CN104635076B - 接触式试验装置和环境试验方法 - Google Patents

接触式试验装置和环境试验方法 Download PDF

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Publication number
CN104635076B
CN104635076B CN201410640375.4A CN201410640375A CN104635076B CN 104635076 B CN104635076 B CN 104635076B CN 201410640375 A CN201410640375 A CN 201410640375A CN 104635076 B CN104635076 B CN 104635076B
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CN
China
Prior art keywords
heating
heating plate
trier
heater
temperature
Prior art date
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Active
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CN201410640375.4A
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English (en)
Chinese (zh)
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CN104635076A (zh
Inventor
田中秀树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Espec Corp
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Espec Corp
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Publication date
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Publication of CN104635076A publication Critical patent/CN104635076A/zh
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Publication of CN104635076B publication Critical patent/CN104635076B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/003—Environmental or reliability tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Toxicology (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Resistance Heating (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Control Of Resistance Heating (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
CN201410640375.4A 2013-11-13 2014-11-13 接触式试验装置和环境试验方法 Active CN104635076B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013235253A JP5871885B2 (ja) 2013-11-13 2013-11-13 接触式試験装置及び環境試験方法
JP2013-235253 2013-11-13

Publications (2)

Publication Number Publication Date
CN104635076A CN104635076A (zh) 2015-05-20
CN104635076B true CN104635076B (zh) 2018-06-22

Family

ID=53042837

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410640375.4A Active CN104635076B (zh) 2013-11-13 2014-11-13 接触式试验装置和环境试验方法

Country Status (5)

Country Link
US (1) US10852348B2 (ja)
JP (1) JP5871885B2 (ja)
KR (1) KR101793894B1 (ja)
CN (1) CN104635076B (ja)
TW (1) TWI624662B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102041208B1 (ko) * 2015-11-12 2019-11-06 쿄세라 코포레이션 히터
CN108037398B (zh) * 2018-01-16 2023-12-05 苏州精濑光电有限公司 一种显示模组老化测试装置及老化测试方法
EP3783375A1 (de) * 2019-08-19 2021-02-24 Dyconex AG Heiss-e-test für unbestückte leiterplatten

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200621069A (en) * 2004-11-15 2006-06-16 Sumitomo Electric Industries Semiconductor fabrication device heater and heating device equipped with the same
TW200928354A (en) * 2007-12-21 2009-07-01 Iteq Corp Apparatus for measurement of heat conductivity effect and method of using the same
TW201039675A (en) * 2009-04-30 2010-11-01 Hon Hai Prec Ind Co Ltd Planar heater

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3160510B2 (ja) * 1995-11-14 2001-04-25 シャープ株式会社 面状発熱体
US5759281A (en) * 1997-06-30 1998-06-02 Emcore Corporation CVD reactor for uniform heating with radiant heating filaments
US6888106B2 (en) * 2000-04-07 2005-05-03 Ibiden Co., Ltd. Ceramic heater
JP2002198302A (ja) * 2000-12-27 2002-07-12 Ibiden Co Ltd 半導体製造・検査装置用ホットプレート
JP2004200199A (ja) * 2002-12-16 2004-07-15 Oki Electric Ind Co Ltd 放熱シート
JP2004221166A (ja) * 2003-01-10 2004-08-05 Toshiba Matsushita Display Technology Co Ltd 加熱装置
JP4298421B2 (ja) * 2003-07-23 2009-07-22 エスペック株式会社 サーマルプレートおよび試験装置
JP4344682B2 (ja) * 2004-12-02 2009-10-14 エスペック株式会社 流体加熱装置、並びに、試験装置
US7901509B2 (en) * 2006-09-19 2011-03-08 Momentive Performance Materials Inc. Heating apparatus with enhanced thermal uniformity and method for making thereof
KR101672910B1 (ko) * 2008-07-22 2016-11-04 에스펙 가부시키가이샤 결로량이 제어 가능한 환경 시험 장치 및 그 제어 방법
JP2011146368A (ja) * 2009-12-15 2011-07-28 Panasonic Corp 面状採暖具の製造方法
TWM433047U (en) * 2011-12-23 2012-07-01 C Sun Mfg Ltd Thin type heater of heating device
TWM464342U (zh) * 2013-05-15 2013-11-01 Kuo-Wei Fan 電熱裝置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200621069A (en) * 2004-11-15 2006-06-16 Sumitomo Electric Industries Semiconductor fabrication device heater and heating device equipped with the same
TW200928354A (en) * 2007-12-21 2009-07-01 Iteq Corp Apparatus for measurement of heat conductivity effect and method of using the same
TW201039675A (en) * 2009-04-30 2010-11-01 Hon Hai Prec Ind Co Ltd Planar heater

Also Published As

Publication number Publication date
CN104635076A (zh) 2015-05-20
KR20150055545A (ko) 2015-05-21
JP5871885B2 (ja) 2016-03-01
KR101793894B1 (ko) 2017-11-06
US20150129575A1 (en) 2015-05-14
TWI624662B (zh) 2018-05-21
JP2015094714A (ja) 2015-05-18
TW201518712A (zh) 2015-05-16
US10852348B2 (en) 2020-12-01

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