CN103323435B - The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse - Google Patents
The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse Download PDFInfo
- Publication number
- CN103323435B CN103323435B CN201310250038.XA CN201310250038A CN103323435B CN 103323435 B CN103323435 B CN 103323435B CN 201310250038 A CN201310250038 A CN 201310250038A CN 103323435 B CN103323435 B CN 103323435B
- Authority
- CN
- China
- Prior art keywords
- laser
- ablation
- pulse
- sample target
- libs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
This patent discloses a kind of Laser-induced Breakdown Spectroscopy detection system defocusing pre-ablation based on dipulse.Its adoption rate spectroscope is divided into two-way pulse laser, and a road is through defocusing light path, and another road is through delay and focusing light path.First via laser pulse pre-ablation on sample target material surface through defocusing light path produces the circular flat surface of certain diameter, is then accurately focused on this flat surface by the second road laser pulse through delay and focusing light path and excites LIBS effect.This dipulse defocuses the impact that pre-ablation LIBS system effectively can eliminate the ablation effect of holes in traditional LIBS, thus improves the precision of LIBS detection.
Description
Technical field
This patent relates to a kind of laser spectrum detection method, particularly relates to a kind of Laser-induced Breakdown Spectroscopy (Laser-inducedbreakdownspectroscopy is called for short LIBS) detection system defocusing pre-ablation based on dipulse.
Background technology
Laser-induced Breakdown Spectroscopy (LIBS) Detection Techniques are the pulse lasers utilizing pulsed laser to send, sample is focused on through condenser lens, focus point obtains high-octane pulse laser, make sample ablation, evaporate, excite with ionization after form the plasma spark of high temperature, high pressure, high electron density, give off the spectrum comprising atom and ion characteristic spectral line, can be used for the element composition of detecting material.
Traditional LIBS detection method utilizes low repetition single-pulse laser as driving source, the method is when pulse and the effect of sample target, because the ablation of High Power Laser Pulses is evaporated, produce ablation hole, thereafter during each laser pulse detection, the degree of depth in hole increases, the roughness of its inside surface increases (being called the ablation effect of holes), make LIBS spectral signal repeatability poor, have a strong impact on LIBS detection precision, in addition due to the scattering of ablation hole rough inner-surface, the signal to noise ratio (S/N ratio) of LIBS detection can be reduced.
For improving the signal to noise ratio (S/N ratio) of LIBS detection and the precision of detection, this patent proposes a kind of Laser-induced Breakdown Spectroscopy (LIBS) detection method defocusing pre-ablation based on dipulse, effectively can reduce the impact of the ablation effect of holes on LIBS detection.
Summary of the invention
The object of this patent is to provide a kind of Laser-induced Breakdown Spectroscopy (LIBS) detection system defocusing pre-ablation based on dipulse, effectively to reduce the impact of the ablation effect of holes on LIBS detection, thus improves precision and the signal to noise ratio (S/N ratio) of LIBS detection.
This patent is achieved like this, and it is characterized in that:
The pulse laser that solid pulse laser sends, the spectroscope through certain ratio is divided into two-way:
Wherein there is first via pulse laser compared with multi-energy through defocusing light path through ratio is spectroscopical.Defocus optical routing frequency-doubling crystal, beam expanding lens A, condenser lens A form.First via pulse laser is after frequency-doubling crystal frequency multiplication, expand through beam expanding lens A, condenser lens A assembles, get on sample target by dichroic mirror, require that convergent lens A focal length is greater than the distance that it arrives sample target material surface, namely defocus condition is in, sample target material surface obtains the uniform laser hot spot of certain diameter, owing to obtaining most of spectral energy and photon energy doubles after frequency multiplication, even if be therefore in defocus condition, pulsed laser power density in hot spot is also very large, now suitably can improve the supply voltage of solid pulse laser, namely single pulse energy is improved, make sample target material surface within the scope of hot spot by even ablation, produce the circular flat surface of certain diameter,
Through the second road pulse laser with less energy of ratio dichroic mirror through delay and focusing light path.Delay and focusing optical routing multi-disc catoptron, optical delay line, beam expanding lens B and condenser lens B form.Second road pulse laser is through optical delay line time delay, beam expanding lens B expands, condenser lens B assembles, get on sample target after dichroic mirror reflection, the focal length of requirement convergent lens B equals the distance that it arrives sample target material surface, is namely in focus state, forms a focus point at sample target material surface, make pulsed laser power density on focus point be greater than the power density threshold needed for LIBS, LIBS effect can be produced.Regulate the time delay of optical delay line, the second road laser pulse after the even ablation of first via laser pulse obtains flat surface is arrived.
Excite produced LIBS signal through lens focus on the end face being arranged on the optical fiber on structure of fiber_optic by the second laser pulse, control fiber spectrometer by computing machine and carry out spectroscopic acquisition and analysis.
Then, solid pulse laser sends next bundle of pulsed laser, still two-way is divided into through ratio spectroscope, wherein it is made to defocus sample target material surface within the scope of hot spot by even ablation through ratio spectroscopical first via pulse laser, produce the circular flat surface of certain diameter, the ablation hole being excited generation by last secondary second road focusing laser pulses can be removed, therefore effectively reduce the impact of the ablation effect of holes, improve the precision of LIBS detection.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of this patent, in figure: 1---ratio spectroscope; 2---solid pulse laser; 3---optical delay line; 4---catoptron A; 5---catoptron B; 6---catoptron C; 7---frequency-doubling crystal; 8---beam expanding lens A; 9---beam expanding lens B; 10---condenser lens B; 11---condenser lens A; 12---catoptron D; 13---dichroic mirror; 14---uniform laser hot spot; 15---sample target; 16---lens; 17---structure of fiber_optic; 18---fiber spectrometer; 19---computing machine.
Embodiment
As shown in Figure 1, the repetition frequency that solid pulse laser 2 sends wavelength 1064nm is the nanosecond pulse laser of 10Hz to the principle of this patent, is divided into two-way through 3 to 7 ratio spectroscopes 1:
The first via is for defocusing light path.Defocus optical routing frequency-doubling crystal 7, beam expanding lens A8, condenser lens A11 form.The first via pulse laser with 70% energy through ratio spectroscope 1 changes the pulse laser that wavelength is 532nm into after frequency-doubling crystal 7, expand through beam expanding lens A8, condenser lens A11 assembles, get on sample target 15 by dichroic mirror 13, the focal length of requirement convergent lens A11 is greater than the distance that it arrives sample target material surface, namely defocus condition is in, sample target material surface obtains the uniform laser hot spot 14 of certain diameter, owing to obtaining most of spectral energy and photon energy doubles after frequency multiplication, even if be therefore in defocus condition, pulsed laser power density in hot spot is also very large, now suitably can improve the supply voltage of solid pulse laser, namely single pulse energy is improved, make sample target material surface within the scope of hot spot by even ablation, produce the circular flat surface of certain diameter,
Second tunnel is delay and focusing light path.Delay and focusing optical routing catoptron A4, catoptron B5, catoptron C6, catoptron D12, optical delay line 3, beam expanding lens B9 and condenser lens B10 form.The second road pulse laser with 30% energy reflected through ratio spectroscope 1 reflects through catoptron A4, optical delay line 3 time delay, catoptron B5 reflects, catoptron C6 reflects, beam expanding lens B9 expands, condenser lens B10 assembles, catoptron D12 reflects, after dichroic mirror 13 reflects, get on sample target, the focal length of requirement convergent lens B10 equals the distance that it arrives sample target material surface, namely focus state is in, a focus point is formed at sample target material surface, pulsed laser power density on focus point is made to be greater than the power density threshold needed for LIBS, LIBS effect can be produced.Fine adjustment optical delay line 3, allows the second road laser pulse produce certain time delay, and the second road laser pulse after the even ablation of first via laser pulse obtains flat surface is arrived.
Excite produced LIBS signal to focus on the end face of the optical fiber be arranged on structure of fiber_optic 17 through lens 16 by the second laser pulse, control fiber spectrometer 18 by computing machine 19 and carry out spectroscopic acquisition and analysis.
Then, solid pulse laser sends next bundle of pulsed laser, still two-way is divided into through ratio spectroscope 1, wherein it is made to defocus sample target material surface within the scope of hot spot by even ablation through the first via pulse laser of ratio spectroscope 1, produce the circular flat surface of certain diameter, the ablation hole being excited generation by last secondary second road focusing laser pulses can be removed, therefore effectively reduce the impact of the ablation effect of holes, improve the precision of LIBS detection.
Claims (1)
1. one kind defocuses the Laser-induced Breakdown Spectroscopy detection system of pre-ablation based on dipulse, it comprises ratio spectroscope, solid pulse laser, optical delay line, catoptron, frequency-doubling crystal, beam expanding lens, condenser lens, catoptron, dichroic mirror, lens, fiber spectrometer and computing machine, it is characterized in that:
The repetition frequency that solid pulse laser (2) sends wavelength 1064nm is the nanosecond pulse laser of 10Hz, is divided into two-way through 3 to 7 ratio spectroscopes (1):
The first via is for defocusing light path, the first via pulse laser with 70% energy through ratio spectroscope (1) changes the pulse laser that wavelength is 532nm into after frequency-doubling crystal (7), expand through beam expanding lens A (8), condenser lens A (11) assembles, get on sample target (15) by dichroic mirror (13), the focal length of convergent lens A (11) is greater than the distance that it arrives sample target material surface, namely defocus condition is in, sample target (15) surface obtains the uniform laser hot spot (14) of certain diameter, sample target material surface within the scope of hot spot is by even ablation, produce the circular flat surface of certain diameter,
Second tunnel is delay and focusing light path, the second road pulse laser with 30% energy reflected through ratio spectroscope (1) reflects through catoptron A (4), optical delay line (3) time delay, catoptron B (5) reflects, catoptron C (6) reflects, beam expanding lens B (9) expands, condenser lens B (10) assembles, catoptron D (12) reflects, after dichroic mirror (13) reflection, get on sample target, the focal length of convergent lens B (10) equals the distance that it arrives sample target material surface, namely focus state is in, laser forms a focus point at sample target material surface, pulsed laser power density on focus point is made to be greater than the power density threshold needed for LIBS, LIBS effect can be produced, fine adjustment optical delay line (3), allows the second road laser pulse produce certain time delay, and the second road laser pulse after the even ablation of first via laser pulse obtains flat surface is arrived, excite produced LIBS signal to focus on the end face of the optical fiber be arranged on structure of fiber_optic (17) through lens (16) by the second road laser pulse, control fiber spectrometer (18) by computing machine (19) and carry out spectroscopic acquisition and analysis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310250038.XA CN103323435B (en) | 2013-06-21 | 2013-06-21 | The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310250038.XA CN103323435B (en) | 2013-06-21 | 2013-06-21 | The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103323435A CN103323435A (en) | 2013-09-25 |
| CN103323435B true CN103323435B (en) | 2016-01-13 |
Family
ID=49192320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310250038.XA Active CN103323435B (en) | 2013-06-21 | 2013-06-21 | The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103323435B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900895A (en) * | 2014-03-31 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Laser ablation system applicable to laser plasma mass spectrometer |
| CN104034703B (en) * | 2014-06-12 | 2016-07-06 | 中国科学院上海技术物理研究所 | The LIBS material composition detection system of the low detection limit of high s/n ratio improved and method |
| CN104142316B (en) * | 2014-08-15 | 2017-01-25 | 中国科学院上海技术物理研究所 | Pre-ablation and reheating combined triple-pulse LIBS (laser-induced breakdown spectroscopy) detection system |
| CN104374760B (en) * | 2014-11-17 | 2016-09-14 | 浙江大学 | Atomic fluorescence spectrophotometry crop heavy metal based on laser ablation plume and trace element method for quick |
| CN104374763B (en) * | 2014-11-17 | 2017-05-10 | 浙江大学 | Adjustable reheating double pulse laser-induced breakdown spectroscopy device |
| CN105044045B (en) * | 2015-05-21 | 2017-10-03 | 中国科学院光电研究院 | The laser system and detection method of cornea ablation threshold value are detected using spectrum analysis |
| CN108423709B (en) * | 2018-01-19 | 2020-03-20 | 南京理工大学 | Ablation method of device for synthesizing nanocrystalline based on double-pulse laser liquid phase ablation |
| CN108195761B (en) * | 2018-03-06 | 2023-08-11 | 南京信息工程大学 | Multi-dimensional adjustable molecular collimation experimental system |
| CN112332200B (en) * | 2020-11-03 | 2023-02-07 | 滨州学院 | Device for generating high-field pulse with ablation prepulse and implementation method thereof |
| CN113916787B (en) * | 2021-10-19 | 2023-05-26 | 西安电子科技大学 | Multimode laser-induced breakdown spectroscopy device |
| CN114324181B (en) * | 2021-12-23 | 2024-02-27 | 重庆融海超声医学工程研究中心有限公司 | Laser transduction device and control method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203385665U (en) * | 2013-06-21 | 2014-01-08 | 中国科学院上海技术物理研究所 | Laser-induced breakdown spectroscopy (LIBS) detection system based on double pulse defocusing pre-ablating |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120314214A1 (en) * | 2011-06-07 | 2012-12-13 | Alexander Dennis R | Laser Induced Breakdown Spectroscopy Having Enhanced Signal-to-Noise Ratio |
-
2013
- 2013-06-21 CN CN201310250038.XA patent/CN103323435B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203385665U (en) * | 2013-06-21 | 2014-01-08 | 中国科学院上海技术物理研究所 | Laser-induced breakdown spectroscopy (LIBS) detection system based on double pulse defocusing pre-ablating |
Non-Patent Citations (1)
| Title |
|---|
| 双波长LA_LIBS技术在铝合金元素分析中的应用;姜杰;《中国优秀硕士学位论文全文数据库 工程科技I辑》;20130115;正文第25-26页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103323435A (en) | 2013-09-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103323435B (en) | The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse | |
| CN203385665U (en) | Laser-induced breakdown spectroscopy (LIBS) detection system based on double pulse defocusing pre-ablating | |
| Chen et al. | Evolution of a plasma waveguide created during relativistic-ponderomotive self-channeling of an intense laser pulse | |
| JP6616432B2 (en) | Method of detecting steel sample components using multi-pulse laser induced plasma spectrum analyzer | |
| Luo et al. | Effect of beam diameter on the propagation of intense femtosecond laser pulses | |
| CN104142316B (en) | Pre-ablation and reheating combined triple-pulse LIBS (laser-induced breakdown spectroscopy) detection system | |
| CN103411932B (en) | Based on LIBS test macro and the method for testing of remote zoom path multiplexing | |
| US20160169805A1 (en) | Combined raman spectroscopy and laser-induced breakdown spectroscopy | |
| US20230093899A1 (en) | Multipulse-induced spectroscopy method and device based on femtosecond plasma grating | |
| Guo et al. | Optimization of distances between the target surface and focal point on spatially confined laser-induced breakdown spectroscopy with a cylindrical cavity | |
| Khalil | A comparative spectroscopic study of single and dual pulse laser produced UV tin plasmas | |
| US20230094973A1 (en) | Detection method and device based on laser-induced breakdown spectroscopy enhanced by 2d plasma grating | |
| Ursu et al. | Excimer laser ablation of graphite: The enhancement of carbon dimer formation | |
| CN107110783B (en) | Compact device for laser induced breakdown spectroscopy and method thereof | |
| Tang et al. | Micro-destructive analysis with high sensitivity using double-pulse resonant laser-induced breakdown spectroscopy | |
| Brieschenk et al. | On the measurement of laser-induced plasma breakdown thresholds | |
| CN110632038A (en) | Light path time-delay double-pulse LIBS device | |
| Wang et al. | Re-heating effect on the enhancement of plasma emission generated from Fe under femtosecond double-pulse laser irradiation | |
| CN105784680A (en) | Method for enhancing plasma spectrum of fused silica induced by femtosecond laser double pulses | |
| CN103868604A (en) | Femtosecond laser pulse width measuring device based on molecule ionization detection | |
| CN204086140U (en) | A kind of in conjunction with pre-ablation and the three pulse LIBS detection systems that heat again | |
| Sobral et al. | Photoacoustic and spectroscopic characterization of the ablation process in orthogonal double-pulse configuration | |
| Zhang et al. | Determination of the temporal structure of femtosecond laser pulses by means of laser-induced air plasma | |
| JP2005242292A (en) | Laser beam incident optical device | |
| JP5078095B2 (en) | Spatial electric field measurement method and spatial electric field measurement apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |