CN106238113B - A kind of micro-fluidic chip and its manufacture craft - Google Patents
A kind of micro-fluidic chip and its manufacture craft Download PDFInfo
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- CN106238113B CN106238113B CN201610794204.6A CN201610794204A CN106238113B CN 106238113 B CN106238113 B CN 106238113B CN 201610794204 A CN201610794204 A CN 201610794204A CN 106238113 B CN106238113 B CN 106238113B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
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Abstract
The present invention devises a kind of micro-fluidic chip, chip is by two pieces of substrates and two pieces of substrate laminars are attached on biadhesive film together form, the biadhesive film attaches between two-layer substrate, microfluidic channel is carved on biadhesive film, fin group is carved on one of substrate, the fin group is located in microfluidic channel, the fin group is made of multiple rib-likes, the rib-like extends to the other side of microfluidic channel from the side of microfluidic channel, the height of the rib-like is less than the thickness of biadhesive film, the structure of micro-fluidic chip of the present invention is simple, it draws materials at low cost, it is easy to process, fin group is carved on substrate, with make up biadhesive film due to thickness it is too thick caused by the too high disadvantage of channel height, when in use, fin group, which can be very good to shut off, captures small molecule biology Or the manufacture craft of micro-fluidic chip has also been devised in microorganism, the present invention.
Description
Technical field
The present invention relates to micro fluidic chip technical field, especially a kind of micro-fluidic chip and its manufacture craft.
Background technique
Microfluidic chip technology is bases such as biology, chemistry, the sample preparation of medical analysis process, reaction, separation, detections
This operating unit is integrated on the chip of one piece of micro-meter scale, is automatically performed analysis overall process.Since it is in biology, chemistry, doctor
The great potential in etc. fields has been developed as the friendship of the subjects such as biology, chemistry, medicine, fluid, electronics, material, a machinery
The brand-new research field of fork.
Micro-fluidic chip is by micrometer-nanometer processing technology by microchannel, Micropump, micro-valve, micro- liquid storage device, microelectrode, micro- detection
The functional modules such as element, window and connector are integrated in them on chip material as integrated circuit.The production material of chip
Material develops to glass, quartz, organic polymer etc. from silicon wafer.Therefore, the processing technology of organic polymer material is also continuous
Development.The new side such as fuzz method, pressure sintering, laser ablation method and soft lithographic is developed on the basis of traditional photoetching and etching
Method.
Traditional micro-fluidic chip is to be designed for material with dimethyl silicone polymer (PDMS) and processed different size
PDMS-PDMS micro-fluid chip and PDMS- glass microfluidic chip.But the realization of this technology needs above-described light
Quarter, machine carried out optimized integration device, the radiation of light source can be generated during photoetching, but also photoresist, developer solution etc. need to be used to change
Reagent, operating procedure very complicated are learned, and has certain harm to the body of laboratory technician, this laboratory also needs especially to set
It sets.
Summary of the invention
In order to solve the above technical problems, the present invention devises a kind of micro-fluidic chip and the processing work of the micro-fluidic chip
Skill realizes the production micro-fluidic chip of low-cost high-efficiency.The present invention is realized using following scheme:
A kind of micro-fluidic chip is attached on biadhesive film group together by two pieces of substrates and by two pieces of substrate laminars
At the biadhesive film attaches between two-layer substrate, and microfluidic channel, one of base are carved on biadhesive film
Fin group is carved on plate, the fin group is located in microfluidic channel, and the fin group is made of multiple rib-likes, the rib
Shape protrusion extends to the other side of microfluidic channel from the side of microfluidic channel, and the height of the rib-like is less than double-sided adhesive
The thickness of property film.
Preferably, the height of the rib-like is less than the thickness of double adhesive membranes.
It is highly preferred that double adhesive membranes with a thickness of 40~50 μm, the height of the rib-like is 20~30 μm.
Preferably, the rib-like is along the direction with substrate-parallel at least one bending.
It is highly preferred that the overbending direction of the rib-like different in the fin group is identical.
It is highly preferred that the fin group is set as multiple groups, the bending of adjacent fin group is mutually staggered.
Preferably, the substrate is made of cycloolefin copolymer material or organic glass.
A kind of processing technology of micro-fluidic chip that processing any description above, step includes using nano marking press pair
One of cycloolefin copolymer plate of material is imprinted, and the fin group of preset shape is squeezed out in cycloolefin copolymer plate of material.
Preferably, the specific method of the processing technology of micro-fluidic chip is that specific method is that a substrate is put into nanometer
The fin group that preset pattern is imprinted out in marking press, sets imprint temperature, air pressure, time, and nano marking press squeezes on substrate
The fin group of preset shape out；Preset microfluidic channel is cut into biadhesive film；Coining is had to the substrate of fin group
Plasma cleaning 60s is carried out with the substrate and biadhesive film of no fin group；Then will coining have the substrate of fin group with
The substrate of biadhesive film and no fin group, is successively pasted together from bottom to top.
In the present invention, micro-fluidic chip using two pieces of substrates with by two pieces of substrates stick together with biadhesive it is thin
Film composition, wherein microfluidic channel is engraved on biadhesive film, and structure is simple, is drawn materials at low cost, easy to process, in substrate
On be carved with fin group, with make up biadhesive film due to thickness it is too thick caused by the too high disadvantage of channel height, using
When, fin group, which can be very good to shut off, captures small molecule biology or microorganism.
The production method that micro-fluidic chip has also been devised in the present invention is will to need to carve the substrate of fin group to use nano impression
Machine coining, it is operationally simple and easy, can batch making, and it is at low cost, be suitble to biomedical research to use.
Detailed description of the invention
Fig. 1, micro-fluidic chip decomposition diagram of the present invention
The top view of microfluidic channel in Fig. 2 micro-fluidic chip of the present invention
Fig. 3 fin group schematic diagram of the present invention
Fig. 4 fin of the present invention and bending structure schematic diagram
" several " character form structure schematic diagram of Fig. 5 fin of the present invention
The side view of Fig. 6 micro-fluidic chip of the present invention
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Embodiment 1,
It is a micro-fluidic chip such as Fig. 1, is divided into three layers, three layers is respectively substrate 1, substrate 2, biadhesive film 3.
Wherein substrate 1 and substrate 2 can be cyclic olefine copolymer material C OP material or COC material, be also possible to pmma material
The characteristics of PMMA, these materials have powerful connections, and fluorescence is low, and electrophoresis is high-efficient, monitors favorable reproducibility, and low in cost, double-sided adhesive
Property film can use DAS material, it is low in cost.
Substrate 1 and substrate 2 are bonded together by biadhesive film 3, form an entirety.In biadhesive film
The microfluidic channel 31 of micro-fluidic chip needs is carved in portion, and such as Fig. 2, wherein the height of microfluidic channel 31 is that double viscosity are thin
The thickness of film 3.Feeder connection 11 and outlet 12 are carved on substrate 1, feeder connection 11 is connected to by channel 31 with outlet 12, and
Form a channel being in communication with the outside.There is fin group 21, fin group is by multiple rib-likes, i.e. 211 groups of fin on substrate 2
At.
Wherein, such as Fig. 3 and Fig. 4, the fin 211 for forming fin group 21 extends to micro-fluidic lead to from the side of microfluidic channel
The other side in road forms a continuous barrier in microfluidic channel, when fluid passes through, can lead to a part of small-molecule substance
The barrier retention that excess convexity rib is formed, and the gap that other fluids then pass through between fin top and substrate 1 passes through, and catches to reach
Obtain the effect of target substance.
The shape of fin 211 is along the direction with substrate-parallel at least one bending, such as Fig. 3 and Fig. 4, the portion of bending
Divide the biology that can collect capture.The angle of bending can be any angle in 60 °~120 °.In plurality of fin group,
The bending of adjacent fin group 21 can mutually stagger, capture target substance as much as possible.The shape of fin is also possible to
" several " shape of Fig. 5.
Such as Fig. 6, the fin group 21 on substrate 2 is not abutted with substrate 1, and the height of fin 211 is lower than miniflow in fin group 21
Control the height in channel 31.In the present invention, in micro-fluidic chip made from inventor, wherein double adhesive membranes with a thickness of 45 μm,
The height of fin is 30 μm, and distance of the fin top apart from substrate 1 is 15 μm.
Embodiment 2,
The present embodiment is the technique for making micro-fluidic chip, with emphasis on the formation of fin group in technique.Institute in the present embodiment
The substrate of use is cyclic olefine copolymer or organic glass, and raw material COP, COP or PMMA have the characteristics of being easy to hot pressing.
The present embodiment is carried out using following four steps:
Step 1 takes one block of COP plate, is put into nano marking press, and predetermined pattern is arranged in nano marking press, uses coining
Machine imprints COP plate, is then arranged 100~110 DEG C of imprint temperature, air pressure 0.1mpa, imprint time is 2~3min, COP plate
It is cooling to deflate after coining is good under the extruding of marking press, the fin group of preset shape is then forced out of on COP plate.
The processing method of step 2, biadhesive film is that the hole of preset shape is cut on biadhesive film,
Hole is microfluidic channel after molding.
Coining is had the substrate, the substrate without fin, biadhesive film of fin group to carry out plasma cleaning 60 by step 3
~120s, then takes out.
The substrate for having fin group after plasma cleaning, the substrate without fin, biadhesive film are bonded in by step 4
Together, a centre is formed with channel, and the closed micro-fluidic chip of surrounding, wherein having in the substrate of fin group, fin is located at
In microfluidic channel.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (4)
1. a kind of micro-fluidic chip, it is characterised in that: be attached on together two-sided by two pieces of substrates and by two pieces of substrate laminars
Adhesive membrane composition, the biadhesive film attach between two-layer substrate, are carved with microfluidic channel on biadhesive film,
Fin group is carved on one of substrate, the fin group is located in microfluidic channel, and the fin group is by multiple parallel ribs
Shape protrusion composition, the rib-like extend to the other side of microfluidic channel from the side of microfluidic channel, and the rib shape is convex
The height risen is less than the thickness of biadhesive film；
The protrusion of the fin along and the direction of substrate-parallel there is at least one bending, the angle of the bending for 60 °~
120°；
The overbending direction of the different rib-likes is identical in the fin group；
The fin group is set as multiple groups, and the bending of adjacent fin group mutually staggers.
2. micro-fluidic chip according to claim 1, it is characterised in that: the substrate is by cycloolefin copolymer material or organic
Glass is made.
3. a kind of manufacture craft for processing micro-fluidic chip of any of claims 1 or 2, it is characterised in that: step includes using
Nano marking press imprints one of cycloolefin copolymer material substrate, squeezes out on cycloolefin copolymer material substrate default
The fin group of shape.
4. a kind of manufacture craft of micro-fluidic chip according to claim 3, it is characterised in that: specific method is, by one
A substrate is put into the fin group that preset pattern is imprinted out in nano marking press, sets imprint temperature, air pressure, time, nanometer pressure
Print machine squeezes out the fin group of preset shape on substrate；Preset microfluidic channel is cut into biadhesive film；It will coining
There are the substrate of fin group and the substrate without fin group and biadhesive film to carry out plasma cleaning 60s；Then coining is had
The substrate of fin group and the substrate of biadhesive film and no fin group, are successively pasted together from bottom to top.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610794204.6A CN106238113B (en) | 2016-08-31 | 2016-08-31 | A kind of micro-fluidic chip and its manufacture craft |
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| CN201610794204.6A CN106238113B (en) | 2016-08-31 | 2016-08-31 | A kind of micro-fluidic chip and its manufacture craft |
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| CN106238113B true CN106238113B (en) | 2019-04-09 |
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| CN107442188B (en) * | 2017-08-01 | 2019-06-21 | 吉林大学 | A kind of all-transparent micro-fluidic chip of built in transparent electrode and preparation method thereof |
| CN108414773B (en) * | 2018-07-12 | 2018-11-02 | 上海速创诊断产品有限公司 | A kind of micro-fluidic detection chip and preparation method thereof, fixing device and centrifugal detection device |
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| US20090136982A1 (en) * | 2005-01-18 | 2009-05-28 | Biocept, Inc. | Cell separation using microchannel having patterned posts |
| CN103087899B (en) * | 2013-01-17 | 2014-08-20 | 湖南大学 | Aptamer-based microfluidic chip capable of capturing cancer cells and preparation thereof as well as separation method of cancer cells |
| CN103357453B (en) * | 2013-07-01 | 2015-08-12 | 香港大学深圳医院 | A kind of micro-fluidic chip and processing technology thereof |
| CN203663854U (en) * | 2013-07-01 | 2014-06-25 | 香港大学深圳医院 | Novel microfluidic chip |
| CN103895376B (en) * | 2014-03-21 | 2017-04-19 | 华南理工大学 | Method for manufacturing microfluidic dielectrophoresis chips through screen printing technology |
| CN205443266U (en) * | 2016-03-23 | 2016-08-10 | 杭州华得森生物技术有限公司 | Rare cell sorter's seizure system circulates |
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