CN105268491A - Method for preparing micro-fluidic/milli-fluidic chip by using detachable template - Google Patents

Method for preparing micro-fluidic/milli-fluidic chip by using detachable template Download PDF

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Publication number
CN105268491A
CN105268491A CN201510695290.0A CN201510695290A CN105268491A CN 105268491 A CN105268491 A CN 105268491A CN 201510695290 A CN201510695290 A CN 201510695290A CN 105268491 A CN105268491 A CN 105268491A
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China
Prior art keywords
micro
milli
stainless steel
fluidic chip
aluminium foil
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CN201510695290.0A
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Chinese (zh)
Inventor
李泽甫
罗炫
王晓军
张�林
杨怡
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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Priority to CN201510695290.0A priority Critical patent/CN105268491A/en
Publication of CN105268491A publication Critical patent/CN105268491A/en
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Abstract

The invention provides a method for preparing a micro-fluidic/ milli-fluidic chip by using a detachable template. The method comprises steps as follows: a, a detachable container is prepared; b, a pipeline is reserved, and the template is prepared; c, a prepolymer is poured and a die is solidified; d, an aluminum foil, a glass sheet and the template of the die are detached, and a micro-fluidic/ milli-fluidic chip blank is obtained; e, the micro-fluidic/ milli-fluidic chip blank is cut, and the micro-fluidic/ milli-fluidic chip is obtained. The method has the characteristics that the processing technology is simple, controllability is high, and the stability of the obtained chip is good.

Description

It is a kind of that to use detachable template to prepare micro-/method of milli fluidic chip
Technical field
The invention belongs to micro-/milli fluidic chip preparing technical field, be specifically related to a kind of method of the micro-/milli fluidic chip that uses detachable template to prepare.
Background technology
Micro-full analytical system, after nineteen ninety is proposed by Manz and Widmer of Giba-Geigy company of Switzerland first, is just subject to the extensive concern from each crossing domains such as analytical chemistry, materialogy, biomedicines, and its core is the preparation of micro-/milli fluidic chip.At present, be widely used in material prepared by chip and mainly contain quartz, glass, siliceous material, macromolecular material.Quartz has good chemical inertness and surface stability, particularly its excellent electric osmose character and obtain the favor of more researcher, but its shortcoming is to be difficult to be formed the large passage of depth-to-width ratio, and material cost is high, bonding difficulty.Glass is many, reusable and be used widely with its bonding technology, but high, the frangible development that also limit it of its processing cost.Silicon chip has certain heat endurance, and processing technology is ripe, but expensive, frangible, and surface chemistry behavior is complicated, and electrical insulating property is bad.In recent years, along with the development of macromolecular material, with low cost, of a great variety, the sight line of people progressively come into by the various material of processing method, and it is maximum that feature be the common drawback that compensate for above a few class material: bonding difficulty.As dimethyl silicone polymer (polydimethylsiloxane, PDMS).
The method preparing macromolecular material micro-fluidic chip is a lot, and everybody is widely used at present mainly contains method of molding, pressure sintering, etching method, injection moulding etc.First method of molding prepares the formpiston with microchannel by techniques such as whirl coating (be generally SU-8 and bear optical cement or positive glue), exposure, etching, cleanings on glass or silicon chip, then prepolymer is cast in this male mold, just the polymer with micro-structural is obtained after solidification, then take the ganoid cover plate of a slice and the above-mentioned substrate with micro-structural carries out bonding, prepare closed microchannel.Pressure sintering also needs first to prepare the formpiston consistent with method of molding or directly use metallic rod to construct micro-structural; then by substrate heating to during close to polymer glass glass transition temperature; apply certain pressure; make substrate and mould pressing; thus the figure copied on formpiston, the bonding finally carrying out substrate prepares complete chip.Photoresists are applied to substrate surface by etching rule, by flow processs such as exposure, development, etching, cleanings, on substrate, directly prepare micro-structural, save operation prepared by mould.First injection moulding need prepare the silicon former with micro-structural, then adopts electrocasting to prepare metal positive, then is installed on injection machine by metal positive, realize industrial mass manufacture, this method must use injection machine, and therefore the more above-mentioned several method of cost is all higher, is not suitable for laboratory and uses.But above-mentioned several method, except etching method, all needs the mould first preparing band micro-structural, therefore extends the manufacturing cycle of chip; On the other hand, comprise the said method of etching method, all need to carry out bonding to cover plate and substrate.For macromolecular material, through the immersion of long-term organic solvent, there is the problems such as swelling unavoidably, the substrate therefore adopting bonding pattern to combine just there will be after Long-Time Service come off, the problem such as seepage.And the high vacuum oxygen plasma sealing technology of people's inventions such as Duffy, although achieve the irreversible sealing-in of dimethyl silicone polymer (polydimethylsiloxane, PDMS), the equipment of its costliness and cost limit the application of the method.
Summary of the invention
The technical problem to be solved in the present invention is to provide that a kind of to use detachable template to prepare micro-/method of milli fluidic chip passage.
Use detachable template of the present invention prepares the method for micro-/milli fluidic chip, comprises the following steps:
A. mould performed polymer container is prepared;
B. preserved pipeline, makes template;
C. prepolymer is poured into a mould and curing mold;
D. remove the aluminium foil of mould, sheet glass and template, obtain micro-/milli fluidic chip blank;
E. cut micro-/milli fluidic chip blank shape, obtain chip micro-/milli fluidic chip.
Described step a comprises the following steps:
A1. the sheet glass of rectangular shape is lain in a horizontal plane in above aluminium foil;
A2. by four sides of aluminium foil along the side upwards folding parcel sheet glass of sheet glass, sheet glass is rolled into the hollow cuboid of a upper opening by aluminium foil, obtains mould performed polymer container, defines the length of hollow cuboid, height, is widely respectively X, Y, Z axis.
Described step b comprises the following steps:
B1. by the X-direction of ganoid stainless steel I along hollow cuboid, hollow cuboid is being passed lower than horizontal symmetrical centerline;
B2. by the aluminium foil or unsettled of one end of ganoid stainless steel II through hollow cuboid, the other end uses adhesive to be bonded on stainless steel I, and stainless steel I is 0 ° ~ 180 ° with the angular range of stainless steel II;
B3. by the aluminium foil or unsettled of one end of ganoid stainless steel III through hollow cuboid, the other end uses adhesive to be bonded on stainless steel II, and stainless steel II is 0 ° ~ 180 ° with the angular range of stainless steel III;
B4. step b2 or b3 is repeated until obtain required template;
The gap stayed on aluminium foil when b5. passing aluminium foil with silicon mud sealing stainless steel.
Described step c comprises the following steps:
C1. polymer and curing agent are uniformly mixed, form prepolymer solution A;
C2. prepolymer solution A is evacuated to bubble-free, forms prepolymer solution B;
C3. prepolymer solution B is poured in the mould performed polymer container that step a makes, form prepolymer solution C;
C4. prepolymer solution C is evacuated to bubble-free, forms prepolymer solution D;
C5. the mould performed polymer integral container filling prepolymer solution D is placed in vacuum drying chamber, at 70 DEG C, solidifies 2 ~ 3h, make mould.
Described steps d comprises the following steps:
D1. by ultrasonic for mould process 30min;
D2. the aluminium foil of die surface and the sheet glass of below is removed;
D3. the stainless steel of mould inside is rotated and extract, obtain micro-/milli fluidic chip blank.
Described hollow cuboid altitude range is 2cm ~ 5cm.
The external diametrical extent of described stainless steel is 1mm ~ 6.5mm.
Described stainless steel can use stainless steel tube, stainless steel sleeve pipe, glass rod, glass tube, teflon rod or polyfluortetraethylene pipe to replace.
Described adhesive is 502 glue or AB glue.
Described polymer is dimethyl silicone polymer, and curing agent is polymethyl methacrylate, the mass ratio 10:1 of dimethyl silicone polymer and polymethyl methacrylate.
Use detachable template of the present invention prepares the method for micro-/milli fluidic chip, use the materials such as sheet glass, aluminium foil, stainless steel tube bar, stainless steel tube, glass rod, glass tube, teflon rod or polyfluortetraethylene pipe, material is cheap, dimension adjustable, can process voluntarily as required, and not easily bring cross pollution, easy stripping, smooth surface is clean, and little to the chip cosmetic injury of final curing molding, optics fidelity is good.Use detachable template of the present invention prepares the method for micro-/milli fluidic chip, adopts silicon mudding to fill the fixed form combined with adhesive bonds, has the advantage that simple and convenient assembly is easy, Modulatory character is strong, be easily assembled into various all kinds of abundant pipeline.
Use detachable template of the present invention prepares the method for micro-/milli fluidic chip, by using the technology of the prefabricated complex pipeline of detachable template, can fast, low cost prepare micro-/milli fluidic chip passage, the method make micro-/milli fluidic chip channel diameter controllable scope is large, pipeline intersecting angle controllable scope is large, formpiston, former need not be prepared, can realize one-step shaping, without the need to adopting any bonding techniques, execution conditions require low, simple for process, expend man-hour few.
Use detachable template of the present invention prepares the method for micro-/milli fluidic chip, prepolymer used is dimethyl silicone polymer, curing agent is polymethyl methacrylate, there is material green non-pollution, heat curing temperature is lower, easy control, fireballing advantage, before and after solidification, geometry fidelity is good, without distortion, the chip mechanical strength prepared after curing molding is moderate, there are certain elasticity and toughness, the glass rod of easy dismounting preformed channel or glass tube, not easily there is again glass rod or glass tube damage and rupture, good line seal performance can also be realized, the more important thing is that the chip optical transparent effect after curing molding is good, be convenient to the flowing of visual research multiphase flow, the microcosmic mechanism of mixing and drop forming thereof.And chip is easy to clean, can repeated multiple timesly use, durable in use, can not because of service time, number of times and occur leakage problem.Microballoon preparation, chemical analysis can be widely used in and the field such as be separated.
In sum, use detachable template of the present invention prepares the method for micro-/milli fluidic chip, can by the prefabricated comparatively complicated passage tube of quick detachable form technology one-step shaping, there is processing technology simple, controllability is strong, cost is low, the chip good stability obtained, passage assembly and disassembly are convenient, easy to clean, micro-/field such as the preparation of mm dia functional microsphere and micro-total analysis system can be widely used in, avoid tradition preparation micro-/milli fluidic chip method in pattern chip and the bond sequence of base material or the form technology of complexity, and the chip mechanical performance brought thus is bad, service life the problem such as short and swelling seepage.
Detailed description of the invention
The present invention is introduced in detail below in conjunction with embodiment.The experimental technique used in following embodiment if no special instructions, is conventional method.The material used in following embodiment, reagent etc., if no special instructions, all can obtain from commercial channels.
embodiment 1
Embodiment 1 is the T-shaped micro-channel chip template made of method of the micro-/milli fluidic chip that adopts use detachable template of the present invention to prepare.
The sheet glass of rectangular shape is lain in a horizontal plane in above aluminium foil, by side upwards folding four sides of wrapping up sheet glass of aluminium foil along sheet glass, sheet glass is rolled into the hollow cuboid of a upper opening by aluminium foil, forms dismountable mould performed polymer container; Ganoid stainless steel I is being passed hollow cuboid along the long limit of hollow cuboid lower than horizontal symmetrical centerline, form passage I, by the aluminium foil of one end of ganoid stainless steel II through hollow cuboid, the other end is bonded on stainless steel I, adhesive is 502 glue or AB glue, make stainless steel II and stainless steel I angle in 90 °, stainless steel II forms passage II, make T-shaped passage template, with silicon mud sealing stainless steel II through the gap stayed on aluminium foil during aluminium foil.
Polymer is dimethyl silicone polymer, curing agent is polymethyl methacrylate, by dimethyl silicone polymer and polymethyl methacrylate in mass ratio 10:1 mix, form prepolymer solution A, prepolymer solution A is evacuated to bubble-free, form prepolymer solution B, prepolymer solution B is poured in mould performed polymer container, form prepolymer solution C, prepolymer solution C is evacuated to bubble-free, forms prepolymer solution D, the mould performed polymer integral container filling prepolymer solution D is placed in vacuum drying chamber, at 70 DEG C, solidify 2h, make mould; By ultrasonic for mould process 30min, remove the aluminium foil of die surface and the sheet glass of below, the stainless steel of mould inside is rotated and extracts, obtain micro-/milli fluidic chip blank; Cut micro-/milli fluidic chip blank shape, obtain chip micro-/milli fluidic chip.
Design parameter is in table 1.
embodiment 2
Embodiment 2 is the Y type micro-channel chip template made of method of the micro-/milli fluidic chip that adopts use detachable template of the present invention to prepare.Embodiment 2 is substantially identical with the embodiment of embodiment 1, and the main distinction is stainless steel II and stainless steel I one-tenth 60 ° of angles, and stainless steel II forms passage III, makes Y type passage template.
Design parameter is in table 1.
embodiment 3
Embodiment 3 is the cross type micro-channel chip template made of method of the micro-/milli fluidic chip that adopts use detachable template of the present invention to prepare.Embodiment 3 is substantially identical with the embodiment of embodiment 1, the main distinction is, increases the stainless steel III with the symmetry of stainless steel II, stainless steel III and stainless steel I angle in 90 °, stainless steel III forms passage IV, makes cross type passage template.
Design parameter is in table 1.
embodiment 4
Embodiment 4 is the dual T-shaped micro-channel chip template made of method of the micro-/milli fluidic chip that adopts use detachable template of the present invention to prepare.Embodiment 4 is substantially identical with the embodiment of embodiment 1, and the main distinction is to increase the vertical stainless steel IV with stainless steel II, and stainless steel IV and stainless steel II angle in 90 °, stainless steel IV forms passage V, makes dual T-shaped passage template.
Design parameter is in table 1.
embodiment 5
Embodiment 5 is the coaxial type micro-channel chip template made of method of the micro-/milli fluidic chip that adopts use detachable template of the present invention to prepare.Embodiment 5 is substantially identical with the embodiment of embodiment 1, and the main distinction is to remove stainless steel II, retains stainless steel I.Stainless steel I is the outer radius variable of stainless steel sleeve pipe, stainless steel I, and external diameter excursion is 1mm ~ 6.5mm, and stainless steel I forms the passage VI of variable diameters, makes coaxial type passage template.
Design parameter is in table 1.
The all available stainless steel tube of stainless steel in above-described embodiment, stainless steel sleeve pipe, glass rod, glass tube, teflon rod or polyfluortetraethylene pipe are replaced.
The present invention is not limited to above-mentioned detailed description of the invention, and person of ordinary skill in the field is from above-mentioned design, and without performing creative labour, done all conversion, all drop within protection scope of the present invention.
Table 1

Claims (10)

1. to use detachable template to prepare micro-/method of milli fluidic chip, and it is characterized in that, comprise the following steps:
A. mould performed polymer container is prepared;
B. preserved pipeline, makes template;
C. prepolymer is poured into a mould and curing mold;
D. remove the aluminium foil of mould, sheet glass and template, obtain micro-/milli fluidic chip blank;
E. cut micro-/milli fluidic chip blank shape, obtain chip micro-/milli fluidic chip.
2. use detachable template according to claim 1 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described step a comprises the following steps:
A1. the sheet glass of rectangular shape is lain in a horizontal plane in above aluminium foil;
A2. by four sides of aluminium foil along the side upwards folding parcel sheet glass of sheet glass, sheet glass is rolled into the hollow cuboid of a upper opening by aluminium foil, obtains mould performed polymer container, defines the length of hollow cuboid, height, is widely respectively X, Y, Z axis.
3. use detachable template according to claim 1 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described step b comprises the following steps:
B1. by the X-direction of ganoid stainless steel I along hollow cuboid, hollow cuboid is being passed lower than horizontal symmetrical centerline;
B2. by the aluminium foil or unsettled of one end of ganoid stainless steel II through hollow cuboid, the other end uses adhesive to be bonded on stainless steel I, and stainless steel I is 0 ° ~ 180 ° with the angular range of stainless steel II;
B3. by the aluminium foil or unsettled of one end of ganoid stainless steel III through hollow cuboid, the other end uses adhesive to be bonded on stainless steel II, and stainless steel II is 0 ° ~ 180 ° with the angular range of stainless steel III;
B4. step b2 or b3 is repeated until obtain required template;
The gap stayed on aluminium foil when b5. passing aluminium foil with silicon mud sealing stainless steel.
4. use detachable template according to claim 1 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described step c comprises the following steps:
C1. polymer and curing agent are uniformly mixed, form prepolymer solution A;
C2. prepolymer solution A is evacuated to bubble-free, forms prepolymer solution B;
C3. prepolymer solution B is poured in the mould performed polymer container that step a makes, form prepolymer solution C;
C4. prepolymer solution C is evacuated to bubble-free, forms prepolymer solution D;
C5. the mould performed polymer integral container filling prepolymer solution D is placed in vacuum drying chamber, at 70 DEG C, solidifies 2 ~ 3h, make mould.
5. use detachable template according to claim 1 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described steps d comprises the following steps:
D1. by ultrasonic for mould process 30min;
D2. the aluminium foil of die surface and the sheet glass of below is removed;
D3. the stainless steel of mould inside is rotated and extract, obtain micro-/milli fluidic chip blank.
6. use detachable template according to claim 2 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described hollow cuboid altitude range is 2cm ~ 5cm.
7. use detachable template according to claim 3 prepares the method for micro-/milli fluidic chip, and it is characterized in that, the external diametrical extent of described stainless steel is 1mm ~ 6.5mm.
8. use detachable template according to claim 3 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described stainless steel stainless steel tube, stainless steel sleeve pipe, glass rod, glass tube, teflon rod or polyfluortetraethylene pipe are replaced.
9. use detachable template according to claim 3 prepares the method for micro-/milli fluidic chip, and it is characterized in that, described adhesive is 502 glue or AB glue.
10. use detachable template according to claim 4 prepares the method for micro-/milli fluidic chip, it is characterized in that, described polymer is dimethyl silicone polymer, and curing agent is polymethyl methacrylate, the mass ratio 10:1 of dimethyl silicone polymer and polymethyl methacrylate.
CN201510695290.0A 2015-10-26 2015-10-26 Method for preparing micro-fluidic/milli-fluidic chip by using detachable template Pending CN105268491A (en)

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Cited By (3)

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CN106807460A (en) * 2016-12-20 2017-06-09 深圳太辰光通信股份有限公司 A kind of preparation method of the microchannel for slab guide sensor chip
CN106914289A (en) * 2017-05-02 2017-07-04 广东顺德工业设计研究院(广东顺德创新设计研究院) Producing device of micro-fluidic chip and preparation method thereof
CN106914289B (en) * 2017-05-02 2019-10-15 广东顺德工业设计研究院(广东顺德创新设计研究院) Producing device of micro-fluidic chip and preparation method thereof

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Application publication date: 20160127