CN104510496B - 超声波装置、探测器、电子设备以及超声波图像装置 - Google Patents
超声波装置、探测器、电子设备以及超声波图像装置 Download PDFInfo
- Publication number
- CN104510496B CN104510496B CN201410498687.6A CN201410498687A CN104510496B CN 104510496 B CN104510496 B CN 104510496B CN 201410498687 A CN201410498687 A CN 201410498687A CN 104510496 B CN104510496 B CN 104510496B
- Authority
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- China
- Prior art keywords
- ultrasonic
- acoustic matching
- acoustic
- matching layer
- transducer elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000002604 ultrasonography Methods 0.000 title description 6
- 238000012285 ultrasound imaging Methods 0.000 title description 2
- 239000000523 sample Substances 0.000 claims abstract description 20
- 239000012528 membrane Substances 0.000 claims abstract description 10
- 238000003384 imaging method Methods 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 98
- 239000012790 adhesive layer Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 27
- 238000005192 partition Methods 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 16
- 230000005534 acoustic noise Effects 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 53
- 238000000926 separation method Methods 0.000 description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 10
- 230000003014 reinforcing effect Effects 0.000 description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/46—Ultrasonic, sonic or infrasonic diagnostic devices with special arrangements for interfacing with the operator or the patient
- A61B8/461—Displaying means of special interest
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Animal Behavior & Ethology (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Public Health (AREA)
- General Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Acoustics & Sound (AREA)
- Mechanical Engineering (AREA)
- Gynecology & Obstetrics (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Computer Vision & Pattern Recognition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013203475A JP6273743B2 (ja) | 2013-09-30 | 2013-09-30 | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 |
| JP2013-203475 | 2013-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104510496A CN104510496A (zh) | 2015-04-15 |
| CN104510496B true CN104510496B (zh) | 2021-04-09 |
Family
ID=52740824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410498687.6A Active CN104510496B (zh) | 2013-09-30 | 2014-09-25 | 超声波装置、探测器、电子设备以及超声波图像装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10517566B2 (enExample) |
| JP (1) | JP6273743B2 (enExample) |
| CN (1) | CN104510496B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6011235B2 (ja) | 2012-10-17 | 2016-10-19 | セイコーエプソン株式会社 | 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 |
| JP6468426B2 (ja) * | 2014-03-10 | 2019-02-13 | セイコーエプソン株式会社 | 超音波センサー |
| US10130339B2 (en) * | 2014-06-30 | 2018-11-20 | Seiko Epson Corporation | Ultrasound sensor and method of manufacturing thereof |
| JP6299509B2 (ja) * | 2014-07-31 | 2018-03-28 | セイコーエプソン株式会社 | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 |
| CN107079223B (zh) * | 2015-04-30 | 2019-12-13 | 奥林巴斯株式会社 | 超声波振子以及超声波探头 |
| US11181627B2 (en) * | 2018-02-05 | 2021-11-23 | Denso Corporation | Ultrasonic sensor |
| JP7180129B2 (ja) * | 2018-06-06 | 2022-11-30 | セイコーエプソン株式会社 | 超音波装置および電子機器 |
| DK181509B1 (en) * | 2022-01-12 | 2024-03-18 | Topsoe As | Process for hydrotreating a liquid crude oil |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5886454A (en) * | 1996-02-29 | 1999-03-23 | Hitachi Medical Corporation | Ultrasonic probe and manufacturing method thereof |
| US6225729B1 (en) * | 1997-12-01 | 2001-05-01 | Hitachi Medical Corporation | Ultrasonic probe and ultrasonic diagnostic apparatus using the probe |
| CN1677706A (zh) * | 2004-03-31 | 2005-10-05 | 通用电气公司 | 传感元件的隔离方法和装置 |
| CN101081169A (zh) * | 2006-05-31 | 2007-12-05 | 株式会社东芝 | 阵列式超声波探针和超声波诊断装置 |
| CN101405090A (zh) * | 2005-11-02 | 2009-04-08 | 视声公司 | 阵列式超声换能器 |
| CN102205310A (zh) * | 2010-01-28 | 2011-10-05 | 株式会社东芝 | 超声波转换器、超声波探头、超声波转换器的制造方法 |
| CN103240220A (zh) * | 2013-05-09 | 2013-08-14 | 电子科技大学 | 一种压电式阵列超声换能器 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4862893A (en) * | 1987-12-08 | 1989-09-05 | Intra-Sonix, Inc. | Ultrasonic transducer |
| JP2005051688A (ja) | 2003-07-31 | 2005-02-24 | Matsushita Electric Works Ltd | 超音波アレイセンサおよびその製造方法 |
| JP4347885B2 (ja) * | 2004-06-03 | 2009-10-21 | オリンパス株式会社 | 静電容量型超音波振動子の製造方法、当該製造方法によって製造された静電容量型超音波振動子を備えた超音波内視鏡装置、静電容量型超音波プローブおよび静電容量型超音波振動子 |
| WO2006046471A1 (ja) * | 2004-10-27 | 2006-05-04 | Olympus Corporation | 静電容量型超音波振動子及びその体腔内超音波診断システム |
| US7449821B2 (en) * | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| JP4787630B2 (ja) | 2006-03-03 | 2011-10-05 | 日立アロカメディカル株式会社 | 超音波探触子 |
| JP4958631B2 (ja) | 2007-05-14 | 2012-06-20 | 株式会社日立製作所 | 超音波送受信デバイス及びそれを用いた超音波探触子 |
| US8563345B2 (en) * | 2009-10-02 | 2013-10-22 | National Semiconductor Corporated | Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements |
| JP5413131B2 (ja) | 2009-11-03 | 2014-02-12 | セイコーエプソン株式会社 | センサーアレイ及び圧力センサーの製造方法 |
| JP5671876B2 (ja) * | 2009-11-16 | 2015-02-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法 |
| JP5708214B2 (ja) * | 2011-03-28 | 2015-04-30 | セイコーエプソン株式会社 | 圧力センサー、センサーアレイ、センサーアレイの製造方法、及び把持装置 |
| JP5834679B2 (ja) * | 2011-09-20 | 2015-12-24 | セイコーエプソン株式会社 | 超音波プローブおよび超音波画像診断装置 |
| JP6078994B2 (ja) | 2012-06-13 | 2017-02-15 | セイコーエプソン株式会社 | 超音波トランスデューサー素子ユニットおよびプローブおよびプローブヘッド並びに電子機器および超音波診断装置 |
-
2013
- 2013-09-30 JP JP2013203475A patent/JP6273743B2/ja active Active
-
2014
- 2014-09-25 CN CN201410498687.6A patent/CN104510496B/zh active Active
- 2014-09-29 US US14/499,806 patent/US10517566B2/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5886454A (en) * | 1996-02-29 | 1999-03-23 | Hitachi Medical Corporation | Ultrasonic probe and manufacturing method thereof |
| US6225729B1 (en) * | 1997-12-01 | 2001-05-01 | Hitachi Medical Corporation | Ultrasonic probe and ultrasonic diagnostic apparatus using the probe |
| CN1677706A (zh) * | 2004-03-31 | 2005-10-05 | 通用电气公司 | 传感元件的隔离方法和装置 |
| CN101405090A (zh) * | 2005-11-02 | 2009-04-08 | 视声公司 | 阵列式超声换能器 |
| CN101081169A (zh) * | 2006-05-31 | 2007-12-05 | 株式会社东芝 | 阵列式超声波探针和超声波诊断装置 |
| CN102205310A (zh) * | 2010-01-28 | 2011-10-05 | 株式会社东芝 | 超声波转换器、超声波探头、超声波转换器的制造方法 |
| CN103240220A (zh) * | 2013-05-09 | 2013-08-14 | 电子科技大学 | 一种压电式阵列超声换能器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6273743B2 (ja) | 2018-02-07 |
| JP2015070473A (ja) | 2015-04-13 |
| CN104510496A (zh) | 2015-04-15 |
| US10517566B2 (en) | 2019-12-31 |
| US20150094596A1 (en) | 2015-04-02 |
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