CN204214778U - A kind of multi-mode laser induced breakdown spectroscopy device - Google Patents
A kind of multi-mode laser induced breakdown spectroscopy device Download PDFInfo
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Abstract
The utility model discloses a kind of multi-mode laser induced breakdown spectroscopy device, there is conllinear, heat again, pre-ablation three kinds of mode of operations; In conllinear mode of operation: the light path of Double-impulse solid laser is provided with light path and climbs system, for raising the light path of the coaxial Output of laser of 1064nm/532nm, making laser focus on sample surfaces by directly over sample stage, producing plasma; Again in heating and pre-ablation mode of operation: the first laser of Double-impulse solid laser enters light path and to climb system, for raising the light path of the first laser, makes the first laser focus on sample surfaces by directly over sample stage, generation plasma; Delay time generator controls the activation schedule of the first laser and the second laser; Second laser of Double-impulse solid laser directly focuses to plasma; Also comprise signal acquisition and processing system, cool the spatial information of characteristic spectral line and the first laser impact sample sent according to plasma, display element is in the distributed intelligence of sample surfaces.
Description
Technical field
The utility model relates to laser spectrum tech field, particularly a kind of multi-mode laser induced breakdown spectroscopy device.
Background technology
LIBS is the abbreviation of Laser-Induced Breakdown Spectroscopy (laser induced breakdown spectrograph), the plasma ablation that this technology utilizes pulse laser to produce material in excited sample (being generally solid), and obtain by spectrometer the spectrum that Plasma-Atomic launches that is excited, identify the element constituent in sample with this, and then the identification of material, classification, qualitative and quantitative test can be carried out.This technology, without the need to carrying out pre-service to sample, can realize long-range, micro-damage fast and detect sample element (especially metallic element), can be used for the detection of solid, gas, fluid sample.The application of Laser-induced Breakdown Spectroscopy is also very extensive, as heavy metal analysis and explosive detection etc. in biomedicine, archaeology, environmental monitoring, water.
Compared with single-pulse laser induced breakdown spectroscopy, double-pulse laser induced breakdown spectrum can strengthen signal greatly, improves the detection limit of element.The mode of operation of double-pulse laser induced breakdown spectrum can be divided into conllinear formula and rectilinear.Rectilinearly can be divided into again pre-Investigation of Ablation Mode (pre-ablative) and heating mode (re-heating) again.These three kinds of each have their own advantages of mode.But, there is no three kinds of mode of operations that Patents realizes Laser-induced Breakdown Spectroscopy on same device both at home and abroad.
In general, the realization of these three kinds of mode of operations needs two cover systems.As patented claim CN101620183B and patented claim CN102788772B achieves conllinear and non-colinear mode of operation with dual pulse welding and two laser instruments respectively.Have patent utilization light path to realize a certain working method with a laser instrument, but its effect does not all reach the request for utilization of LIBS technology yet.The induced with laser spectrum detection system that dipulse as patented claim CN103323435A defocuses pre-ablation utilizes 2 tunnel light paths to achieve LIBS conllinear dipulse mode of operation, but the sequential of its beam of laser and the second bundle laser is uncontrollable, cannot obtain best spectral line.And although the Laser-induced Breakdown Spectroscopy measurement mechanism described in patented claim CN103529000A utilizes single laser instrument 2 tunnel light path to realize vertical operation pattern, but utilize the control time of optical shutter to be generally Millisecond, the control overflow of LIBS Microsecond grade cannot be realized.
Utility model content
For realizing realizing the integrated of Laser-induced Breakdown Spectroscopy three kinds of mode of operations on same device, the utility model discloses a kind of multi-mode laser induced breakdown spectroscopy device, reducing system building cost, have and regulate simply, the advantages such as adjustable parameter is many.
Concrete technical scheme of the present utility model is as follows:
A kind of multi-mode laser induced breakdown spectroscopy device, is characterized in that, comprising Double-impulse solid laser, sample stage and the delay time generator for controlling Double-impulse solid laser activation schedule; Double-impulse solid laser has that 1064nm coaxially exports, 532nm coaxially exports, the different axle of 1064nm exports and the different axle of 1064nm, 532nm exports four kinds of way of outputs;
Described multi-mode laser induced breakdown spectroscopy device has conllinear, heats, pre-ablation three kinds of mode of operations;
In described conllinear mode of operation: the light path of described Double-impulse solid laser is provided with light path and climbs system, this light path climbs system for raising the light path of the coaxial Output of laser of 1064nm/532nm, make laser focus on sample surfaces by directly over sample stage, produce plasma;
In described heating again and pre-ablation mode of operation: the first laser of described Double-impulse solid laser enters described light path and to climb system, this light path climbs system for raising the light path of the first laser, make the first laser focus on sample surfaces by directly over sample stage, produce plasma; Described delay time generator controls the activation schedule of the first laser and the second laser; Second laser of described Double-impulse solid laser directly focuses to plasma;
Also comprise signal acquisition and processing system, cool the spatial information of characteristic spectral line and the first laser impact sample sent according to plasma, display element is in the distributed intelligence of sample surfaces.
The utility model adopts a kind of Double-impulse solid laser (Lei Bao company, Vlite200) and building of subsequent optical path system to achieve Laser-induced Breakdown Spectroscopy 3 kinds of mode of operations, and the switching of multiple operation wavelength.There is pre-ablation, again heating and conllinear Three models mode, wherein line mode has 2 operation wavelengths (532nm and 1064nm), pre-ablation and heating again also has 2 operation wavelengths (2 roads are 1064nm, and a road 1064nm, another road 532nm).
The optical axis of described Double-impulse solid laser is also furnished with energy attenuator and the laser energy real-time monitoring system for real-time detection record laser energy; The first described laser through the outgoing of laser energy real-time monitoring system laggard enter light path to climb system; The second described laser focuses to plasma after the outgoing of laser energy real-time monitoring system.Laser energy real-time detecting system is mainly used in the energy of real-time detection record laser, for subsequent data analysis.
When applying Laser-induced Breakdown Spectroscopy and detecting, sample properties to be detected is different, and the laser energy needed for it is also different.For realizing the detection of sample as fragile in plant leaf blade, animal tissue etc. or reducing laser to the damage of sample, usually need to decay to the energy of laser.But, by regulating laser diode voltage, decay is carried out to energy and laser energy can be caused unstable, and then affect testing result.The utility model adopts energy attenuator to decay to laser energy, and its attenuation range is 1% ~ 99%.Laser energy real-time detecting system is mainly used in the energy of real-time detection record laser, for judging whether the fluctuation of energy of lasers occurs exception, and carries out subsequent data analysis.When follow-up carry out data analysis time, can according to energy variation, the line strength obtained is compensated.
Wherein, described signal acquisition and processing system comprises: optical fiber collection system, cools for collecting plasma the characteristic spectral line sent; Beam splitting system, for carrying out light splitting to characteristic spectral line; ICCD detector, for being converted to electric signal by the light signal of beam splitting system; Sample surface imaging system, for monitoring the first laser impact sample position, obtains the spatial information of sampled point; Computing machine, according to the spatial information of described electric signal and sampled point, display element is in the distributed intelligence of sample surfaces.
Preferably, described beam splitting system is echelle spectrometer.
Echelle spectrometer is the spectrometer using echelle grating as dispersion element, disposablely can obtain full modal data without the need to raster scanning, can avoid conventional spectrograph hyperchannel head and the tail section Bonding Problem.Echelle spectrometer inner inorganic tool part, stability is higher, and resolution can reach 0.08nm, can meet spectral line light splitting requirement.
Wherein, described sample surface imaging system comprises: for the LED light source for illuminating from positive dirction illuminated sample, is positioned at the beam splitter on LED light source for illuminating optical axis, CCD camera and imaging lens, for gathering the sample surfaces image information of beam splitter reflection.
Preferably, described light path system of climbing is made up of the first catoptron, the second catoptron and the 3rd catoptron, and described second catoptron is positioned at directly over the first catoptron, and the 3rd catoptron is positioned at directly over sample stage; The first described catoptron, the second catoptron and the 3rd catoptron are Nd:YAG double-frequency laser catoptron.
The light path system of climbing is mainly used in lifting light path, and will in the horizontal direction laser conversion for vertically to propagate.The application light path system of climbing effectively can be avoided raising laser positions and cause the laser factors of instability.Laser impacts sample surfaces directly over sample, is conducive to effectively exciting of plasma, ensures that plasma uniformity is symmetrical.
Described delay time generator controls Double-impulse solid laser and adjusts Q triggered time and xenon lamp to open the triggered time, and delay time generator arranges Double-impulse solid laser and adjusts the triggered time of Q signal 150 ± 20 μ s after xenon lamp signal triggers.This sequential the energy stability that at utmost can ensure Double-impulse solid laser is set.
Preferably, described first laser and the second Laser Focusing lens are arranged on the Lens mounting carrier that is slidably matched along optical axis; The first described laser optical path focusing lens surface plating V-arrangement film, it is less than 0.25% at the reflectivity at 532nm, 1064nm place.
The distance of lens and sample is the important parameter of Laser-induced Breakdown Spectroscopy, directly affects the laser parameter of laser at object to be excited.As a rule, the distance of lens and sample should be less than the focal length of lens.When lens and sample distance reduce, the diameter of impact point will increase, and radiancy and flux-time all can reduce.Therefore, lens being arranged on the Lens mounting carrier that is slidably matched along optical axis can according to the distance of sample properties and actual demand fine adjustment lens and sample.Optical maser wavelength due to Double-impulse solid laser is 532nm and 1064nm, for reducing the loss of laser energy at light path system, ensure the effective rate of utilization of laser energy, described lens surface plating V-arrangement film, it is less than 0.25% at the reflectivity at 532nm, 1064nm place.Described lens plating V-arrangement film can, effectively for the wavelength of selected Double-impulse solid laser, make it be less than 0.25% at the reflectivity at 532nm, 1064nm place.
As improvement, described sample stage comprises the electric displacement platform with four-degree-of-freedom, the objective table being movably arranged on the lifter plate on electric displacement platform and being slidably fitted on electric displacement platform; Described lifter plate is provided with transparent constraint window, impacts sample after laser light constraint window; The below of described lifter plate is provided with restraining plate, and this restraining plate is placed in directly over sample, and restraining plate is distributed with constraint chamber, this constraint chamber is for retraining the plasma of sample excitation.
Sample stage, by space constraint enhanced line intensity, can laterally and longitudinally retrain by plasma, and regulates constraint space size adjustment line strength according to different sample requirement, and it is 2 ~ 10 times that line strength strengthens scope.Constraint window is mainly used in plasma and longitudinally retrains, and has good transmissivity to the characteristic spectral line of incident laser and plasma generation.The transverse direction that restraining plate is mainly used in plasma retrains, and makes characteristic spectral line carry out constraint propagation, improves spectral line collection efficiency and line strength.
Preferably, described lifter plate is provided with printing opacity mouth, and this printing opacity mouth place is coated with light-passing board, the constraint window described in described printing opacity mouth and light-passing board form.
Wherein, light-passing board is poly (methyl methacrylate) plate, and the selection of material is N-BK7, and thickness is 1 ~ 5mm, and transmitance is greater than 90%, and energy threshold is greater than 10J/cm
2.Line enhancement effect suffers restraints the impact of window from sample distance.Because properties of samples is different with the element spectral line intensity that will detect, constraint window of the present utility model can move in the vertical direction, regulates line strength as required.For ensureing that laser effectively excites the effective collection with characteristic spectral line, the transmitance of light-passing board to optical maser wavelength and characteristic spectral line should be greater than 90%.Meanwhile, for preventing laser from causing damage to poly (methyl methacrylate) plate, its energy threshold should be greater than 10J/cm
2.
Restraining plate is the aluminium sheet of chromium plating, and thickness is 1 ~ 3mm.In the constraint chamber of aluminium sheet, carry out chromium plating, make inner chamber have higher reflectivity, make characteristic spectral line constraint propagation, improve spectral line collection efficiency.
The Double-impulse solid laser that the utility model adopts, its energy hole is realized by energy attenuator, avoids utilizing voltage directly to regulate and causes energy of lasers unstable.Application of samples platform and laser work parameter can be regulated along the Lens mounting carrier of optical axis direction movement.First mode of operation is conllinear mode of operation, and delay time generator controlled the first Laser emission sequential before the second Laser emission, only needs the displacement of Quality control platform Z-direction to regulate the spot size of Laser Focusing point.Second mode of operation is heating work pattern again, delay time generator controlled the first Laser emission sequential before the second Laser emission, Quality control platform, regulate Z-direction displacement height, make the second laser (1064nm) light-emitting window higher than 1 ± 0.5mm above plasma confinement plate, regulate first, second lens combination erecting frame to control the spot size of Laser Focusing point.3rd mode of operation is pre-ablation mode of operation, delay time generator controls the first Laser emission sequential after the second Laser emission, Quality control platform, regulate Z-direction displacement height, make the second laser (1064nm) light-emitting window higher than 1 ± 0.5mm above plasma confinement plate, regulate first, second lens combination erecting frame to control the spot size of Laser Focusing point.Because the shape of sample and characteristic there are differences, sample stage adopts 4DOF (X, Y, Z and W) sample stage, comprises 3 single-degree-of-freedom (X, Y and Z) pulse electric displacement platforms and rotary freedom (W) electric rotary table.When sample is spherical (as apple, pear and other fruits), select whole degree of freedom; When sample surfaces is regular planar, XYZ Three Degree Of Freedom is selected to meet the demands.
The beneficial effect that the utility model has is:
(1) achieve three kinds of mode of operations of double-pulse laser induced breakdown spectrum, detect sample elements content for selecting optimum working mode and provide condition.
(2) achieve the Real-Time Monitoring to laser energy, be conducive to the repeatability improving detection technique.
(3) according to different samples, distance and the laser energy of lens and object can be regulated, obtain best signal to noise ratio (S/N ratio).
(4) sample stage is by space constraint enhanced line intensity, can laterally and longitudinally retrain by plasma, improve spectral line collection efficiency and line strength, can avoid exciting particle again to cover sample surfaces, and smooth sample surfaces (special in out-of-flatness samples such as fresh blades), make sample remain unchanged to the distance of condenser lens thus improve detection repeatability.
Accompanying drawing explanation
Fig. 1 is the structural drawing of multi-mode laser induced breakdown spectroscopy device;
Fig. 2 is the structural drawing of sample stage;
Fig. 3 is the vertical view of sample stage in Fig. 2;
Fig. 4 is the schematic diagram that on sample stage, sample is impacted;
Fig. 5 is unconfined plasma figure;
Fig. 6 is the constraints graph with constraint window and constraint chamber plasma.
Embodiment
As shown in Figure 1, the multi-mode laser induced breakdown spectroscopy device in the utility model comprises: Double-impulse solid laser 1, delay time generator 2, energy attenuator 3, laser energy real-time monitoring system 4, light path is climbed system 5, ICCD detector 6, beam splitting system 7, second condenser lens 8, sample stage 9, the first condenser lens 10, optical fiber collection system 11, sample surface imaging system 12.
Double-impulse solid laser 1 has 4 kinds of mode of operations: (1) 1064nm coaxially exports, and (2) 532nm coaxially exports, and the different axle of (3) 1064nm exports, and the different axle of (4) 1064nm, 532nm exports.Double-impulse solid laser 1 can be realized by 2 monopulse 1064nm solid state lasers, frequency-doubling crystal and conjunction beam optical paths.
Delay time generator 2 controls the gate duration that Double-impulse solid laser 1 adjusts the Q triggered time, xenon lamp opens triggered time and ICCD detector 6.Delay time generator arranges Double-impulse solid laser and adjusts the triggered time of Q signal 150 ± 20 μ s after xenon lamp signal triggers, control opening time of detector be the second road laser Q-switching switch triggering time after 1.5 μ s (the control opening time of detector need be optimized according to signal to noise ratio (S/N ratio)).
Variable energy attenuator 2 is made up of 1/2 wave plate 31 and the first beam splitter 32.Laser energy Real-Time Monitoring feedback system is made up of thermoelectric pulse probe the 41, second beam splitter 42, USB connecting line, computing machine 13.The laser of monitoring separates the laser energy of 30% by 3:7 beam splitter, and being popped one's head in by thermoelectric pulse receives, and is connected to computing machine by USB connecting line, special software shows the energy of recording laser in real time, for subsequent data analysis.
Light path system 5 of climbing is made up of the first catoptron 52, second catoptron 51 and the 3rd catoptron 53.1 inch of double frequency Nd:YAG laser mirror selected by first catoptron 52, second catoptron 51 and the 3rd catoptron 53, and 532, the reflectivity at 1064nm place is more than 98%.
First condenser lens 10 and the second condenser lens 8 are installed on to be had in the Lens mounting carrier of degree of freedom along optical axis direction, for regulating the distance of sample and lens, thus controls impact to the laser parameter on sample.
Optical fiber collection system 11 is made up of light collector and optical fiber.Sample surface imaging system 12 comprises CCD camera 124, imaging lens 123, the 3rd beam splitter 122, LED light source for illuminating 121.
Beam splitting system 7 is echelle spectrometer.N-BK7 selected by first condenser lens 10 and the second condenser lens 8, plating V-arrangement film, its 532, the reflectivity at 1064nm place is less than 0.25%.
As shown in Figure 2, Figure 3 and Figure 4, sample stage 9 comprises gear rack elevating bar 901, gear slider 902, right angle card extender 903, plasma confinement window 904, cylindrical guide 905, plasma confinement plate 906, V-type slide block 907, combined electrical moving stage 909, pull bar 910, constraint chamber 911.Combined electrical moving stage 909 adopts four-degree-of-freedom (x, y, z, w) combined electrical moving stage, comprises three single-degree-of-freedoms (x, y and z) pulse electric displacement platform and rotary freedom (w) electric rotary table.Gear rack elevating bar 901 is vertically arranged in combined electrical moving stage 909, and gear slider 902 engages with gear rack elevating bar 901, can be lower mobile in the vertical direction.Right angle card extender 903 is secured by bolts on gear slider 902, and plane is provided with the printing opacity mouth of rectangle, and printing opacity mouth edge is provided with support level, is provided with light-passing board in printing opacity mouth, forms plasma confinement window 904.Cylindrical guide 905 is fixed on combined electrical moving stage 909, and plasma confinement plate 906 can slide up and down along cylindrical guide 905.Cylindrical guide 905 and gear rack elevating bar 901 all by bolt-connection in combined electrical moving stage 909.Combined electrical moving stage 909 has V-type groove, and V-type slide block 907 can horizontally slip along V-type groove under pull bar 910 acts on, and pull bar 910 is by being screwed in V-type slide block 907.Sample 908 is placed on V-type slide block 907 (being equivalent to objective table), laser impacts downwards from top, by plasma confinement window 904, and through plasma confinement plate 906, impact is to sample surfaces, activated plasma, cooling sends characteristic spectral line and is collected by optical fiber collection system 11.
The material of plasma confinement window 904 is N-BK7, and thickness is 1 ~ 5mm, and transmitance is greater than 90%, and energy threshold is greater than 10J/cm
2.Plasma confinement window 904 is mainly used in plasma and longitudinally retrains, and has good transmissivity to the characteristic spectral line of incident laser and plasma generation.N-BK7 is a kind of common optical glass, can through the light of 350nm ~ 2000nm wave band, and the transmissivity of its laser is greater than 90%, and energy threshold is greater than 10J/cm
2.Therefore plasma confinement window 904 the selection of material is N-BK7, and thickness is 1 ~ 3m.Plasma confinement window 904 vertically can move under gear slider 902 acts on.Line enhancement effect suffers restraints the impact of window from sample distance.Because properties of samples is different with the element spectral line intensity that will detect, plasma confinement window 904 of the present utility model can move in the vertical direction, regulates line strength as required.
In the present embodiment, the material of plasma confinement plate 906 is the aluminium sheet of chromium plating, and thickness is 1mm, and be evenly distributed with conical constraint chamber 911 in the middle of it, upper conical surface diameter and lower conical surface diameter are 2mm and 3mm respectively.With combined electrical moving stage 909, the spacing in constraint chamber 911 should plan that displacement is consistent.The transverse direction that plasma restraining plate 6 is mainly used in plasma retrains, and makes characteristic spectral line carry out constraint propagation, improves spectral line collection efficiency and line strength, and it is 2 ~ 10 times that line strength strengthens scope.In the constraint chamber 911 of aluminium sheet, carry out chromium plating, make inner chamber have higher reflectivity, make characteristic spectral line constraint propagation, improve spectral line collection efficiency.Constraint chamber adopts conical structure, and due to the structure that it is up-small and down-big, the structure compared with column type better can obtain plasma and retrain.In addition, when plasma is from taper shape constraint chamber injection, because its space constraint strengthens, its electron density and movement velocity all can be enhanced, therefore advantageously in the enhancing of spectral line signal.With combined electrical moving stage 909, the spacing in the constraint chamber of plasma confinement plate 906 of the present utility model plans that displacement is consistent, can be applicable to the working method of Laser-induced Breakdown Spectroscopy Surface scan.The utility model using plasma restraining plate 906 covers sample surfaces, is conducive to smooth sample surfaces and improves detection repeatability, avoid exciting other region to be measured of particle contamination simultaneously.When testing sample is the surface irregularity samples such as fresh blade, its region to be measured and lens distance there are differences, and then affect the laser parameter that laser arrives sample.The detection stability of Laser-induced Breakdown Spectroscopy and the laser parameter in region to be detected closely bound up, therefore smooth sample surfaces be conducive to fixed laser parameter improve detect repeatability.In addition, the up-small and down-big conical structure of plasma confinement plate 906 is conducive to farthest avoiding exciting particle contamination by a upper surveyed area, ensures that institute's detected object is the element in region to be detected.
V-type slide block 907 can move along V-type groove under pull bar 910 acts on, and adopts this V-type sliding block guide track structure, avoids raising the troublesome operation such as plasma confinement window mouth and plasma restraining plate.Connection between plasma confinement plate 906 and cylindrical guide 905 is stressed joint, and plasma confinement plate 906 can not freely glide under gravity.
For Laser-induced Breakdown Spectroscopy system heating work pattern again, during the work of this sample stage, it is corresponding with the position of top laser that control combination electric displacement platform 909 makes the pyramid type of plasma confinement plate 906 retrain chamber 911, and the work step-length arranging combined electrical moving stage 909 is conical constraint chamber neighbor distance or multiple.Beam of laser B is through light path system, and line focus lens are propagated downwards from top, through plasma confinement window 904, and through conical constraint chamber impact sample.Its laser transmittance of plasma confinement window 904 is greater than 90%, and energy threshold is greater than 10J/cm
2.Second bundle laser A vertically focuses on impact on the plasma inspired by condenser lens, enhanced line signal.Plasma cooling sends characteristic spectral line C and is collected by the optical fiber collection system 11 of top.The number of times of required impact can be selected in each position according to actual requirement, moved carry out multiple positions spectra collection after completing a position by combined electrical moving stage 909.As shown in Figure 5 and Figure 6, when without plasma confinement window 904 and plasma confinement plate 906, the plasma D inspired is free excited state; After limiting the plasma D excited, the density of plasma D increases, and plasma temperature raises, and enhances line strength of excited atom.
Double-impulse solid laser 1 sends pulse laser, through energy attenuator 3 damping capacity, through optical system, impact is on sample, and when energy density forms plasma higher than during the threshold value excited, plasma cooling sends the characteristic spectral line of different wave length, collect via optical fiber collection system 11, through beam splitting system 7, detected by ICCD detector 6, and on computing machine 13 Graphics Processing.This device can realize 3 kinds of mode of operations by regulation output laser and light path and different operating wavelength switches.The conllinear (collinear) that the mode of operation that dipulse LIBS tri-kinds is different refers to, pre-ablation (pre-ablative), to heat again (re-heating).
Mode of operation 1 (conllinear): Double-impulse solid laser 1 mode of operation is coaxial 532nm or coaxial 1064nm, conputer controlled delay time generator 2 gives Double-impulse solid laser 1 modulating signal and adjusts Q signal, and Double-impulse solid laser 1 is started working.Laser is successively through the light path of the first catoptron 52 (532nm/1064nm) and the second catoptron 51 (532nm/1064nm) improving laser; Regulate the reflector mount of the second catoptron 51 to make laser be positioned at above sample, change light path through the 3rd catoptron 53, propagate downwards.Laser focuses on sample surfaces via plating V film glass first condenser lens 10, and when laser energy density is higher than the threshold value excited, sample produces plasma, and plasma cools, atom generation transition, produces the characteristic spectral line characterizing element.Spectral line is collected by optical fiber collection system 11, via beam splitting system 7 (echelle spectrometer) light splitting, be converted into electric signal by ICCD detector 6, be connected in computing machine 13 by USB, carry out data statistics and analysis at computing machine 13, determine the content of certain material in sample.
Mode of operation 2 (heating again): Double-impulse solid laser 1 mode of operation is that different axle 532nm/1064nm, 1064nm export, conputer controlled delay time generator 2 awards Double-impulse solid laser 1 modulating signal and adjusts Q signal, and Double-impulse solid laser 1 is started working.First laser (532nm/1064nm) is successively through the light path of the first catoptron 52 (532nm/1064nm) and the second catoptron 51 (532nm/1064nm) improving laser; Regulate the reflector mount of the second catoptron 51 to make laser be positioned at above sample, change light path through the 3rd catoptron 53 (532nm/1064nm), propagate downwards.Laser focuses on sample surfaces via plating V film glass first condenser lens 10, and when laser energy density is higher than the threshold value excited, sample produces plasma.Quality control platform 9, regulates Z-direction displacement height, makes the second laser (1064nm) light-emitting window higher than plasma confinement plate 9061 ± 0.5mm.Second laser (1064nm) focuses on through plating V film glass plano-convex second condenser lens 8, focuses on the plasma signal that ejects, enhanced line signal.Spectral line is collected by optical fiber collection system 11, via beam splitting system 7 (echelle spectrometer) light splitting, be converted into electric signal by ICCD detector 6, be connected in computing machine 13 by USB, carry out data statistics and analysis at computing machine 13, determine the content of certain material in sample.
Mode of operation 3 (pre-ablation): Double-impulse solid laser 1 mode of operation is that different axle 532nm/1064nm, 1064nm export, conputer controlled delay time generator 2 awards Double-impulse solid laser 1 modulating signal and adjusts Q signal, and Double-impulse solid laser 1 is started working.Quality control platform 9, regulates Z-direction displacement height, makes the second laser (1064nm) light-emitting window higher than plasma confinement plate 9061 ± 0.5mm.Second laser (1064nm) focuses on through plating V film glass plano-convex second condenser lens 8, focuses on above sample, can lead to inert gas.First laser (532nm/1064nm) is successively through the light path of the first catoptron 52 (532nm/1064nm) and the second catoptron 51 (532nm/1064nm) improving laser; Regulate the reflector mount of the second catoptron 51 to make laser be positioned at above sample, change light path through the 3rd catoptron 53 (532nm/1064nm), propagate downwards.Laser focuses on sample surfaces via plating V film glass first condenser lens 10, and when laser energy density is higher than the threshold value excited, sample produces plasma.Spectral line optical fiber collection system 11 is collected, via beam splitting system 7 (echelle spectrometer) light splitting, be converted into electric signal by ICCD detector 6, be connected in computing machine 13 by USB, carry out data statistics and analysis at computing machine 13, determine the content of certain material in sample.
Inventive point of the present utility model only relates to light path design and apparatus structure, and after acquisition characteristics spectral line information, the existing technology of computer utility, can determine the content of certain material in sample, does not relate to the improvement in software and computing method.
Claims (10)
1. a multi-mode laser induced breakdown spectroscopy device, is characterized in that, comprises Double-impulse solid laser, sample stage and the delay time generator for controlling Double-impulse solid laser activation schedule; Double-impulse solid laser has that 1064nm coaxially exports, 532nm coaxially exports, the different axle of 1064nm exports and the different axle of 1064nm, 532nm exports four kinds of way of outputs;
Described multi-mode laser induced breakdown spectroscopy device has conllinear, heats, pre-ablation three kinds of mode of operations;
In described conllinear mode of operation: the light path of described Double-impulse solid laser is provided with light path and climbs system, this light path climbs system for raising the light path of the coaxial Output of laser of 1064nm/532nm, make laser focus on sample surfaces by directly over sample stage, produce plasma;
In described heating again and pre-ablation mode of operation: the first laser of described Double-impulse solid laser enters described light path and to climb system, this light path climbs system for raising the light path of the first laser, make the first laser focus on sample surfaces by directly over sample stage, produce plasma; Described delay time generator controls the activation schedule of the first laser and the second laser; Second laser of described Double-impulse solid laser directly focuses to plasma;
Also comprise signal acquisition and processing system, cool the spatial information of characteristic spectral line and the first laser impact sample sent according to plasma, display element is in the distributed intelligence of sample surfaces.
2. multi-mode laser induced breakdown spectroscopy device as claimed in claim 1, is characterized in that, the optical axis of described Double-impulse solid laser is also furnished with energy attenuator and the laser energy real-time monitoring system for real-time detection record laser energy;
The first described laser through the outgoing of laser energy real-time monitoring system laggard enter light path to climb system;
The second described laser focuses to plasma after the outgoing of laser energy real-time monitoring system.
3. multi-mode laser induced breakdown spectroscopy device as claimed in claim 1, it is characterized in that, described signal acquisition and processing system comprises:
Optical fiber collection system, cools for collecting plasma the characteristic spectral line sent;
Beam splitting system, for carrying out light splitting to characteristic spectral line;
ICCD detector, for being converted to electric signal by the light signal of beam splitting system;
Sample surface imaging system, for monitoring the first laser impact sample position, obtains the spatial information of sampled point;
Computing machine, according to the spatial information of described electric signal and sampled point, display element is in the distributed intelligence of sample surfaces.
4. multi-mode laser induced breakdown spectroscopy device as claimed in claim 3, it is characterized in that, described beam splitting system is echelle spectrometer.
5. multi-mode laser induced breakdown spectroscopy device as claimed in claim 4, it is characterized in that, described sample surface imaging system comprises:
For the LED light source for illuminating from positive dirction illuminated sample,
Be positioned at the beam splitter on LED light source for illuminating optical axis,
CCD camera and imaging lens, for gathering the sample surfaces image information of beam splitter reflection.
6. multi-mode laser induced breakdown spectroscopy device as claimed in claim 1, it is characterized in that, described light path system of climbing is made up of the first catoptron, the second catoptron and the 3rd catoptron, described second catoptron is positioned at directly over the first catoptron, and the 3rd catoptron is positioned at directly over sample stage;
The first described catoptron, the second catoptron and the 3rd catoptron are Nd:YAG double-frequency laser catoptron.
7. multi-mode laser induced breakdown spectroscopy device as claimed in claim 1, it is characterized in that, described delay time generator controls Double-impulse solid laser and adjusts Q triggered time and xenon lamp to open the triggered time, and delay time generator arranges Double-impulse solid laser and adjusts the triggered time of Q signal 150 ± 20 μ s after xenon lamp signal triggers.
8. multi-mode laser induced breakdown spectroscopy device as claimed in claim 1, is characterized in that, described first laser and the second Laser Focusing lens are arranged on the Lens mounting carrier that is slidably matched along optical axis; The first described laser optical path focusing lens surface plating V-arrangement film, it is less than 0.25% at the reflectivity at 532nm, 1064nm place.
9. multi-mode laser induced breakdown spectroscopy device as claimed in claim 1, it is characterized in that, described sample stage comprises the electric displacement platform with four-degree-of-freedom, the objective table being movably arranged on the lifter plate on electric displacement platform and being slidably fitted on electric displacement platform;
Described lifter plate is provided with transparent constraint window, impacts sample after laser light constraint window;
The below of described lifter plate is provided with restraining plate, and this restraining plate is placed in directly over sample, and restraining plate is distributed with constraint chamber, this constraint chamber is for retraining the plasma of sample excitation.
10. multi-mode laser induced breakdown spectroscopy device as claimed in claim 9, it is characterized in that, described lifter plate is provided with printing opacity mouth, and this printing opacity mouth place is coated with light-passing board, the constraint window described in described printing opacity mouth and light-passing board form.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104406942A (en) * | 2014-11-17 | 2015-03-11 | 浙江大学 | Multi-mode laser-induced breakdown spectroscopy device |
| CN107655422A (en) * | 2017-09-19 | 2018-02-02 | 中国地质大学（武汉） | Nsec resolution ratio recording laser degrades the system and method for thing dynamic change |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104406942A (en) * | 2014-11-17 | 2015-03-11 | 浙江大学 | Multi-mode laser-induced breakdown spectroscopy device |
| CN104406942B (en) * | 2014-11-17 | 2017-07-21 | 浙江大学 | A kind of multi-mode laser induced breakdown spectroscopy device |
| CN107655422A (en) * | 2017-09-19 | 2018-02-02 | 中国地质大学（武汉） | Nsec resolution ratio recording laser degrades the system and method for thing dynamic change |
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