CN104374698B - Sample table for laser-induced breakdown spectroscopy detection - Google Patents
Sample table for laser-induced breakdown spectroscopy detection Download PDFInfo
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- CN104374698B CN104374698B CN201410653818.3A CN201410653818A CN104374698B CN 104374698 B CN104374698 B CN 104374698B CN 201410653818 A CN201410653818 A CN 201410653818A CN 104374698 B CN104374698 B CN 104374698B
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- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 title claims abstract description 35
- 238000001514 detection method Methods 0.000 title claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 28
- 230000000452 restraining effect Effects 0.000 claims description 15
- 230000003028 elevating effect Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 32
- 210000002381 plasma Anatomy 0.000 abstract 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000002835 absorbance Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000002708 enhancing effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- QQHSIRTYSFLSRM-UHFFFAOYSA-N alumanylidynechromium Chemical compound [Al].[Cr] QQHSIRTYSFLSRM-UHFFFAOYSA-N 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
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- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention discloses a sample table for laser-induced breakdown spectroscopy detection. The sample table comprises an electric displacement table having at least a one-dimensional degree of freedom; a movable lifting plate is mounted on the electric displacement table and an objective table for holding a sample is arranged on the electric displacement table in a sliding fit manner; a transparent confining window is arranged on the lifting plate; laser passes through the confining window and then strikes the sample; a confining plate is arranged under the lifting plate and located right above the sample; confining cavities are distributed on the confining plate and used for confining plasmas excited on the sample. According to the sample table for the laser-induced breakdown spectroscopy detection, the intensity of spectral lines is regulated by confining the plasmas in the transverse direction and the longitudinal direction and adjusting the size of the confining space according to the requirements of different sample, and the enhancement range of the intensity of spectral lines is from 2 to 10 times.
Description
Technical field
The present invention relates to LIBS detection technique, more particularly to a kind of for LIBS inspection
The sample stage of survey.
Background technology
Laser induced breakdown spectrograph (Laser-Induced Breakdown Spectroscopy, LIBS) utilizes pulse
Laser-produced plasma ablation simultaneously excites material in sample (normally solid), and is obtained by spectrogrph and be excited
The spectrum that plasma-atomic is launched, with this to recognize sample in elementary composition composition, and then can carry out material identification,
Classification, qualitative and quantitative analyses.The technology can quickly realize long-range, micro- damage to sample without the need for carrying out pretreatment to sample
Element (especially metallic element) detected, can be used for the detection of solid, gas, fluid sample.LIBS
Application it is also quite varied, heavy metal analysis and explosive detection such as in biomedicine, archaeology, environmental monitoring, water
Deng.
However, LIBS analysis and detection technology also has corresponding limitation：1. detection limit is higher.It is logical
Often the detection limit of LIBS is more than μ g/g.2. repeatability is poor.Because LIBS detection and analysis is easily subject to energy, object lens distance, sample
Product matrix etc. affects, therefore the relative standard deviation of testing result is typically 10% or so.Therefore, LIBS technology for detection energy is improved
Power and repeatability are the important contents of current LIBS technologies development.
It is a kind of raising LIBS signal intensity that space limits, reduce a kind of effective ways of detection limit.
As patent application CN 103543131A propose a kind of side that element certainty of measurement is improved based on dipulse and space restriction effect
Method, the method makes pit-hole or cavity in testing sample surface first, then sample is carried out using double-pulse laser
Impact.First pulse produces lower pressure environment in pit-hole or inside cavity, and second pulse is then used to excite sample generation etc.
Gas ions.Plasma is subject to space restriction effect during extension so that plasma temperature and electron density are notable
Improve, and plasma is more uniform, is conducive to increasing the stability of measurement signal, improves signal to noise ratio, reduces micro- in sample
The detection limit of secondary element.The patent points out that space limits the strength and stability that can improve LIBS measurement signals, is conducive to unit
The raising of plain certainty of measurement.
The content of the invention
The invention provides a kind of sample stage for LIBS detection, using spatially transverse and longitudinal limit
Method enhanced line intensity processed, plasma confinement plate adopts chromium plating aluminium sheet, constraint chamber to adopt conical structure, sample to adopt V-type
Sliding block guide track structure is moved.
The concrete technical scheme of the present invention is as follows：
A kind of sample stage for LIBS detection, including the electric displacement platform at least with one-dimensional degree of freedom,
The lifter plate of activity is installed on described electric displacement platform, and is sliding combined with the object stage for placing sample,
The lifter plate is provided with transparent constraint window, and after laser light constraint window sample is impacted；
Restraining plate is provided with below the lifter plate, the restraining plate is placed in the surface of sample, is distributed with about on restraining plate
Beam chamber, the constraint chamber is used to constrain the plasma of sample excitation.
Provided by the present invention is a kind of sample stage that enhanced line intensity is limited based on space, and energy plasma is horizontal
And row constraint is entered in longitudinal direction, and constraint space size adjustment the intensity of spectral line is adjusted according to different sample requirements, the intensity of spectral line increases
Strong scope is 2-10 times.Constraint window is mainly used in plasma and longitudinally enters row constraint, and to incident laser and plasma
The characteristic spectral line of generation has preferable absorbance.Constraint chamber on restraining plate is mainly used in laterally carrying out about for plasma
Beam, and make characteristic spectral line carry out constraint propagation, spectral line collection efficiency and the intensity of spectral line are improved, it is 2-10 that the intensity of spectral line strengthens scope
Times.
The electric displacement platform is provided with the elevating mechanism for driving lifter plate, slides including the elevating lever with tooth bar and along elevating lever
Dynamic slide block, described slide block is provided with and tooth bar meshed gears, and described lifter plate is fixed on slide block.Using tooth bar and
The engagement of gear, drives slide block lifting, simple structure to be easy to operation.
Described lifter plate is the right angle pinboard of L-shaped.Described lifter plate is provided with light-transmitting opening, covers at the light-transmitting opening
There are light-passing board, the light-transmitting opening constraint window described with light-passing board composition.Described light-transmitting opening inward flange is provided with support level,
Light-passing board is directly placed in light-transmitting opening, is fixed by support level.
In the present invention, described light-passing board is poly (methyl methacrylate) plate, and the selection of material is N-BK7, and thickness is 1～5mm, is passed through
Rate is more than 90%, and energy threshold is more than 10J/cm2.Line enhancement effect suffers restraints impact of the window with a distance from sample.Due to
Properties of samples is different with element spectral line intensity to be detected, and the constraint window of the present invention can be moved in vertical direction, root
According to need adjust the intensity of spectral line.To ensure that laser effectively excites effective collection with characteristic spectral line, light-passing board to optical maser wavelength and
The transmitance of characteristic spectral line should be greater than 90%.Meanwhile, to prevent laser from causing damage to poly (methyl methacrylate) plate, its energy threshold should be big
In 10J/cm2。
Used as the aluminium sheet that preferred, described restraining plate is chromium plating, thickness is 1～3mm.Carry out in the constraint intracavity of aluminium sheet
Chromium plating, makes inner chamber have higher reflectance, makes characteristic spectral line constraint propagation, improves spectral line collection efficiency.
Described constraint chamber is cone, and upper conical surface diameter is 2～8mm, lower conical surface diameter is bigger by 1 than upper conical surface diameter～
3mm.Conical surface diameter effectively can enter row constraint using the size to the plasma of different samples.In addition, constraint chamber adopts circular cone
Shape structure, due to its up-small and down-big structure, more preferable can obtain plasma and enter row constraint compared with the structure of column type.In addition,
When plasma is projected from cone constraint chamber, because its space constraint is increased, its electron density can be obtained with movement velocity
To enhancing, therefore advantageously in the enhancing of spectral line signal.
For ease of the placement of testing sample, slide-and-guide groove is offered on described electric displacement platform, described object stage has
The guide pad coordinated with slide-and-guide groove, using sliding block guide track structure, object stage can flexibly push or extract out constraint window just
Lower section, it is to avoid raise the constraint troublesome operation such as window and restraining plate.
Two lead columns are installed, restraining plate is set in lead column on the electric displacement platform.Constraint is moved up and down along lead column
Plate, adjusts the height of restraining plate, and restraining plate covers sample surfaces, is conducive to smooth sample surfaces to improve detection repeatability, while
Avoid exciting other regions to be measured of particle contamination.When testing sample is the surface irregularity samples such as fresh blade, its area to be measured
Domain has differences with lens distance, and then affects laser to reach the laser parameter of sample.The detection of LIBS is steady
It is qualitative closely bound up with the laser parameter in region to be detected, therefore smooth sample surfaces are conducive to fixed laser parameter to improve detection
Repeatability.Additionally, the up-small and down-big conical structure of restraining plate is conducive to farthest avoiding by a upper detection zone
Excite particle contamination, it is ensured that institute's detection object is the element in region to be detected.
The invention has the advantages that：
1) LIBS spectral line signals can effectively be strengthened, it is 2-10 times that the intensity of spectral line strengthens scope；
2) it is avoided that and excites granule to cover sample surfaces again, affects the detection and analysis of sample postorder；
3) the smooth sample surfaces of energy (especially such as fresh blade out-of-flatness sample), makes sample protect to the distance of condenser lenses
Hold constant so as to improve detection repeatability；
4) with simple, low cost, convenient disassembly is adjusted the features such as.
Description of the drawings
Fig. 1 is the sample stage structure chart for LIBS detection；
Fig. 2 is the top view of sample stage in Fig. 1；
Fig. 3 is the right view of sample stage in Fig. 1；
Fig. 4 is the schematic diagram that sample is impacted on sample stage；
Fig. 5 is unconfined plasma figure；
Fig. 6 is the constraints graph with constraint window and constraint chamber plasma.
Specific embodiment
As Figure 1-3, a kind of sample stage for LIBS detection, including gear rack elevating bar 1, gear
Slide block 2, right angle pinboard 3, plasma confinement window 4, cylindrical guide 5, plasma confinement plate 6, V-type slide block 7, combination electricity
Moving stage 9, pull bar 10.
Combination electric displacement platform 9 combines electric displacement platform, including three single-degree-of-freedom (x, y and z) arteries and veins using four-degree-of-freedom (x, y, z, w)
Rush electricity driving displacement platform and rotary freedom (w) electric rotary table.
Gear rack elevating bar 1 is vertically installed on combination electric displacement platform 9, and gear slider 2 is engaged with gear rack elevating bar 1, can be along vertical
Nogata is to moving up and down.Right angle pinboard 3 is secured by bolts on gear slider 3, and plane is provided with the light-transmitting opening of rectangle, printing opacity
Mouth edge is provided with support level, and light-passing board is provided with light-transmitting opening, forms plasma confinement window 4.
Cylindrical guide 5 is fixed on combination electric displacement platform 9, and plasma confinement plate 6 can be slided up and down along cylindrical guide 5.Cylinder
Guide rail 5 and gear rack elevating bar 1 are by bolt-connection on combination electric displacement platform 9.Combination electric displacement platform 9 is provided with V-groove, V-type slide block 7
Can horizontally slip along V-groove in the case where pull bar 10 is acted on, pull bar 10 is threadably secured in V-type slide block 7.Sample 8 places V-type cunning
On block 7 (equivalent to object stage), laser is impacted down from above, by plasma confinement window 4, and through plasma about
Beam plate 6, impact to sample surfaces excites plasma, cooling to send characteristic spectral line and collected by optical fiber.
In the present embodiment, the material of plasma confinement window 4 is N-BK7, and thickness is 1～3mm, and transmitance is more than 90%,
Energy threshold is more than 10J/cm2.Plasma confinement window 4 is mainly used in plasma and longitudinally enters row constraint, and swashs to incident
The characteristic spectral line that light is produced with plasma has preferable absorbance.N-BK7 is a kind of common optical glass, can be passed through
The light of 350nm～2000nm wave bands, the absorbance of its laser is more than 90%, and energy threshold is more than 10J/cm2.Therefore window is constrained
4 the selection of materials are N-BK7, and thickness is 1～3m.
Plasma confinement window 4 can vertically be moved in the case where gear slider 2 is acted on.Line enhancement effect is subject to
Impact of the constraint window with a distance from sample.Due to properties of samples it is different with element spectral line intensity to be detected, the present invention etc.
Ion bondage window 4 can be moved in vertical direction, and the intensity of spectral line is adjusted as needed.
In the present embodiment, the material of plasma confinement plate 6 is the aluminium sheet of chromium plating, and thickness is 1mm, uniform cloth in the middle of it
There is cone constraint chamber 11, upper conical surface diameter and lower conical surface diameter are respectively 2mm and 3mm.Distance should be with group between constraint chamber 11
Close the planning displacement of electric displacement platform 9 consistent.What plasma confinement plate 6 was mainly used in plasma laterally enters row constraint, and makes spy
Levying spectral line carries out constraint propagation, improves spectral line collection efficiency and the intensity of spectral line, and it is 2～10 times that the intensity of spectral line strengthens scope.In aluminum
Chromium plating is carried out in the constraint chamber 11 of plate, makes inner chamber that there is higher reflectance, make characteristic spectral line constraint propagation, improved spectral line and collect
Efficiency.Constraint chamber adopts conical structure, due to its up-small and down-big structure, can be more preferable compared with the structure of column type it is reciprocity from
Row constraint is entered in daughter.In addition, when plasma is projected from cone constraint chamber, because its space constraint is increased, its electronics is close
Degree can be strengthened with movement velocity, therefore advantageously in the enhancing of spectral line signal.The plasma confinement plate 6 of the present invention
Distance is consistent with the combination planning displacement of electric displacement platform 9 between constraint chamber, can be suitably used for the work of LIBS Surface scan
Make mode.The present invention covers sample surfaces using plasma confinement plate 6, is conducive to smooth sample surfaces to improve detection repeatability,
Avoid exciting other regions to be measured of particle contamination simultaneously.When testing sample is the surface irregularity samples such as fresh blade, it is treated
Survey region to have differences with lens distance, and then affect laser to reach the laser parameter of sample.The inspection of LIBS
Survey stability closely bound up with the laser parameter in region to be detected, therefore smooth sample surfaces are conducive to fixed laser parameter to improve
The repeatability of detection.Additionally, the up-small and down-big conical structure of plasma confinement plate 6 is conducive to farthest avoiding by upper one
Individual detection zone excites particle contamination, it is ensured that institute's detection object is the element in region to be detected.
V-type slide block 7 can be moved under the effect of pull bar 10 along V-groove, using this V-type sliding block guide track structure, it is to avoid be risen high
The troublesome operation such as ion bondage window and plasma confinement plate.Connection between plasma confinement plate 6 and cylindrical guide 5 is tight
Connection, under gravity plasma confinement plate 6 can not freely glide.
During present invention assembling, first gear elevating lever 1 and cylindrical guide 5 are fixed by bolt with electric displacement platform 9 is combined, then will
V-type slide block 7 and pull bar 10 are coordinated by internal and external threads to be fixed, and V-type slide block 7 and the V-groove cooperation for combining electric displacement platform 9 are allowed to can
Along V-groove slidably.By the mating holes of plasma confinement plate 6 pass through 2 cylindrical guides 5, under action of gravity can not freely under
It is sliding.Gear slider 2 is engaged with gear elevating lever 1 by rack-and-pinion, and right angle pinboard 3 is by screw attachment in gear slider
On 2, the plasma confinement window 4 on right angle pinboard 3 can be moved in the vertical direction under rack-and-pinion effect.
As shown in figure 4, present invention can be suitably applied to the several working ways of LIBS, conllinear formula has both been capable of achieving
Excite, be also capable of achieving rectilinear exciting；Both it is applicable for single-pulse laser induced breakdown spectroscopy, it is equally applicable to dipulse and swashs
Photoinduction breakdown spectral.The present invention is especially suitable for the such as fresh blade biological specimen of plant, can effectively improve signal intensity.With
As a example by the rectilinear LIBS system of dipulse, during present invention work, by pull bar 10 by V-type slide block 7 from work
Position removes, and detected sample 8 is positioned on V-type slide block 7, then shifts V-type slide block 7 onto operating position.Mobile plasma
Restraining plate 6 is allowed to be pressed onto on sample 8, then adjusts the upper-lower position of plasma confinement window 4 so as to can limit inspire etc.
Gas ions.It is relative with the position of top laser that control combination electric displacement platform 9 makes the pyramid type of plasma confinement plate 6 constrain chamber 11
Should, the work step-length for arranging combination electric displacement platform 9 is cone constraint chamber neighbor distance or multiple.Beam of laser B is through light path
System, line focus lens are propagated down from above, through plasma confinement window 4, and through cone constraint chamber impact sample
Product.Its laser transmittance of plasma confinement window 4 is more than 90%, and energy threshold is more than 10J/cm2.Second beam laser A edges
Vertical direction is focused on by condenser lenses and impacted on the plasma for inspiring, enhanced line signal.Plasma cooling is sent out
Go out characteristic spectral line C to be collected by the optical fiber collection system of top.The number of times that each position can impact according to needed for actual requirement is selected,
Multiple position spectra collections are carried out by the combination movement of electric displacement platform 9 after a position is completed.As shown in Figure 5 and Figure 6, nothing is worked as
When plasma confinement window 4 and plasma confinement plate 6, the plasma D for inspiring is free excited state；When to exciting
Plasma D limited after, the density of plasma D increases, and plasma temperature is raised, and enhances the spectrum of excited atom
Line strength.
Operation principle of the present invention：
It is a kind of raising LIBS signal intensity that space limits, reduce a kind of effective ways of detection limit.
First, when the expansion of plasma is subject to space constraint, temperature and the electron density of plasma can increase.Next, by
The secondary pressure ripple and reflected shock wave produced in space constraint carries out post bake to primary plasma, so further improving
The temperature and electron density of plasma.Therefore, when to exciting plasma to carry out space and limit, plasma temperature and electricity
Sub- density is greatly increased, and is advantageously implemented thermal equilibrium condition, improves the intensity of spectral line, reduces detection limit.
Claims (7)
1. it is a kind of for LIBS detection sample stage, including at least have one-dimensional degree of freedom electric displacement platform, its
It is characterised by, the lifter plate of activity is installed on described electric displacement platform, and is sliding combined with the object stage for placing sample,
The lifter plate is provided with transparent constraint window, and after laser light constraint window sample is impacted；
Restraining plate is provided with below the lifter plate, the restraining plate covers sample surfaces, Constrained chamber is distributed on restraining plate, this is about
Beam chamber is used to constrain the plasma of sample excitation；
The electric displacement platform is provided with the elevating mechanism for driving lifter plate, slides including the elevating lever with tooth bar and along elevating lever
Slide block, described slide block is provided with and tooth bar meshed gears, and described lifter plate is fixed on slide block；
Described lifter plate is provided with light-transmitting opening, and light-passing board is coated with the light-transmitting opening, and the light-transmitting opening constitutes institute with light-passing board
The constraint window stated；
Described constraint chamber is cone, and upper conical surface diameter is 2～8mm, lower conical surface diameter 1～3mm bigger than upper conical surface diameter.
2. it is as claimed in claim 1 to be used for the sample stage that LIBS is detected, it is characterised in that described lifting
Plate is the right angle pinboard of L-shaped.
3. it is as claimed in claim 1 to be used for the sample stage that LIBS is detected, it is characterised in that described printing opacity
Mouth inward flange is provided with support level, and the light-passing board is placed on support level.
4. it is as claimed in claim 3 to be used for the sample stage that LIBS is detected, it is characterised in that described printing opacity
Plate is poly (methyl methacrylate) plate, and thickness is 1～5mm, and transmitance is more than 90%, and energy threshold is more than 10J/cm2。
5. it is as claimed in claim 1 to be used for the sample stage that LIBS is detected, it is characterised in that described constraint
Plate is the aluminium sheet of chromium plating, and thickness is 1～3mm.
6. it is as claimed in claim 1 to be used for the sample stage that LIBS is detected, it is characterised in that described electromigration
Slide-and-guide groove is offered on platform, described object stage has the guide pad coordinated with slide-and-guide groove.
7. it is as claimed in claim 6 to be used for the sample stage that LIBS is detected, it is characterised in that the electric displacement platform
On two lead columns are installed, restraining plate is set in lead column.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410653818.3A CN104374698B (en) | 2014-11-17 | 2014-11-17 | Sample table for laser-induced breakdown spectroscopy detection |
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| CN201410653818.3A CN104374698B (en) | 2014-11-17 | 2014-11-17 | Sample table for laser-induced breakdown spectroscopy detection |
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| CN104374698B true CN104374698B (en) | 2017-04-12 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105699338B (en) * | 2016-01-22 | 2019-02-05 | 清华大学 | The LIBS system of micro heavy detection based on plasma confinement chamber |
| CN106124778B (en) * | 2016-07-27 | 2018-06-12 | 深圳市博卡生物技术有限公司 | Immunoblotting assay instrument |
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| US5847825A (en) * | 1996-09-25 | 1998-12-08 | Board Of Regents University Of Nebraska Lincoln | Apparatus and method for detection and concentration measurement of trace metals using laser induced breakdown spectroscopy |
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| CN103543131A (en) * | 2013-10-17 | 2014-01-29 | 清华大学 | Method for improving element measurement precision based on double pulses and space limitation |
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2014
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