CN104374763B - Adjustable reheating double pulse laser-induced breakdown spectroscopy device - Google Patents
Adjustable reheating double pulse laser-induced breakdown spectroscopy device Download PDFInfo
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Abstract
The invention discloses an adjustable reheating double pulse laser-induced breakdown spectroscopy device. The device comprises a first laser device, a second laser device, a time delay generator and a sample table, wherein an optical path raising system is arranged in the optical path of the first laser device and used for raising the optical path of the first laser device so that first laser can be focused onto the surface of a sample from a position right above the sample table to generate plasmas; the time delay generator is used for controlling the trigger timing of the first laser device and the second laser device; a frequency doubler is arranged in the optical path of the second laser device, and second laser penetrating through the frequency doubler is used for reheating the plasmas. The device further comprises a signal acquiring and processing system which is capable of displaying the distribution information of elements on the surface of the sample according to the characteristic spectral lines emitted by plasma cooling and the space information of the first laser striking the sample. The adjustable reheating double pulse laser-induced breakdown spectroscopy device realizes a double pulse laser-induced breakdown spectroscopy reheating working mode and creates conditions for strengthening the element content detection signals of fragile samples (such as biological samples).
Description
Technical field
The present invention relates to laser spectrum tech field, more particularly to a kind of adjustable reheating double-pulse laser induced breakdown light
Spectral apparatus.
Background technology
LIBS is the abbreviation of Laser-Induced Breakdown Spectroscopy (laser induced breakdown spectrograph),
Plasma ablation that the technology is produced using pulse laser simultaneously excites material in sample (normally solid), and by spectrum
Instrument obtains the spectrum that Plasma-Atomic launched that is excited, with this to recognize sample in elementary composition composition, and then can be with
Carry out identification, classification, the qualitative and quantitative analyses of material.The technology can be realized quickly without the need for carrying out pretreatment to sample
Remotely, it is micro- damage sample element (especially metallic element) is detected, can be used for the detection of solid, gas, fluid sample.Swash
The application of photoinduction breakdown spectral is also quite varied, such as heavy metal analysis in biomedicine, archaeology, environmental monitoring, water
With explosive detection etc..
Compared with single-pulse laser induced breakdown spectroscopy, double-pulse laser induced breakdown spectrum can greatly enhance signal.Such as
The patent application of the A of publication number CN 102854172 provides a kind of double-pulse laser induced breakdown spectrograph system and its spectrum
The method of analysis, the spectrometer system include pulse laser, completely reflecting mirror, condenser lenses, sample stage, ellipsoidal surface mirror,
The light collecting system of light radiation, spectrogrph, computer, high-voltage pulse power source；The pulse laser is to produce laser, laser
Jing after completely reflecting mirror by condenser lenses focussing force on the sample of sample stage；Sample passages through which vital energy circulates rushes laser instrument and high-tension pulse
Rush corona discharge effect after produce light radiation by ellipsoidal surface mirror reflect after again Jing light collecting systems enter spectrogrph；It is described
Computer is connected with pulse laser, high-voltage pulse power source and spectrogrph, to be responsible for communication and total activation commander.
Reheating is a kind of vertical operation mode of double-pulse laser induced breakdown spectrum, is referred to the first beam laser excitation
The second beam laser of plasma is heated again the effect for reaching enhancing signal.Reheat working method be relatively more suitable for compared with
The enhancing of fragile sample signal, such as plant leaf blade, animal tissue.However, reheating, LIBS system fading margin parameters are more, difficulty
Greatly, adjust complicated, the current country there is no Patents.
The content of the invention
To realize realizing that LIBS reheats working method on same device, the invention discloses a kind of
Adjustable reheating double-pulse laser induced breakdown spectral device, overcomes the working method and adjusts difficult problem, can quickly, it is smart
Really running parameter is adjusted, the repeatability of detection is improve, optimal letter can be obtained under different running parameters
Make an uproar ratio.
Concrete technical scheme of the present invention is as follows：
A kind of adjustable reheating double-pulse laser induced breakdown spectral device, including first laser device, second laser, prolong
When generator and sample stage；It is disposed with light path in the light path of the first laser device to climb system, the light path system of climbing is used for
Raise the light path of first laser so that first laser produces plasma by sample surfaces are focused on directly over sample stage；It is described
Delay time generator be used to control the triggering sequential of first laser device and second laser；Cloth in the light path of the second laser
A times frequency generator is equipped with, the second laser through frequency generator again is used to reheat described plasma；Also adopt including signal
Collection and processing system, the characteristic spectral line and first laser that are sent according to plasma cooling impact the spatial information of sample, show
Distributed intelligence of the element in sample surfaces.
Wherein, energy attenuator is equipped with described first laser device and the light path of second laser and for inspection in real time
Survey the laser energy real-time monitoring system of recording laser energy；Described first laser Jing laser energy real-time monitoring system outgoing
Climb system into light path afterwards；Described second laser focuses to plasma Jing after laser energy real-time monitoring system outgoing.
When being detected using LIBS, sample properties to be detected are different, the laser energy needed for it
Also it is different.To realize such as plant leaf blade, the detection of animal tissue's fragility sample or reducing damage of the laser to sample, generally need
The energy of laser is decayed.However, carrying out decay to energy by regulation laser diode voltage can cause laser energy not
It is stable, and then affect testing result.The present invention is decayed using energy attenuator to laser energy, and its attenuation range is 1%
～99%.Laser energy real-time detecting system is mainly used in the energy of real-time detection recording laser, for judging energy of lasers
Fluctuation whether there is exception, and carry out subsequent data analysis.When data analysiss are subsequently carried out, can be right according to energy variation
The intensity of spectral line of acquisition is compensated.Wherein, described signal acquisition and processing system includes：Optical fiber collection system, for receiving
The characteristic spectral line that collection plasma cooling sends；Beam splitting system, for carrying out light splitting to characteristic spectral line；Detector, for dividing
The optical signal of photosystem is converted to the signal of telecommunication；Sample surface imaging system, for monitoring first laser impact sample position, obtains
The spatial information of sampled point；Computer, according to the spatial information of the described signal of telecommunication and sampled point, display elements are in sample surfaces
Distributed intelligence.
First laser device sends pulse laser, through optical system, impacts on sample, when energy density is higher than what is excited
Plasma is formed during threshold value, the laser article on plasma that second laser is produced is heated again, plasma cooling sends
The characteristic spectral line of different wave length, collects via optical fiber collection system, through beam splitting system, is detected by detector, and in computer
Upper display processing.
Preferably, described beam splitting system is echelle spectrometer.
Echelle spectrometer is the spectrogrph using echelle grating as dispersion element, without the need for by raster scanning one
Secondary property obtains full modal data, is avoided that conventional spectrograph multichannel head and the tail section Bonding Problem.Echelle spectrometer inside nothing
Mechanical part, stability is higher, and resolution can reach 0.08nm, can meet spectral line light splitting requirement.
Wherein, described sample surface imaging system includes：For illuminating the LED light source for illuminating of sample, position from positive direction
Beam splitter on LED light source for illuminating optical axis, CCD camera and imaging lens, for gathering the sample surfaces figure of beam splitter reflection
As information.
Preferably, described light path climb system by the first reflecting mirror, the second reflecting mirror and the 3rd speculum group into described
Second reflecting mirror is located at the surface of the first reflecting mirror, and the 3rd reflecting mirror is located at the surface of sample stage；The first described reflection
Mirror, the second reflecting mirror and the 3rd reflecting mirror are Nd：YAG double-frequency laser reflecting mirrors.
The light path system of climbing is mainly used in lifting light path, and laser will be converted into and vertically propagate in the horizontal direction.
Can be prevented effectively from rising laser positions using the light path system of climbing causes the laser factors of instability.Laser is from directly over sample
Impact sample surfaces, are conducive to effectively exciting for plasma, it is ensured that plasma is uniformly and symmetrically distributed.
Preferably, described delay time generator control first laser device and second laser adjusts Q triggered times and xenon lamp to open
Open the triggered time, first laser device and second laser adjust triggered time of Q signal 150 ± 20 μ after the triggering of xenon lamp signal
s.The setting of the sequential can at utmost ensure the energy stability of Double-impulse solid laser.
Preferably, the focusing in the light path of the first laser device and second laser is arranged on lens and is slided along optical axis
On the Lens mounting carrier of cooperation, for adjusting the distance of sample and lens, so as to control impact to the laser parameter on sample.
Lens and the important parameter that the distance of sample is LIBS, directly affect laser in object to be excited
Laser parameter.As a rule, the distance of lens and sample should be less than the focal length of lens.When lens and sample distance reduce,
The diameter of impact point will increase, and radiancy and fluence can reduce.Therefore, lens are arranged on to be slided along optical axis and are matched somebody with somebody
The Lens mounting carrier of conjunction can be according to sample properties and the distance of actual demand accurate adjustment lens and sample.
Preferably, described sample stage includes the electric displacement platform with four-degree-of-freedom, the lifting being movably arranged on electric displacement platform
Plate and the object stage being slidably fitted on electric displacement platform；The lifter plate is provided with transparent constraint window, laser light constraint window
Sample is impacted after mouthful；Restraining plate is provided with below the lifter plate, the restraining plate is placed in the surface of sample, is distributed on restraining plate
Constrained chamber, the constraint chamber is used to constrain the plasma of sample excitation.
Sample stage limits enhanced line intensity by space, and energy plasma is laterally and row constraint, and root are entered in longitudinal direction
Constraint space size adjustment the intensity of spectral line is adjusted according to different sample requirements, it is 2-10 times that the intensity of spectral line strengthens scope.Constraint window
Mouth is mainly used in plasma and longitudinally enters row constraint, and has to the characteristic spectral line that incident laser and plasma are produced preferable
Absorbance.What restraining plate was mainly used in plasma laterally enters row constraint, and makes characteristic spectral line carry out constraint propagation, improves
Spectral line collection efficiency and the intensity of spectral line.
Preferably, described lifter plate is provided with light-transmitting opening, is coated with light-passing board at the light-transmitting opening, the light-transmitting opening with it is saturating
The described constraint window of tabula rasa composition.
Wherein, light-passing board is poly (methyl methacrylate) plate, and the selection of material is N-BK7, and thickness is 1-5mm, is to ensure that laser effectively swashs
The effective collection with characteristic spectral line is sent out, light-passing board should be greater than 90% to the transmitance of optical maser wavelength and characteristic spectral line, meanwhile, it is anti-
Only laser causes damage to poly (methyl methacrylate) plate, and its energy threshold should be greater than 10J/cm2.Line enhancement effect suffer restraints window from
The impact of sample distance.Because properties of samples is different with element spectral line intensity to be detected, the constraint window of the present invention can be
Vertical direction is moved, and the intensity of spectral line is adjusted as needed.
Restraining plate is the aluminium sheet of chromium plating, and thickness is 1～3mm.Carry out chromium plating in the constraint intracavity of aluminium sheet, make inner chamber have compared with
High reflectance, makes characteristic spectral line constraint propagation, improves spectral line collection efficiency.
The invention has the advantages that：
(1) realize double-pulse laser induced breakdown spectrum and reheat mode of operation, be fragile sample (such as biological specimen)
Detection of content of element signal enhancing provides condition.
(2) real-time monitoring to laser energy is realized, is conducive to improving the repeatability of detection technique.
(3) distance and laser energy of lens and object according to different samples, can be adjusted, optimal noise is obtained
Than.
(4) it is many with adjustable parameter, adjust simply, accurately and fast.
(5) sample stage limits enhanced line intensity by space, and energy plasma is laterally and row constraint is entered in longitudinal direction, carries
High spectral line collection efficiency and the intensity of spectral line, are avoided that and excite granule to cover sample surfaces again, and smooth sample surfaces are (especially
Such as fresh blade out-of-flatness sample), make sample keep constant so as to improve detection repeatability to the distance of condenser lenses.
Description of the drawings
Fig. 1 is the index path of adjustable reheating double-pulse laser induced breakdown spectral device；
Fig. 2 is the structure chart of sample stage；
Fig. 3 is the top view of sample stage in Fig. 2；
Fig. 4 is the schematic diagram that sample is impacted on sample stage.
Specific embodiment
As shown in figure 1, a kind of adjustable reheating double-pulse laser induced breakdown spectral device, including first laser device 1, the
Dual-laser device 2, times frequency generator 3, delay time generator 4, energy attenuator 5, laser energy real-time monitoring system 6, light path is climbed
System 7, detector 8, beam splitting system 9, sample stage 11, the first condenser lenses 12, the second condenser lenses 10, optical fiber collection system
13, sample surface imaging system 14.
First laser device 1 sends pulse laser, through optical system, impacts on sample, when energy density is higher than to excite
Threshold value when form plasma, the laser article on plasma that second laser 2 is produced is heated again, and plasma cooling is sent out
Go out the characteristic spectral line of different wave length, collect via optical fiber collection system 13, through beam splitting system 9, detected by detector 8, and
Display processing on computer 15.
Light path system 7 of climbing is made up of the first reflecting mirror 72, the second reflecting mirror 71 and the 3rd reflecting mirror 73, the first reflecting mirror
72nd, the second reflecting mirror 71 and the 3rd reflecting mirror 73 select 1 inch of fundamental frequency Nd：YAG laser mirrors, the reflectance at 1064nm exists
More than 98%.
Optical fiber collection system 13 is made up of light collector and optical fiber.Sample surface imaging system 14 include CCD camera 144,
Imaging lens 143, the second beam splitter 142, LED light source for illuminating 141.
Variable energy attenuator 5 has various implementations, (1) 1/2 wave plate and beam splitter, and (2) are taken by adjusting light beam
The angle of sample mirror, (3) are decayed using neutral density filter plate to energy.
Sample stage 11 combines realization by 3 single-degree-of-freedom pulse electric displacement platforms and electric rotary table.
As shown in Figure 2, Figure 3 and Figure 4, sample stage 11 includes gear rack elevating bar 901, gear slider 902, right angle pinboard
903, plasma confinement window 904, cylindrical guide 905, plasma confinement plate 906, V-type slide block 907 combines electric displacement platform
909, pull bar 910 constrains chamber 911.Combination electric displacement platform 909 combines electric displacement platform, including three lists using four-degree-of-freedom (x, y, z, w)
Degree of freedom (x, y and z) pulse electric displacement platform and rotary freedom (w) electric rotary table.Gear rack elevating bar 901 is vertically pacified
It is mounted on combination electric displacement platform 909, gear slider 902 is engaged with gear rack elevating bar 901, can vertically be moved up and down.Right angle
Pinboard 903 is secured by bolts on gear slider 902, and plane is provided with the light-transmitting opening of rectangle, and light-transmitting opening edge is provided with support
Step, is provided with light-passing board in light-transmitting opening, form plasma confinement window 904.Cylindrical guide 905 is fixed on combination electric displacement platform
909, plasma confinement plate 906 can be slided up and down along cylindrical guide 905.Cylindrical guide 905 and gear rack elevating bar 901 pass through
Bolt-connection is on combination electric displacement platform 909.Combination electric displacement platform 909 is provided with V-groove, and V-type slide block 907 can under the effect of pull bar 910
Horizontally slip along V-groove, pull bar 910 is threadably secured in V-type slide block 907.Sample 908 places V-type slide block 907 (quite
In object stage) on, laser is impacted down from above, by plasma confinement window 904, and through plasma confinement plate
906, impact to sample surfaces excites plasma, cooling to send characteristic spectral line and collected by optical fiber collection system 13.
The material of plasma confinement window 904 is N-BK7, and thickness is 1-5mm, and transmitance is more than 90%, energy threshold
More than 10J/cm2.Plasma confinement window 904 is mainly used in plasma and longitudinally enters row constraint, and to incident laser with
The characteristic spectral line that plasma is produced has preferable absorbance.N-BK7 is a kind of common optical glass, can be passed through
The light of 350nm-2000nm wave bands, the absorbance of its laser is more than 90%, and energy threshold is more than 10J/cm2.Therefore plasma
Constraint window 904 the selection of material is N-BK7, and thickness is 1-5m.Plasma confinement window 904 can be acted in gear slider 902
Under vertically move.Line enhancement effect suffers restraints impact of the window with a distance from sample.Due to properties of samples and
Element spectral line intensity to be detected is different, and the plasma confinement window 904 of the present invention can be moved in vertical direction, root
According to need adjust the intensity of spectral line.
In the present embodiment, the material of plasma confinement plate 906 is the aluminium sheet of chromium plating, and thickness is 1mm, uniform in the middle of it
Cone constraint chamber 911 is furnished with, upper conical surface diameter and lower conical surface diameter are respectively 2mm and 3mm.Distance should between constraint chamber 911
It is consistent with the combination planning displacement of electric displacement platform 909.Plasma confinement plate 906 is mainly used in laterally carrying out about for plasma
Beam, and make characteristic spectral line carry out constraint propagation, spectral line collection efficiency and the intensity of spectral line are improved, it is 2-10 that the intensity of spectral line strengthens scope
Times.Chromium plating is carried out in the constraint chamber 911 of aluminium sheet, makes inner chamber that there is higher reflectance, make characteristic spectral line constraint propagation, improved
Spectral line collection efficiency.Constraint chamber adopts conical structure, due to its up-small and down-big structure, can be more preferably compared with the structure of column type
Obtain plasma and enter row constraint.In addition, when plasma is projected from cone constraint chamber, because its space constraint is increased,
Its electron density can be strengthened with movement velocity, therefore advantageously in the enhancing of spectral line signal.The plasma of the present invention
Distance is consistent with the combination planning displacement of electric displacement platform 909 between the constraint chamber of body restraining plate 906, can be suitably used for laser-induced breakdown
The working method of spectrum Surface scan.Using plasma restraining plate 906 of the present invention covers sample surfaces, is conducive to smooth sample table
Improve repeatability in face, it is to avoid excite other regions to be measured of particle contamination.When testing sample is the surface irregularity samples such as fresh blade
During product, its region to be measured has differences with lens distance, and then affects laser to reach the laser parameter of sample.Laser-induced breakdown
The detection stability of spectrum is closely bound up with the laser parameter in region to be detected, therefore smooth sample surfaces are conducive to fixed laser
Parameter improves the repeatability of detection.Additionally, the up-small and down-big conical structure of plasma confinement plate 906 is conducive at utmost
Avoid exciting particle contamination by a upper detection zone, it is ensured that institute's detection object is the element in region to be detected.
V-type slide block 907 can be moved under the effect of pull bar 910 along V-groove, using this V-type sliding block guide track structure, it is to avoid be raised
The troublesome operation such as plasma confinement window and plasma confinement plate.Company between plasma confinement plate 906 and cylindrical guide 905
It is connected in be close to and connects, under gravity plasma confinement plate 906 can not freely glides.
Control combination electric displacement platform 909 makes the pyramid type of plasma confinement plate 906 constrain the position in chamber 911 and top laser
Corresponding, the work step-length for arranging combination electric displacement platform 909 is cone constraint chamber neighbor distance or multiple.Beam of laser B Jing
Light path system is crossed, line focus lens are propagated down from above, through plasma confinement window 904, and through cone constraint
Chamber impacts sample.Its laser transmittance of plasma confinement window 904 is more than 90%, and energy threshold is more than 10J/cm2.Second
Shu Jiguang A are vertically focused on by condenser lenses and impacted on the plasma for inspiring, enhanced line signal.Plasma
Body cooling sends characteristic spectral line C and is collected by the optical fiber collection system 13 of top.Each position can be according to needed for actual requirement be selected
The number of times of impact, multiple position spectra collections are carried out after a position is completed by the combination movement of electric displacement platform 909.When without etc.
When plasma confinement window 904 and plasma confinement plate 906, the plasma for inspiring is free excited state；When to swashing
After the plasma sent out is limited, the density of plasma increases, and plasma temperature is raised, and enhances the spectrum of excited atom
Line strength.
Beam splitting system 9 is echelle spectrometer.
The control of delay time generator 4 first laser device 1 and second laser 2 adjust Q triggered times, xenon lamp open the triggered time and
The gate duration of ICCD detectors 8.When the setting first laser of delay time generator 4 device 1 and second laser 2 adjust the triggering of Q signal
Between xenon lamp signal triggering after 150 ± 20 μ s.Detector gates switch on-time for the triggering of the Q-switch of second laser 2
1 μ s afterwards.
Laser energy real-time monitoring feedback system 6 by thermoelectric pulse pop one's head in the 61, first beam splitter 62, USB connecting lines and
Computer 15 is constituted.The laser to be monitored passes through 3：7 beam splitters separate 30% laser energy, are connect by thermoelectric pulse probe
Receive, computer is connected to by USB connecting lines, the energy of recording laser is shown in real time on special-purpose software, for subsequent data
Analysis.
First condenser lenses 12 and the second condenser lenses 10 are installed on the Lens mounting carrier for having degree of freedom along optical axis direction
In, for adjusting the distance of sample and lens, so as to control impact to the laser parameter on sample.First condenser lenses 12 and
Two condenser lenses 10 select N-BK7.
The present invention work when, control the sequencing contro first laser device 1 of delay time generator 4 and the modulating signal of second laser 2 and
Adjust Q signal triggered time and the gate duration of detector 8.First laser device 1 and second laser 2 adjust the triggering of Q signal in xenon
150 ± 20 μ s after modulating signal triggering, detector gate switch on-time is 1 μ after the triggering of the Q-switch of second laser 2
s.First laser (1064nm) Jing energy attenuators 5 decay to laser energy, sequentially pass through the first reflecting mirror 72 and second
Reflecting mirror 71, the light path of improving laser；Adjusting the reflector mount of the second reflecting mirror 71 makes laser be located at sample top, and Jing the 3rd is anti-
Penetrate mirror 73 and change light path, propagate downwards.Laser focuses on sample surfaces via the first condenser lenses 12, when laser energy density height
When the threshold value for exciting, sample produces plasma.Second laser decays through energy attenuator 5, by frequency generator 3 again,
Laser frequency is changed into 532nm.It is higher than plasma confinement plate to adjust the height of sample stage 11 and make second laser (532nm) light-emitting window
906 1 ± 0.5mm of surface.Whether sample stage 11 can select rotary freedom according to sample characteristics of for example.Second laser (532nm) is passed through
Second condenser lenses 10 are focused on, and are focused on the plasma for ejecting, enhanced line signal.Spectral line is collected by optical fiber
System 13 is collected, and via beam splitting system 9 (echelle spectrometer) light splitting, by detector 8 signal of telecommunication is converted into, and is connected by USB
In being connected to computer 15, data statisticss and analysis are carried out in computer 15, determine the content of certain material in sample.
Claims (9)
1. a kind of adjustable reheating double-pulse laser induced breakdown spectral device, it is characterised in that including first laser device, second
Laser instrument, delay time generator and sample stage；
It is disposed with light path in the light path of the first laser device to climb system, the light path climbs system for raising first laser
Light path so that first laser produces plasma by sample surfaces are focused on directly over sample stage；
Described delay time generator is used to control the triggering sequential of first laser device and second laser；
A times frequency generator is disposed with the light path of the second laser, the second laser through frequency generator again is used to reheat
Described plasma；
Also include signal acquisition and processing system, the characteristic spectral line and first laser sent according to plasma cooling impacts sample
Spatial information, distributed intelligence of the display elements in sample surfaces；
Described sample stage includes the electric displacement platform with four-degree-of-freedom, the lifter plate being movably arranged on electric displacement platform and is slidably matched
Object stage on electric displacement platform；The lifter plate is provided with transparent constraint window, and after laser light constraint window sample is impacted；
Restraining plate is provided with below the lifter plate, the restraining plate covers sample surfaces, Constrained chamber, the constraint chamber are distributed on restraining plate
For constraining the plasma of sample excitation；
Described constraint chamber constrains chamber for cone, and upper conical surface diameter and lower conical surface diameter are respectively 2mm and 3mm, and constrains chamber
Inwall chromium plating.
2. it is adjustable as claimed in claim 1 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Energy attenuator and swashing for real-time detection recording laser energy are equipped with the light path of first laser device and second laser
Light energy real-time monitoring system；
The laser of described first laser device is climbed system Jing after laser energy real-time monitoring system outgoing into light path；
The laser of described second laser focuses to plasma Jing after laser energy real-time monitoring system outgoing.
3. it is adjustable as claimed in claim 1 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Signal acquisition and processing system includes：
Optical fiber collection system, for collecting the characteristic spectral line that plasma cooling sends；
Beam splitting system, for carrying out light splitting to characteristic spectral line；
Detector, for the optical signal of beam splitting system to be converted to into the signal of telecommunication；
Sample surface imaging system, for monitoring first laser impact sample position, obtains the spatial information of sampled point；
Computer, according to the spatial information of the described signal of telecommunication and sampled point, distributed intelligence of the display elements in sample surfaces.
4. it is adjustable as claimed in claim 3 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Beam splitting system is echelle spectrometer.
5. it is adjustable as claimed in claim 4 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Sample surface imaging system includes：
For illuminating the LED light source for illuminating of sample from positive direction,
Beam splitter on LED light source for illuminating optical axis,
CCD camera and imaging lens, for gathering the sample surfaces image information of beam splitter reflection.
6. it is adjustable as claimed in claim 1 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Light path is climbed, and to be located at first into, second reflecting mirror by the first reflecting mirror, the second reflecting mirror and the 3rd speculum group anti-for system
The surface of mirror is penetrated, the 3rd reflecting mirror is located at the surface of sample stage；
Described the first reflecting mirror, the second reflecting mirror and the 3rd reflecting mirror are Nd：YAG double-frequency laser reflecting mirrors.
7. it is adjustable as claimed in claim 6 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Delay time generator controls first laser device and second laser adjusts Q triggered times and xenon lamp to open triggered time, first laser device
With second laser adjust Q signal triggered time xenon lamp signal triggering after 150 ± 20 μ s.
8. adjustable reheating double-pulse laser induced breakdown spectral device as claimed in claim 1, it is characterised in that described the
Focusing lens in the light path of one laser instrument and second laser are arranged on along the Lens mounting carrier that optical axis is slidably matched.
9. it is adjustable as claimed in claim 1 to reheat double-pulse laser induced breakdown spectral device, it is characterised in that described
Lifter plate is provided with light-transmitting opening, and light-passing board, the light-transmitting opening constraint window described with light-passing board composition are coated with the light-transmitting opening
Mouthful.
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