CN115389487A - Method for detecting components and concentration thereof in object - Google Patents
Method for detecting components and concentration thereof in object Download PDFInfo
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- CN115389487A CN115389487A CN202210942852.7A CN202210942852A CN115389487A CN 115389487 A CN115389487 A CN 115389487A CN 202210942852 A CN202210942852 A CN 202210942852A CN 115389487 A CN115389487 A CN 115389487A
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- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 230000015556 catabolic process Effects 0.000 claims abstract description 10
- 230000008878 coupling Effects 0.000 claims abstract description 8
- 238000010168 coupling process Methods 0.000 claims abstract description 8
- 238000005859 coupling reaction Methods 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 18
- 239000000835 fiber Substances 0.000 claims description 11
- 230000001066 destructive effect Effects 0.000 claims description 2
- 238000010276 construction Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- 239000011888 foil Substances 0.000 abstract description 2
- 239000013307 optical fiber Substances 0.000 abstract 2
- 238000007747 plating Methods 0.000 abstract 1
- 235000000621 Bidens tripartita Nutrition 0.000 description 7
- 240000004082 Bidens tripartita Species 0.000 description 7
- 208000006637 fused teeth Diseases 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The invention discloses a method for detecting components and concentration thereof in an object, which comprises the following specific steps: 1) Placing a sample to be detected on a sample table, and performing non-contact nondestructive detection on the object by using a laser-induced breakdown spectrometer; 2) During detection, the sample stage is driven to do uniform-speed circular motion by the rotary driving device or to do uniform-speed translational motion by the translational driving device; at the moment, laser is generated by a laser, and the laser passes through a laser irradiation hole on the sample stage from bottom to top to irradiate a sample to be detected after being focused by a focusing lens; the measured surface of the sample to be measured generates plasma sparks under the irradiation of laser, plasma spark signals are coupled into the optical fiber spectrometer through the signal coupling lens, and the components and the concentration of the components contained in the object can be obtained by analyzing the plasma spark signals received by the optical fiber spectrometer. The method for detecting the components and the concentration thereof in the object is particularly suitable for detecting samples with thin thicknesses such as a plating layer, an aluminum foil and the like.
Description
Technical Field
The invention relates to a method for detecting components and concentration thereof in an object by using a laser-induced breakdown spectrometer.
Background
At present, when a traditional Laser Induced Breakdown Spectroscopy (LIBS) is used for detecting components and concentration thereof in an object, a sample is fixed, so that a plurality of pulse lasers are applied to the same point of the sample, and scratches generated on the surface of the sample are deeper. This is easily broken down for samples with a relatively thin thickness, such as plated layers, aluminum foil, etc.; in addition, the area of plasma excited on the surface of the sample is small due to the short laser nick, and the fluctuation of the detection result is large for the sample with uneven surface, so that the repeatability and stability of the detection result are greatly influenced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: a method of detecting a constituent and its concentration in an object is provided that can achieve a score of a set depth and length.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows: a method for detecting components and concentrations thereof in an object, the method using a laser induced breakdown spectrometer for non-contact, non-destructive detection of the object, the laser induced breakdown spectrometer comprising: the laser spectrometer comprises a shell 109, and a laser 101, a spectrometer 103, a focusing lens 104 and a coupling lens 105 which are arranged in the shell 109, wherein the shell 109 is further provided with a sample stage 106 matched with the focal length of the focusing lens 104, and a rotary driving device 2 for driving the sample stage 106 to do horizontal circular motion or a translation driving device for driving the sample stage 106 to do linear motion along the direction vertical to the laser irradiation direction, the sample stage 106 is positioned above the focusing lens 104, the sample stage 106 is provided with a laser irradiation hole, and the shell 109 and the rotary driving device 2 are provided with a laser irradiation through hole corresponding to the laser irradiation hole on the sample stage 106; the method for detecting the components and the concentration thereof in the object comprises the following specific steps:
1) Placing a sample 108 to be tested on the sample stage 106;
2) During detection, the rotary driving device 2 drives the sample stage 106 to do uniform-speed circular motion or the translation driving device drives the sample stage 106 to do uniform-speed translation motion; at the moment, laser generated by a laser 101 is focused by a focusing lens 104 and then passes through a laser irradiation hole on a sample stage 106 from bottom to top to irradiate a sample 108 to be detected; the surface to be measured of the sample 108 to be measured generates plasma sparks under the irradiation of laser, plasma spark signals are coupled into the fiber spectrometer 103 through the signal coupling lens 105, and the components contained in the object and the concentration thereof can be obtained by analyzing the plasma spark signals received by the fiber spectrometer 103.
Preferably, in the method for detecting the components and the concentration thereof in the object, the laser 101 is a pulsed laser with a wavelength of 0.5 to 1.55um, and the energy of the laser 101 is more than 50uJ.
Preferably, in the method for detecting the components and the concentration thereof in the object, the spectrometer 103 is a fiber optic spectrometer.
Preferably, in the method for detecting the components and the concentration thereof in the object, the wavelength of the spectrometer 103 is in a range from 180nm to 900 nm.
As a preferable mode, in the method for detecting a component in an object and a concentration thereof, the specific structure of the rotation driving device 2 includes: an adapter plate 204 arranged on the shell 109, wherein a rotary gear 208 is movably arranged on the adapter plate 204 through a rotary bearing 202, the sample stage 106 is arranged on the rotary gear 208, a rotary driving motor 206 is also arranged on the shell 109, and a rotary driving gear 205 meshed with the rotary gear 208 is arranged on a driving shaft of the rotary driving motor 206; the laser irradiation via hole on the rotary drive device 2 includes: laser irradiation via holes formed in the adapter plate 204, the slewing bearing 202, and the slewing gear 208.
In the method for detecting a component and a concentration thereof in an object, the rotary drive device 2 preferably has a worm gear and screw structure.
As a preferable mode, in the method for detecting a component in an object and a concentration thereof, the translation driving device is a single-tooth type translation driving device 4, and the structure thereof includes: the sample stage comprises a sliding block 406 arranged on one side of the sample stage 106, a sliding seat 405 arranged on the shell 109 and a single rack 402 arranged on the other side of the sample stage 106, wherein a sliding groove matched with the sliding block 406 is formed in the sliding seat 405, the sliding block 406 is arranged in the sliding groove in the sliding seat 405 in a sliding manner, a translation driving motor 404 is arranged on the shell 109, and a translation driving gear 403 meshed with the single rack 402 is arranged on a driving shaft of the translation driving motor 404.
As a preferable mode, in the method for detecting a component in an object and a concentration thereof, the translation driving device is a double-tooth translation driving device 5, and the structure thereof includes: the sample rack comprises a sliding block 504 arranged on one side of the sample platform 106, a sliding seat 505 arranged on the housing 109, and a double rack 502 arranged on the other side of the sample platform 106, wherein a transmission arrangement hole 5021 is formed in the double rack 502, and a pair of oppositely arranged groove walls corresponding to the transmission arrangement hole 5021 of the double rack 502 are respectively provided with a transmission gear 5022; the sliding seat 505 is provided with a sliding groove matched with the sliding block 504, the sliding block 504 is slidably arranged in the sliding groove on the sliding seat 505, the housing 109 is provided with a translation driving motor 506, a driving shaft of the translation driving motor 506 is provided with a translation driving turntable 503, and the translation driving turntable 503 is partially provided with a plurality of transmission columns 5031 matched with the transmission teeth 5022 along the circumferential direction.
As a preferable scheme, in the method for detecting the components and the concentration thereof in the object, a protective enclosure is arranged on the housing 109, and the protective enclosure encloses the rotary driving device 2 or the translation driving device or the related components of the rotary driving device 2 or the translation driving device.
The invention has the beneficial effects that: the method for detecting the components and the concentration thereof in the object provided by the invention has the advantages that the sample is continuously moved at a uniform speed while the sample is irradiated by the laser, and the depth of the nick can be controlled by controlling the moving speed, so that the nick with set depth and length can be obtained according to actual needs, and the repeatability and the stability of a detection result are greatly improved. In addition, because the laser irradiates the sample from the laser irradiation via hole of the shell and the laser irradiation hole on the sample platform, the influence of the surrounding environment on the laser beam is avoided, and the repeatability and the stability of the detection result are further improved; in addition, the protective fence arranged on the shell shields the laser beam, and the repeatability and the stability of a detection result are further improved.
Drawings
FIG. 1 is a schematic diagram of the principle structure of the laser induced breakdown spectrometer of the present invention.
Fig. 2 is an exploded view of a rotary drive device according to the present invention.
Fig. 3 is a schematic perspective view of the laser induced breakdown spectrometer according to the present invention.
Fig. 4 is a partial structural schematic view of another rotary drive device according to the present invention.
Fig. 5 is a schematic structural view of the single-tooth type translation driving device according to the present invention.
Fig. 6 is a schematic perspective view of the single-tooth type translation driving device according to the present invention.
Fig. 7 is a schematic structural view of the double-tooth type translation driving device of the present invention.
Fig. 8 is a schematic perspective view of the double-tooth type translational driving device of the present invention.
Fig. 9 is a partial structural view of the single-tooth type translation driving device according to the present invention.
The reference numerals in fig. 1 to 9 are: 101. the laser device comprises a laser 1011, a laser beam 102, a microprocessor 103, a spectrometer 104, a focusing lens 105, a coupling lens 106, a sample stage 108, a sample to be measured 109, a shell 1091, a top plate 202, a rotary bearing 204, an adapter plate 205, a rotary driving gear 206, a rotary driving motor 208, a rotary gear 209, a protective enclosure 301, a worm gear 302, a worm, 4, a single-tooth type translation driving device 402, a single-tooth bar 403, a translation driving gear 404, a translation driving motor 405, a sliding seat 406, a sliding block, 5, a double-tooth type translation driving device 502, a double-tooth bar 5021, a transmission setting hole 5022, a transmission tooth 503, a translation driving turntable 5031, a transmission column 504, a sliding block 505, a sliding seat 506 and a translation driving motor.
Detailed Description
The following describes an embodiment of the method for detecting a component and its concentration in an object according to the present invention in detail with reference to specific examples.
Example 1:
the method for detecting the components and the concentration thereof in the object adopts a laser-induced breakdown spectrometer to carry out non-contact nondestructive detection on the object, as shown in figure 1, the laser-induced breakdown spectrometer comprises: as shown in fig. 2 and 3, the housing 109 is further provided with a sample stage 106 matched with a focal length of the focusing lens 104, and a rotary driving device 2 for driving the sample stage 106 to perform horizontal circular motion, the sample stage 106 is located above the focusing lens 104, the sample stage 106 is provided with a laser irradiation hole, and the rotary driving device 2 comprises: an adapter plate 204 arranged on the top plate 1091 of the housing 109, a rotary gear 208 movably arranged on the adapter plate 204 through a rotary bearing 202, the sample stage 106 arranged on the rotary gear 208, a rotary driving motor 206 arranged on the housing 109, and a rotary driving gear 205 engaged with the rotary gear 208 and arranged on the driving shaft of the rotary driving motor 206; the top plate 1091, the adapter plate 204, the bearing 202 for rotation and the rotation gear 208 of the housing 109 are provided with laser irradiation via holes matched with the laser irradiation holes on the sample table 106, and the method for detecting the components and the concentration thereof in the object comprises the following specific steps:
1) Placing a sample 108 to be tested on the sample stage 106;
2) During detection, the rotary driving motor 206 drives the sample table 106 to do uniform-speed circular motion according to a set speed; at this time, the laser 101 generates laser, and the laser beam 1011 focused by the focusing lens 104 passes through the laser irradiation hole on the sample stage 106 from bottom to top to irradiate the sample 108 to be measured; the measured surface of the sample 108 to be measured generates plasma sparks under the irradiation of laser, plasma spark signals are coupled into the fiber spectrometer 103 through the signal coupling lens 105, and then the micro processor 102 can obtain the components and the concentrations thereof contained in the object by analyzing the plasma spark signals received by the fiber spectrometer 103 (which belongs to the conventional technology in the field and will not be described herein).
Example 2:
the same applies except for the rotary drive 2. As shown in fig. 4, the rotation driving device 2 in the present embodiment employs a worm gear structure, that is: a worm gear 301 and a worm 302 matched with the worm gear are used for driving the sample table 106 to rotate (which belongs to the conventional technology in the field and is not described herein). The method of detecting the components and their concentrations in the object is the same as in example 1.
Example 3:
in this embodiment, a single-tooth type translation driving device 4 is adopted to drive the sample stage 106, as shown in fig. 5 and 6, the single-tooth type translation driving device 4 includes: the sample platform comprises a sliding block 406 arranged on one side of the sample platform 106, a sliding seat 405 arranged on a top plate 1091 of the shell 109, and a single rack 402 arranged on the other side of the sample platform 106, wherein a sliding groove matched with the sliding block 406 is formed in the sliding seat 405, the sliding block 406 is arranged in the sliding groove in the sliding seat 405 in a sliding manner, a translation driving motor 404 is arranged on the top plate 1091 of the shell 109, and a translation driving gear 403 meshed with the single rack 402 is arranged on a driving shaft of the translation driving motor 404.
The method for detecting the components and the concentration thereof in the object comprises the following specific steps:
1) Placing a sample 108 to be tested on the sample stage 106;
2) During detection, the translation driving motor 404 drives the sample stage 106 to make uniform-speed linear motion according to a set speed; at this time, the laser 101 generates laser, and the laser beam 1011 focused by the focusing lens 104 passes through the laser irradiation hole on the sample stage 106 from bottom to top to irradiate the sample 108 to be measured; the measured surface of the sample 108 to be measured generates plasma sparks under the irradiation of laser, plasma spark signals are coupled into the fiber spectrometer 103 through the signal coupling lens 105, and then the micro processor 102 can obtain the components and the concentrations thereof contained in the object by analyzing the plasma spark signals received by the fiber spectrometer 103 (which belongs to the conventional technology in the field and will not be described herein).
Example 4:
in the present embodiment, a double-tooth translational drive device 5 is adopted to drive the sample stage 106, as shown in fig. 7 to 9, the double-tooth translational drive device 5 includes: the sample rack comprises a sliding block 504 arranged on one side of the sample platform 106, a sliding seat 505 arranged on the housing 109, and a double rack 502 arranged on the other side of the sample platform 106, wherein a transmission arrangement hole 5021 is formed in the double rack 502, and a pair of oppositely arranged groove walls corresponding to the transmission arrangement hole 5021 of the double rack 502 are respectively provided with a transmission gear 5022; the sliding seat 505 is provided with a sliding slot matched with the sliding block 504, the sliding block 504 is slidably arranged in the sliding slot on the sliding seat 505, the top plate 1091 of the housing 109 is provided with a translation driving motor 506, a translation driving turntable 503 is arranged on a driving shaft of the translation driving motor 506, and a plurality of transmission columns 5031 matched with the transmission teeth 5022 are locally arranged on the translation driving turntable 503 along the circumferential direction. The method for detecting the components and the concentration thereof in the object according to the present invention is the same as that in embodiment 3, and will not be described herein again.
In practical application, the laser 101 is a pulse laser with a wave band of 0.5-1.55 um, and the energy of the laser 101 is more than 50uJ; the spectrometer 103 is a fiber optic spectrometer having a wavelength in the range of 180nm to 900 nm. As shown in fig. 2, a top plate 1091 of the housing 109 is provided with a guard fence 209, and the guard fence 209 encloses the rotary driving device 2 or related components therein; of course, the top plate 1091 of the housing 109 may also be provided with shielding enclosures corresponding to the single-tooth and dual-tooth translational drives 4 and 5, respectively, and enclosing the single-tooth and dual-tooth translational drives 4 and 5 or related components therein.
In summary, the present invention is only a preferred embodiment, and not intended to limit the scope of the invention, and all equivalent changes and modifications made in the shape, structure, characteristics and spirit of the present invention described in the claims should be included in the scope of the present invention.
Claims (9)
1. A method for detecting components and concentrations thereof in an object, the method using a laser induced breakdown spectrometer for non-contact, non-destructive detection of the object, the laser induced breakdown spectrometer comprising: the device comprises a shell (109), a laser (101), a spectrometer (103), a focusing lens (104) and a coupling lens (105) which are arranged in the shell (109), wherein a sample stage (106) matched with the focal length of the focusing lens (104) and a rotary driving device (2) for driving the sample stage (106) to do horizontal circular motion or a translation driving device for driving the sample stage (106) to do linear motion along the direction vertical to the laser irradiation direction are also arranged on the shell (109), the sample stage (106) is positioned above the focusing lens (104), a laser irradiation hole is formed in the sample stage (106), and laser irradiation through holes corresponding to the laser irradiation hole in the sample stage (106) are formed in the shell (109) and the rotary driving device (2); the method for detecting the components and the concentration of the components in the object comprises the following specific steps:
1) Placing a sample (108) to be tested on a sample stage (106);
2) During detection, the rotary driving device (2) drives the sample stage (106) to do uniform-speed circular motion or the translation driving device (3) drives the sample stage (106) to do uniform-speed translation motion; at the moment, laser is generated by a laser (101), and the laser passes through a laser irradiation hole on a sample stage (106) from bottom to top after being focused by a focusing lens (104) to irradiate a sample (108) to be detected; the measured surface of a sample (108) to be measured generates plasma sparks under the irradiation of laser, plasma spark signals are coupled into the fiber spectrometer (103) through the signal coupling lens (105), and components contained in an object and the concentration thereof can be obtained by analyzing the plasma spark signals received by the fiber spectrometer (103).
2. A method of detecting a component and its concentration in an object according to claim 1, characterized in that the laser (101) is a pulsed laser in the 0.5 to 1.55um band, the laser (101) energy being more than 50uJ.
3. A method of detecting a component and its concentration in an object as claimed in claim 1, characterized in that the spectrometer (103) is a fiber optic spectrometer.
4. A method of detecting a component and its concentration in an object as claimed in claim 1, characterized in that the wavelength range of the spectrometer (103) is between 180nm and 900 nm.
5. A method for detecting a component and its concentration in an object according to claim 1, wherein said rotary drive means (2) comprises: the sample platform is characterized by comprising an adapter plate (204) arranged on the shell (109), wherein a rotary gear (208) is movably arranged on the adapter plate (204) through a rotary bearing (202), the sample platform (106) is arranged on the rotary gear (208), a rotary driving motor (206) is further arranged on the shell (109), and a rotary driving gear (205) meshed with the rotary gear (208) is arranged on a driving shaft of the rotary driving motor (206); the laser irradiation via hole on the rotary drive device (2) comprises: laser irradiation via holes are formed in the adapter plate (204), the slewing bearing (202), and the slewing gear (208).
6. A method for detecting a component and its concentration in an object as claimed in claim 1, characterized in that the rotary drive (2) is of worm-and-screw construction.
7. A method for detecting a component and its concentration in an object according to claim 1, wherein said translation drive means is a single-tooth type translation drive means (4) configured to include: the sample platform comprises a sliding block (406) arranged on one side of the sample platform (106), a sliding seat (405) arranged on the shell (109) and a single rack (402) arranged on the other side of the sample platform (106), wherein a sliding groove matched with the sliding block (406) is formed in the sliding seat (405), the sliding block (406) is arranged in the sliding groove in the sliding seat (405) in a sliding mode, a translation driving motor (404) is arranged on the shell (109), and a translation driving gear (403) meshed with the single rack (402) is arranged on a driving shaft of the translation driving motor (404).
8. A method for detecting a component and its concentration in an object as claimed in claim 1, wherein said translatory drive is a double-toothed translatory drive (5) configured to: the device comprises a sliding block (504) arranged on one side of the sample platform (106), a sliding seat (505) arranged on the shell (109) and a double rack (502) arranged on the other side of the sample platform (106), wherein a transmission arrangement hole (5021) is formed in the double rack (502), and transmission teeth (5022) are respectively arranged on a pair of corresponding oppositely-arranged groove walls of the transmission arrangement hole (5021) of the double rack (502); the sliding seat (505) is provided with a sliding groove matched with the sliding block (504), the sliding block (504) is arranged in the sliding groove on the sliding seat (505) in a sliding mode, the shell (109) is provided with a translation driving motor (506), a translation driving turntable (503) is arranged on a driving shaft of the translation driving motor (506), and a plurality of transmission columns (5031) matched with the transmission teeth (5022) are locally arranged on the translation driving turntable (503) along the circumferential direction.
9. A method for detecting a component and its concentration in an object according to any one of claims 1 to 8, characterized in that a shielding enclosure is provided on the housing (109) enclosing the rotary drive means (2) or the translational drive means or the relevant parts of the rotary drive means (2) or the translational drive means.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210942852.7A CN115389487A (en) | 2022-08-08 | 2022-08-08 | Method for detecting components and concentration thereof in object |
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| CN202210942852.7A CN115389487A (en) | 2022-08-08 | 2022-08-08 | Method for detecting components and concentration thereof in object |
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| CN104374763A (en) * | 2014-11-17 | 2015-02-25 | 浙江大学 | Adjustable reheating double pulse laser-induced breakdown spectroscopy device |
| KR20150051579A (en) * | 2013-11-04 | 2015-05-13 | 주식회사 녹색기술연구소 | Laser induced plazma spectroscopic analyzer |
| CN109187501A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil laser differential confocal LIBS spectrum micro imaging method and device |
| CN109682794A (en) * | 2019-02-22 | 2019-04-26 | 中国科学技术大学 | A kind of the transformation time measuring system and method for energetic material |
| CN110196245A (en) * | 2018-02-26 | 2019-09-03 | 成都艾立本科技有限公司 | A kind of laser induced breakdown spectroscopy detection system |
| CN112557375A (en) * | 2020-11-12 | 2021-03-26 | 华南师范大学 | Inverted laser-induced breakdown spectroscopy device |
| CN216284940U (en) * | 2021-11-04 | 2022-04-12 | 华南师范大学 | Scanning device for laser-induced breakdown spectroscopy |
-
2022
- 2022-08-08 CN CN202210942852.7A patent/CN115389487A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150051579A (en) * | 2013-11-04 | 2015-05-13 | 주식회사 녹색기술연구소 | Laser induced plazma spectroscopic analyzer |
| CN104374763A (en) * | 2014-11-17 | 2015-02-25 | 浙江大学 | Adjustable reheating double pulse laser-induced breakdown spectroscopy device |
| CN110196245A (en) * | 2018-02-26 | 2019-09-03 | 成都艾立本科技有限公司 | A kind of laser induced breakdown spectroscopy detection system |
| CN109187501A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil laser differential confocal LIBS spectrum micro imaging method and device |
| CN109682794A (en) * | 2019-02-22 | 2019-04-26 | 中国科学技术大学 | A kind of the transformation time measuring system and method for energetic material |
| CN112557375A (en) * | 2020-11-12 | 2021-03-26 | 华南师范大学 | Inverted laser-induced breakdown spectroscopy device |
| CN216284940U (en) * | 2021-11-04 | 2022-04-12 | 华南师范大学 | Scanning device for laser-induced breakdown spectroscopy |
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Application publication date: 20221125 |