove-1Pa-10-3Pa, and 2-3h is kept, carry out Gao Zhen
Empty metallic cementation processing；
In this step, the voltage 400V-500V of plating cathode power 44 is kept, the voltage 600V- of plating source electrode power supply 46 is kept
700V, keeps 500 DEG C -600 DEG C of in-furnace temperature.Start vavuum pump 32, open total valve 33, the first valve 39 is realized in body of heater
Continue to vacuumize, input argon gas and adjust vacuum to 10-1Pa-10-3Pa, closes vavuum pump 32, total valve 33, the first valve
39, and 2-3h is kept, realize that high vacuum metallic cementation is handled.
S6, closing plating cathode power, closing plating source electrode power supply, open plated film power supply and simultaneously adjust its voltage for 700V-
Vacuum 10 in 1000V, holding furnace-1Pa-10-3Pa, carries out high vacuum coating processing.
In this step, plating cathode power 44, plating source electrode power supply 46 are closed, plated film power supply 45 is opened, by voltage-regulation
To 700V-1000V, vacuum 10 in holding furnace-1Pa-10-3Pa, realizes that high vacuum coating is handled.
It should be understood that embodiment described in above example to claims merely to carry out clear, complete
Explanation, but be not meant to the restriction to claims protection domain, every inventive concept based on the present invention, in this hair
Carried out on the basis of bright with deformation and transformation of the present invention without substantive difference, belong to the protection model of the claims in the present invention
Enclose.
Claims (9)
1. one kind is multi-functional to ooze stove, it is characterised in that：Including oozing furnace main body, frame, electrically-controlled component, temperature control component, water circulation group
Part and vacuum provisioning component；
The furnace main body that oozes includes upper furnace body and lower furnace body, and the upper furnace body is fixed on above frame, and lower furnace body is movably connected on
Below frame, the drive component for driving lower furnace body to be fastened with upper furnace body is provided with the frame, the upper furnace body is with
The binding site of body of heater is provided with caulking gum；
The upper furnace body interior insulation is fixed with metallic cementation source electrode and plated film negative electrode, and the metallic cementation source electrode is close to lower furnace body side
Multigroup metallic cementation target is provided with, the plated film negative electrode is provided with outside multigroup coated target, the upper furnace body close to lower furnace body side
Metallic cementation source electrode interface and plated film negative electrode interface are provided with, the metallic cementation source electrode interface is through upper furnace body body wall and metallic cementation source
Pole is connected, and the plated film negative electrode interface is connected through upper furnace body body wall with plated film negative electrode, and the metallic cementation source electrode interface, plated film are cloudy
Pole interface insulate and sealed with upper furnace body body wall；
The furnace wall of the upper furnace body is welded by three-layer metal material, and furnace wall forms not connected top exocoel from outside to inside
And upper lumen, the top exocoel is provided with and communicated with the first water inlet interface and the first water outlet mouthpiece with upper furnace body outer wall, described
First water inlet interface and the first water outlet mouthpiece are connected with the export and import of water circulation component respectively, the upper lumen and upper stove
External wall is provided with and communicated with upper lumen vacuum interface；
The lower furnace body interior insulation is fixed with plating negative electrode, and the plating negative electrode is being provided with multigroup be used for close to upper furnace body side
Install and plating negative electrode interface is provided with outside the work rest of material to be infiltrated, the lower furnace body, the plating negative electrode interface is passed through down
Body of heater body wall is connected with plating negative electrode, and the plating negative electrode interface insulate and sealed with lower furnace body body wall；
The furnace wall of the lower furnace body is welded by three-layer metal material, is formed from outside to inside outside not connected bottom in furnace wall
Chamber and lower lumen, the bottom exocoel are provided with and communicated with the second water inlet interface and the second water outlet mouthpiece, institute with lower furnace body outer wall
State the second water inlet interface and the second water outlet mouthpiece to be connected with the export and import of water circulation component respectively, the lower lumen is with
Furnace body outer wall is provided with and communicated with lower lumen vacuum interface；
The electrically-controlled component includes plating cathode power, plated film power supply and plating source electrode power supply, and the plating cathode power is just
Pole is turned on and is grounded with the positive pole of plating source electrode power supply, and the negative pole of plating cathode power is turned on the positive pole of plated film power supply, and with
Plating negative electrode interface is connected, and the negative pole of the plated film power supply is connected with plated film negative electrode interface, and the negative pole of plating source electrode power supply is with oozing
Metal source interface is connected；
Hygrosensor, argon gas interface tube, vacuum interface tube in nitrogen interface tube and stove are additionally provided with through the furnace main body that oozes,
Vacuum interface tube is insulated and sealed with oozing furnace main body body wall in the hygrosensor, argon gas interface tube, nitrogen interface tube and stove,
The hygrosensor is connected with temperature control component, is connected with argon tanks with the argon gas interface tube, is connect with the nitrogen tube
Mouth is connected with nitrogen pot；
In the upper lumen vacuum interface, lower lumen vacuum interface and stove vacuum interface tube with the vacuum provisioning component
Connection.
2. multi-functional as claimed in claim 1 ooze stove, it is characterised in that the drive component is vertically set including a pair
The drive screw put, is sheathed on the drive nut in drive screw, and for driving the synchronous motor of drive screw turns, institute
The upper and lower ends for stating drive screw are fixed by rolling bearing units respectively, and the synchronous motor passes through shaft coupling and one end of drive screw
Connection, the lower furnace body is fixedly connected with the drive nut.
3. multi-functional as claimed in claim 2 ooze stove, it is characterised in that the drive component also includes guider, described
Guider includes the line slideway being vertically arranged in pairs and the linear slider being fixed on lower furnace body, and the straight line is slided
Block is movably set on line slideway.
4. multi-functional as claimed in claim 1 ooze stove, it is characterised in that the metallic cementation source electrode and plated film negative electrode are parallel to each other
Set, the metallic cementation source electrode includes two horizontal donuts of mutual conduction, the metallic cementation target protrusion is arranged at one heart
Annulus offers some through holes on lower furnace body side, the tube wall of metallic cementation target；The plated film negative electrode includes mutual conduction
Two horizontal donuts, the metallic cementation target protrusion is arranged at plated film negative electrode close to lower furnace body side.
5. multi-functional as claimed in claim 4 ooze stove, it is characterised in that the metallic cementation target is cylindrical, the through hole edge
The tube wall generatrix direction arrangement of metallic cementation target.
6. multi-functional as described in claim 4 or 5 oozes stove, it is characterised in that the through hole is circular hole, and through-hole diameter is 10-
12mm。
7. multi-functional as claimed in claim 1 ooze stove, it is characterised in that the plating negative electrode is in annular shape, the work rest
Uniformly arranged along plating negative electrode circumferencial direction.
8. multi-functional as claimed in claim 1 ooze stove, it is characterised in that the vacuum provisioning component includes vavuum pump and vacuum
Storage tank, the vacuum storage tank is connected by the first valve with vacuum interface tube in stove, passes through the second valve and upper lumen vacuum
Interface is connected, and is connected by the 3rd valve with lower lumen vacuum interface, is connected and also sets up with the upper lumen vacuum interface
There is the first pressure relief valve, the opposite side and atmosphere of first pressure relief valve are connected with the upper lumen vacuum interface
It is provided with the second pressure relief valve, the opposite side and atmosphere of second pressure relief valve.
9. a kind of plating plated film integral method, stove is oozed based on multi-functional described in claim 1, it is characterised in that including with
Lower step is realized：
S1, replacement metallic cementation target and coated target material are default target, and workpiece to be processed is put into work rest；
S2, close up upper furnace body and lower furnace body, the voltage of adjustment plating cathode power is adjustment plating source electrode electricity between 400-500V
The voltage in source is 600V-700V, opens vacuum provisioning component and upper lumen, lower lumen and furnace interior are evacuated；
S3, when in-furnace temperature reaches 500 DEG C -600 DEG C, open water circulation component and make it that top exocoel, lower lumen realize that water is followed
Ring, and the vacuum of release upper lumen and lower lumen；
S4, inject vacuum in nitrogen and argon gas to stove into body of heater and reach 1Pa-10Pa, close vacuum provisioning component, and keep
3-4h, carries out the synchronous composite cementation of ionic nitriding-metallic cementation；
S5, continue by vacuum provisioning component to be evacuated to 10 into stove-1Pa-10-3Pa, and 2-3h is kept, carry out high vacuum and ooze
Metal processing；
S6, closing plating cathode power, closing plating source electrode power supply, open plated film power supply and simultaneously adjust its voltage for 700V-
Vacuum 10 in 1000V, holding furnace-1Pa-10-3Pa, carries out high vacuum coating processing.
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| CN111850457B (en) * | 2020-07-29 | 2022-04-22 | 扬州大学 | Controllable surface nitriding device and using method thereof |
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| CN2737805Y (en) * | 2004-06-07 | 2005-11-02 | 大连海事大学 | Ion-nitriding furnace |
| CN101033544B (en) * | 2006-11-03 | 2010-08-11 | 广东世创金属科技有限公司 | Continuous synthesis method for rare earth ion nitriding-rare earth ion plating composite coating |
| CN100537835C (en) * | 2007-01-25 | 2009-09-09 | 桂林电子科技大学 | Magnetron sputtering-LASER HEATING CEM depositing process and equipment |
| CN201850306U (en) * | 2010-08-17 | 2011-06-01 | 中国人民解放军第四军医大学 | Mini type plasma film coating device for stomatological department |
| CN103643204B (en) * | 2013-11-10 | 2019-03-08 | 广东世创金属科技股份有限公司 | Flexibility multifunctional vacuum filming equipment and its intelligence control system |
| CN203782220U (en) * | 2014-04-14 | 2014-08-20 | 王珺博 | Pressurized gas nitriding multi-purpose furnace |
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