CN104640431B - 支撑装置、用来支撑待用元件装配的基底的方法及装配机 - Google Patents

支撑装置、用来支撑待用元件装配的基底的方法及装配机 Download PDF

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Publication number
CN104640431B
CN104640431B CN201410584661.3A CN201410584661A CN104640431B CN 104640431 B CN104640431 B CN 104640431B CN 201410584661 A CN201410584661 A CN 201410584661A CN 104640431 B CN104640431 B CN 104640431B
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China
Prior art keywords
support meanss
substrate
piston
fluid
fluid cavity
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Chinese (zh)
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CN104640431A (zh
Inventor
特里贾尼·米歇尔
罗斯曼·托马斯
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ASMPT GmbH and Co KG
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ASM Assembly Systems GmbH and Co KG
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
CN201410584661.3A 2013-11-08 2014-10-27 支撑装置、用来支撑待用元件装配的基底的方法及装配机 Active CN104640431B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013112292.2 2013-11-08
DE102013112292.2A DE102013112292B4 (de) 2013-11-08 2013-11-08 Stützvorrichtung und Verfahren zum Abstützen eines mit Bauelementen zu bestückenden Substrates und Bestückungsautomat

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CN104640431A CN104640431A (zh) 2015-05-20
CN104640431B true CN104640431B (zh) 2017-10-03

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ID=52990798

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CN201410584661.3A Active CN104640431B (zh) 2013-11-08 2014-10-27 支撑装置、用来支撑待用元件装配的基底的方法及装配机

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CN (1) CN104640431B (de)
DE (1) DE102013112292B4 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7264653B2 (ja) * 2019-01-30 2023-04-25 株式会社Fuji 基板処理装置
TWI707740B (zh) 2019-11-26 2020-10-21 財團法人工業技術研究院 可調式工件支撐系統及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04293300A (ja) * 1991-03-22 1992-10-16 Fuji Mach Mfg Co Ltd プリント基板支持装置
US5984293A (en) * 1997-06-25 1999-11-16 Mcms, Inc. Apparatus for holding printed circuit board assemblies in manufacturing processes
CN101480117A (zh) * 2006-06-26 2009-07-08 松下电器产业株式会社 部件支撑方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7028391B2 (en) * 2002-06-19 2006-04-18 Speedline Technologies, Inc. Method and apparatus for supporting a substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04293300A (ja) * 1991-03-22 1992-10-16 Fuji Mach Mfg Co Ltd プリント基板支持装置
US5984293A (en) * 1997-06-25 1999-11-16 Mcms, Inc. Apparatus for holding printed circuit board assemblies in manufacturing processes
CN101480117A (zh) * 2006-06-26 2009-07-08 松下电器产业株式会社 部件支撑方法

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Publication number Publication date
DE102013112292B4 (de) 2016-05-04
DE102013112292A1 (de) 2015-05-13
CN104640431A (zh) 2015-05-20

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