CN104604337B - 直流电源装置以及直流电源装置的控制方法 - Google Patents

直流电源装置以及直流电源装置的控制方法 Download PDF

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Publication number
CN104604337B
CN104604337B CN201280075694.4A CN201280075694A CN104604337B CN 104604337 B CN104604337 B CN 104604337B CN 201280075694 A CN201280075694 A CN 201280075694A CN 104604337 B CN104604337 B CN 104604337B
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China
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control
current
voltage
circuit
output
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Chinese (zh)
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CN104604337A (zh
Inventor
让原逸男
安达俊幸
小玉真一
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Kyosan Electric Manufacturing Co Ltd
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Kyosan Electric Manufacturing Co Ltd
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32027—DC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33573—Full-bridge at primary side of an isolation transformer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33507—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001—Arrangements for beam delivery or irradiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Dc-Dc Converters (AREA)
CN201280075694.4A 2012-09-07 2012-09-07 直流电源装置以及直流电源装置的控制方法 Active CN104604337B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/072854 WO2014038060A1 (ja) 2012-09-07 2012-09-07 直流電源装置、直流電源装置の制御方法

Publications (2)

Publication Number Publication Date
CN104604337A CN104604337A (zh) 2015-05-06
CN104604337B true CN104604337B (zh) 2016-05-18

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CN201280075694.4A Active CN104604337B (zh) 2012-09-07 2012-09-07 直流电源装置以及直流电源装置的控制方法

Country Status (10)

Country Link
US (1) US9137885B2 (enExample)
EP (1) EP2879471B1 (enExample)
JP (1) JP5634626B2 (enExample)
KR (1) KR101579416B1 (enExample)
CN (1) CN104604337B (enExample)
DE (1) DE12884110T1 (enExample)
IN (1) IN2014KN03106A (enExample)
PL (1) PL2879471T3 (enExample)
TW (1) TWI491317B (enExample)
WO (1) WO2014038060A1 (enExample)

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EP2879257B1 (en) * 2012-09-05 2017-05-10 Kyosan Electric Mfg. Co., Ltd. Dc power supply device, and control method for dc power supply device
JP5729732B2 (ja) * 2013-09-27 2015-06-03 株式会社京三製作所 直流電源装置、直流電源装置の制御方法
DE102015117892A1 (de) * 2015-10-21 2017-04-27 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Verfahren zum Auf- oder Entladen einer Fahrzeugbatterie
GB2548209B (en) * 2016-03-07 2018-03-21 Intelligent Growth Solutions Ltd Controllable power and lighting system
KR102737698B1 (ko) 2016-06-15 2024-12-02 와틀로 일렉트릭 매뉴팩츄어링 컴파니 열시스템용 전력 변환기
DE112017004113B4 (de) * 2016-08-17 2024-10-24 Mitsubishi Electric Corporation Zündvorrichtung vom Barriere-Entladungstyp
JP6606038B2 (ja) * 2016-09-06 2019-11-13 株式会社東芝 出力電圧制御回路
EP3703248A4 (en) * 2017-10-18 2021-07-21 Hitachi-Johnson Controls Air Conditioning, Inc. CURRENT CONVERSION DEVICE AND REFRIGERATION AIR CONDITIONER
PL233868B1 (pl) * 2017-12-29 2019-12-31 Politechnika Lubelska Układ i sposób zasilania reaktora plazmowego ze ślizgającym się wyładowaniem
KR102242234B1 (ko) 2019-05-08 2021-04-20 주식회사 뉴파워 프라즈마 고주파 제너레이터 및 그의 동작 방법
CN111865111B (zh) * 2020-07-22 2024-02-20 新风光电子科技股份有限公司 大功率ac/dc变换等离子体点火器驱动电路及方法
KR102796631B1 (ko) * 2021-11-16 2025-04-16 주식회사 뉴파워 프라즈마 임피던스 매칭 장치 및 이를 포함하는 플라즈마 발생 장치
EP4479993A1 (de) * 2022-02-15 2024-12-25 Cyclize GmbH Schaltungsanordnung für eine plasmaquelle zur erzeugung von plasma bei atmosphärendruck

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JP2002173772A (ja) * 2000-12-05 2002-06-21 Ricoh Co Ltd スパッタリング装置
JP2005094827A (ja) * 2003-09-12 2005-04-07 Shunsuke Hosokawa 高電圧電源パルス電源
CN101447743A (zh) * 2007-11-30 2009-06-03 日立空调·家用电器株式会社 电力变换装置以及电力变换装置的控制方法
JP2010225308A (ja) * 2009-03-19 2010-10-07 Kanazawa Univ 誘導熱プラズマ発生方法及び装置
CN102027154A (zh) * 2008-05-26 2011-04-20 株式会社爱发科 溅射方法
CN102365705A (zh) * 2009-02-27 2012-02-29 Mks仪器股份有限公司 用于提供功率以在活性气体发生器中激发和维持等离子体的方法和装置

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JPS63268470A (ja) * 1987-04-27 1988-11-07 Mitsubishi Electric Corp 電力変換器
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs
JPH11229138A (ja) 1998-02-09 1999-08-24 Murata Mfg Co Ltd スパッタ装置
KR100488448B1 (ko) * 2001-11-29 2005-05-11 엘지전자 주식회사 플라즈마 디스플레이 패널의 서스테인펄스 발생장치
JP4406754B2 (ja) * 2003-07-30 2010-02-03 株式会社アイ・ライティング・システム 放電灯点灯装置
JP4526879B2 (ja) * 2004-06-18 2010-08-18 四変テック株式会社 直流電源装置
PL1864313T3 (pl) * 2005-03-24 2013-05-31 Oerlikon Trading Ag Próżniowy generator plazmowy
TW201031276A (en) 2009-02-06 2010-08-16 Creating Nano Technologies Inc Resonant inverter and plasma driving system icluding the same
JP2010255061A (ja) 2009-04-27 2010-11-11 Canon Anelva Corp スパッタリング装置及びスパッタリング処理方法
JP5153003B2 (ja) * 2009-08-19 2013-02-27 ウシオ電機株式会社 高圧放電ランプ点灯装置およびプロジェクタ
KR101421483B1 (ko) 2010-08-18 2014-07-22 가부시키가이샤 알박 직류 전원 장치
US9379643B2 (en) * 2010-12-23 2016-06-28 The Regents Of The University Of Colorado, A Body Corporate Electrosurgical generator controller for regulation of electrosurgical generator output power
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Publication number Priority date Publication date Assignee Title
JP2002173772A (ja) * 2000-12-05 2002-06-21 Ricoh Co Ltd スパッタリング装置
JP2005094827A (ja) * 2003-09-12 2005-04-07 Shunsuke Hosokawa 高電圧電源パルス電源
CN101447743A (zh) * 2007-11-30 2009-06-03 日立空调·家用电器株式会社 电力变换装置以及电力变换装置的控制方法
CN102027154A (zh) * 2008-05-26 2011-04-20 株式会社爱发科 溅射方法
CN102365705A (zh) * 2009-02-27 2012-02-29 Mks仪器股份有限公司 用于提供功率以在活性气体发生器中激发和维持等离子体的方法和装置
JP2010225308A (ja) * 2009-03-19 2010-10-07 Kanazawa Univ 誘導熱プラズマ発生方法及び装置

Also Published As

Publication number Publication date
KR101579416B1 (ko) 2015-12-21
KR20150038625A (ko) 2015-04-08
US20150195896A1 (en) 2015-07-09
EP2879471A1 (en) 2015-06-03
TW201412199A (zh) 2014-03-16
EP2879471A4 (en) 2016-07-06
DE12884110T1 (de) 2015-09-24
IN2014KN03106A (enExample) 2015-05-08
EP2879471B1 (en) 2017-05-10
WO2014038060A1 (ja) 2014-03-13
JP5634626B2 (ja) 2014-12-03
US9137885B2 (en) 2015-09-15
JPWO2014038060A1 (ja) 2016-08-08
PL2879471T3 (pl) 2017-09-29
TWI491317B (zh) 2015-07-01
CN104604337A (zh) 2015-05-06

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GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20150506

Assignee: Shang Shang Trading (Shanghai) Co., Ltd.

Assignor: Kyosan Electric Manufacturing Co., Ltd.

Contract record no.: 2016990000452

Denomination of invention: Dc power supply device, and control method for dc power supply device

Granted publication date: 20160518

License type: Common License

Record date: 20161028

LICC Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20150506

Assignee: Shanghai High-Light Tech Co., Ltd.

Assignor: Shang Shang Trading (Shanghai) Co., Ltd.

Contract record no.: 2016990000466

Denomination of invention: Dc power supply device, and control method for dc power supply device

Granted publication date: 20160518

License type: Common License

Record date: 20161108

LICC Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model