CN216284940U - Scanning device for laser-induced breakdown spectroscopy - Google Patents
Scanning device for laser-induced breakdown spectroscopy Download PDFInfo
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Abstract
The embodiment of the utility model provides a scanning device for laser-induced breakdown spectroscopy, which reasonably sets an optical path by arranging a plurality of reflectors and focusing lenses. The initial position of the scanning device, the motion center point of the motion track of the similar spiral line of the scanning device, the variation of the labyrinth before and after the first circle of motion, the number of motion circles and other parameters are set, and relevant operation is carried out according to the parameters, so that the unique motion track of the uniform linear motion of the similar spiral line is determined. Because the motion track linear velocity of the scanning device is kept constant all the time, the whole motion process has no acceleration process and deceleration process, the situations of corners and the like can be avoided when a sample to be detected moves, and the stability of spectrum collection of a spectrometer is improved; the motion trail of the scanning device is designed into a spiral line-like form, so that the utilization rate of a circular sample can be greatly improved, the adverse effect of secondary ablation of the sample on the spectrum is avoided, and the stability and quality of the spectrum can be greatly improved.
Description
Technical Field
The embodiment of the utility model relates to the technical field of optics, in particular to a scanning device for laser-induced breakdown spectroscopy.
Background
Laser-induced breakdown spectroscopy (LIBS), an elemental composition analysis technique. The method uses a fiber laser to emit laser to act on the surface of a sample to be measured, and ablates the sample to be measured. When the laser energy is strong enough and the acting time is long enough, a large amount of plasma consisting of free electrons and ions is generated on the surface of the object. The plasma will expand continuously with the temperature drop, and the ions and atoms at high energy level will transit to low energy level state and emit photons of specific frequency. The spectrometer forms characteristic spectral line information by collecting photon information generated by cooling and expanding the plasma. According to the characteristic spectral line information, the element types and the concentration information of the samples to be detected can be obtained. The laser-induced breakdown spectroscopy technology has the characteristics of no damage, no need of processing a sample to be detected in advance, remote control, high detection speed and the like, and becomes a novel object element analysis technology. In recent years, the laser-induced breakdown spectroscopy technology is more diverse in the fields of space and aviation and biomedical detection, and fully embodies the technical superiority of the laser-induced breakdown spectroscopy technology.
In order to ensure the synchronous acquisition speed of the laser and the spectrum detector, the repetition frequency of the conventional laser is generally less than 100Hz, and in the current research aiming at the phenomenon of spectrum self-absorption, a low-frequency pulse laser (such as Nd: YAG laser) is mostly used, however, the low-frequency pulse laser has the limitation that the low-frequency pulse laser cannot be operated continuously for a long time, otherwise, the phenomenon of power reduction inevitably occurs. The high-frequency pulse laser has the characteristics of high output frequency and strong stability, can stably work for a long time, and maintains high-stability output power. Therefore, the stability of the LIBS system can be improved better by adopting the high-frequency pulse laser, and the experimental operation time is reduced.
When the high-frequency pulse laser emits laser to act on the surface of a sample to be detected, a displacement platform is required to assist the movement of the sample to be detected. The motion trail of the existing optical displacement platform is in a bow shape, and the motion mode has two disadvantages: first, in each experimental operation, a large amount of corner phenomena occur in the manner of the bow-shaped motion, so that the acceleration process and the deceleration process are repeated. The spectrometer collects characteristic spectral lines in the variable speed process of a sample to be measured, the phenomenon that the spectral intensity is greatly reduced can occur, and adverse effects such as the stability of the spectrum is deteriorated are caused; second, the motion pattern is less effective for a round sample. In order to avoid the influence of the surface roughness of the sample on the spectral stability, the adjacent ablation tracks cannot be too close, so that the phenomenon that the corner position of the circular sample is not effectively ablated can occur, and the effective utilization rate of the sample is reduced.
In order to improve the displacement platform device and improve the spectral quality, the chinese utility model patent with application number 201810855210.7 proposes to combine the axial elevating displacement platform with the two-dimensional translation platform to achieve the method of adjusting the device for the coaxial optical system, but this method can only improve the coaxial optical system, and can not improve the paraxial optical system. In addition, the Chinese utility model with application number 201410780598.0 proposes that a horizontal displacement mechanism and a vertical displacement structure are built, and a balancer is arranged at the upper end of the vertical structure, but the method still has a large amount of acceleration and deceleration processes of the sample to be detected in the motion process.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a scanning device for laser-induced breakdown spectroscopy, which improves the stability of a spectrometer for collecting spectra; the motion trail of the experiment platform device is designed into a spiral line-like form, so that the utilization rate of a circular sample can be greatly improved, the adverse effect of secondary ablation of the sample on the spectrum is avoided, and the stability and quality of the spectrum can be greatly improved.
The embodiment of the utility model provides a scanning device for laser-induced breakdown spectroscopy, which comprises a high-frequency pulse laser, a total reflection mirror, a first focusing lens, a sample table, a rotating motor, a spectrometer and a computer, wherein the high-frequency pulse laser is arranged on the sample table;
the sample table is arranged on the rotating motor, the sample table is used for placing a sample to be detected, and the rotating motor is used for driving the sample table to perform uniform linear motion along a preset similar spiral motion track;
the high-frequency pulse laser is used for emitting pulse laser, and the pulse laser is reflected to the first focusing lens through the full-reflecting mirror;
the first focusing lens is used for focusing the pulse laser to the surface of a sample to be detected on a sample stage and ablating the surface of the sample to be detected so as to generate a plasma beam signal;
the spectrometer is used for collecting the plasma light beam signals, converting the plasma light beam signals into electric signals and transmitting the electric signals to the computer for analysis and processing.
Preferably, the pulse laser device further comprises a fixed motion track, a mobile motor arranged on the fixed motion track, and a connecting rod connected with the mobile motor, wherein the total reflection mirror and the first focusing lens are fixed on the connecting rod, and an included angle between the first focusing lens and the total reflection mirror is 45 degrees, so that the total reflection mirror reflects the pulse laser to the first focusing lens;
the moving motor is used for driving the total reflection mirror and the first focusing lens to move back and forth along the direction of the pulse laser incident to the total reflection mirror.
Preferably, the laser device further comprises a first laser reflector and a second laser reflector, wherein the first laser reflector is arranged on a transmitting light path of the high-frequency laser, the second laser reflector is arranged on a reflecting light path of the first laser reflector, and the first laser reflector and the second laser reflector are used for reflecting the pulse laser to the total reflection mirror.
Preferably, the laser spectrometer further comprises a second focusing lens, and the second focusing lens is arranged between the second laser mirror and the spectrometer.
Preferably, the sample analyzer further comprises a second focusing lens, the second focusing lens and the spectrometer are fixed on the connecting rod, and the second focusing lens is arranged between the sample to be measured and the spectrometer; and the optical axes of the first focusing lens and the second focusing lens are superposed on the surface of the sample to be measured.
Preferably, the similar spiral motion trajectory of the sample stage is:
the moving speeds of the sample table on the x axis and the y axis are respectively as follows:
in the above formula, r is a maze; the coordinates of the start point are (0, r)0) The coordinate of the end point of the first circle of spiral motion is (0, r)0+d0) (ii) a Constant linear velocity of V0The time required for the first-circle type spiral line to move is t0The difference d between the start and end of the first winding and the curve0Target running turns n.
Preferably, the moving speed of the moving motor is matched with the moving speed of the sample stage on the x axis and the y axis.
According to the scanning device for laser-induced breakdown spectroscopy provided by the embodiment of the utility model, the bottom surface rotating motor is arranged below the sample to be detected, and the rotating motor can perform circular motion on the sample to be detected. The optical path is reasonably set by placing a plurality of reflecting mirrors and focusing lenses. The parts are combined to design a scanning device for laser-induced breakdown spectroscopy. The initial position of the scanning device, the motion center point of the motion track of the similar spiral line of the scanning device, the variation of the labyrinth before and after the first circle of motion, the number of motion circles and other parameters are set, and relevant operation is carried out according to the parameters, so that the unique motion track of the uniform linear motion of the similar spiral line is determined. Because the motion track linear velocity of the scanning device is kept constant all the time, the whole motion process has no acceleration process and deceleration process, the situations of corners and the like can be avoided when a sample to be detected moves, and the stability of spectrum collection of a spectrometer is improved; the motion trail of the scanning device is designed into a spiral line-like form, so that the utilization rate of a circular sample can be greatly improved, the adverse effect of secondary ablation of the sample on the spectrum is avoided, and the stability and quality of the spectrum can be greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of an exemplary scanning apparatus for laser induced breakdown spectroscopy according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of another exemplary scanning apparatus for laser induced breakdown spectroscopy according to an embodiment of the present invention;
fig. 3 is a schematic diagram of the effect of the spiral-like motion according to the embodiment of the utility model.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the embodiment of the present application, the term "and/or" is only one kind of association relationship describing an associated object, and means that three relationships may exist, for example, a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone.
The terms "first" and "second" in the embodiments of the present application are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "comprise" and "have", as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a system, product or apparatus that comprises a list of elements or components is not limited to only those elements or components but may alternatively include other elements or components not expressly listed or inherent to such product or apparatus. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specifically limited otherwise.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
The embodiment of the utility model provides a scanning device for laser-induced breakdown spectroscopy, which comprises a high-frequency pulse laser 1, a total reflection mirror 4, a first focusing lens 5, a sample stage 8, a rotating motor 9, a spectrometer 11 and a computer 12, wherein the high-frequency pulse laser is connected with the sample stage through a transmission line;
the sample table 8 is arranged on the rotating motor 9, the sample table 8 is used for placing a sample to be detected, and the rotating motor 9 is used for driving the sample table 8 to perform uniform linear velocity motion along a preset similar spiral motion track;
the high-frequency pulse laser 1 is used for emitting pulse laser, and the pulse laser is reflected to the first focusing lens 5 through the total reflection mirror 4;
the first focusing lens 5 is used for focusing the pulse laser to the surface of a sample to be detected on a sample stage 8, and ablating the surface of the sample to be detected to generate a plasma beam signal;
the spectrometer 11 is configured to collect the plasma beam signal, convert the plasma beam signal into an electrical signal, and transmit the electrical signal to the computer 12 for analysis and processing.
In this embodiment, through placing bottom surface rotating electrical machines 9 in the sample below that awaits measuring, rotating electrical machines 9 can carry out circular motion to the sample that awaits measuring, through placing speculum and focusing lens, sets up the light path rationally, will above part combine, designs a scanning device for laser-induced breakdown spectroscopy. The initial position of the scanning device, the motion center point of the motion track of the similar spiral line of the scanning device, the variation of the labyrinth before and after the first circle of motion, the number of motion circles and other parameters are set, and relevant operation is carried out according to the parameters, so that the unique motion track of the uniform linear motion of the similar spiral line is determined. Because the motion track linear velocity of the scanning device is kept constant all the time, the whole motion process has no acceleration process and deceleration process, the situations of corners and the like can be avoided when a sample to be detected moves, and the stability of the spectrometer 11 for collecting spectra is improved; the motion trail of the scanning device is designed into a spiral line-like form, so that the utilization rate of a circular sample can be greatly improved, the adverse effect of secondary ablation of the sample on the spectrum is avoided, and the stability and quality of the spectrum can be greatly improved.
On the basis of the above embodiment, as a preferred implementation manner, as shown in fig. 1, the laser pulse laser beam is fixed;
the moving motor 7 is used for driving the total reflection mirror 4 and the first focusing lens 5 to move back and forth along the direction of the pulse laser incident on the total reflection mirror 4.
The laser device is characterized by further comprising a first laser reflector 2 and a second laser reflector 3, wherein the first laser reflector 2 is arranged on a transmitting light path of the high-frequency laser, the second laser reflector 3 is arranged on a reflecting light path of the first laser reflector 2, and the first laser reflector 2 and the second laser reflector 3 are used for reflecting the pulse laser to the total reflection mirror 4.
The laser spectrometer also comprises a second focusing lens 10, wherein the second focusing lens 10 is arranged between the second laser reflector 3 and the spectrometer 11.
The total reflection mirror 4 and the first focusing lens 5 move together with the moving motor 7 moving left and right, so that the light path has the effect of moving left and right. The circular motion of the bottom surface rotating motor 9 is combined, and the motion effect of the uniform linear velocity motion of the similar spiral line is finally achieved; the high-frequency pulse laser 1 emits pulse laser to ablate the surface of the sample to be measured with the uniform linear motion similar to a spiral line, thereby generating plasma and characteristic spectral line thereof. The spectrometer 11 collects the plasma optical signal, converts the plasma optical signal into an electrical signal, and transmits the electrical signal to the computer 12 for analysis and processing.
On the basis of the above embodiment, as another preferred implementation manner, as shown in fig. 2, the laser pulse laser further includes a fixed moving track 6, a moving motor 7 disposed on the fixed moving track 6, and a connecting rod connected to the moving motor 7, wherein the all-mirror 4 and the first focusing lens 5 are fixed on the connecting rod, and an included angle between the first focusing lens 5 and the all-mirror 4 is 45 ° so that the all-mirror 4 reflects the pulse laser to the first focusing lens 5; the sample analyzer further comprises a second focusing lens 10, wherein the second focusing lens 10 and the spectrometer 11 are fixed on the connecting rod, namely the relative positions of the first focusing lens 5, the total reflection mirror 4, the second focusing lens 10 and the spectrometer 11 are fixed, and the second focusing lens 10 is arranged between the sample to be measured and the spectrometer 11; the optical axes of the first focusing lens 5 and the second focusing lens 10 are coincided on the surface of the sample to be measured.
The total reflection mirror 4, the first focusing lens 5, the second focusing lens 10 and the spectrometer 11 move together with the moving motor 7 moving left and right, so that the effect that the light path moves left and right is achieved. The circular motion of the bottom surface rotating motor 9 is combined, and finally the motion effect of the spiral line-like uniform linear velocity motion is achieved (as shown in fig. 3). The high-frequency pulse laser 1 emits laser to ablate the surface of the sample moving at the uniform linear velocity similar to the spiral line, so as to generate plasma and characteristic spectral line thereof. The spectrometer 11 collects the plasma optical signal, converts the plasma optical signal into an electrical signal, and transmits the electrical signal to the computer 12 for analysis and processing.
On the basis of the above embodiments, in this embodiment, before starting the measurement, the embodiment of the present invention needs to be set firstThe relevant parameters of the displacement platform set the initial point of the spiral-like motion as (X)0,Y0) Constant linear velocity V0The difference d between the start and end of the first winding and the curve0Planning the running turns n; in order to ensure that the motion trail of the sample to be detected is a quasi-spiral line and unique, the relation between the size of the maze and the time is set as a linear function relation, namely:
r＝at+b (1)
let t be the time required for the first-turn helical motion0The coordinates of the starting point are (0, r)0) The coordinate of the center point is (0, r)0+d0) The coordinates of the starting point and the middle stop point are substituted into formula (1) to obtain:
the angular velocity function with respect to time is determined according to equation (2):
integral operation of angular velocity
Obtaining the time required by the first circle of spiral line motion:
substituting equation (4) for equation (2) yields the function of the maze with respect to time:
substituting equation (4) for equation (3) yields the angular velocity as a function of time:
integral operation of angular velocity
Obtaining a relation between the polar angle and the time, namely the similar spiral motion track of the sample stage 8 is as follows:
substituting the equation (5) into the equation (7) can obtain a relational expression between the polar angle and the maze, and determine the motion track of the scanning device:
according to the polar angle and time relation, the moving speeds of the sample stage 8 on the x axis and the y axis are respectively obtained as follows:
in the above formula, r is a maze; the coordinates of the start point are (0, r)0) The coordinate of the end point of the first circle of spiral motion is (0, r)0+d0) (ii) a Constant linear velocity of V0The time required for the first-circle type spiral line to move is t0The difference d between the start and end of the first winding and the curve0Target running turns n.
After determining the motion track of the scanning device and the motion speeds of the x axis and the y axis, the scanning device is tried to be operated and the motion situation of the scanning device is observed.
And if the motion track of the scanning device is abnormal or exceeds the sample size range, modifying the relevant parameters until the conditions that the motion track of the scanning device is abnormal and the motion track exceeds the sample size range do not occur, and taking the motion track of the spiral line uniform linear motion as the motion track of the scanning device.
Setting the laser power, energy and working frequency of the fiber laser, wherein the fiber laser emits laser, and the laser irradiates the surface of the experimental sample after being reflected by the reflecting mirror and focused by the focusing lens.
The scanning device moves at a uniform linear velocity according to a preset quasi-spiral motion track, and an experimental sample generates plasma under the action of strong laser pulse, so that a continuous spectrum and a linear spectrum representing atomic characteristics are finally formed.
After the optical plasma signal is collected by the spectrometer 11, it is converted into an electrical signal and transmitted to the computer 12 for analysis and processing.
After the experiment is completed, the high-frequency pulse laser 1 is turned off, the movement of the scanning device is suspended, and finally the experimental sample is taken out.
Preferably, the moving speed of the moving motor 7 is matched with the moving speed of the sample stage 8 in the x axis and the y axis.
In order to verify the effect of the embodiment of the utility model, the utility model is verified through experiments, and before the experiments are started, the relevant parameters of the scanning device are set. Setting the initial point of the scanning device to (0,3 × 10)-3) Constant linear velocity of V0＝5mm/s＝5×10-3m/s, the difference between the start and end meanders of the first turn is d0＝2mm＝2×10-3m, the number of the simulated running turns is n, which is 10.
In order to ensure that the motion track of the scanning device is spiral-like and unique, the relation between the size of the maze and the time is set as a linear function relation, namely r is at + b;
let t be the time required for the first-turn helical motion0. The coordinates of the starting point are (0,3 × 10)-3) The coordinates of the mid-point are (0,5 × 10)-3) Substituting the coordinates of the starting point and the middle stop point into the formula to obtain:
b＝r0＝3×10-3
the angular velocity function with respect to time is determined according to the above equation:
integral operation of angular velocity
Obtaining the time required by the first circle of spiral line motion:
and (3) obtaining a function relation of the maze with respect to time:
deriving the angular velocity as a function of time:
integral operation of angular velocity
Obtaining a polar angle and time relation formula:
the relation between the polar angle and the maze can be obtained, and the motion track of the scanning device is determined:
obtaining the moving speed of the x axis and the y axis of the scanning device according to the relation between the polar angle and the time:
after determining the motion track of the scanning device and the motion speeds of the x axis and the y axis, the scanning device is tried to be operated and the motion situation of the scanning device is observed.
And if the motion track of the scanning device is abnormal or exceeds the sample size range, modifying the relevant parameters until the conditions that the motion track of the scanning device is abnormal and the motion track exceeds the sample size range do not occur, and taking the motion track of the spiral line uniform linear motion as the motion track of the scanning device.
Setting the laser power of the fiber laser to be 10w and the working frequency to be 35kHz, wherein the fiber laser emits laser, and the laser irradiates the surface of an experimental sample after being reflected by a reflector and focused by a focusing lens.
The scanning device moves at a uniform linear velocity according to a preset quasi-spiral motion track, and an experimental sample generates plasma under the action of strong laser pulse, so that a continuous spectrum and a linear spectrum representing atomic characteristics are finally formed.
Setting the integration time of the spectrometer to be 1.2ms, and converting plasma optical signals into electric signals after the plasma optical signals are collected by the spectrometer and transmitting the electric signals to a computer for analysis and processing.
After the experiment is completed, the optical fiber laser is turned off, the movement of the displacement platform is suspended, and finally the experimental sample is taken out.
According to the scanning device for laser-induced breakdown spectroscopy provided by the embodiment of the utility model, the reflector and the focusing lens are connected with the moving motor which moves left and right, so that the light path can be moved left and right. In addition, a bottom surface rotating motor is arranged below the sample to be detected, and the rotating motor can perform circular motion on the sample to be detected. The optical path is reasonably set by placing a plurality of reflecting mirrors and focusing lenses. The parts are combined to design a scanning device for laser-induced breakdown spectroscopy. The initial position of the scanning device, the motion center point of the motion track of the similar spiral line of the scanning device, the variation of the labyrinth before and after the first circle of motion, the number of motion circles and other parameters are set, and relevant operation is carried out according to the parameters, so that the unique motion track of the uniform linear motion of the similar spiral line is determined. Because the motion track linear velocity of the scanning device is kept constant all the time, the whole motion process has no acceleration process and deceleration process, the situations of corners and the like can be avoided when a sample to be detected moves, and the stability of spectrum collection of a spectrometer is improved; the motion trail of the scanning device is designed into a spiral line-like form, so that the utilization rate of a circular sample can be greatly improved, the adverse effect of secondary ablation of the sample on the spectrum is avoided, and the stability and quality of the spectrum can be greatly improved. The embodiments of the present invention can be arbitrarily combined to achieve different technical effects.
In the above embodiments, the implementation may be wholly or partially realized by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the procedures or functions described in accordance with the present application are generated, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a network of computers, or other programmable device. The computer instructions may be stored in a computer readable storage medium or transmitted from one computer readable storage medium to another, for example, the computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by wire (e.g., coaxial cable, fiber optic, digital subscriber line) or wirelessly (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device, such as a server, a data center, etc., that incorporates one or more of the available media. The usable medium may be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., Solid state disk), among others.
One of ordinary skill in the art will appreciate that all or part of the processes in the methods of the above embodiments may be implemented by hardware related to instructions of a computer program, which may be stored in a computer-readable storage medium, and when executed, may include the processes of the above method embodiments. And the aforementioned storage medium includes: various media capable of storing program codes, such as ROM or RAM, magnetic or optical disks, etc.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (7)
1. A scanning device for laser-induced breakdown spectroscopy is characterized by comprising a high-frequency pulse laser, a total reflection mirror, a first focusing lens, a sample table, a rotating motor, a spectrometer and a computer;
the sample table is arranged on the rotating motor, the sample table is used for placing a sample to be detected, and the rotating motor is used for driving the sample table to perform uniform linear motion along a preset similar spiral motion track;
the high-frequency pulse laser is used for emitting pulse laser, and the pulse laser is reflected to the first focusing lens through the full-reflecting mirror;
the first focusing lens is used for focusing the pulse laser to the surface of a sample to be detected on a sample stage and ablating the surface of the sample to be detected so as to generate a plasma beam signal;
the spectrometer is used for collecting the plasma light beam signals, converting the plasma light beam signals into electric signals and transmitting the electric signals to the computer for analysis and processing.
2. The scanning device for laser-induced breakdown spectroscopy according to claim 1, further comprising a fixed moving track, a moving motor disposed on the fixed moving track, and a connecting rod connected to the moving motor, wherein the total reflection mirror and the first focusing lens are fixed to the connecting rod, and an included angle between the first focusing lens and the total reflection mirror is 45 ° so that the total reflection mirror reflects the pulse laser to the first focusing lens;
the moving motor is used for driving the total reflection mirror and the first focusing lens to move back and forth along the direction of the pulse laser incident to the total reflection mirror.
3. The scanning device for laser-induced breakdown spectroscopy as claimed in claim 2, further comprising a first laser reflector and a second laser reflector, wherein the first laser reflector is disposed on an emission light path of the high-frequency pulse laser, the second laser reflector is disposed on a reflection light path of the first laser reflector, and the first laser reflector and the second laser reflector are configured to reflect the pulse laser to the all-reflector.
4. The scanning device for laser induced breakdown spectroscopy of claim 3, further comprising a second focusing lens disposed between the second laser mirror and the spectrometer.
5. The scanning device for laser-induced breakdown spectroscopy of claim 2, further comprising a second focusing lens, wherein the second focusing lens and the spectrometer are fixed on the connecting rod, and the second focusing lens is disposed between the sample to be measured and the spectrometer; and the optical axes of the first focusing lens and the second focusing lens are superposed on the surface of the sample to be measured.
6. The scanning device for laser-induced breakdown spectroscopy of claim 2, wherein the sample stage has a spiral-like motion trajectory of:
the moving speeds of the sample table on the x axis and the y axis are respectively as follows:
in the above formula, r is a maze; the coordinates of the start point are (0, r)0) The coordinate of the end point of the first circle of spiral motion is (0, r)0+d0) (ii) a Constant linear velocity of V0The time required for the first-circle type spiral line to move is t0The difference d between the start and end of the first winding and the curve0Target running turns n.
7. The scanning device for laser induced breakdown spectroscopy of claim 6 wherein the moving motor moves at a speed that matches the speed of the sample stage in the x-axis and the y-axis.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115389487A (en) * | 2022-08-08 | 2022-11-25 | 苏州星帆华镭光电科技有限公司 | Method for detecting components and concentration thereof in object |
| WO2023222618A1 (en) * | 2022-05-20 | 2023-11-23 | QuantoLux Innovation GmbH | Spectrometer system for laser-induced plasma spectral analysis |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023222618A1 (en) * | 2022-05-20 | 2023-11-23 | QuantoLux Innovation GmbH | Spectrometer system for laser-induced plasma spectral analysis |
| CN115389487A (en) * | 2022-08-08 | 2022-11-25 | 苏州星帆华镭光电科技有限公司 | Method for detecting components and concentration thereof in object |
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