CN104568287B - Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film - Google Patents
Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film Download PDFInfo
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- CN104568287B CN104568287B CN201410823125.4A CN201410823125A CN104568287B CN 104568287 B CN104568287 B CN 104568287B CN 201410823125 A CN201410823125 A CN 201410823125A CN 104568287 B CN104568287 B CN 104568287B
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- pressure
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- air grooves
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- pdms film
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Abstract
Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film, PDMS chips with groove are separated with main channel by one layer of extremely thin dimethyl silicone polymer (PDMS) film, so groove is closed, in groove (standard atmospheric pressure) known to the pressure of gas, when the fluid in main channel passes through groove, PDMS film can be deformed, gas volume in groove is caused to change, by measuring the size of gas volume in groove, the size of pressure in the position main channel is rapidly and accurately obtained.Novel part of the invention is the new equipment for devising pressure in a kind of measurement microchannel.The size of micro groove and microchannel can designed, designed, meet different measurement pressure limits.
Description
Technical field
The present invention relates to a kind of method of pressure in direct measurement microchannel, more particularly to micro-scale in hydrodynamics
Under micro-fluidic chip realize measurement and control to pressure in microchannel.The invention belongs to micro- using experimental provision direct measurement
Channel inner pressure method and technology field.
Background technology
With the fast development of extensive and super large-scale integration, the research of microelectromechanical systems (MEMS) is obtained
Wider application.As a MEMS important branch, microfluidic control system is with the high integration of its function and huge
Big potential application gets most of the attention.Micro-flows are then the bases for studying microfluidic system, are used as the important of Micro-flows
Pressure in parameter-microchannel will directly affect the flow behavior of fluid under minute yardstick, realizes in microfluidic system and presses exactly
The measurement and control of power can preferably describe and understand the flow behavior such as fluid velocity, viscosity of fluid under the conditions of minute yardstick
And flow resistance etc., in engineering practice, the measurement and control of pressure are widely used in Micropump, cell training in microfluidic system
The technical fields such as the foster, transmission of chemical reagent, bio-pharmaceuticals.
And actually also exist so far to the pressure measxurement of microfluidic system and control it is many difficult, be on the one hand
Under minute yardstick, the surface-to-volume ratio of liquid will increase, and this wellability between causing liquid solid significantly affects the fortune of liquid
Dynamic characteristic.Fluid is mainly acted on when being flowed in microchannel by outfield force, stickiness power and surface tension, and the influence of inertia force is normal
Often ignore.This microscopic heat conduction different from macro-scale, causes by traditional pressure measurement method and theoretical mould
The conclusion solution that type analysis are obtained is no longer appropriate for Micro-flows.On the other hand, pressure measxurement hand at this stage to microfluidic system
Section has some limitations, and most of method of minute yardstick pressure measxurement at this stage is to be passed outside microfluidic system using pressure
Sensor such as laser displacement sensor, minute-pressure electric transducer etc., but there is also certain shortcoming for this kind of method：1st, need in miniflow
Increase complicated outside pressure tester outside control system, complex operation, apparatus expensive, the response time are long；2nd, microchannel can not be measured
The local pressure of interior optional position；3rd, there is pressure dissipation during fluid flow communication, cause the pressure of measurement inaccurate.
The content of the invention
The present invention is in order to need not be simple, quickly and accurately measure microchannel under conditions of outside pressure instrumentataion
The pressure size of a certain position.Present invention aims at there is provided one with reeded PDMS microchips, PDMS with groove
Chip is separated with main channel by one layer of extremely thin dimethyl silicone polymer (PDMS) film, and such groove is closed, gas in groove
(standard atmospheric pressure) known to the pressure of body, when the fluid in main channel passes through groove, PDMS film can be deformed, and be caused recessed
Gas volume changes in groove, by measuring the size of gas volume in groove, can rapidly and accurately obtain position master
The size of channel inner pressure.
To achieve the above object, the technical solution adopted by the present invention is as follows, and a kind of deformation of utilization PDMS film is directly surveyed
The device of pressure in microchannel is measured, the structure involved by the device includes PDMS microchips 1, PDMS film 2, main channel 3, glass
Chip 4, air grooves 5, CCD camera 6, tester 7.
An air grooves 5 wherein are provided with the lower wall surface center of PDMS microchips 1, the upper wall surface of PDMS film 2 passes through
Standard UV photolithographic processes are sticked together with the lower wall surface of PDMS microchips 1, so that air grooves 5 are closed, main channel 3 is scribed
In the upper wall surface of glass-chip 4, the lower wall surface of PDMS film 2 fits in the upper wall surface of glass-chip 4 by corona treatment.
Air grooves 5 and main channel 3 are in same vertical position.CCD camera 6 is fixed in camera frame, and regulation CCD camera makes it just right
Air grooves 5, tester 7 is connected with CCD camera 6 by wire.
Compared with prior art, the present invention has the advantages that.
1st, the novel part of the present invention is the new equipment for devising pressure in a kind of measurement microchannel.Micro groove and microchannel
Size can designed, designed, meet different measurement pressure limits.
2nd, the inventive method can realize the real-time measurement to a certain position pressure in microchannel, simple to operate, it is not necessary to
Complicated extra pressure instrumentataion, with it is efficient, economical, accurate the characteristics of.
3rd, the method averaged when the present invention is calculated using repeatedly measuring, it is ensured that the precision of experiment.
Brief description of the drawings
Fig. 1 is the experiment used by the method for pressure in a kind of deformation direct measurement microchannel of utilization PDMS film of the invention
Schematic device.
Fig. 2 is the front view of the microchannel of the invention with sealed by film groove.
Fig. 3 is the top view of the microchannel of the invention with sealed by film groove.
In figure：1st, PDMS microchips, 2, PDMS film, 3, main channel, 4, glass-chip, 5, air grooves, 6, CCD phases
Machine, 7, tester.
Embodiment
It is how to realize in the deformation direct measurement microchannel using PDMS film to the present apparatus with reference to Structure Figure
Pressure is described in further detail.
Fig. 1 is the experimental provision schematic diagram used by pressure in a kind of deformation direct measurement microchannel of utilization PDMS film,
The device is placed on observation platform, wherein main, by PDMS microchips 1, (lower wall surface center is provided with air grooves 5, translucency
Very well, facilitate CCD camera 6 observe air grooves 5 in gas volume change), (upper wall surface passes through standard UV light to PDMS film 2
Lithography and the lower wall surface of PDMS microchips 1 stick together, and form closed air grooves 5, and film thickness only has 50 μm, with
Ensure that change of the film to pressure in microchannel is very sensitive, corresponding deformation can be also produced even if small pressure change film),
Main channel 3 (is engraved on the upper wall surface center of glass-chip 4, with air grooves 5 in same vertical position, liquid can be wherein
Flowing, speed can be controlled by outside micro drives pump), (upper wall surface center is provided with main channel 3, upper wall surface to glass-chip 4
Fitted after corona treatment with the lower wall surface of PDMS film 2), air grooves 5 (be in the lower wall surface of PDMS microchips 1
Center, then a closed cavity is constituted with PDMS film 2, when not having fluid in main channel 3, a standard is contained in inside
Atmospheric pressure), CCD camera 6 (be fixed in camera frame, regulation CCD camera 6 it is faced air grooves 5, high resolution makes
It can clearly observe the intensity of variation of gas volume in air grooves 5), tester 7 (pass through wire with CCD camera
It is connected, realizes the change that the change of groove inner volume is converted into pressure) several parts compositions.PDMS microchips 1 and PDMS
Film 2 is all made of, by soft lithography micro Process, to be sticked together between the two by standard UV photoetching process, is reached well
Sealing effectiveness.Main channel 3 is the upper surface that the method etched by micro Process is engraved on glass-chip 4,.Do not have when in main channel 3
When having liquid flowing, containing a standard atmospheric pressure in air grooves 5, PDMS film 2 is not also deformed.Otherwise work as main channel
3 when having the liquid to pass through, and the deformation of PDMS film 2 can just be monitored in real time (i.e. air is recessed by facing the CCD camera 6 of air grooves 5
The change of gas volume in groove 5) and by Volume Changes signal transmission into tester 7, complete to turn Volume Changes signals
Change pressure change output into, realize the real-time measurement to pressure at air grooves position.Flowing velocity is not in main channel 3 for liquid
Together, the deformation of the port PDMS film 2 of air grooves 5 is also different, the real-time monitoring by CCD camera 6 to air grooves 5,
The knots modification of gas volume in air grooves 5 is obtained, the corresponding pressure finally calculated at the now position of air grooves 5 is big
It is small.
After the completion of experimental provision is built, specific implementation process is as follows：Flowed first with outside micro drives pump by fixed
The liquid injection of amount enters in main channel 3, and air is obtained by CCD camera 6 after the liquid flow velocity in main channel 3 is stable
The picture that PDMS film 2 is deformed at the port position of groove 5, the picture obtained is reached in tester 7 by wire, then
In the case of known to the depth D of air grooves 5, gas volume in air grooves 5 is gone out using corresponding Software tool numerical computations
Variable quantity, then the corresponding pressure size in the position of air grooves 5 is drawn by hydrodynamics correlation theory.Keep flow constant,
Repeatedly the average value of pressure is sought in measurement.The present apparatus can realize measurement not by the inlet flow rate of the outside micro drives pump of change
Liquid with speed then obtains friction speed entrance by the deformation of the port PDMS film 2 of air grooves during main channel 35
Fluid pass through 5 position of air grooves when pressure size.
Claims (2)
1. the device of pressure in a kind of deformation direct measurement microchannel of utilization PDMS film, it is characterised in that：The device includes
PDMS microchips (1), PDMS film (2), main channel (3), glass-chip (4), air grooves (5), CCD camera (6), tester
Device (7)；
An air grooves (5) is wherein provided with PDMS microchips (1) lower wall surface center, PDMS film (2) upper wall surface passes through
Standard UV photolithographic processes stick together with PDMS microchips (1) lower wall surface, so that air grooves (5) are closed, main channel
(3) upper wall surface of glass-chip (4) is engraved on, the lower wall surface of PDMS film (2) fits in glass core by corona treatment
The upper wall surface of piece (4)；Air grooves (5) and main channel (3) are in same vertical position；CCD camera (6) is fixed on camera frame
On, regulation CCD camera makes it face air grooves (5), and tester (7) is connected with CCD camera (6) by wire.
2. the device of pressure in a kind of deformation direct measurement microchannel of utilization PDMS film according to claim 1, its
It is characterised by：After the completion of experimental provision is built, specific implementation process is as follows, first with outside micro drives pump, by fixation
The fluid of flow is injected into main channel (3), and CCD camera (6) are passed through after the fluid-flow rate in main channel (3) is stable
The picture that PDMS film (2) is deformed at air grooves (5) port position is obtained, the picture obtained is reached into test by wire
In instrument (7), then in the case of air grooves (5) depth D is known, air is gone out using corresponding Software tool numerical computations
The variable quantity of groove (5) interior gas volume, then the corresponding pressure in air grooves (5) position is drawn by hydrodynamics correlation theory
Size；Keep flow constant, the average value of pressure is sought in repeatedly measurement；The entrance stream that the present apparatus passes through the outside micro drives pump of change
Amount, can realize the fluid of measurement friction speed by the shape of air grooves (5) port PDMS film (2) when main channel (3)
Become, the size of pressure when the fluid for then obtaining friction speed entrance passes through air grooves (5) position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410823125.4A CN104568287B (en) | 2014-12-24 | 2014-12-24 | Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410823125.4A CN104568287B (en) | 2014-12-24 | 2014-12-24 | Pressure apparatus in a kind of deformation direct measurement microchannel of utilization PDMS film |
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| Publication Number | Publication Date |
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| CN104568287A CN104568287A (en) | 2015-04-29 |
| CN104568287B true CN104568287B (en) | 2017-07-14 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105036061B (en) * | 2015-07-01 | 2017-06-23 | 北京工业大学 | The preparation method of the microchannel of lower wall surface indent |
| CN104998701B (en) * | 2015-07-01 | 2017-05-10 | 北京工业大学 | Method for making micro channel with movable bottomface by using groove |
| CN105842151B (en) * | 2016-03-18 | 2018-07-20 | 清华大学深圳研究生院 | A kind of the PDMS film liquid appearance measuring device and method of micro-fluidic chip |
| CN107976154B (en) * | 2017-11-16 | 2020-03-13 | 北京工业大学 | Method for measuring upper/lower wall surface profile of channel based on fluorescence intensity |
| CN110118788A (en) * | 2019-04-30 | 2019-08-13 | 东南大学 | Submerged structure Defect inspection contact visual sensing equipment and image processing method |
| CN111998985B (en) * | 2019-09-30 | 2022-06-14 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
| CN111707664A (en) * | 2020-05-19 | 2020-09-25 | 西安交通大学 | Observation experiment device suitable for super hydrophobic surface |
| CN113074860A (en) * | 2021-03-17 | 2021-07-06 | 重庆大学 | Miniature pressure sensing device for blood vessel chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4020318B2 (en) * | 2004-05-19 | 2007-12-12 | 株式会社山武 | Capacitive pressure sensor |
| US20110039303A1 (en) * | 2007-02-05 | 2011-02-17 | Stevan Bogdan Jovanovich | Microfluidic and nanofluidic devices, systems, and applications |
| GB2466929A (en) * | 2009-01-09 | 2010-07-14 | Smart Fibres Ltd | Pressure sensor device comprising flexible diaphragm with integral optical sensor |
| DE102011004729A1 (en) * | 2011-02-25 | 2012-08-30 | Endress + Hauser Gmbh + Co. Kg | Pressure measuring cell of pressure sensor, has lower measuring chamber that communicates with metallic hydraulic line, where upper end portion of hydraulic line is pressure-tightly fastened and welded at casing |
| US8590387B2 (en) * | 2011-03-31 | 2013-11-26 | DePuy Synthes Products, LLC | Absolute capacitive micro pressure sensor |
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