CN207779094U - A kind of ultrahigh vacuum exhaust station - Google Patents
A kind of ultrahigh vacuum exhaust station Download PDFInfo
- Publication number
- CN207779094U CN207779094U CN201820033550.7U CN201820033550U CN207779094U CN 207779094 U CN207779094 U CN 207779094U CN 201820033550 U CN201820033550 U CN 201820033550U CN 207779094 U CN207779094 U CN 207779094U
- Authority
- CN
- China
- Prior art keywords
- babinet
- vacuum
- room
- heating room
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of ultrahigh vacuum exhaust stations, including ionic pump, babinet, vacuum chamber, loading room and heating room, the box house bottom is equipped with heating room, there are two driving motors for the inside installation of babinet at the heating room position, babinet above the heating room is internally provided with loading room, box house above the loading room is equipped with vacuum chamber, top of the box at the vacuum tube position is equipped with the second vacuum meter, the one end of the vacuum tube far from vacuum chamber is equipped with ionic pump, side of the babinet far from the first vacuum meter is equipped with controller.The utility model installs two driving motors by the inside of the babinet at heating room position, and the output end of driving motor all installs shaft, and extend to the inside of heating room in the one end of shaft far from driving motor, and fan blade is uniformly provided in shaft, the fan blade rotation in shaft is driven by motor, convenient for being stirred to heating room heat, make workpiece thermally equivalent.
Description
Technical field
The utility model is related to be vacuum-evacuated technical field, specially a kind of ultrahigh vacuum exhaust station.
Background technology
Current vacuum exhaust platform, including vacuum chamber, vacuum chamber upper end have objective table, vacuum valve are arranged in the middle part of lower end,
Objective table is equipped with tail pipe seat, and tail pipe seat connects workpiece, since tail pipe seat is along arranged in a straight line, is being taken out with a batch of workpiece
When vacuum operation, the pumping mouth of some workpiece is close apart from vacuum valve, and the pumping mouth of some workpiece is remote apart from vacuum valve, when close apart from valve
The vacuum degree of workpiece when reaching ultrahigh vacuum, i.e., ultrahigh vacuum is not achieved in the vacuum degree in far-end workpiece, causes with a batch
Secondary workpiece vacuum degree difference is larger；It requires the power of heating rod to have higher wattage simultaneously, requirement, but this could be met
Sample just improves the usage amount of electricity, increases energy consumption, improves production cost, and electrically heated rod heating is very fast, is easy to make true
Non-uniform temperature above and below blank pipe generates batch waste product.
Utility model content
It is mentioned above in the background art to solve the purpose of this utility model is to provide a kind of ultrahigh vacuum exhaust station
Problem.
To achieve the above object, the utility model provides the following technical solutions：A kind of ultrahigh vacuum exhaust station, including ion
Pump, babinet, vacuum chamber, loading room and heating room, the box house bottom is equipped with heating room, and the inner wall for heating room is equipped with
The bottom of polyurethane insulation coating, the babinet is uniformly equipped with fire protection pipe, and one end of fire protection pipe extends to heating chamber, institute
The other end for stating fire protection pipe is equipped with ignition tip, and fire protection pipe is connected with Gas Pipe close to one end of ignition tip by Gas Pipe
Road, there are two driving motors for the inside installation for heating the babinet at the position of room, and the output end of driving motor is all equipped with
Shaft, the one end of the shaft far from driving motor extend to the inside of heating room, and fan blade is uniformly provided in shaft, described to add
Babinet above hot cell is internally provided with loading room, and the bottom of loading room is hinged with door body, the babinet above the loading room
It being internally provided with vacuum chamber, and the bottom of vacuum chamber is uniformly provided with tail pipe seat, one end of the tail pipe seat extends to loading chamber interior,
The first vacuum meter is installed on the outside of babinet at the vacuum chamber position, and the middle position at the top of vacuum chamber is connected with vacuum
It manages, the top of the box at the vacuum tube position is equipped with the second vacuum meter, one end installation of the vacuum tube far from vacuum chamber
There are ionic pump, side of the babinet far from the first vacuum meter that controller is installed.
Preferably, the bottom of the babinet is equipped with supporting rod.
Preferably, edge of the door body far from loading room side is equipped with handle.
Preferably, check valve is installed, and check valve is electrically connected with controller on the tail pipe seat.
Preferably, there are two control valves for installation on the gas pipeline.
Compared with prior art, the utility model has the beneficial effects that：The Novel ultrahigh vacuum exhaust station, by babinet
Interior bottom portion setting heating room, and polyurethane insulation coating is set on the inner wall of heating room, convenient for being kept the temperature to heating room, pass through
Fire protection pipe is uniformly installed in the bottom of babinet, and one end of fire protection pipe extends to heating chamber, and in the other end of fire protection pipe
Ignition tip is installed, and fire protection pipe is connected with gas pipeline close to one end of ignition tip by Gas Pipe, and electrical heating is changed to combustion gas
Heating saves 50% or more cost to reduce energy consumption, simultaneously because gas heating is slowly to heat up, makes the indoor temperature up and down of heating
Degree difference is smaller, reduces the rejection rate of product, installs two driving motors by the inside of the babinet at heating room position, and drive
The output end of dynamic motor all installs shaft, and extends to the inside of heating room, and shaft in the one end of shaft far from driving motor
On be uniformly provided with fan blade, by motor drive shaft on fan blade rotate, convenient for heating room heat be stirred, keep workpiece equal
Even heated, vacuum chamber is arranged by the box house above loading room in the utility model, and the bottom of vacuum chamber is uniformly arranged
One end of tail pipe seat, tail pipe seat extends to loading chamber interior, the first vacuum meter is installed on the outside of the babinet at vacuum chamber position, and true
Middle position at the top of empty room is connected with vacuum tube, and the second vacuum meter is installed in the top of the box at vacuum tube position, very
The one end of blank pipe far from vacuum chamber is equipped with ionic pump, can carry out vacuum pumping to multiple workpiece, the production cycle of workpiece adds
Soon, productivity effect is improved.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the partial schematic diagram of the utility model；
Fig. 3 is the side view of the utility model；
In figure：1- gas pipelines；2- Gas Pipes；3- fire protection pipes；4- door body；5- check valves；The first vacuum meters of 6-；7- vacuum
Pipe；8- ionic pumps；The second vacuum meters of 9-；10- babinets；11- vacuum chambers；12- tail pipe seats；13- loadings room；14- loadings room；15-
Heat room；16- controllers；17- ignition tips；18- supporting rods；19- driving motors；20- fan blades；21- shafts；22- handles.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
- 3 are please referred to Fig.1, a kind of embodiment provided by the utility model：A kind of ultrahigh vacuum exhaust station, including ionic pump
8, babinet 10, vacuum chamber 11, loading room 13 and heating room 15,10 interior bottom portion of babinet is equipped with heating room 15, and heats room 15
Inner wall is equipped with polyurethane insulation coating 14, and the bottom of babinet 10 is uniformly equipped with fire protection pipe 3, and one end of fire protection pipe 3 extends to
It heats inside room 15, the other end of fire protection pipe 3 is equipped with ignition tip 17, and fire protection pipe 3 passes through combustion close to one end of ignition tip 17
Tracheae 2 is connected with gas pipeline 1, is installed on gas pipeline 1 there are two control valve, heats the inside of the babinet 10 at 15 position of room
There are two driving motors 19 for installation, and the model of the driving motor 19 can be Y80M1-2, and the output end of driving motor 19 is all installed
There are shaft 21, the one end of shaft 21 far from driving motor 19 to extend to the inside of heating room 15, and wind is uniformly provided in shaft 21
Leaf 20, the babinet 10 of 15 top of heating room is internally provided with loading room 13, and the bottom of loading room 13 is hinged with door body 4, door body 4
Edge far from 13 side of loading room is equipped with handle 22, and the babinet 10 of 13 top of loading room is internally provided with vacuum chamber 11, and true
The bottom of empty room 11 is uniformly provided with tail pipe seat 12, and check valve 5 is equipped on tail pipe seat 12, and one end of tail pipe seat 12 extends to loading
Inside room 13,10 outside of babinet at 11 position of vacuum chamber is equipped with the first vacuum meter 6, and the centre position at 11 top of vacuum chamber
Place is connected with vacuum tube 7, and 10 top of babinet at 7 position of vacuum tube is equipped with the second vacuum meter 9, and vacuum tube 7 is far from vacuum chamber
11 one end is equipped with ionic pump 8, and the model of the ionic pump 8 can be Agilent VacIon Plus300, and babinet 10 is far from the
The side of one vacuum meter 6 is equipped with controller 16, and the model of the controller 16 can be MAM-330, and check valve 5 and controller 16
It is electrically connected, the bottom of babinet 10 is equipped with supporting rod 18.
Operation principle：It is first turned on door body 4 and puts the workpiece in loading room 13, shut door body 4, then ionic pump 8 is by true
Tail pipe seat 12 is installed to vacuumize loading room 13 and workpiece in empty room 11, while passing through the first vacuum meter 6 and the second vacuum meter 9
Inside is detected, while natural gas is passed through into Gas Pipe 2 from gas pipeline 1, then it is carried out a little by ignition tip 17
Fire, then heats heating room 15, carries out auxiliary vacuum to workpiece to conduct heat into loading room 13, leads to simultaneously
Motor 19 of overdriving drives the fan blade 20 in shaft 21 to rotate, and is stirred evenly to the heat in heating room 15, most closes power supply, beat
Opening door body 4 takes out workpiece.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this practicality is new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing in the equivalent requirements of the claims will be fallen
All changes in justice and range are embraced therein.Any reference numeral in claim should not be considered as limitation
Involved claim.
Claims (5)
1. a kind of ultrahigh vacuum exhaust station, including ionic pump (8), babinet (10), vacuum chamber (11), loading room (13) and heating room
(15), it is characterised in that：Babinet (10) interior bottom portion is equipped with heating room (15), and the inner wall for heating room (15) is equipped with and gathers
The bottom of urethane insulating layer (14), the babinet (10) is uniformly equipped with fire protection pipe (3), and one end of fire protection pipe (3) extends to
Room (15) inside is heated, the other end of the fire protection pipe (3) is equipped with ignition tip (17), and fire protection pipe (3) is close to ignition tip
(17) one end is connected with gas pipeline (1), the inside of the babinet (10) at described heating room (15) position by Gas Pipe (2)
There are two driving motors (19) for installation, and the output end of driving motor (19) is all equipped with shaft (21), and the shaft (21) is remote
One end from driving motor (19) extends to the inside of heating room (15), and fan blade (20) is uniformly provided in shaft (21), described
That heats the babinet (10) above room (15) is internally provided with loading room (13), and the bottom of loading room (13) is hinged with door body (4),
Babinet (10) above the loading room (13) is internally provided with vacuum chamber (11), and the bottom of vacuum chamber (11) is uniformly provided with tail pipe
One end of seat (12), the tail pipe seat (12) extends to loading room (13) inside, the babinet at vacuum chamber (11) position
(10) outside is equipped with the first vacuum meter (6), and the middle position at the top of vacuum chamber (11) is connected with vacuum tube (7), described
Second vacuum meter (9) is installed, the vacuum tube (7) is far from vacuum chamber (11) at the top of the babinet (10) at vacuum tube (7) position
One end ionic pump (8) is installed, side of the babinet (10) far from the first vacuum meter (6) is equipped with controller (16).
2. a kind of ultrahigh vacuum exhaust station according to claim 1, it is characterised in that：The bottom of the babinet (10) is equipped with
Supporting rod (18).
3. a kind of ultrahigh vacuum exhaust station according to claim 1, it is characterised in that：The door body (4) is far from loading room
(13) edge of side is equipped with handle (22).
4. a kind of ultrahigh vacuum exhaust station according to claim 1, it is characterised in that：It is equipped on the tail pipe seat (12)
Check valve (5), and check valve (5) is electrically connected with controller (16).
5. a kind of ultrahigh vacuum exhaust station according to claim 1, it is characterised in that：It is installed on the gas pipeline (1)
There are two control valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820033550.7U CN207779094U (en) | 2018-01-09 | 2018-01-09 | A kind of ultrahigh vacuum exhaust station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820033550.7U CN207779094U (en) | 2018-01-09 | 2018-01-09 | A kind of ultrahigh vacuum exhaust station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207779094U true CN207779094U (en) | 2018-08-28 |
Family
ID=63222944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820033550.7U Expired - Fee Related CN207779094U (en) | 2018-01-09 | 2018-01-09 | A kind of ultrahigh vacuum exhaust station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207779094U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567488A (en) * | 2019-08-28 | 2019-12-13 | 西安嘉怡天恒精密技术股份有限公司 | Laser gyro vacuum exhaust platform |
-
2018
- 2018-01-09 CN CN201820033550.7U patent/CN207779094U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567488A (en) * | 2019-08-28 | 2019-12-13 | 西安嘉怡天恒精密技术股份有限公司 | Laser gyro vacuum exhaust platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180828 Termination date: 20200109 |