CN104568287A - Device for directly measuring pressure inside micro-channel by the aid of deformation of PDMS (polydimethylsiloxane) film - Google Patents
Device for directly measuring pressure inside micro-channel by the aid of deformation of PDMS (polydimethylsiloxane) film Download PDFInfo
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- CN104568287A CN104568287A CN201410823125.4A CN201410823125A CN104568287A CN 104568287 A CN104568287 A CN 104568287A CN 201410823125 A CN201410823125 A CN 201410823125A CN 104568287 A CN104568287 A CN 104568287A
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Abstract
The invention discloses a device for directly measuring pressure inside a micro-channel by the aid of deformation of a PDMS (polydimethylsiloxane) film. A PDMS chip with a groove is separated from a main channel by the aid of a layer of especially thin PDMS film, thus, the groove is airtight, the pressure of a gas in the groove is known (standard atmospheric pressure), when a fluid in the main channel passes through the groove, the PDMS film can deform, the volume of the gas in the groove changes, and the pressure inside the main channel in the position can be acquired rapidly and accurately by measuring the volume of the gas in the groove. The device is characterized in that a new device for measuring the pressure inside the micro-channel is designed. Sizes of both the micro-groove and the micro-channel can be designed voluntarily, and different pressure measurement ranges can be satisfied.
Description
Technical field
The present invention relates to the method for pressure in a kind of direct measurement microchannel, the micro-fluidic chip particularly related in fluid mechanics under micro-scale realizes the Measurement & Control to pressure in microchannel.The invention belongs to and utilize experimental provision directly to measure pressure method technical field in microchannel.
Background technology
Along with fast development that is extensive and VLSI (very large scale integrated circuit), the research of microelectromechanical systems (MEMS) obtains applies widely.As an important branch of MEMS, microfluidic control system gets most of the attention with the high integration of its function and huge potential application.Micro-flows is then the basis of research microfluidic system, the flow characteristics of fluid under microscale will be directly affected as the pressure in the important parameter-microchannel of Micro-flows, realize the measurement of pressure in microfluidic system exactly and control to describe better and to understand flow characteristics such as fluid velocity, viscosity and the resistance to flow etc. of fluid under microscale condition, in engineering practice, in microfluidic system, the measurement of pressure and control are widely used in the technical field such as transmission, bio-pharmaceuticals of Micropump, cell chulture, chemical reagent.
And in fact to the pressure survey of microfluidic system with control also to exist up to now a lot of difficulty, be under microscale on the one hand, the surface-to-volume ratio of liquid will increase, this make liquid-solid between the kinetic characteristic of wellability appreciable impact liquid.Mainly by outfield force, stickiness power and capillary effect when fluid flows in microchannel, the impact of inertial force is usually negligible.This microscopic heat conduction being different from macro-scale, results through the conclusion solution that traditional pressure measurement method and theoretical model analysis obtain and is no longer applicable to Micro-flows.On the other hand, present stage, the pressure survey means to microfluidic system had some limitations, the tonometric method great majority of present stage microscale adopt pressure transducer such as laser displacement sensor, minute-pressure electric transducer etc. outward in microfluidic system, but also there is certain shortcoming in these class methods: 1, need to increase complicated outside pressure tester outward in microfluidic system, complicated operation, apparatus expensive, the response time is long; 2, the local pressure of optional position in microchannel cannot be measured; 3, there is pressure dissipation in fluid flow communication process, cause the pressure of measurement inaccurate.
Summary of the invention
The present invention is in order under the condition not needing outside pressure instrumentataion, measures the pressure size of a certain position, microchannel simply, quickly and accurately.The object of the invention there are provided a reeded PDMS microchip of band, PDMS chip with groove and main channel are separated by dimethyl silicone polymer (PDMS) film that one deck is thin especially, such groove is airtight, the pressure of gas known (standard atmospheric pressure) in groove, when the fluid in main channel is through groove, PDMS film can produce distortion, gas volume in groove is caused to change, by measuring the size of gas volume in groove, the size of pressure in this main channel, position can be obtained rapidly and accurately.
For achieving the above object, the technical solution used in the present invention is as follows, utilize the deformation of PDMS film directly to measure a device for pressure in microchannel, the structure involved by this device comprises PDMS microchip 1, PDMS film 2, main channel 3, glass-chip 4, air grooves 5, CCD camera 6, testing tool 7.
Wherein have an air grooves 5 in PDMS microchip 1 lower wall surface center, PDMS film 2 upper wall surface have passed standard UV photolithographic processes and PDMS microchip 1 lower wall surface sticks together, thus make air grooves 5 airtight, main channel 3 is engraved on the upper wall surface of glass-chip 4, and the lower wall surface of PDMS film 2 fits in the upper wall surface of glass-chip 4 through Cement Composite Treated by Plasma.Air grooves 5 and main channel 3 are at same vertical position.CCD camera 6 is fixed in camera frame, and regulate CCD camera to make it face air grooves 5, testing tool 7 is connected by wire with CCD camera 6.
Compared with prior art, the present invention has following beneficial effect.
1, the novel part of the present invention is to devise a kind of new equipment measuring pressure in microchannel.The size of micro groove and microchannel can designed, designed, can meet different measurement pressure limits.
2, the inventive method can realize the real-time measurement to a certain position pressure in microchannel, simple to operate, does not need complicated extra pressure instrumentataion, has efficient, economy, accurately feature.
3, the method adopting repetitive measurement to average when the present invention calculates, ensure that the precision of experiment.
Accompanying drawing explanation
Fig. 1 is that the experimental provision schematic diagram used of the method for pressure in microchannel is directly measured in the deformation of a kind of PDMS of utilization of the present invention film.
Fig. 2 is the front view of the microchannel of band sealed by film groove of the present invention.
Fig. 3 is the vertical view of the microchannel of band sealed by film groove of the present invention.
In figure: 1, PDMS microchip, 2, PDMS film, 3, main channel, 4, glass-chip, 5, air grooves, 6, CCD camera, 7, testing tool.
Embodiment
How to realize the utilizing deformation of PDMS film directly to measure pressure in microchannel to be described in further detail below in conjunction with Structure Figure to this device.
Fig. 1 is that the experimental provision schematic diagram used of pressure in microchannel is directly measured in a kind of deformation of the PDMS of utilization film, this device is placed on observation platform, wherein primarily of PDMS microchip 1, (lower wall surface center has air grooves 5, light transmission is fine, CCD camera 6 is facilitated to observe the change of gas volume in air grooves 5), (upper wall surface is sticked together by the lower wall surface of standard UV photoetching process and PDMS microchip 1 PDMS film 2, define airtight air grooves 5, film thickness only has 50 μm, can ensure that film is very responsive to the change of pressure in microchannel, even if small pressure change film also can produce corresponding deformation), main channel 3 (is engraved on glass-chip 4 upper wall surface center, with air grooves 5 at same vertical position, liquid can flow wherein, speed controls by the micro drives pump of outside), (upper wall surface center has main channel 3 to glass-chip 4, upper wall surface fits with the lower wall surface of PDMS film 2 after Cement Composite Treated by Plasma), air grooves 5 (is in PDMS microchip 1 lower wall surface center, an airtight cavity is formed again with PDMS film 2, inner containing a standard atmospheric pressure when there is no fluid in main channel 3), CCD camera 6 (is fixed in camera frame, CCD camera 6 is regulated to make it face air grooves 5, the high intensity of variation that clearly can observe gas volume in air grooves 5 of resolution), testing tool 7 (is connected by wire with CCD camera, realize the change change of groove inner volume being converted into pressure) several part formation.PDMS microchip 1 and PDMS film 2 are all made by soft lithography micro Process, sticked together between the two, reach good sealing effectiveness by standard UV photoetching process.Main channel 3 is upper surfaces that the method etched by micro Process is engraved on glass-chip 4.When not having liquid flow in main channel 3, containing a standard atmospheric pressure in air grooves 5, PDMS film 2 does not also produce distortion.Otherwise when there is liquid main channel 3 through out-of-date, the CCD camera 6 facing air grooves 5 just can Real-Time Monitoring PDMS film 2 the deformation change of gas volume (namely in air grooves 5) and by volume change Signal transmissions in testing tool 7, complete and convert volume change signal to pressure change output, realize the real-time measurement to air grooves position pressure.Liquid flowing velocity in main channel 3 is different, the deformation of air grooves 5 port PDMS film 2 is also different, by the Real-Time Monitoring of CCD camera 6 pairs of air grooves 5, the knots modification of gas volume in air grooves 5 can be obtained, finally can calculate the corresponding pressure size of now air grooves 5 position.
After experimental provision has been built, concrete implementation process is as follows: first utilize external micropumps to drive and enter in main channel 3 by the liquid injection of firm discharge, obtained the picture of air grooves 5 port position place PDMS film 2 distortion by CCD camera 6 after the liquid flow velocity in main channel 3 is stablized, the picture obtained is reached in testing tool 7 through wire, then when air grooves 5 degree of depth D is known, corresponding Software tool can be utilized numerical evaluation can to go out the variable quantity of gas volume in air grooves 5, the corresponding pressure size in air grooves 5 position is drawn again by fluid mechanics correlation theory.Keep flow constant, repetitive measurement asks the mean value of pressure.This device can by changing the inlet flow rate of outside micro drives pump, the deformation of the liquid air grooves 5 port PDMS film 2 when main channel 3 measuring friction speed can be realized, then can obtain the size of fluid through air grooves 5 position pressure of friction speed entrance.
Claims (2)
1. utilize the deformation of PDMS film directly to measure a device for pressure in microchannel, it is characterized in that: the structure involved by this device comprises PDMS microchip (1), PDMS film (2), main channel (3), glass-chip (4), air grooves (5), CCD camera (6), testing tool (7);
Wherein have an air grooves (5) in PDMS microchip (1) lower wall surface center, PDMS film (2) upper wall surface have passed standard UV photolithographic processes and PDMS microchip (1) lower wall surface sticks together, thus make air grooves (5) airtight, main channel (3) is engraved on the upper wall surface of glass-chip (4), and the lower wall surface of PDMS film (2) fits in the upper wall surface of glass-chip (4) through Cement Composite Treated by Plasma; Air grooves (5) and main channel (3) are at same vertical position; CCD camera (6) is fixed in camera frame, and regulate CCD camera to make it face air grooves (5), testing tool (7) is connected by wire with CCD camera (6).
2. the device of pressure in microchannel is directly measured in the deformation of a kind of PDMS of utilization film according to claim 1, it is characterized in that: after experimental provision has been built, concrete implementation process is as follows, first utilizing external micropumps to drive enters in main channel (3) by the liquid injection of firm discharge, the picture be out of shape by CCD camera (6) acquisition air grooves (5) port position place PDMS film (2) after liquid flow velocity in main channel (3) is stable, the picture obtained is reached in testing tool (7) through wire, then when air grooves (5) degree of depth D is known, corresponding Software tool can be utilized numerical evaluation can to go out the variable quantity of air grooves (5) interior gas volume, the corresponding pressure size in air grooves (5) position is drawn again by fluid mechanics correlation theory, keep flow constant, repetitive measurement asks the mean value of pressure, this device can by changing the inlet flow rate of outside micro drives pump, can realize measuring the deformation of air grooves (5) port PDMS film (2) when main channel (3) of the liquid of friction speed, then can obtain the size of fluid through air grooves (5) position pressure of friction speed entrance.
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| CN201410823125.4A CN104568287B (en) | 2014-12-24 | 2014-12-24 | Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film |
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| CN201410823125.4A CN104568287B (en) | 2014-12-24 | 2014-12-24 | Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film |
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Cited By (8)
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| CN104998701A (en) * | 2015-07-01 | 2015-10-28 | 北京工业大学 | Method for making micro channel with movable bottomface by using groove |
| CN105036061A (en) * | 2015-07-01 | 2015-11-11 | 北京工业大学 | Manufacturing method of microchannel with recessed lower wall |
| CN105842151A (en) * | 2016-03-18 | 2016-08-10 | 清华大学深圳研究生院 | PDMS thin film liquid volume measuring device and method |
| CN107976154A (en) * | 2017-11-16 | 2018-05-01 | 北京工业大学 | A kind of measuring method of the passage up/down wall profile based on fluorescence intensity |
| CN110118788A (en) * | 2019-04-30 | 2019-08-13 | 东南大学 | Submerged structure Defect inspection contact visual sensing equipment and image processing method |
| CN111707664A (en) * | 2020-05-19 | 2020-09-25 | 西安交通大学 | Observation experiment device suitable for super hydrophobic surface |
| CN111998985A (en) * | 2019-09-30 | 2020-11-27 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
| CN113074860A (en) * | 2021-03-17 | 2021-07-06 | 重庆大学 | Miniature pressure sensing device for blood vessel chip |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104998701A (en) * | 2015-07-01 | 2015-10-28 | 北京工业大学 | Method for making micro channel with movable bottomface by using groove |
| CN105036061A (en) * | 2015-07-01 | 2015-11-11 | 北京工业大学 | Manufacturing method of microchannel with recessed lower wall |
| CN105842151A (en) * | 2016-03-18 | 2016-08-10 | 清华大学深圳研究生院 | PDMS thin film liquid volume measuring device and method |
| CN105842151B (en) * | 2016-03-18 | 2018-07-20 | 清华大学深圳研究生院 | A kind of the PDMS film liquid appearance measuring device and method of micro-fluidic chip |
| CN107976154A (en) * | 2017-11-16 | 2018-05-01 | 北京工业大学 | A kind of measuring method of the passage up/down wall profile based on fluorescence intensity |
| CN107976154B (en) * | 2017-11-16 | 2020-03-13 | 北京工业大学 | Method for measuring upper/lower wall surface profile of channel based on fluorescence intensity |
| CN110118788A (en) * | 2019-04-30 | 2019-08-13 | 东南大学 | Submerged structure Defect inspection contact visual sensing equipment and image processing method |
| CN111998985A (en) * | 2019-09-30 | 2020-11-27 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
| CN111707664A (en) * | 2020-05-19 | 2020-09-25 | 西安交通大学 | Observation experiment device suitable for super hydrophobic surface |
| CN113074860A (en) * | 2021-03-17 | 2021-07-06 | 重庆大学 | Miniature pressure sensing device for blood vessel chip |
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