CN104385118A - Diamond shot piece, application method thereof and grinding tool - Google Patents

Diamond shot piece, application method thereof and grinding tool Download PDF

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Publication number
CN104385118A
CN104385118A CN201410474488.1A CN201410474488A CN104385118A CN 104385118 A CN104385118 A CN 104385118A CN 201410474488 A CN201410474488 A CN 201410474488A CN 104385118 A CN104385118 A CN 104385118A
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CN
China
Prior art keywords
diamond pellet
combined binder
diamond
soft
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410474488.1A
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Chinese (zh)
Inventor
吕迅
马科
张国贤
吴俊�
梅德庆
郑熠科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Sunny Optics Co Ltd
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Zhejiang Sunny Optics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Sunny Optics Co Ltd filed Critical Zhejiang Sunny Optics Co Ltd
Priority to CN201410474488.1A priority Critical patent/CN104385118A/en
Publication of CN104385118A publication Critical patent/CN104385118A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/12Lapping plates for working plane surfaces
    • B24B37/14Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent

Abstract

The invention discloses a diamond shot piece. The diamond shot piece is a composite binding agent diamond shot piece containing a composite binding agent and diamond abrasive particles. The invention further discloses a grinding tool and an application method of the diamond shot piece.

Description

A kind of diamond pellet and application process, milling tool
Technical field
The present invention relates to grinding technique, particularly relate to a kind of diamond pellet and application process, milling tool.
Background technology
Along with the development of modern science and technology, soft-brittle material is used widely at the numerous areas of Modern High-Tech's industry, such as: for tellurium zinc cadmium (CZT) crystal of high-performance infrared focus plane device backing material, for nonlinear optical material potassium dihydrogen phosphate (KDP) crystal of inertial confinement fusion, wide bandgap semiconductor electronic material GaAs (GaAs) and indium phosphide (InP), the soft-brittle material such as optical glass material all have excellent performance in respective application; Therefore, the application of these excellent performance soft-brittle material also becomes the study hotspot of high-technology field in the world.Described soft-brittle material belongs to fragile material, its " soft " be a relative concept just, compared to common hard brittle material, such as: the Mohs' hardness of typical hard brittle material silicon is 7, but the Mohs' hardness of CZT crystal is only 2.3, the Mohs' hardness of KDP crystal is the Mohs' hardness of 2.5, GaAs is 4.5.
In the application process of soft-brittle material, need to carry out Ultra-precision Turning to described soft-brittle material, traditional ultraprecise processing method comprises attrition process and polishing; Wherein, the object of described attrition process makes being of the required size of soft-brittle material workpiece, improves the surface figure accuracy of described soft-brittle material workpiece, reduces the surface roughness of described soft-brittle material workpiece, and reduce described soft-brittle material workpiece surface damage layer; The object of described polishing is the damage layer that the described soft-brittle material workpiece of removal generates in last process, reduces the surface roughness of described soft-brittle material workpiece, meets the requirements to make described soft-brittle material workpiece.
Here, described attrition process comprise again slightly grind processing and lappingout process; Described slightly grind processing and lappingout process difference be that the granularity of the abrasive particle of the milling tool adopted in process of lapping is different, therefore, described process side of slightly grinding overweights allowance and surface figure accuracy, and described lappingout lays particular emphasis on face shape, dimensional accuracy and surface roughness and damage layer; But, the described lappingout processing method in described traditional ultraprecise processing method is adopted to add man-hour to described soft-brittle material, although can surface figure accuracy be improved, but the dark cut that produces on described soft-brittle material workpiece and pit can not be suppressed, these dark cuts and pit need to increase the time in follow-up polishing process and could remove, or cannot remove completely and cause yields to reduce.Therefore, need a kind of novel lappingout processing method badly, the dark cut that produces on described soft-brittle material workpiece and pit can be suppressed, also can improve the surface figure accuracy of soft-brittle material workpiece, improve the yields of described soft-brittle material workpiece and reduce follow-up polishing time.
Summary of the invention
For solving the technical problem of existing existence, the embodiment of the present invention provides a kind of diamond pellet and application process, milling tool, can suppress the dark cut that produces on described soft-brittle material workpiece and pit, and can improve the surface figure accuracy of soft-brittle material workpiece.
Technical scheme of the present invention is achieved in that and the invention provides a kind of diamond pellet, and described diamond pellet is the combined binder diamond pellet including combined binder and diamond abrasive grain.
In such scheme, the shape of described combined binder diamond pellet is cylindrical, crescent or six prismatics.
In such scheme, described combined binder comprises metallic bond and resinoid bond.
The embodiment of the present invention additionally provides a kind of milling tool, comprises abrasive disk; Wherein, several combined binder diamond pellet described in any one of claims 1 to 3 are stained with in described abrasive disk.
In such scheme, the arrangement mode of several combined binder diamond pellet adhered in described abrasive disk is: any one in length and breadth in run-in index, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula, single thread line formula and ray type.
In such scheme, the arrangement pitches of each combined binder diamond pellet adhered in described abrasive disk is 1 to 20mm.
The embodiment of the present invention additionally provides a kind of application process of diamond pellet, and described method comprises:
The milling tool being provided with diamond pellet is adopted to grind soft-brittle material;
Wherein, described diamond pellet is the combined binder diamond pellet including combined binder and diamond abrasive grain;
Several combined binder diamond pellet are stained with in the abrasive disk of described milling tool.
In such scheme, described method also comprises:
The adherent fashion of described combined binder diamond pellet in described abrasive disk is determined according to the soft durometer of described soft-brittle material;
Wherein, described adherent fashion comprises: any one in length and breadth in run-in index, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula, single thread line formula and ray type.
In such scheme, the arrangement pitches of each combined binder diamond pellet adhered in described abrasive disk is 1 to 20mm.
In such scheme, the shape of described combined binder diamond pellet is cylindrical, crescent or six prismatics.
In such scheme, after adopting the milling tool being provided with diamond pellet to grind soft-brittle material, the surface roughness of the soft-brittle material obtained is: profile arithmetic average error R a4 to 10nm, maximum height of the profile R z50 to 65nm, peak valley vertical range R maximum in evaluation length t60 to 90nm.
Embodiment of the present invention diamond pellet and application process, milling tool, combined binder and diamond abrasive grain are mixed to get combined binder diamond pellet, and adopt the milling tool being attached with described combined binder diamond pellet to carry out smooth grinding to soft-brittle material; So, because described combined binder had both had good overall conformal ability, diamond abrasive grain appropriateness when stressed can be made again to retire, grain depth of cut is made to be close to unanimously, therefore, adopt the diamond pellet described in the embodiment of the present invention and application process, milling tool, the dark cut pit produced on described soft-brittle material workpiece can be suppressed, also can improve the surface figure accuracy of soft-brittle material workpiece simultaneously, and then improve the yields of described soft-brittle material workpiece and reduce follow-up polishing time.
Accompanying drawing explanation
Fig. 1 is the schematic diagram adopting metal-bonded diamond pellet soft-brittle material workpiece to be carried out to smooth grinding;
Fig. 2 is the schematic diagram adopting resin bonding agent diamond pellet soft-brittle material workpiece to be carried out to smooth grinding;
Fig. 3 is the structural representation of embodiment of the present invention milling tool;
Fig. 4 is the structural representation of the arrangement mode of embodiment of the present invention combined binder diamond pellet.
Detailed description of the invention
Traditional lappingout processing method can adopt metal-bonded diamond pellet to carry out smooth grinding to soft-brittle material workpiece, and because the rigidity of described metal-bonded diamond pellet is comparatively large, therefore, processing clearance is high, good to soft-brittle material workpiece conformal ability.But, as shown in Figure 1, because the granularity of described metal-bonded diamond pellet is inconsistent, comprise large abrasive particle 1 and little abrasive particle 2, and the rigidity of described metal-bonded diamond pellet is comparatively large, therefore, in lappingout process, easily on described soft-brittle material workpiece 4, form dark cut pit 3; So, just cause clearance during polishing to reduce, and then cause total removal rate to reduce; And, owing to creating dark cut pit in lappingout process, therefore, extend the process time of polishing, even cause percent defective to rise.
Traditional lappingout processing method can also adopt resin bonding agent diamond pellet to carry out smooth grinding to soft-brittle material workpiece, as shown in Figure 2, although the granularity of resin bonding agent diamond pellet is inconsistent, comprise large abrasive particle 1 and little abrasive particle 2, but because resinoid bond has good elastoplasticity, in lappingout processing, the cutting-ins such as abrasive particle is tending towards are cut, abrasive particle is stressed close to consistent, reduce the stress of maximum abrasive particle, therefore, when adopting described resin bonding agent diamond pellet to carry out smooth grinding to described soft-brittle material workpiece 4, dark cut pit can be avoided, make the surface quality of soft-brittle material workpiece 4 good, but, because resinoid bond integral rigidity is poor, therefore, not easily improve the surface figure accuracy of described soft-brittle material workpiece when adopting described resin bonding agent diamond pellet to carry out lappingout, even can worsen the surface figure accuracy of soft-brittle material workpiece.
For solving the problem, embodiments provide a kind of diamond pellet and application process, milling tool, in order to more at large understand feature of the present invention and technology contents, below in conjunction with the drawings and specific embodiments, realization of the present invention is elaborated further, the use of appended accompanying drawing explanation only for reference, is not used for limiting the present invention.
Embodiment one
Embodiments provide a kind of diamond pellet, wherein, described diamond pellet is the combined binder diamond pellet including combined binder and diamond abrasive grain.
In such scheme, the shape of described combined binder diamond pellet is cylindrical, crescent or six prismatics.
In such scheme, described combined binder comprises metallic bond and resinoid bond.
Here, the metallic bond in described combined binder mainly comprises: copper powder, glass putty, magnesium powder and phosphorus powder etc.; Described resinoid bond is mainly polyimide resin; In described combined binder, the mass percent of each component is: copper powder 20-40%, glass putty 5-10%, magnesium powder 5-15%, phosphorus powder 2-7%, polyimide resin 30-50%.
The preparation method of described combined binder diamond pellet comprises: mixed with diamond abrasive grain by described combined binder and after stirring, and to pour in grinding tool and at 250-350 DEG C, the condition compacted under of 80-110MPa; Subsequently, by the mixture of the described combined binder after shaping and diamond abrasive grain under the condition of 280-350 DEG C, sinter 3 to 5 hours, after cooling, namely obtain described combined binder diamond pellet.
Embodiment of the present invention diamond pellet, combined binder and diamond abrasive grain are mixed to get combined binder diamond pellet, so, when adopting the milling tool being attached with described combined binder diamond pellet to carry out smooth grinding to soft-brittle material, owing to both including metallic bond in described combined binder, include resinoid bond again, described combined binder diamond pellet is so just made both to have had the characteristic of metal-bonded diamond pellet, there is again the characteristic of resin bonding agent diamond pellet, that is, metallic bond composition in described combined binder has good overall conformal ability as the framework of combined binder diamond pellet, and the resinoid bond composition of local can make diamond abrasive grain appropriateness when stressed on described combined binder diamond pellet top layer retire in described combined binder, to make grain depth of cut consistent, therefore, adopt the diamond pellet described in the embodiment of the present invention, the dark cut pit produced on described soft-brittle material workpiece can be suppressed, also can improve the surface figure accuracy of soft-brittle material workpiece simultaneously, and then improve the yields of described soft-brittle material workpiece and reduce follow-up polishing time.
Embodiment two
The embodiment of the present invention additionally provides a kind of milling tool, comprises abrasive disk; Wherein, several combined binder diamond pellet are stained with in described abrasive disk.
In such scheme, the arrangement mode of several combined binder diamond pellet adhered in described abrasive disk is: any one in length and breadth in run-in index, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula, single thread line formula and ray type.
In such scheme, the arrangement pitches of each combined binder diamond pellet adhered in described abrasive disk is 1 to 20mm.
Here, as shown in Figure 3, described milling tool is ultraprecise face lapping mill 5, wherein, is stained with multiple combined binder diamond pellet 6 in the abrasive disk of described ultraprecise face lapping mill;
Particularly, described abrasive disk forms primarily of disk body 7, binding agent and described combined binder diamond pellet 6; Wherein, described disk body 7 is as the carrier of described combined binder diamond pellet 6, and several combined binder diamond pellet 6 described are according to certain arrangement mode, be fixed in described disk body 7 by described binding agent; When the main shaft of described ultraprecise face lapping mill 5 drives described abrasive disk to rotate, the combined binder diamond pellet 6 of different queueing discipline is treated grinding work-piece and is carried out smooth grinding, such as: the soft-brittle material workpiece 4 shown in Fig. 3 carries out smooth grinding.
Here, as shown in Figure 4, Fig. 4 (a) adopts the arrangement mode of run-in index in length and breadth to adhere to the schematic diagram after described disk body for described combined binder diamond pellet; Fig. 4 (b) adopts the arrangement mode of the equidistant formula of concentric circles to adhere to the schematic diagram after described disk body for described combined binder diamond pellet; Fig. 4 (c) adopts the arrangement mode of concentric circles radial to adhere to the schematic diagram after described disk body for described combined binder diamond pellet; As can be seen from Figure 4, arrangement mode shown in Fig. 4 (c) Yu Fig. 4 (b) is similar, that is: all combined binder diamond pellet are in multiple concentric circles, and just the concentric circles residing for each combined binder diamond pellet shown in Fig. 4 (c) is non-isometric; Fig. 4 (d) adopts the arrangement mode of multi-head spiral line formula to adhere to the schematic diagram after described disk body for described combined binder diamond pellet; Fig. 4 (e) adopts the arrangement mode of single thread line formula to adhere to the schematic diagram after described disk body for described combined binder diamond pellet; Fig. 4 (f) adopts the arrangement mode of ray type to adhere to the schematic diagram after described disk body for described combined binder diamond pellet.
Combined binder diamond pellet is stained with in the abrasive disk of embodiment of the present invention milling tool, and, described combined binder diamond pellet includes combined binder and diamond abrasive grain, so, when adopting the milling tool being attached with described combined binder diamond pellet to carry out smooth grinding to soft-brittle material, owing to both including metallic bond in described combined binder, include resinoid bond again, this just makes described combined binder diamond pellet both have the characteristic of metal-bonded diamond pellet, there is again the characteristic of resin bonding agent diamond pellet, that is, metallic bond composition in described combined binder has good overall conformal ability as the framework of combined binder diamond pellet, and the resinoid bond composition of local can make diamond abrasive grain appropriateness when stressed on described combined binder diamond pellet top layer retire in described combined binder, to make grain depth of cut consistent, therefore, adopt the milling tool described in the embodiment of the present invention, the dark cut pit produced on described soft-brittle material workpiece can be suppressed, also can improve the surface figure accuracy of soft-brittle material workpiece simultaneously, and then improve the yields of described soft-brittle material workpiece and reduce follow-up polishing time.
Embodiment three
The embodiment of the present invention additionally provides a kind of application process of diamond pellet, and described method comprises:
The milling tool being provided with diamond pellet is adopted to grind soft-brittle material;
Wherein, described diamond pellet is the combined binder diamond pellet including combined binder and diamond abrasive grain;
Several combined binder diamond pellet are stained with in the abrasive disk of described milling tool.
In such scheme, described method also comprises:
The adherent fashion of described combined binder diamond pellet in described abrasive disk is determined according to the soft durometer of described soft-brittle material;
Wherein, described adherent fashion comprises: any one in length and breadth in run-in index, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula, single thread line formula and ray type.
Here, generally, the adherent fashion of described combined binder diamond pellet in described abrasive disk is the equidistant formula of concentric circles or concentric circles radial; But, for softer soft-brittle material, usually adopt some adherent fashion of arrangement comparatively dense, such as, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula or single thread line formula; And for harder soft-brittle material, usually adopt more sparse adherent fashion, and such as, run-in index or ray type in length and breadth; It should be noted that above-mentioned adherent fashion is only for explaining the present invention, not for limiting implementation of the present invention, in actual applications, the material for different soft and hard degree can also select other adherent fashion.
In such scheme, the arrangement pitches of each combined binder diamond pellet adhered in described abrasive disk is 1 to 20mm.
In such scheme, the shape of described combined binder diamond pellet is cylindrical, crescent or six prismatics.
In such scheme, after adopting the milling tool being provided with diamond pellet to grind soft-brittle material, the surface roughness of the soft-brittle material obtained is: profile arithmetic average error R abe 4 to 10nm, maximum height of the profile R zbe 50 to 65nm, peak valley vertical range R maximum in evaluation length tbe 60 to 90nm.
Embodiment of the present invention diamond pellet and application process thereof, milling tool, combined binder and diamond abrasive grain are mixed to get combined binder diamond pellet, and adopt the milling tool being attached with described combined binder diamond pellet to carry out smooth grinding to soft-brittle material, so, owing to both including metallic bond in described combined binder, include resinoid bond again, this just makes described combined binder diamond pellet both have the characteristic of metal-bonded diamond pellet, there is again the characteristic of resin bonding agent diamond pellet, that is, metallic bond composition in described combined binder has good overall conformal ability as the framework of combined binder diamond pellet, and the resinoid bond composition of local can make diamond abrasive grain appropriateness when stressed on described combined binder diamond pellet top layer retire in described combined binder, to make grain depth of cut consistent, therefore, adopt the diamond pellet described in the embodiment of the present invention and application process thereof, milling tool, the dark cut pit produced on described soft-brittle material workpiece can be suppressed, also can improve the surface figure accuracy of soft-brittle material workpiece simultaneously, and then improve the yields of described soft-brittle material workpiece and reduce follow-up polishing time.
Set forth below in conjunction with the advantage of an embody rule scene to the embodiment of the present invention, particularly:
Adopt the milling tool described in the embodiment of the present invention two to carry out high-efficiency and precision grinding to soft crisp optical glass material workpiece, comprising:
Step one: be that 1800# diamond abrasive grain mixes by combined binder and grain size number; Wherein, in described combined binder, the mass percent of each component is: copper powder 30%, glass putty 10%, magnesium powder 10%, phosphorus powder 7%, polyimide resin 43%.
Step 2: the described combined binder after being uniformly mixed and described diamond abrasive grain, to be mixed evenly after, pour in grinding tool, and temperature be 350 DEG C, under pressure is the condition of 110MPa, by shaping for the mixture of described combined binder and described diamond abrasive grain;
Step 3: by the mixture of the described combined binder after shaping and diamond abrasive grain under the condition of 350 DEG C, sinter 5 hours, be cooled to room temperature subsequently, namely obtain described combined binder diamond pellet;
Step 4: the described combined binder diamond pellet adopting binding agent step 3 to be obtained adheres in the abrasive disk of milling tool;
Step 5: adopt the milling tool being stained with described combined binder diamond pellet to carry out smooth grinding to described soft crisp optical glass material workpiece, wherein, in smooth grinding process, pressure is 250kPa, and the rotating speed of abrasive disk is 1500rpm, cutting fluid concentration is 10%, and the smooth grinding time is 8 seconds.
Under the smooth grinding condition described in step 5, after carrying out smooth grinding to described soft crisp optical glass material workpiece, the surface roughness of described soft crisp optical glass material workpiece becomes: R a5.50nm, R z59.29nm, R t65.30nm;
Here, before described smooth grinding, the surface roughness of described soft crisp optical glass material workpiece after rough lapping is R afor 295.33nm, R z8.79 μm, R t12.20 μm.
After adopting the method described in embodiment three to carry out smooth grinding to soft crisp optical glass material workpiece, described soft crisp optical glass material workpiece surface figure accuracy is high, and surface is without dark cut; And the postorder polishing time, close to the surface after polishing, so, can effectively be reduced in the surface of described soft crisp optical glass material workpiece.
The above is only the embodiment of the embodiment of the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from embodiment of the present invention principle; can also make some improvements and modifications, these improvements and modifications also should be considered as the protection domain of the embodiment of the present invention.

Claims (11)

1. a diamond pellet, is characterized in that, described diamond pellet is the combined binder diamond pellet including combined binder and diamond abrasive grain.
2. diamond pellet according to claim 1, is characterized in that, the shape of described combined binder diamond pellet is cylindrical, crescent or six prismatics.
3. diamond pellet according to claim 1 and 2, is characterized in that, described combined binder comprises metallic bond and resinoid bond.
4. a milling tool, comprises abrasive disk; It is characterized in that, in described abrasive disk, be stained with several combined binder diamond pellet described in any one of claims 1 to 3.
5. milling tool according to claim 4, it is characterized in that, the arrangement mode of several combined binder diamond pellet adhered in described abrasive disk is: any one in length and breadth in run-in index, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula, single thread line formula and ray type.
6. the milling tool according to claim 4 or 5, is characterized in that, the arrangement pitches of each combined binder diamond pellet adhered in described abrasive disk is 1 to 20mm.
7. an application process for diamond pellet, is characterized in that, described method comprises:
The milling tool being provided with diamond pellet is adopted to grind soft-brittle material;
Wherein, described diamond pellet is the combined binder diamond pellet including combined binder and diamond abrasive grain;
Several combined binder diamond pellet are stained with in the abrasive disk of described milling tool.
8. application process according to claim 7, is characterized in that, described method also comprises:
The adherent fashion of described combined binder diamond pellet in described abrasive disk is determined according to the soft durometer of described soft-brittle material;
Wherein, described adherent fashion comprises: any one in length and breadth in run-in index, the equidistant formula of concentric circles, concentric circles radial, multi-head spiral line formula, single thread line formula and ray type.
9. application process according to claim 7, is characterized in that, the arrangement pitches of each combined binder diamond pellet adhered in described abrasive disk is 1 to 20mm.
10. application process according to claim 7, is characterized in that, the shape of described combined binder diamond pellet is cylindrical, crescent or six prismatics.
11. application processes according to any one of claim 7 to 10, is characterized in that, after adopting the milling tool being provided with diamond pellet to grind soft-brittle material, the surface roughness of the soft-brittle material obtained is: profile arithmetic average error R a4 to 10nm, maximum height of the profile R z50 to 65nm, peak valley vertical range R maximum in evaluation length t60 to 90nm.
CN201410474488.1A 2014-09-17 2014-09-17 Diamond shot piece, application method thereof and grinding tool Pending CN104385118A (en)

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Publication number Priority date Publication date Assignee Title
CN106956222A (en) * 2017-03-17 2017-07-18 衢州学院 A kind of mandruka composite diamond grinding pellet of use gum cement and preparation method thereof
CN109176163A (en) * 2018-10-31 2019-01-11 上海航天控制技术研究所 A kind of efficient ultraprecise processing method of magnesium aluminate optical hemispherical thin-wall part
CN114367927A (en) * 2022-01-26 2022-04-19 华侨大学 Soft/hard abrasive consolidation pill grinding disc and preparation method thereof

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US20120295525A1 (en) * 2007-03-21 2012-11-22 3M Innovative Properties Company Abrasive articles, rotationally reciprocating tools, and methods
CN201055975Y (en) * 2007-04-03 2008-05-07 沈阳科晶自动化设备有限公司 Magnetic disk type ball and tablet abrasive disk device
JP2013505842A (en) * 2009-09-28 2013-02-21 スリーエム イノベイティブ プロパティズ カンパニー Abrasive article having a solid core and method for producing the article
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956222A (en) * 2017-03-17 2017-07-18 衢州学院 A kind of mandruka composite diamond grinding pellet of use gum cement and preparation method thereof
CN109176163A (en) * 2018-10-31 2019-01-11 上海航天控制技术研究所 A kind of efficient ultraprecise processing method of magnesium aluminate optical hemispherical thin-wall part
CN114367927A (en) * 2022-01-26 2022-04-19 华侨大学 Soft/hard abrasive consolidation pill grinding disc and preparation method thereof

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