CN103055981A - Polydimethylsiloxane micro-fluidic chip and preparation method thereof - Google Patents
Polydimethylsiloxane micro-fluidic chip and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a polydimethylsiloxane micro-fluidic chip and a preparation method thereof. The polydimethylsiloxane micro-fluidic chip is characterized in that the polydimethylsiloxane micro-fluidic chip consists of three layers of base materials, wherein the upper layer is a polydimethylsiloxane cover layer, the middle layer is a double-sided rubber layer, and the lower layer is a polydimethylsiloxane basal layer; and the micro-fluidic chip is prepared by adhering the upper and lower layers of base materials and the middle layer. The preparation method is characterized by comprising the following steps in sequence: (1) designing and drawing micro-channels of the micro-fluidic chip by using computer-aided design software; (2) processing the micro-channels as well as sample inlets on the base materials of the chip through a micro-processing technology; and (3) aligning, pressing and sealing the three layers of base materials to prepare the micro-fluidic chip. The polydimethylsiloxane micro-fluidic chip and the preparation method thereof have the advantages that no generator or ultraviolet irradiation equipment needs to be used in the preparation of the polydimethylsiloxane micro-fluidic chip provided by the invention, and rapid sealing of the polydimethylsiloxane can be realized.
Description
Technical field
The present invention relates to a kind of micro-fluidic chip, particularly relate to a kind of preparation method of dimethyl silicone polymer micro flow control chip.
Background technology
Micro-fluidic chip is called again micro-total analysis system, is minisize reaction or the analytical system of a class take the microchannel network as architectural feature.Because have that analysis speed is fast, reagent consumption less, use cost is low, easy of integration and the advantage such as automation, micro-fluidic chip has become current very active science frontier, and is widely used in the research in the fields such as chemistry, biology, medical science.
The manufacturing technology of chip is a large research emphasis of microfluidic system.The material that is used at present the making micro-fluidic chip mainly contains silicon, glass and high molecular polymer etc., dimethyl silicone polymer (polydimethylsiloxane wherein, PDMS) belong to a kind of elastopolymer material, because having excellent optical property, gas permeability, surface, this material easily modifies the characteristics such as processing, become one of the most frequently used material of micro-fluidic chip, be widely used at present the fields such as capillary electrophoresis separation, cell culture assays, protein or detection of nucleic acids.The making of PDMS micro-fluidic chip mainly is divided into processing and chip bonding two parts of microchannel, and microchannel processing is main to be adopted based on the moulding by casting of mould or laser ablation methods and realize that the bonding of chip mainly is divided into irreversible bonding and reversible keying.Wherein, reversible keying mainly utilizes the PDMS surface to have certain adhesiveness and the high-flatness characteristic is directly fitted two PDMS substrates, but its bond strength is relatively poor, easily leakage; Irreversible bonding mainly adopts the surface active bonding method, be about to fit behind the using plasma activation of two PDMS substrate surfaces elder generation or the ultraviolet treatment with irradiation certain hour, realize nonvolatil involution, although the chip bonding intensity that adopts this method to obtain is large, but need expensive plasma generator or special ultraviolet irradiation equipment, and processing procedure often needs approximately tens of minutes, often becomes the key step of the whole chip preparation flow of restriction.Therefore, develop a kind of flexible, quick, easy, PDMS bonding method cheaply, become the focus that current micro-fluidic field is paid close attention to.
Summary of the invention
The object of the invention is to for the problems referred to above in the present PDMS chip manufacturing, a kind of bonding method of new PDMS micro-fluidic chip is provided.
This method does not need complicated instrument and equipment and strict experiment condition, can realize flexible, quick, easy in the PDMS chip preparation process, chip sealing cheaply, thereby set up a kind of processing technology that common lab is carried out the PDMS chip that is applicable to.
For achieving the above object, the technical solution used in the present invention is that dimethyl silicone polymer micro flow control chip is comprised of three layers of base material.The upper strata is dimethyl silicone polymer cover plate layer, and the intermediate layer is layers of two-sided, and lower floor is the dimethyl silicone polymer basalis, and the preparation of micro-fluidic chip is to paste by two-layer base material about inciting somebody to action and intermediate layer to form.
Layers of two-sided used in the present invention, two surfaces all are coated with energy and the bonding adhesive of dimethyl silicone polymer base material up and down, and gross thickness is 10～1000 microns.
The present invention includes following steps:
1) microchannel of Computer-aided design Software for Design and drafting micro-fluidic chip;
2) process microchannel and sample holes by micro-processing technology in chip substrates;
3) with three layers of base material alignment, compression, involution, make micro-fluidic chip.
In step 2) in, described MCA can be to get in the processing of dimethyl silicone polymer base material, also can be to get in layers of two-sided processing.
In dimethyl silicone polymer substrate surface processing microchannel, can by the cast polymerization preparation based on mould, also can get the micro groove structure at the dimethyl silicone polymer base material on upper strata or the dimethyl silicone polymer surface processing of lower floor by laser etching method.
Describedly process the microchannel in layers of two-sided, can get by laser etching method processing the MCA of hollow out.
In step 3) in, the preparation of described micro-fluidic chip is that two-layer dimethyl silicone polymer base material aligns, compresses with the intermediate layer respectively by inciting somebody to action up and down, rely on the stickup characteristic on double faced adhesive tape surface to realize involution, finally be prepared into the micro-fluidic chip with airtight microfluidic channel.
Compare with existing dimethyl silicone polymer micro flow control chip preparation method, outstanding advantages of the present invention is:
1) preparation of this dimethyl silicone polymer micro flow control chip need not to use oxygen plasma generator or ultraviolet irradiation equipment, can realize the fast sealing of dimethyl silicone polymer.
2) by selecting the double faced adhesive tape material of different bonding strengths, according to the dimethyl silicone polymer micro flow control chip that preparation method of the present invention obtains, both irreversible bonding can be realized, also reversible keying can be realized.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1 dimethyl silicone polymer micro flow control chip.In Fig. 1,
Represent the poly dimethyl silica
Alkane represents double faced adhesive tape.
Fig. 2 is the structural representation of the embodiment of the invention 2 dimethyl silicone polymer micro flow control chips.In Fig. 2,
Represent the poly dimethyl silica
Alkane represents double faced adhesive tape.
Fig. 3 is the structural representation of the embodiment of the invention 3 dimethyl silicone polymer micro flow control chips.In Fig. 3,
Represent the poly dimethyl silica
Alkane represents double faced adhesive tape.
The specific embodiment
The present invention is described in further detail in connection with accompanying drawing for following examples.
Embodiment 1
Fig. 1 is the cross section structure schematic diagram of the embodiment of the invention 1 dimethyl silicone polymer micro flow control chip.
In Fig. 1, the upper strata is dimethyl silicone polymer cover plate layer, and the intermediate layer is layers of two-sided, and lower floor is the dimethyl silicone polymer basalis.The microchannel of micro-fluidic chip is directly to process on the double faced adhesive tape material in intermediate layer, and concrete grammar is: adopt laser etching method commercial
Process penetrating microchannel figure on the Tape type double faced adhesive tape, cover plate layer and substrate layer all be by the performed polymer of dimethyl silicone polymer and initator in 10: 1 ratio mix, degasification, be cast on the flat glass film and obtain.After getting solution on the cover plate layer with card punch and importing and exporting, two-layer dimethyl silicone polymer base material is aimed at the intermediate layer, is pasted and form micro-fluidic chip up and down.
Embodiment 2
Fig. 2 is the cross section structure schematic diagram of the embodiment of the invention 2 dimethyl silicone polymer micro flow control chips.
In Fig. 2, the upper strata is dimethyl silicone polymer cover plate layer, and the intermediate layer is layers of two-sided, and lower floor is the dimethyl silicone polymer basalis.The microchannel of micro-fluidic chip is directly to process on the dimethyl silicone polymer silicone compositions on upper strata, concrete grammar is: adopt traditional little processing mode to prepare the silicon masterplate with microprotrusion figure of silicon base, with the performed polymer of dimethyl silicone polymer and initator in 10: 1 ratio mix, degasification, be cast on the silicon masterplate and obtain microchannel substrate with micro groove structure.The dimethyl silicone polymer substrate of lower floor directly by the performed polymer of dimethyl silicone polymer and initator in 10: 1 ratio mix, degasification, be cast on the flat glass film and obtain.Further after getting solution on the cover plate layer with card punch and importing and exporting, two-layer dimethyl silicone polymer base material is aimed at respectively with the intermediate layer, is pasted and form micro-fluidic chip up and down.
Embodiment 3
Fig. 3 is the cross section structure schematic diagram of the embodiment of the invention 2 dimethyl silicone polymer micro flow control chips.
In Fig. 3, the upper strata is dimethyl silicone polymer cover plate layer, and the intermediate layer is layers of two-sided, and lower floor is the dimethyl silicone polymer basalis.The microchannel of micro-fluidic chip is directly to process on the dimethyl silicone polymer silicone compositions of lower floor, concrete grammar is: adopt traditional little processing mode to prepare the silicon masterplate with microprotrusion figure of silicon base, with the performed polymer of dimethyl silicone polymer and initator in 10: 1 ratio mix, degasification, be cast on the silicon masterplate and obtain microchannel substrate with micro groove structure.The dimethyl silicone polymer substrate on upper strata directly by the performed polymer of dimethyl silicone polymer and initator in 10: 1 ratio mix, degasification, be cast on the flat glass film and obtain.Further after getting solution on cover plate layer and the intermediate layer with card punch and importing and exporting, two-layer dimethyl silicone polymer base material is aimed at respectively with the intermediate layer, is pasted and form micro-fluidic chip up and down.
Claims (7)
1. method is closed in a dimethyl silicone polymer micro flow control chip and preparation thereof, it is characterized in that this dimethyl silicone polymer micro flow control chip is comprised of three layers of base material.The upper strata is dimethyl silicone polymer cover plate layer, and the intermediate layer is layers of two-sided, and lower floor is the dimethyl silicone polymer basalis, and the preparation of micro-fluidic chip is to paste by two-layer base material about inciting somebody to action and intermediate layer to form.
2. by a kind of dimethyl silicone polymer micro flow control chip claimed in claim 1 and preparation method thereof, its characterization step is as follows successively:
1) microchannel of Computer-aided design Software for Design and drafting micro-fluidic chip;
2) process microchannel and sample holes by micro-processing technology in chip substrates;
3) with three layers of base material alignment, compression, involution, make micro-fluidic chip.
3. a kind of dimethyl silicone polymer micro flow control chip as claimed in claim 1 and preparation method thereof, it is characterized in that described layers of two-sided, two surfaces all are coated with energy and the bonding adhesive of dimethyl silicone polymer base material up and down, and gross thickness is 10～1000 microns.
4. a kind of dimethyl silicone polymer micro flow control chip as claimed in claim 1 or 2 and preparation method thereof, it is characterized in that in step 2) in, described MCA can be to get in the processing of dimethyl silicone polymer base material, also can be to get in layers of two-sided processing.
5. such as claim 2 or 4 described a kind of dimethyl silicone polymer micro flow control chips and preparation method thereof, it is characterized in that in step 2) in, described in dimethyl silicone polymer substrate surface processing microchannel, can by the cast polymerization preparation based on mould, also can get the micro groove structure at the dimethyl silicone polymer base material on upper strata or the dimethyl silicone polymer surface processing of lower floor by laser etching method.
6. such as claim 2 or 4 described a kind of dimethyl silicone polymer micro flow control chips and preparation method thereof, it is characterized in that in step 2) in, describedly process the microchannel in layers of two-sided, can get by laser etching method processing the MCA of hollow out.
7. a kind of dimethyl silicone polymer micro flow control chip as claimed in claim 1 or 2 and preparation method thereof, it is characterized in that in step 3) in, the preparation of described micro-fluidic chip is that two-layer dimethyl silicone polymer base material aligns, compresses with the intermediate layer respectively by inciting somebody to action up and down, rely on the stickup characteristic on double faced adhesive tape surface to realize involution, finally be prepared into the micro-fluidic chip with airtight microfluidic channel.
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| CN103386335A (en) * | 2013-08-07 | 2013-11-13 | 苏州扬清芯片科技有限公司 | Flexible circular micro-fluidic chip |
| CN103818876A (en) * | 2014-03-12 | 2014-05-28 | 杭州霆科生物科技有限公司 | Rapid bonding method for micro-fluidic chip |
| CN103934049A (en) * | 2014-04-14 | 2014-07-23 | 西安交通大学 | Scale type micro-fluidic chip for quantitative immediate diagnosis and preparation method of scale type micro-fluidic chip |
| CN104251910A (en) * | 2013-06-29 | 2014-12-31 | 黄辉 | Microfluidic chip based on optical detection and preparation method thereof |
| CN104792767A (en) * | 2015-05-08 | 2015-07-22 | 厦门大学 | Microfluidic chip for SERS (surface-enhanced Raman scattering) detection by sol method and using method of microfluidic chip |
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| CN105467111A (en) * | 2014-09-05 | 2016-04-06 | 宏达国际电子股份有限公司 | Micro channel module |
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| CN110963457A (en) * | 2018-09-29 | 2020-04-07 | 中国科学院微电子研究所 | High-precision micro-channel network manufacturing method |
| CN111250185A (en) * | 2020-02-21 | 2020-06-09 | 京东方科技集团股份有限公司 | Preparation method and preparation device of micro-fluidic chip |
| CN118059974A (en) * | 2024-04-22 | 2024-05-24 | 中南大学 | Microfluidic chip collaborative thermocompression bonding regulation and control method |
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Application publication date: 20130424 |