CN104674216A - Multifunctional infiltration furnace and diffusion coating and coating integrated method - Google Patents
Multifunctional infiltration furnace and diffusion coating and coating integrated method Download PDFInfo
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- CN104674216A CN104674216A CN201510078227.2A CN201510078227A CN104674216A CN 104674216 A CN104674216 A CN 104674216A CN 201510078227 A CN201510078227 A CN 201510078227A CN 104674216 A CN104674216 A CN 104674216A
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Abstract
The invention relates to a multifunctional infiltration furnace and a diffusion coating and coating integrated method. The multifunctional infiltration furnace comprises an upper furnace body, a lower furnace body, a rack, an electric control assembly, a temperature control assembly, a water cycle assembly and a vacuum supply assembly, wherein a metal cementation source and a coating electrode are fixedly arranged in the upper furnace body in an insulating manner; a plurality of groups of metal cementation targets are arranged on the metal cementation source; a plurality of coating targets are arranged in the coating cathode; a diffusion coating cathode is fixedly arranged in the lower furnace body in an insulating manner; a plurality of groups of workpiece racks for mounting to-be-infiltrated materials are arranged on the diffusion coating cathode; the electric control assembly comprises a diffusion coating cathode power supply, a coating power supply and a diffusion coating source power supply; a temperature detector, an argon pipe opening and an in-furnace vacuum pipe opening are also formed in a main infiltration furnace body in a penetrating manner. The diffusion coating and coating integrated method comprises the following steps: ionic nitriding-metal cementation synchronous composite infiltration, high-vacuum metal cementation treatment and high-vacuum coating treatment. The functions of low-vacuum ionic nitriding-metal cementation synchronous composite infiltration, high-vacuum metal cementation and high-vacuum ionic coating within one furnace can be realized by virtue of the multifunctional infiltration furnace.
Description
Technical field
The heat treating method that the present invention relates to a kind of thermal treatment unit and use this device to realize, is particularly a kind ofly applicable to the multi-functional of clock and watch part and oozes stove and a kind of plating plated film integral method.
Background technology
Clock and watch part adopts austenitic stainless steel material manufacture as gauge stand, watchband etc., generally needs to adopt ion nitriding, metallic cementation process to improve its surface hardness, also to need to adopt ion film plating painted, realizes its decoration functions.At present, when clock and watch part carries out ion nitriding, metallic cementation, coating film treatment, generally need to adopt different heat treatment furnaces, many, the consuming time length of operation, energy consumption are large; Further, to adopt after ion nitriding again ion nitriding again after metallic cementation or metallic cementation, the content of chromium in stainless steel tissue all may be caused to decline, thus cause the remarkable reduction of stainless steel antiseptic property, make the stainless steel components after plating occur getting rusty.
Summary of the invention
In order to solve the deficiencies in the prior art, an object of the present invention is to provide and is a kind ofly applicable to the multi-functional of clock and watch part and oozes stove; Another object of the present invention is to provide a kind of and multi-functionally oozes plating that stove matches, plated film integral method; To realize the function can carrying out the synchronous composite cementation of rough vacuum ion nitriding-metallic cementation, high vacuum metallic cementation, high vacuum ion film plating in a stove.
In order to realize first object of the present invention, the multi-functional stove that oozes of the present invention is achieved through the following technical solutions:
One is multi-functional oozes stove, comprises and oozes furnace main body, frame, electrically-controlled component, temperature control assembly, water circulation component and vacuum provisioning component;
The described furnace main body that oozes comprises upper furnace body and lower furnace body, described upper furnace body is fixed on above frame, lower furnace body is movably connected on below frame, and described frame is provided with the driven unit for driving lower furnace body and upper furnace body to fasten, the binding site of described upper furnace body and lower furnace body is provided with caulking gum;
In described upper furnace body, insulation is fixed with metallic cementation source electrode and plated film negative electrode, described metallic cementation source electrode is being provided with many group metallic cementation targets near lower furnace body side, described plated film negative electrode is provided with in close lower furnace body side and organizes coated target more, described upper furnace body is outside equipped with metallic cementation source electrode interface and plated film negative electrode interface, described metallic cementation source electrode interface runs through upper furnace body body wall and is connected with metallic cementation source electrode, described plated film negative electrode interface runs through upper furnace body body wall and is connected with plated film negative electrode, and described metallic cementation source electrode interface, plated film negative electrode interface all insulate with upper furnace body body wall and seals;
The furnace wall of described upper furnace body is welded by three-layer metal material, furnace wall forms not connected top exocoel and top inner chamber from outside to inside, described top exocoel is communicated with upper furnace body outer wall and is provided with the first water inlet interface and the first water outlet mouthpiece, described first water inlet interface is connected with the export and import of water circulation component respectively with the first water outlet mouthpiece, and described top inner chamber is communicated with upper furnace body outer wall and is provided with top inner chamber vacuum interface;
In described lower furnace body, insulation is fixed with plating negative electrode, described plating negative electrode is being provided with many groups for installing the work rest of material to be infiltrated near upper furnace body side, described lower furnace body is outside equipped with plating negative electrode interface, described plating negative electrode interface is connected with plating negative electrode through lower furnace body body wall, and described plating negative electrode interface and lower furnace body body wall insulate and seal;
The furnace wall of described lower furnace body is welded by three-layer metal material, not connected bottom exocoel and lower lumen is formed from outside to inside in furnace wall, described bottom exocoel is communicated with lower furnace body outer wall and is provided with the second water inlet interface and the second water outlet mouthpiece, described second water inlet interface is connected with the export and import of water circulation component respectively with the second water outlet mouthpiece, and described lower lumen is communicated with lower furnace body outer wall and is provided with lower lumen vacuum interface;
Described electrically-controlled component comprises plating cathode power, plated film power supply and plating source electrode power supply, the positive pole of described plating cathode power and the positive pole conducting of plating source electrode power supply ground connection, the negative pole of plating cathode power and the positive pole conducting of plated film power supply, and be connected with plating negative electrode interface, the negative pole of described plated film power supply is connected with plated film negative electrode interface, and the negative pole of plating source electrode power supply is connected with metallic cementation source electrode interface;
Ooze furnace main body described in running through and be also provided with valve tube interface in hygrosensor, tunger tube interface, nitrogen tube interface and stove, in described hygrosensor, tunger tube interface, nitrogen tube interface and stove valve tube interface with ooze furnace main body body wall and insulate and seal, described hygrosensor is connected with temperature control assembly, be connected with argon tanks with described tunger tube interface, be connected with nitrogen pot with described nitrogen tube interface;
In described top inner chamber vacuum interface, lower lumen vacuum interface and stove, valve tube interface is all connected with described vacuum provisioning component.
As a kind of specific embodiment, described driven unit comprises the drive screw vertically arranged for a pair, be sheathed on the drive nut on drive screw, and for driving the synchronous machine of drive screw turns, the two ends up and down of described drive screw are fixed by rolling bearing units respectively, described synchronous driving motor is connected with one end of drive screw by shaft coupling, and described lower furnace body is fixedly connected with described drive nut.
As a kind of specific embodiment, described driven unit also comprises liner, and described liner comprises the line slideway vertically arranged in pairs and the linear slider be fixed on lower furnace body, and described linear slider is movably set on line slideway.
As a kind of specific embodiment, described metallic cementation source electrode and plated film negative electrode arranged in parallel, described metallic cementation source electrode comprises two horizontal donuts of mutual conduction, and described metallic cementation target protrudes and is arranged at donut near lower furnace body side, and the tube wall of metallic cementation target offers some through holes; Described plated film negative electrode comprises two horizontal donuts of mutual conduction, and described metallic cementation target protrudes and is arranged at plated film negative electrode near lower furnace body side.
As a kind of specific embodiment, described metallic cementation target is cylindric, and described through hole arranges along the tube wall generatrix direction of metallic cementation target.
As a kind of specific embodiment, described through hole is circular hole, and through-hole diameter is 10-12mm.
As a kind of specific embodiment, described plating negative electrode is circular, and described work rest is evenly arranged along plating negative electrode circumferential direction.
As a kind of specific embodiment, described vacuum provisioning component comprises vacuum pump and vacuum storage tank, described vacuum storage tank is connected with valve tube interface in stove by the first valve, be connected with top inner chamber vacuum interface by the second valve, be connected with lower lumen vacuum interface by the 3rd valve, be connected with described top inner chamber vacuum interface and be also provided with the first pressure relief valve, the opposite side of described first pressure relief valve is communicated with air, be connected with the second pressure relief valve with described top inner chamber vacuum interface, the opposite side of described second pressure relief valve is communicated with air.
In order to realize second object of the present invention, plating plated film integral method of the present invention comprises the following steps realization:
Workpiece to be processed, for presetting target, is put into work rest by the material of S1, replacement metallic cementation target and coated target.
S2, close up upper furnace body and lower furnace body, the voltage of adjustment plating cathode power is between 400-500V, and the voltage of adjustment plating source electrode power supply is 600V-700V, and open vacuum provisioning component by top inner chamber, lower lumen and furnace interior are evacuated
S3, when in-furnace temperature reaches 500 DEG C-600 DEG C, open water recirculation assembly makes top exocoel, lower lumen realizes water cycle, and the vacuum of release top inner chamber and lower lumen;
S4, reach 1Pa-10Pa to vacuum tightness in nitrogen injection in body of heater and argon gas to stove, close vacuum provisioning component, and keep 3-4h, carry out the synchronous composite cementation of ion nitriding-metallic cementation;
S5, continue to be evacuated to 10 in stove by vacuum provisioning component
-1pa-10
-3pa, and keep 2-3h, carry out the process of high vacuum metallic cementation;
S6, closedown plating cathode power, closedown plating source electrode power supply, opening plated film power supply and adjusting its voltage is 700V-1000V, keeps vacuum tightness 10 in stove
-1pa-10
-3pa, carries out high vacuum coating process.
Compared with prior art, beneficial effect of the present invention is:
(1) in same body of heater, realize the synchronous composite cementation of rough vacuum ion nitriding-metallic cementation, high vacuum metallic cementation, high vacuum ion film plating continuously, save man-hour, the energy, raise the efficiency.
(2) the synchronous composite cementation of rough vacuum ion nitriding-metallic cementation is realized, when to arrange in target in material containing chromium, the content of chromium in the tissue of stainless steel work-piece can be made to significantly decrease, both can improve stainless hardness, stainless antiseptic property can be guaranteed again.
(3) furnace wall adopts three layers structure, and during intensification, furnace wall inner chamber vacuumizes, exocoel water cycle, and furnace heat loss is little, quick heating, and furnace wall temperature is low, and work-yard envrionment temperature is not significantly higher, and improves the operating environment of workman; Holding stage, furnace wall inner chamber sheds vacuum, exocoel water cycle, can take away unnecessary heat, keeps the constant of temperature; So both can shorten the heating-up time, and enhance productivity, when can ensure again plating, plated film, parameter is stable, ensures quality product.
(4) technique is simple, is easy to carry out adjusting and controlling.
(5) have employed the mode that rough vacuum combines with high vacuum, product appearance smooth finish, stay in grade.
Accompanying drawing explanation
Fig. 1 is the multi-functional assembling relationship figure oozing stove.
Fig. 2 is the A direction view of Fig. 1.
Fig. 3 is the B direction view of Fig. 1.
Fig. 4 is the C-C direction view of Fig. 1.
Fig. 5 is the multi-functional schematic diagram oozing stove.
In figure, I. upper furnace body assembly; II. lower furnace body assembly; III. housing assembly.
1-first is intake interface, 2-tunger tube interface, 3-hygrosensor, 4-top inner chamber vacuum interface, 5-upper furnace body, 6-synchronous machine, 7-shaft coupling, 8-rolling bearing units I, 9-joint nut, 10-drive screw, 11-rolling bearing units II, 12-frame, 13-second is intake interface, 14-plating negative electrode, 15-nitrogen tube interface, 16-lower furnace body, 17-lower lumen vacuum interface, 18-second water outlet mouthpiece, 19-caulking gum, 20-work rest, 21.-first water outlet mouthpiece, 22-metallic cementation target, 23-coated target, 24-plated film negative electrode, 25-metallic cementation source electrode, valve tube interface in 26-stove, 27-metallic cementation source electrode interface, 28-plated film negative electrode interface, 29-linear slider, 30-plating negative electrode interface, 31-line slideway, 3-. vacuum pump, 33-total valve, 34-vacuum storage tank, 35-second valve, 36-tensimeter I, 37-pressure Table II, 38-first pressure relief valve, 39-first valve, 40. pressure Table III, 41-the 3rd valve, 42-second pressure relief valve, 43-nitrogen pot, 44-plating cathode power, 45-plated film power supply, 46-plating source electrode power supply, 47-argon tanks, 48-temperature control unit.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is described further:
See Fig. 1-Fig. 5, of the present inventionly multi-functionally ooze stove, comprise and ooze furnace main body, frame, electrically-controlled component, temperature control assembly 48, water circulation component and vacuum provisioning component.
The described furnace main body that oozes comprises upper furnace body 5 and lower furnace body 16, described upper furnace body 5 is fixed on the top of frame 12, lower furnace body 16 is movably connected on below frame 12, described frame 12 is provided with the driven unit for driving lower furnace body 16 and upper furnace body 5 to fasten, described upper furnace body 5 is provided with caulking gum 19 with the binding site of lower furnace body 16.
In described upper furnace body 5, insulation is fixed with metallic cementation source electrode 25 and plated film negative electrode 24, and described metallic cementation source electrode 25 is being provided with many group metallic cementation targets 22 near lower furnace body 16 side, described plated film negative electrode 24 is being provided with many group coated targets 23 near lower furnace body 16 side; Described upper furnace body 5 is outside equipped with metallic cementation source electrode interface 27 and plated film negative electrode interface 28, described metallic cementation source electrode interface 27 runs through upper furnace body 5 body wall and is connected with metallic cementation source electrode 25, described plated film negative electrode interface 28 runs through upper furnace body 5 body wall and is connected with plated film negative electrode 24, and described metallic cementation source electrode interface 25, plated film negative electrode interface 28 and hygrosensor all insulate with upper furnace body 5 body wall and seal.
The furnace wall of described upper furnace body 5 is welded by three-layer metal material, not connected top exocoel and top inner chamber is formed from outside to inside in furnace wall, described top exocoel is communicated with upper furnace body 5 outer wall and is provided with the first water inlet interface 1 and the first water outlet mouthpiece 21, described first water inlet interface 1 is connected with the export and import of water circulation component respectively with the first water outlet mouthpiece 21, and described top inner chamber is communicated with upper furnace body 5 outer wall and is provided with top inner chamber vacuum interface pipe 4;
In described lower furnace body 16, insulation is fixed with plating negative electrode 14, described plating negative electrode 14 is being provided with many groups for installing the work rest 20 of material to be infiltrated near upper furnace body 5 side, described lower furnace body 16 is outside equipped with plating negative electrode interface 30, described plating negative electrode interface 30 is connected with plating negative electrode 14 through lower furnace body 16 body wall, described plating negative electrode interface 30 insulate with lower furnace body 16 body wall and seals, described plating negative electrode 14 is in circular, and described work rest 20 is uniformly distributed on plating negative electrode 14 (plated film anode of holding concurrently).
The furnace wall of described lower furnace body 16 is welded by three-layer metal material, not connected bottom exocoel and lower lumen is formed from outside to inside in furnace wall, described bottom exocoel is communicated with lower furnace body outer wall and is provided with the second water inlet interface 13 and the second water outlet mouthpiece 18, described second water inlet interface 13 is connected with the export and import of water circulation component respectively with the second water outlet mouthpiece 18, and described lower lumen is communicated with lower furnace body 16 outer wall and is provided with lower lumen vacuum interface 17.
Described electrically-controlled component comprises plating cathode power 44, plated film power supply 45 and plating source electrode power supply 46, the positive pole of described plating cathode power 44 and the positive pole conducting of plating source electrode power supply 46 ground connection, the negative pole of plating cathode power 44 and the positive pole conducting of plated film power supply 45, and be connected with plating negative electrode interface 30, the negative pole of described plated film power supply 45 is connected with plated film negative electrode interface 28, and the negative pole of plating source electrode power supply 46 is connected with metallic cementation source electrode interface 27.
Ooze furnace main body described in running through and be also provided with valve tube interface 26 in hygrosensor 3, tunger tube interface 2, nitrogen tube interface 15 and stove, in described hygrosensor 3, tunger tube interface 2, nitrogen tube interface 15 and stove valve tube interface 26 with ooze furnace main body body wall and insulate and seal, described hygrosensor 3 is connected with temperature control assembly 48, be connected with argon tanks 47 with described tunger tube interface 2, be connected with nitrogen pot 43 with described nitrogen tube interface 15.
In described top inner chamber vacuum interface 4, lower lumen vacuum interface 17 and stove, valve tube interface 26 is all connected with described vacuum provisioning component.
Described temperature control assembly 48 is for receiving the value of feedback of hygrosensor 3, and instruction starts water circulation system work, and described water circulation component comprises water pump, for the formation of water circulation system to oozing stove cooling.
In the present embodiment, described driven unit comprises the drive screw 10 vertically arranged for a pair, be sheathed on the drive nut 9 on drive screw 10, and the synchronous machine 6 for driving drive screw 10 to rotate, the two ends up and down of described drive screw 10 are fixed by rolling bearing units 8 and rolling bearing units 11 respectively, described synchronous driving motor 6 is connected with one end of drive screw 10 by shaft coupling 7, and described lower furnace body 16 is fixedly connected with described drive nut 9.
Described driven unit also comprises liner, described liner to comprise on vertical direction the line slideway 31 that arranges in pairs and and the linear slider 29 that is fixed on lower furnace body 16, described linear slider 29 is movably set on line slideway 31.
Described metallic cementation source electrode 25 and plated film negative electrode 24 arranged in parallel, described metallic cementation source electrode 25 comprises two horizontal donuts of mutual conduction, described metallic cementation target 22 protrudes and is arranged at donut near lower furnace body 16 side, described metallic cementation target 22 is in cylindric, the tube wall of metallic cementation target 22 offers some through holes along generatrix direction, in the present embodiment, described metallic cementation target 22 is in cylindric, described through hole is preferably circular hole, and arrange along the tube wall generatrix direction of metallic cementation target 22, through-hole diameter is preferably 10-12mm; Described plated film negative electrode 24 comprises two horizontal donuts of mutual conduction, and described coated target 23 protrudes and is arranged at plated film negative electrode 24 near lower furnace body 16 side, and coated target 23 is in arcuation, and multiple coated target 23 is installed on two concentric(al) circless of plated film negative electrode 24.
Above-mentioned plating negative electrode 24 is in circular, and described work rest 20 is evenly arranged along plating negative electrode 14 circumferential direction.
Above-mentioned vacuum provisioning component comprises vacuum pump 32 and vacuum storage tank 34, a connection line is had between vacuum pump 32 and vacuum storage tank 34, pipeline is provided with total valve 33,2 connection lines are had between vacuum storage tank 34 and upper furnace body 5, wherein a pipeline makes described vacuum storage tank 34 be connected with valve tube interface 26 in stove with tensimeter II37 by the first valve 39, vacuumizes in body of heater for realizing; Another pipeline is connected with top inner chamber vacuum interface 4 with tensimeter I36 by the second valve 35, vacuumizes for realizing top inner chamber.Be connected with the first pressure relief valve 38 with described top inner chamber vacuum interface, the opposite side of described first pressure relief valve 38 is communicated with air, when evacuated, second valve 35 is opened, and the first pressure relief valve 38 is closed, when release, second valve 35 is closed, and the first pressure relief valve 38 is opened;
1 connection line is had between vacuum storage tank 34 and lower furnace body 16, vacuum storage tank 34 is connected with lower lumen vacuum interface 17 with tensimeter III40 by the 3rd valve 41, be connected with the second pressure relief valve 42 with described lower lumen vacuum interface 17, the opposite side of described second pressure relief valve 42 is communicated with air; When evacuated, the 3rd valve 41 is opened, and the second pressure relief valve 42 is closed, and when release, the 3rd valve 41 is closed, and the second pressure relief valve I42 opens.
Based on said structure and setting, a kind of plating plated film integral method, comprises the following steps realization:
Workpiece to be processed, for presetting target, is put into work rest by the material of S1, replacement metallic cementation target and coated target.
In this step, the material of metallic cementation target (hollow cathode) 22 is replaced with required metallic cementation material, the material of coated target 23 is replaced with required Coating Materials; Workpiece is loaded onto work rest 20.
S2, close up upper furnace body and lower furnace body, the voltage of adjustment plating cathode power is between 400-500V, and the voltage of adjustment plating source electrode power supply is 600V-700V, and open vacuum provisioning component by top inner chamber, lower lumen and furnace interior are evacuated.
In this step, start synchronous machine 6, make upper furnace body 5 and lower furnace body 16 close up and seal, start plating cathode power 44, adjustment voltage, to 400V-500V, starts plating source electrode power supply 46, and adjustment voltage is to 600V-700V; Start temperature control unit, start vacuum pump 32, open total valve 33, first valve 39, second valve 35, the 3rd valve 41, realize vacuumizing in top inner chamber, lower lumen, body of heater simultaneously, its main purpose reduces stove heat conduction at the temperature rise period, makes in-furnace temperature reach temperature required requirement fast.
S3, when in-furnace temperature reaches 500 DEG C-600 DEG C, open water recirculation assembly makes top exocoel, lower lumen realizes water cycle, destroys the vacuum of top inner chamber and lower lumen.
In this step, when hygrosensor 3 detect in-furnace temperature reach 500 DEG C-600 DEG C time, open water recirculation assembly, realize top exocoel, bottom exocoel water cycle thus be incubated, close the second valve 35 and the 3rd valve 41 simultaneously, open the first pressure relief valve 38 and the second pressure relief valve 42, take away unnecessary heat to allow the water cycle of upper furnace body exocoel and lower furnace body exocoel.
S4, reach 1Pa-10Pa to vacuum tightness in nitrogen injection in body of heater and argon gas to stove, close vacuum provisioning component, and keep 3-4h, carry out the synchronous composite cementation of ion nitriding-metallic cementation;
In this step, respectively by nitrogen pot 43 and argon tanks 47 to nitrogen injection in body of heater and argon gas, when vacuum tightness reaches 1Pa-10Pa in stove, close vacuum pump 32 and whole valves, and keep 3-4h, realize the synchronous composite cementation of ion nitriding-metallic cementation.
S5, continue to be evacuated to 10 in stove by vacuum provisioning component
-1pa-10
-3pa, and keep 2-3h, carry out the process of high vacuum metallic cementation;
In this step, keep plating cathode power 44 voltage 400V-500V, keep plating source electrode power supply 46 voltage 600V-700V, keep in-furnace temperature 500 DEG C-600 DEG C.Start vacuum pump 32, open total valve 33, the first valve 39, realize continuing in body of heater to vacuumize, input argon gas also regulates vacuum tightness to 10
-1pa-10
-3pa, closes vacuum pump 32, total valve 33, first valve 39, and keeps 2-3h, realize the process of high vacuum metallic cementation.
S6, closedown plating cathode power, closedown plating source electrode power supply, opening plated film power supply and adjusting its voltage is 700V-1000V, keeps vacuum tightness 10 in stove
-1pa-10
-3pa, carries out high vacuum coating process.
In this step, close plating cathode power 44, plating source electrode power supply 46, open plated film power supply 45, voltage is adjusted to 700V-1000V, keep vacuum tightness 10 in stove
-1pa-10
-3pa, realizes high vacuum coating process.
Should be appreciated that; embodiment described in above embodiment is only to carry out clear, complete explanation to claims; but and do not mean that the restriction to claims protection domain; every based on inventive concept of the present invention; basis of the present invention is carried out with the present invention without the distortion of substantive difference and transformation, all belong to the protection domain of the claims in the present invention.
Claims (9)
1. multi-functionally ooze a stove, it is characterized in that: comprise and ooze furnace main body, frame, electrically-controlled component, temperature control assembly, water circulation component and vacuum provisioning component;
The described furnace main body that oozes comprises upper furnace body and lower furnace body, described upper furnace body is fixed on above frame, lower furnace body is movably connected on below frame, and described frame is provided with the driven unit for driving lower furnace body and upper furnace body to fasten, the binding site of described upper furnace body and lower furnace body is provided with caulking gum;
In described upper furnace body, insulation is fixed with metallic cementation source electrode and plated film negative electrode, described metallic cementation source electrode is being provided with many group metallic cementation targets near lower furnace body side, described plated film negative electrode is provided with in close lower furnace body side and organizes coated target more, described upper furnace body is outside equipped with metallic cementation source electrode interface and plated film negative electrode interface, described metallic cementation source electrode interface runs through upper furnace body body wall and is connected with metallic cementation source electrode, described plated film negative electrode interface runs through upper furnace body body wall and is connected with plated film negative electrode, and described metallic cementation source electrode interface, plated film negative electrode interface all insulate with upper furnace body body wall and seals;
The furnace wall of described upper furnace body is welded by three-layer metal material, furnace wall forms not connected top exocoel and top inner chamber from outside to inside, described top exocoel is communicated with upper furnace body outer wall and is provided with the first water inlet interface and the first water outlet mouthpiece, described first water inlet interface is connected with the export and import of water circulation component respectively with the first water outlet mouthpiece, and described top inner chamber is communicated with upper furnace body outer wall and is provided with top inner chamber vacuum interface;
In described lower furnace body, insulation is fixed with plating negative electrode, described plating negative electrode is being provided with many groups for installing the work rest of material to be infiltrated near upper furnace body side, described lower furnace body is outside equipped with plating negative electrode interface, described plating negative electrode interface is connected with plating negative electrode through lower furnace body body wall, and described plating negative electrode interface and lower furnace body body wall insulate and seal;
The furnace wall of described lower furnace body is welded by three-layer metal material, not connected bottom exocoel and lower lumen is formed from outside to inside in furnace wall, described bottom exocoel is communicated with lower furnace body outer wall and is provided with the second water inlet interface and the second water outlet mouthpiece, described second water inlet interface is connected with the export and import of water circulation component respectively with the second water outlet mouthpiece, and described lower lumen is communicated with lower furnace body outer wall and is provided with lower lumen vacuum interface;
Described electrically-controlled component comprises plating cathode power, plated film power supply and plating source electrode power supply, the positive pole of described plating cathode power and the positive pole conducting of plating source electrode power supply ground connection, the negative pole of plating cathode power and the positive pole conducting of plated film power supply, and be connected with plating negative electrode interface, the negative pole of described plated film power supply is connected with plated film negative electrode interface, and the negative pole of plating source electrode power supply is connected with metallic cementation source electrode interface;
Ooze furnace main body described in running through and be also provided with valve tube interface in hygrosensor, tunger tube interface, nitrogen tube interface and stove, in described hygrosensor, tunger tube interface, nitrogen tube interface and stove valve tube interface with ooze furnace main body body wall and insulate and seal, described hygrosensor is connected with temperature control assembly, be connected with argon tanks with described tunger tube interface, be connected with nitrogen pot with described nitrogen tube interface;
In described top inner chamber vacuum interface, lower lumen vacuum interface and stove, valve tube interface is all connected with described vacuum provisioning component.
2. multi-functionally as claimed in claim 1 ooze stove, it is characterized in that, described driven unit comprises the drive screw vertically arranged for a pair, be sheathed on the drive nut on drive screw, and for driving the synchronous machine of drive screw turns, the two ends up and down of described drive screw are fixed by rolling bearing units respectively, and described synchronous driving motor is connected with one end of drive screw by shaft coupling, and described lower furnace body is fixedly connected with described drive nut.
3. multi-functionally as claimed in claim 2 ooze stove, it is characterized in that, described driven unit also comprises liner, and described liner comprises the line slideway vertically arranged in pairs and the linear slider be fixed on lower furnace body, and described linear slider is movably set on line slideway.
4. multi-functionally as claimed in claim 1 ooze stove, it is characterized in that, described metallic cementation source electrode and plated film negative electrode arranged in parallel, described metallic cementation source electrode comprises two horizontal donuts of mutual conduction, described metallic cementation target protrudes and is arranged at donut near lower furnace body side, and the tube wall of metallic cementation target offers some through holes; Described plated film negative electrode comprises two horizontal donuts of mutual conduction, and described metallic cementation target protrudes and is arranged at plated film negative electrode near lower furnace body side.
5. multi-functionally as claimed in claim 4 ooze stove, it is characterized in that, described metallic cementation target is cylindric, and described through hole arranges along the tube wall generatrix direction of metallic cementation target.
6. multi-functional as described in claim 4 or 5 oozes stove, and it is characterized in that, described through hole is circular hole, and through-hole diameter is 10-12mm.
7. multi-functionally as claimed in claim 1 ooze stove, it is characterized in that, described plating negative electrode is circular, and described work rest is evenly arranged along plating negative electrode circumferential direction.
8. multi-functionally as claimed in claim 1 ooze stove, it is characterized in that, described vacuum provisioning component comprises vacuum pump and vacuum storage tank, described vacuum storage tank is connected with valve tube interface in stove by the first valve, be connected with top inner chamber vacuum interface by the second valve, be connected with lower lumen vacuum interface by the 3rd valve, be connected with described top inner chamber vacuum interface and be also provided with the first pressure relief valve, the opposite side of described first pressure relief valve is communicated with air, the second pressure relief valve is connected with described top inner chamber vacuum interface, the opposite side of described second pressure relief valve is communicated with air.
9. a plating plated film integral method, multi-functionally oozes stove based on according to claim 1, it is characterized in that, comprise the following steps realization:
Workpiece to be processed, for presetting target, is put into work rest by the material of S1, replacement metallic cementation target and coated target.
S2, close up upper furnace body and lower furnace body, the voltage of adjustment plating cathode power is between 400-500V, and the voltage of adjustment plating source electrode power supply is 600V-700V, and open vacuum provisioning component by top inner chamber, lower lumen and furnace interior are evacuated
S3, when in-furnace temperature reaches 500 DEG C-600 DEG C, open water recirculation assembly makes top exocoel, lower lumen realizes water cycle, and the vacuum of release top inner chamber and lower lumen;
S4, reach 1Pa-10Pa to vacuum tightness in nitrogen injection in body of heater and argon gas to stove, close vacuum provisioning component, and keep 3-4h, carry out the synchronous composite cementation of ion nitriding-metallic cementation;
S5, continue to be evacuated to 10 in stove by vacuum provisioning component
-1pa-10
-3pa, and keep 2-3h, carry out the process of high vacuum metallic cementation;
S6, closedown plating cathode power, closedown plating source electrode power supply, opening plated film power supply and adjusting its voltage is 700V-1000V, keeps vacuum tightness 10 in stove
-1pa-10
-3pa, carries out high vacuum coating process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510078227.2A CN104674216B (en) | 2015-02-13 | 2015-02-13 | One kind is multi-functional to ooze stove and plating plated film integral method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510078227.2A CN104674216B (en) | 2015-02-13 | 2015-02-13 | One kind is multi-functional to ooze stove and plating plated film integral method |
Publications (2)
| Publication Number | Publication Date |
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| CN104674216A true CN104674216A (en) | 2015-06-03 |
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| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN111850457A (en) * | 2020-07-29 | 2020-10-30 | 扬州大学 | Controllable surface nitriding device and using method thereof |
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