CN109702649A - The manufacturing method of chemical mechanical grinding trimmer - Google Patents
The manufacturing method of chemical mechanical grinding trimmer Download PDFInfo
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- CN109702649A CN109702649A CN201711011826.8A CN201711011826A CN109702649A CN 109702649 A CN109702649 A CN 109702649A CN 201711011826 A CN201711011826 A CN 201711011826A CN 109702649 A CN109702649 A CN 109702649A
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- tip
- abrasive
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Abstract
A kind of manufacturing method of chemical mechanical grinding trimmer, one pedestal with multiple grooves is provided, be provided in the groove sponge and one penetrate into the sponge thermosetting property viscose glue, multiple grinding units are respectively corresponded again and are set in the groove, the grinding unit respectively has an abrasive tip, and the abrasive tip of an at least grinding unit exceeds a datum plane, it is compressed with a plate, the abrasive tip is aligned by the elasticity of the sponge with the datum plane, make height of the abrasive tip apart from the pedestal between 50 microns to 100 microns, and the protrusion gap of highest protruding tip and the second high protruding tip is less than or equal to 5 microns in those abrasive grains, the protrusion gap of preceding 1% high protruding tip is less than or equal to 20 microns in those abrasive grains, the final curing thermosetting property viscose glue, and the difference in height of the abrasive tip can be reduced It is different, promote monolithic finish efficiency.
Description
Technical field
The present invention is to be related to a kind of cutting down device, espespecially a kind of manufacturing method of chemical mechanical grinding trimmer.
Background technique
Chemical mechanical grinding (Chemical Mechanical Polishing, CMP) is ground to be common in various industries
Grinding process can grind the surface of various articles using chemical grinding technique, and as integrated circuit is quickly grown, and chemical machine
Tool grinding can reach the purpose of large area planarization, it has also become common one of wafer planarization technology in semiconductor technology.But
Clast caused by grinding and grinding slurry can accumulate the hole in grinding pad, enable the grinding pad generate consume and cause to grind
Effect decline, therefore can remaining clast and grinding slurry in grinding pad be removed using a trimmer (Conditioner) simultaneously.
Common trimmer such as U.S. patent Nos announce No. US7467989 " Ceramic polishing pad
Dresser and method for fabricating the same ", the ceramic grinding pad for disclosing a kind of tool plastic base are repaired
Whole device and its manufacturing method utilize the vitrified processing procedure of a ceramic powders, more abrasive grains are bonded on a ceramic substrate,
Form a ceramic diamond dish, a plastic base recycled to be installed in its bottom, in favor of formed corresponding screw hole and location hole with
Cooperation institute chemical mechanical grinding (CMP) board to be mounted.
However, the size of those abrasive grains is not identical, and when to be bonded to the ceramic substrate, each grinding
The projecting height at the tip of particle is inconsistent, and partial mill particle is enabled not to be effectively used, and then reduces monolithic finish efficiency,
Therefore, how to make each abrasive grains that can all be used effectively, and promote monolithic finish efficiency actually related dealer is intended to solve
Project.
Summary of the invention
The main object of the present invention is that the projecting height for solving abrasive grains is inconsistent, and then reduces monolithic finish effect
The problem of rate.
In order to achieve the above object, the present invention provides a kind of manufacturing method of chemical mechanical grinding trimmer comprising the steps of:
S1: providing a pedestal with multiple grooves, and a sponge and an infiltration with an elasticity is provided in the groove
Enter the thermosetting property viscose glue of the sponge；
S2: multiple grinding units being respectively corresponded and are set in those grooves, which respectively has one and the thermosetting
Property viscose glue contact bottom surface and one by multiple abrasive grains is formed and far from the bottom surface abrasive tip, those abrasive tips expose be somebody's turn to do
Groove, and the abrasive tip of an at least grinding unit has first height beyond a datum plane；
S3: the abrasive tip beyond the datum plane is compressed to the datum plane with a plate, the abrasive tip is by the sea
The elasticity of cotton supports the plate, and is reduced to second height being aligned with the datum plane from first height, grinds those
Height of the end apart from the pedestal is ground between 50 microns to 100 microns, and highest protruding tip and the in those abrasive grains
The protrusion gap of two high protruding tips is less than or equal to 5 microns, the protrusion gap of preceding 1% high protruding tip in those abrasive grains
Less than or equal to 20 microns；And
S4: heating the thermosetting property viscose glue, and the thermosetting property viscose glue is made to solidify the grinding unit of adhering, and enables the abrasive tip solid
Due to second height.
In conclusion compressing the abrasive tip by using the plate, height of the abrasive tip apart from the pedestal can be made to be situated between
Between 50 microns to 100 microns, the protrusion gap of those abrasive grains protruding tips is reduced, the difference in height of the abrasive tip is reduced
It is different, to promote monolithic finish efficiency.
Detailed description of the invention
Fig. 1 is the flow diagram of one embodiment of the invention.
Fig. 2A~2D is the production process schematic diagram of one embodiment of the invention.
Specific embodiment
It is related to detailed description of the invention and technology contents, now just cooperation schema is described as follows:
It please referring to shown in Fig. 1 and Fig. 2A to Fig. 2 D, the present invention is a kind of manufacturing method of chemical mechanical grinding trimmer,
Include following steps:
Step S1: as shown in Figure 2 A, a pedestal 10 with multiple grooves 11 is provided, is provided with a tool in the groove 11
There is the sponge 20 of an elasticity, and penetrate into a thermosetting property viscose glue 30 in the sponge, the material of pedestal 10 can close for metal, metal
Gold, oxidized metal, plastic material, fictile, carbon product or combinations thereof etc..
Step S2: as shown in Figure 2 B, multiple grinding units 40 being respectively corresponded and are set in those grooves 11, the grinding list
Member 40 respectively there is a bottom surface 41 and an abrasive tip 43 far from the bottom surface 41, the bottom surface 41 to contact with the thermosetting property viscose glue 30,
And the abrasive tip 43 is then to be formed by multiple abrasive grains 42 and the abrasive tip 43 can expose the groove 11, and at least one grinding is single
The abrasive tip 43 of member 40 has a first height H1 for exceeding a datum plane 50, in this present embodiment, those abrasive grains
42 can be monocrystalline diamond, cubic boron nitride, silicon carbide or combinations thereof etc., and those grinding units 40 also respectively include a substrate
44, those abrasive grains 42 are to be fixed in the substrate 44 using glued or electro-plating method, and the material of the substrate 44 is gold
Category, metal alloy, oxidized metal, plastic material, fictile, carbon product or combinations thereof etc., but not limited to this.
Step S3: as shown in Fig. 2 C and Fig. 2 D, compressing those abrasive tips 43 with a plate 60, makes beyond the datum plane 50
Those abrasive tips 43 drop to the datum plane 50, due to the sponge 20 have the elasticity, those abrasive tips 43 are by the sea
The elasticity of cotton 20 supports the plate 60, and is reduced to second height being aligned with the datum plane 50 from first height H1
H2 makes those height of abrasive tip 43 apart from the pedestal 10 between 50 microns (μm) to 100 microns, and those abrasive grains
The protrusion gap of highest protruding tip and the second high protruding tip is less than or equal to 5 microns in 42, preceding 1% in those abrasive grains 42
The protrusion gap of high protruding tip is less than or equal to 20 microns, and highest protruding tip and the tenth height are prominent in those abrasive grains 42
The protrusion gap at tip is less than or equal to 20 microns, and highest protruding tip and the 100th high protruding tip in those abrasive grains 42
Protrusion gap be less than or equal to 40 microns.In this way, which the difference in height of the abrasive tip 43 can be reduced, make those abrasive grains
42 all can effectively be utilized, and then promote monolithic finish efficiency.
Step S4: heating the thermosetting property viscose glue 30, solidifies the thermosetting property viscose glue 30 and the grinding unit 40 of adhering, and
So that the sponge is no longer generated deformation, enable the abrasive tip 43 be fixed on second height H2, that is, be aligned the datum plane 50, wherein
The thermosetting property viscose glue 30 can be epoxy resin or phenolic resin etc., and its heat curing temperature is between 50 DEG C to 150 DEG C.
In conclusion the present invention compresses the abrasive tip by using the plate, those abrasive tips is made to be aligned the datum plane,
And make height of those abrasive tips apart from the pedestal between 50 microns to 100 microns, the difference in height of the abrasive tip is reduced,
And the protrusion gap of the protruding tip of those abrasive grains to each other is small, and subtleer trimming can be carried out, make those grindings
Particle all can be effectively utilized, and then promote monolithic finish efficiency.
Although the present invention has been disclosed as a preferred embodiment, however, it is not to limit the invention, therefore any familiar
The related technical personnel of this field, without departing from the spirit and scope of the present invention, and it is made it is a little change and retouch, all answer
It is covered by the protection scope of appended claims of the present invention.
Claims (9)
1. a kind of manufacturing method of chemical mechanical grinding trimmer, which is characterized in that comprise the steps of:
S1: providing a pedestal with multiple grooves, and a sponge with an elasticity is provided in the groove and an infiltration should
The thermosetting property viscose glue of sponge；
S2: multiple grinding units being respectively corresponded and are set in those grooves, which respectively has one to glue with the thermosetting property
The bottom surface and one that splicing is touched are formed by multiple abrasive grains and the abrasive tip far from the bottom surface, and it is recessed that those abrasive tips expose this
Slot, and the abrasive tip of an at least grinding unit has first height beyond a datum plane；
S3: the abrasive tip beyond the datum plane is compressed to the datum plane with a plate, the abrasive tip is by the sponge
The elasticity supports the plate, and is reduced to second height being aligned with the datum plane from first height, makes those abrasive tips
Height apart from the pedestal is between 50 microns to 100 microns, and highest protruding tip and second high in those abrasive grains
The protrusion gap of protruding tip is less than or equal to 5 microns, and the protrusion gap of preceding 1% high protruding tip is less than in those abrasive grains
Equal to 20 microns；And
S4: heating the thermosetting property viscose glue, solidifies the thermosetting property viscose glue and the grinding unit of adhering, the abrasive tip is enabled to be fixed on
Second height.
2. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S1,
The thermosetting property viscose glue is selected from epoxy resin or phenolic resin.
3. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S4,
The heat curing temperature of the thermosetting property viscose glue is between 50 DEG C to 150 DEG C.
4. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S1,
The material of the pedestal is selected from by metal, metal alloy, oxidized metal, plastic material, fictile, carbon product and combinations thereof institute
The group of composition.
5. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S2,
Those abrasive grains are selected from the group as composed by monocrystalline diamond, cubic boron nitride, silicon carbide and combinations thereof.
6. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S2,
Those grinding units respectively include a substrate, those abrasive grains are to be fixed in the substrate through glued or electro-plating method.
7. the manufacturing method of chemical mechanical grinding trimmer according to claim 6, which is characterized in that the material of the substrate
For selected from the group as composed by metal, metal alloy, oxidized metal, plastic material, fictile, carbon product and combinations thereof.
8. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S3,
The protrusion gap of highest protruding tip and the tenth high protruding tip is less than or equal to 20 microns in those abrasive grains.
9. the manufacturing method of chemical mechanical grinding trimmer according to claim 1, which is characterized in that in step S3,
The protrusion gap of highest protruding tip and the 100th high protruding tip is less than or equal to 40 microns in those abrasive grains.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711011826.8A CN109702649A (en) | 2017-10-25 | 2017-10-25 | The manufacturing method of chemical mechanical grinding trimmer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711011826.8A CN109702649A (en) | 2017-10-25 | 2017-10-25 | The manufacturing method of chemical mechanical grinding trimmer |
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| CN109702649A true CN109702649A (en) | 2019-05-03 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110091249A (en) * | 2019-05-06 | 2019-08-06 | 西安奕斯伟硅片技术有限公司 | The method for dismounting and heating device of a kind of installation method of grinding pad, grinding pad |
| CN110434773A (en) * | 2019-08-09 | 2019-11-12 | 大连理工大学 | A kind of production method of glass polishing machine large area honeycomb superhard mill and correction-plate |
| CN111775073A (en) * | 2020-06-19 | 2020-10-16 | 长江存储科技有限责任公司 | Polishing pad dresser and manufacturing method thereof |
| CN113172553A (en) * | 2021-05-25 | 2021-07-27 | 宁波江丰电子材料股份有限公司 | Chemical mechanical grinding polishing pad dressing device and preparation method thereof |
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| TW201611952A (en) * | 2014-09-30 | 2016-04-01 | Applied Diamond Inc | Manufacture method of grinding dresser |
| CN106826600A (en) * | 2017-01-26 | 2017-06-13 | 福建自贸试验区厦门片区展瑞精芯集成电路有限公司 | The manufacture method of the big diamond monocrystalline cmp trimmer of combined type |
| CN106938444A (en) * | 2017-01-26 | 2017-07-11 | 北京清烯科技有限公司 | Combined finisher with bitellos monocrystalline |
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Patent Citations (5)
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| KR20040048464A (en) * | 2002-12-03 | 2004-06-10 | 주식회사 하이닉스반도체 | Chemical mechanical polishing pad |
| CN103367242A (en) * | 2012-04-10 | 2013-10-23 | 铼钻科技股份有限公司 | Combined trimmer and manufacturing method thereof and chemical mechanical polishing method |
| TW201611952A (en) * | 2014-09-30 | 2016-04-01 | Applied Diamond Inc | Manufacture method of grinding dresser |
| CN106826600A (en) * | 2017-01-26 | 2017-06-13 | 福建自贸试验区厦门片区展瑞精芯集成电路有限公司 | The manufacture method of the big diamond monocrystalline cmp trimmer of combined type |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110091249A (en) * | 2019-05-06 | 2019-08-06 | 西安奕斯伟硅片技术有限公司 | The method for dismounting and heating device of a kind of installation method of grinding pad, grinding pad |
| CN110434773A (en) * | 2019-08-09 | 2019-11-12 | 大连理工大学 | A kind of production method of glass polishing machine large area honeycomb superhard mill and correction-plate |
| CN111775073A (en) * | 2020-06-19 | 2020-10-16 | 长江存储科技有限责任公司 | Polishing pad dresser and manufacturing method thereof |
| CN111775073B (en) * | 2020-06-19 | 2021-04-23 | 长江存储科技有限责任公司 | Polishing pad dresser and manufacturing method thereof |
| CN113172553A (en) * | 2021-05-25 | 2021-07-27 | 宁波江丰电子材料股份有限公司 | Chemical mechanical grinding polishing pad dressing device and preparation method thereof |
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Application publication date: 20190503 |
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