CN104998701A - Method for making micro channel with movable bottomface by using groove - Google Patents
Method for making micro channel with movable bottomface by using groove Download PDFInfo
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- CN104998701A CN104998701A CN201510379949.1A CN201510379949A CN104998701A CN 104998701 A CN104998701 A CN 104998701A CN 201510379949 A CN201510379949 A CN 201510379949A CN 104998701 A CN104998701 A CN 104998701A
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Abstract
The invention provides a method for making a micro channel with amovable bottom faceby using grooves, and the method is used for making a micro channel structuremade of PDMSand capable of realizing deformation of a determined part of a determined length of the lower wall surface. PDMS is poured on a convex template for generating a main body portion of a micro fluidic chip containingthemicro channel structure, a PDMS film which is obtained on a silicon chip through swinging is bonded to one side, with a channel opening, of the main body, and aPDMS block witharectangular groove is bonded to the other side of the film. Therectangular groove provides a space for deformation of the film, so that the lower wall surface of the channel is movable, and the position and the length of deformation can be controlled by adjusting bonding position and dimension of the groove. According to the invention, the groove is used for realizing deformation of the lower bottom surface of the micro scale channel, the related making and treating method are mature, the reliability is guaranteed, and the operation process is simple.
Description
Technical field
The present invention relates to the preparation method of movable microchannel, a kind of PDMS based on minute yardstick groove (polydimethylsiloxane) bottom, based on minute yardstick film making and take method, utilize the length of PDMS groove and bonding position to realize the movable of designated length and assigned address bottom microscale channel.
Background technology
Along with greatly developing of small scale chemistry, medical science or bio-analysis system, relate to micro-total analysis system (micro totalanalysis ayatems, μ TAS) or various types of microfluidic device of chip lab (lab-on-a-chip) and structure by extensive design and researchp, thus there is the various micro-fluidic chip be applied under different background.The high development of minute yardstick manufacturing technology is that the investigation and application of Micro-flows provides sufficient technical support, such as the technology such as photoetching and laser ablation can realize the making etc. of micron scale construction, the development of process for treating surface can complete the bonding between different structure, can be converted into finished product manufacture based on this various novel flowing and control structure from design.
PDMS material, with the advantage of its higher plasticity and adaptability and lower cost of manufacture, is widely used in the making of micro-fluidic chip.The liquid form of PDMS can be filled in micro-structural template preferably, intactly copy each details of micro-scaled structures, elastomeric soft materials speciality after solidifying contribute to it to cut open in good condition from template from, to obtain microfluidic chip structure, and then be bonded in substrate and formed micro-fluidic chip.Utilize the even glue technology of centrifugal principle can be coated on silicon chip by liquid, form micron order film comparatively simply, the method is widely used in the photoetching process of micro-fluidic chip template.But what prior art obtained is mostly the micro-channel chip that bottom is fixing, the manufacturing technology correlative study that shorter mention microchannel bottom surface is movable.
Design based on micro-fluidic chip needs, and the maturation application of existing PDMS process technology in facture of microchip process, obtaining the movable micro-fluidic chip experimental model of bottom surface, attempting useful for existing processing mode combination and improving for making.
Summary of the invention
The present invention is a kind of is material with PDMS, is produced on the method that lower wall surface assigned address realizes the deformable MCA of designated length.The micro-fluidic chip body part containing MCA is generated by building PDMS on convex template, the PDMS Thin-film key that system that silicon chip gets rid of obtains is incorporated into main part upper channel opening side, again the PDMS block with rectangular recess is bonded to the opposite side of film, by rectangular recess for film provides the space of distortion, realize channel wall face movable, and the position of distortion and length can control respectively by the bonding position of adjustment groove and size.
Be the preparation method that PDMS (polydimethylsiloxane) processes the deformable microscale channel of lower wall surface based on material described in this method, comprise the following steps:
1) microchannel is made: be cast in the template with MCA by PDMS host and the mixed prefabricated reagent of coagulating agent, template is provided with alignment slot a (1); Then being put in baking in baking oven makes PDMS solidify.PDMS after solidifying is taken off and cuts the microscale channel solid structure obtaining one side opening band alignment slot a (1).
2) prepare film: utilize sol evenning machine, the system of getting rid of on silicon chip that is put in by PDMS reagent forms thin layer cutose, is finally put in baking in baking oven and within 1 hour, makes cutose solidify formation solid elastic film.
3) bonding film: by step 1) in the microscale channel opening of well cutting and step 2) in the outer surface of solid elastic film utilize corona machine process respectively after be bonded together, slight amount is to guarantee the two laminating fully, then baking is placed on hot plate that temperature is about 90 DEG C 10 ~ 20 minutes, scratch with the edge of blade along micro-channel chip, part will be scratched together take off, obtain the membrane micro-channel chip of one side.
4) bonding groove: use and step 1) identical method obtains the solid block being with groove structure, is with the solid block of groove structure to be provided with alignment slot b (2); By the groove one side in solid block and step 3) in the another side of film that takes off be bonded together, utilize microscope will overlap according to the direction of setting with alignment slot b (2) and alignment slot a (1), variable to realize assigned address, same light pressure guarantees the two fully laminating, to be then placed on hot plate that temperature is about 90 DEG C baking 10 ~ 20 minutes.
The present invention can utilize groove to realize the distortion of microscale channel bottom surface, and involved making and processing method maturation, reliability can be guaranteed, and operating process is simple.
Accompanying drawing explanation
Fig. 1 is the operating procedure flow chart of the preparation method of the movable microscale channel of bottom surface of the present invention.
Fig. 2 is the groove bonding process schematic diagram of the movable microscale channel of bottom surface of the present invention.
Fig. 3 is the cross-sectional structure figure of a certain chip utilizing the preparation method of the movable microscale channel of bottom surface of the present invention to obtain.
In figure: 1, alignment slot a, 2, alignment slot b.
Detailed description of the invention
There is provided the concrete manufacturing process utilizing groove to realize the distortion of microscale channel bottom thin film below in conjunction with content of the present invention, concrete steps are:
1) design of alignment slot
In punch version, microchannel lower wall surface presets movable position side and little rectangular block is designed as alignment slot a (1) in relevant position, groove block side, to utilize recess space movable to the assigned address realizing microchannel lower wall surface.
2) body passageways structure preparation process
PDMS (dimethyl silicone polymer) host and coagulating agent are mixed according to the ratio of 10:1, be placed in normal-temperature vacuum environment and separate out whole bubble, be poured on the silicon chip containing microscale channel punch, and to be put in temperature be 1 hours in the baking oven of 65 DEG C, make it solidify.After treating that PDMS solidifies, it is taken off from silicon chip template, and cut out the main part of the micro-fluidic chip with complete MCA.
3) film manufacturing process
With 2) in step identical, preparation PDMS mix reagent bubble.Bare silicon wafer is placed on centrifugal sol evenning machine, then PDMS mix reagent be poured on wafer center and open sol evenning machine, making the PDMS reagent system of being got rid of form homogeneous liquid film is attached on silicon chip, the silicon chip with liquid film is put in baking oven 1 hour and makes liquid film solidify formation solid elastic film.
4) film bonding process
Because rete is too thin, can not directly peel off from silicon chip.The gateway place card punch of the PDMS micro-fluidic chip body part containing MCA is punched.Utilize corona machine processor will containing the opening surface of channel design in chip body part, and pellicular front process on silicon chip 3 ~ 5 seconds, then will both bondings.
Hot plate silicon chip (with chip body structure on it) after bonding being placed in about 90 DEG C heats about 15 minutes.Then scratch gently with the edge of blade along chip body structure, chip body structure taken off, now film has been attached in chip body structure, obtains the membrane micro-channel chip in bottom.
5) groove realizes deformable process
With 2) in identical, configuration PDMS mix reagent bubble, be poured on the convex film silicon chip containing groove structure, being positioned over temperature is 1 hours in the baking oven of 65 DEG C, makes it solidify.Take the PDMS on silicon chip off and cut out the solid block of complete band groove structure, the solid block of band groove structure is provided with the alignment slot b (2) corresponding with alignment slot a (1).
With 4) in the same, corona machine is utilized to process the another side 3 ~ 5 seconds of film on the band solid block fovea superior groove face of groove structure and membrane micro-channel chip respectively, alignment slot on two sides is also combined according to the complete alignment keys in direction preset by two sides after process relatively under the microscope, and light pressure guarantees fully to fit in two sides, then about being placed on about 90 DEG C of heating plate upper 15 minutes, can obtain being bonded with the membrane microscale channel chip of one side of groove structure, the movable of film can be realized at groove, also the assigned address designated length bottom surface namely realizing passage is movable.
Claims (2)
1. utilize groove to realize the preparation method of the movable microchannel of bottom surface, the micro-fluidic chip body part containing MCA is generated by building PDMS on convex template, the PDMS Thin-film key that system that silicon chip gets rid of obtains is incorporated into main part upper channel opening side, again the PDMS block with rectangular recess is bonded to the opposite side of film, by rectangular recess for film provides the space of distortion, realize channel wall face movable, and the position of distortion and length control respectively by the bonding position of adjustment groove and size; It is characterized in that: its preparation method comprises the following steps:
1) microchannel is made: be cast in the template with MCA by PDMS host and the mixed prefabricated reagent of coagulating agent, template is provided with alignment slot a(1); Then being put in baking in baking oven makes PDMS solidify; PDMS after solidifying is taken off and cuts and obtain one side opening band alignment slot a(1) microscale channel solid structure;
2) prepare film: utilize sol evenning machine, the system of getting rid of on silicon chip that is put in by PDMS reagent forms thin layer cutose, is finally put in baking in baking oven and within 1 hour, makes cutose solidify formation solid elastic film;
3) bonding film: by the microscale channel opening of well cutting in step 1) and step 2) in the outer surface of solid elastic film utilize corona machine process respectively after be bonded together, slight amount is to guarantee the two laminating fully, then baking is placed on hot plate that temperature is about 90 DEG C 10 ~ 20 minutes, scratch with the edge of blade along micro-channel chip, part will be scratched together take off, obtain the membrane micro-channel chip of one side;
4) bonding groove: use the method identical with step 1) to obtain the solid block of band groove structure, the solid block of band groove structure is provided with alignment slot b(2); The another side of film taken off in groove one side in solid block and step 3) is bonded together, utilize microscope will with alignment slot b(2) and alignment slot a(1) overlap according to the direction of setting, variable to realize assigned address, same light pressure guarantees the two fully laminating, to be then placed on hot plate that temperature is about 90 DEG C baking 10 ~ 20 minutes.
2. the preparation method utilizing groove to realize the movable microchannel of bottom surface according to claim 1, is characterized in that: utilize groove to realize the concrete manufacturing process of microscale channel bottom thin film distortion, concrete steps are,
1) design of alignment slot
In punch version, microchannel lower wall surface presets movable position side and little rectangular block is designed as alignment slot a(1 in relevant position, groove block side), to utilize recess space movable to the assigned address realizing microchannel lower wall surface;
2) body passageways structure preparation process
By PDMS(dimethyl silicone polymer) host and coagulating agent mix according to the ratio of 10:1, be placed in normal-temperature vacuum environment and separate out whole bubble, be poured on the silicon chip containing microscale channel punch, and to be put in temperature be 1 hours in the baking oven of 65 DEG C, make it solidify; After treating that PDMS solidifies, it is taken off from silicon chip template, and cut out the main part of the micro-fluidic chip with complete MCA;
3) film manufacturing process
With 2) in step identical, preparation PDMS mix reagent bubble; Bare silicon wafer is placed on centrifugal sol evenning machine, then PDMS mix reagent be poured on wafer center and open sol evenning machine, making the PDMS reagent system of being got rid of form homogeneous liquid film is attached on silicon chip, the silicon chip with liquid film is put in baking oven 1 hour and makes liquid film solidify formation solid elastic film;
4) film bonding process
Because rete is too thin, can not directly peel off from silicon chip; The gateway place card punch of the PDMS micro-fluidic chip body part containing MCA is punched; Utilize corona machine processor will containing the opening surface of channel design in chip body part, and pellicular front process on silicon chip 3 ~ 5 seconds, then will both bondings;
Hot plate silicon chip (with chip body structure on it) after bonding being placed in about 90 DEG C heats about 15 minutes; Then scratch gently with the edge of blade along chip body structure, chip body structure taken off, now film has been attached in chip body structure, obtains the membrane micro-channel chip in bottom;
5) groove realizes deformable process
With 2) in identical, configuration PDMS mix reagent bubble, be poured on the convex film silicon chip containing groove structure, being positioned over temperature is 1 hours in the baking oven of 65 DEG C, makes it solidify; Take the PDMS on silicon chip off and cut out the solid block of complete band groove structure, the solid block of band groove structure is provided with and alignment slot a(1) corresponding alignment slot b(2);
With 4) in the same, corona machine is utilized to process the another side 3 ~ 5 seconds of film on the band solid block fovea superior groove face of groove structure and membrane micro-channel chip respectively, alignment slot on two sides is also combined according to the complete alignment keys in direction preset by two sides after process relatively under the microscope, and light pressure guarantees fully to fit in two sides, then about being placed on about 90 DEG C of heating plate upper 15 minutes, can obtain being bonded with the membrane microscale channel chip of one side of groove structure, the movable of film can be realized at groove, also the assigned address designated length bottom surface namely realizing passage is movable.
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Cited By (4)
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| CN105536896A (en) * | 2015-12-13 | 2016-05-04 | 北京工业大学 | Microfluidic chip with outer-convex lower wall face |
| CN105536897A (en) * | 2015-12-13 | 2016-05-04 | 北京工业大学 | Manufacturing method of microfluidic chip with movable upper wall face and movable lower wall face |
| CN108893411A (en) * | 2018-06-15 | 2018-11-27 | 杭州电子科技大学 | Micro-fluidic chip and its manufacturing method based on photocuring printing |
| CN110975954A (en) * | 2019-12-23 | 2020-04-10 | 北京工业大学 | Device is pour to PDMS micro-fluidic chip secondary |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105536896A (en) * | 2015-12-13 | 2016-05-04 | 北京工业大学 | Microfluidic chip with outer-convex lower wall face |
| CN105536897A (en) * | 2015-12-13 | 2016-05-04 | 北京工业大学 | Manufacturing method of microfluidic chip with movable upper wall face and movable lower wall face |
| CN108893411A (en) * | 2018-06-15 | 2018-11-27 | 杭州电子科技大学 | Micro-fluidic chip and its manufacturing method based on photocuring printing |
| CN108893411B (en) * | 2018-06-15 | 2024-03-08 | 杭州电子科技大学 | Microfluidic chip based on photo-curing printing and manufacturing method thereof |
| CN110975954A (en) * | 2019-12-23 | 2020-04-10 | 北京工业大学 | Device is pour to PDMS micro-fluidic chip secondary |
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| CN104998701B (en) | 2017-05-10 |
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