CN113916787B - Multimode laser-induced breakdown spectroscopy device - Google Patents
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Abstract
The invention discloses a multimode laser-induced breakdown spectroscopy device, and belongs to the technical field of laser detection. The multimode laser-induced breakdown spectroscopy device comprises: the objective table comprises a hydraulic cylinder and a bedplate; a beam splitting optical path provided with a pulse laser; the first focusing light path is vertically arranged and connected with the platen, and is provided with a first light through hole; the second focusing light path is provided with a second light through hole, the second focusing light path is provided with a first photoelectric gate, and the first photoelectric gate is electrically connected with a delay controller; the spectrometer is used for collecting LIBS signals generated after the sample is excited by the pulsed laser; and the computer is used for setting parameters of the pulse laser and receiving, analyzing and displaying LIBS signals acquired by the spectrometer. According to the multimode laser-induced breakdown spectroscopy device, two working modes, namely a collinear mode and a vertical mode, are realized through one pulse laser, and can be freely switched between the two working modes, so that acquisition and analysis of LIBS signals of samples in different double pulse modes are realized.
Description
Technical Field
The invention relates to the technical field of laser detection, in particular to a multi-mode laser-induced breakdown spectroscopy device.
Background
The Laser Induced Breakdown Spectroscopy (LIBS) ablates a sample through pulse laser to generate plasma, so that the sample is excited to generate an excitation spectrum, and then the spectrum emitted by excited plasma atoms is acquired through a spectrometer, so that the element components in the sample are identified, and further the identification, classification, qualitative and quantitative analysis of materials can be performed. The commonly used laser-induced breakdown spectroscopy (LIBS) has a single pulse type and a double pulse type, and the double pulse type laser-induced breakdown spectroscopy can greatly enhance signals and improve the detection limit of elements, so that the laser-induced breakdown spectroscopy is widely applied. There are two modes of operation for double pulse laser induced breakdown spectroscopy: the two methods have advantages of collinear and vertical methods.
The existing double-pulse laser-induced breakdown spectroscopy device only has a single working mode, and is difficult to meet actual requirements.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provide a multi-mode laser-induced breakdown spectroscopy device, which realizes two working modes, namely a collinear mode and a vertical mode, by a pulse laser and can be switched freely under the two working modes, thereby realizing acquisition and analysis of LIBS signals of samples.
The invention provides a multimode laser-induced breakdown spectroscopy device, which comprises:
the objective table comprises a hydraulic cylinder and a table board, wherein the table board is connected to a piston of the hydraulic cylinder, the hydraulic cylinder is communicated with a liquid supply device, and a sample is placed on the table board;
the beam splitting optical path is vertically arranged above the bedplate and is provided with a pulse laser;
the first focusing light path is vertically arranged and connected with the platen, and is provided with a first light through hole;
the second focusing light path is arranged at one side of the bedplate and is provided with a second light through hole, the second light through hole is opposite to the first light through hole, the second focusing light path is provided with a first photoelectric door, and the first photoelectric door is electrically connected with a delay controller;
the spectrometer is used for collecting LIBS signals generated after the sample is excited by the pulsed laser;
the computer is electrically connected with the pulse laser, the delay controller and the spectrometer and is used for setting parameters of the pulse laser, receiving, analyzing and displaying LIBS signals acquired by the spectrometer, and the power supply device is electrically connected with the computer;
the light emitted by the pulse laser is divided into fundamental frequency light and frequency multiplication light by the light splitting light path, the frequency multiplication light vertically irradiates on a sample on the platen along the direction vertical to the platen by the first focusing light path, and the fundamental frequency light directly irradiates on the sample along the direction parallel to the platen by the second focusing light path or returns to the first focusing light path through the second light through hole and the first light through hole after passing through the second focusing light path and indirectly irradiates on the sample in a collinear way with the frequency multiplication light.
Preferably, the beam splitting optical path comprises a first lens cone, a spectroscope, a frequency doubling crystal and a second photoelectric gate, a third light through hole is formed in the side wall of the first lens cone, the pulse laser is arranged at the top end of the first lens cone and is communicated with the first lens cone, the spectroscope is arranged at the third light through hole in the first lens cone, the second photoelectric gate is arranged in the first lens cone, the frequency doubling crystal is arranged between the first lens cone and the second photoelectric gate, and the second photoelectric gate is electrically connected with the delay controller.
Preferably, the first focusing light path comprises a second lens cone, a first focusing lens and a double-color lens, the second lens cone is connected with a connecting rod, the connecting rod is connected with the platen, the second lens cone is communicated with the first lens cone, the top end of the second lens cone is communicated with the bottom end of the first lens cone, the first focusing lens is arranged in the second lens cone, the first light-passing hole is arranged on the side wall of the bottom end of the second lens cone, and the double-color lens is arranged at the first light-passing hole in the second lens cone.
Preferably, the second focusing light path comprises a third lens cone, a first reflector, a second focusing lens and a second reflector, the second light passing hole is formed in the bottom of the third lens cone, a fourth light passing hole is formed in the side wall of the top of the third lens cone, the fourth light passing hole is opposite to the third light passing hole, the first reflector is arranged at the fourth light passing hole in the third lens cone, the second focusing lens and the first reflector are arranged in the third lens cone, and the second reflector is arranged at the second light passing hole.
Preferably, the first focusing lens is slidably connected with the inner wall of the second lens barrel along a vertical direction, and the second focusing lens is slidably connected with the inner wall of the third lens barrel along a vertical direction.
Preferably, the liquid supply device comprises an electromagnetic directional valve, a hydraulic pump and a liquid storage cylinder, wherein the hydraulic cylinder is a double-acting cylinder, the electromagnetic directional valve is communicated with the double-acting cylinder, the hydraulic pump is communicated with the electromagnetic directional valve, the liquid storage cylinder is communicated with the hydraulic pump, the liquid storage cylinder is communicated with the electromagnetic directional valve, and the electromagnetic directional valve and the hydraulic pump are electrically and mechanically connected.
Compared with the prior art, the invention has the beneficial effects that: according to the multimode laser-induced breakdown spectroscopy device, two double-pulse LIBS working modes, namely a collinear mode and a vertical mode, are realized through one pulse laser, and can be switched freely under the two working modes, so that the LIBS signals of a sample are collected and analyzed. The beam-splitting light path of the device can realize pre-ablation and re-ablation of the sample, so that the ablation quality is improved, and the detection error is reduced. The first focusing light path of the device can gather the frequency multiplication light energy and irradiate the frequency multiplication light energy to the sample, so that the energy density and the ablation quality are improved. The second focusing light path of the device can enable fundamental frequency light energy to be gathered and irradiated on a sample, so that the energy density of the fundamental frequency light is improved, the re-ablation power density is improved, and the critical power of the excitation spectrum of the sample is ensured. Through setting up first focus lens into along vertical direction sliding connection with the second lens cone inner wall, set up second focus lens into along vertical direction sliding connection with the third lens cone inner wall, can conveniently adjust the focus position after fundamental frequency light and the frequency doubling light focus to the convenience of customers focuses. By using the hydraulic cylinder as a double-acting cylinder and controlling the action of the electromagnetic directional valve, the lifting of the bedplate can be conveniently controlled.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention in a collinear mode of operation;
FIG. 2 is a schematic view of the structure of the present invention in a vertical mode of operation;
FIG. 3 is a schematic view of a liquid supply apparatus according to the present invention;
fig. 4 is a block diagram of the control principle of the present invention.
Reference numerals illustrate:
101. stage, 102, pressure cylinder, 103, platen, 104, pulse laser, 105, first light passing hole, 106, second light passing hole, 107, first photo gate, 108, spectrometer, 201, first lens barrel, 202, spectroscope, 203, frequency doubling crystal, 204, second photo gate, 205, third light passing hole, 301, second lens barrel, 302, first focusing lens, 303, dichroic mirror, 304, connecting rod, 401, third lens barrel, 402, first reflecting mirror, 403, second focusing lens, 404, second reflecting mirror, 405, fourth light passing hole, 501, electromagnetic reversing valve, 502, hydraulic pump, 503, liquid storage cylinder.
Detailed Description
Specific embodiments of the present invention will be described in detail below with reference to fig. 1-4, but it should be understood that the scope of the invention is not limited by the specific embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1:
as shown in fig. 1 to 4, the multimode laser-induced breakdown spectroscopy device provided by the present invention includes: the device comprises an objective table 101, a beam splitting optical path, a first focusing optical path, a second focusing optical path, a spectrometer 108 and a computer, wherein the objective table 101 comprises a hydraulic cylinder 102 and a platen 103, the platen 103 is connected to a piston of the hydraulic cylinder 102, the hydraulic cylinder 102 is communicated with a liquid supply device, and a sample is placed on the platen 103; a beam-splitting optical path vertically arranged above the platen 103, wherein the beam-splitting optical path is provided with a pulse laser 104; a first focusing light path vertically arranged and connected with the platen 103, wherein the first focusing light path is provided with a first light-transmitting hole 105; the second focusing light path is arranged on one side of the platen 103, the second focusing light path is provided with a second light through hole 106, the second light through hole 106 is opposite to the first light through hole 105, the second focusing light path is provided with a first photoelectric gate 107, and the first photoelectric gate 107 is electrically connected with a delay controller; the spectrometer 108 is used for collecting LIBS signals generated by the sample after the excitation of the pulsed laser; the computer is electrically connected with the pulse laser 104, the delay controller and the spectrometer 108, and is used for setting parameters of the pulse laser 104, receiving, analyzing and displaying LIBS signals acquired by the spectrometer 108, and the computer is electrically connected with a power supply device; the beam splitting optical path splits the light emitted by the pulse laser 104 into fundamental frequency light and frequency doubling light after passing through the beam splitting optical path, the frequency doubling light vertically irradiates on the sample on the platen 103 along the direction vertical to the platen 103 through the first focusing optical path, and the fundamental frequency light directly irradiates on the sample along the direction parallel to the platen 103 after passing through the second focusing optical path or returns to the first focusing optical path after passing through the second light through hole 106 and the first light through hole 105 after passing through the second focusing optical path and indirectly irradiates on the sample in a collinear way with the frequency doubling light.
The working principle of example 1 will now be briefly described:
the sample is placed on the platen 103, and the pulse laser generated by the pulse laser 104 is divided into fundamental frequency light and frequency doubling light after passing through a beam splitting optical path, wherein the wavelength range of the fundamental frequency light is 900-1100 nm, and the wavelength range of the frequency doubling light is 200-300 nm. There are two modes of operation at this time, collinear: the hydraulic cylinder 102 is controlled by the liquid supply device to drive the platen 103 to move along the vertical direction, at the moment, a first focusing light path connected to the platen 103 also moves along with the platen, but a second focusing light path does not move, when the first focusing light path moves to the position that a first light passing hole 105 of the first focusing light path is opposite to a second light passing hole 106 of the second focusing light path, at the moment, frequency doubling light vertically irradiates on a sample on the platen 103 along the direction vertical to the platen 103 through the first focusing light path, so that the sample is pre-ablated; the fundamental frequency light enters the second focusing light path, a delay controller in the second focusing light path controls the first photoelectric gate 107 to be opened after a certain time, the fundamental frequency light returns to the first focusing light path after passing through the first photoelectric gate 107 and passes through the second light through hole 106 and the first light through hole 105 and is indirectly irradiated on the sample in a collinear way with the frequency multiplication light, the sample is further ablated, LIBS signals are generated after being ablated again, the LIBS signals are collected by the spectrometer 108 and then are transmitted to a computer, and analysis results are displayed after being analyzed and processed by the computer. Vertical type: the hydraulic cylinder 102 is controlled by the liquid supply device to drive the platen 103 to move along the vertical direction, when the platen 103 moves to the position that the sample on the platen 103 is opposite to the second light through hole 106 of the second focusing light path, at the moment, the frequency doubling light vertically irradiates the sample on the platen 103 along the direction vertical to the platen 103 through the first focusing light path, so as to pre-ablate the sample; the fundamental frequency light enters the second focusing light path, a delay controller in the second focusing light path controls the first photoelectric gate 107 to be opened after a certain time, the fundamental frequency light directly irradiates the sample through the second light through hole 106 after passing through the first photoelectric gate 107 to ablate the sample, at the moment, the fundamental frequency light is perpendicular to the direction of the frequency doubling light, the sample generates LIBS signals after being ablated again, the LIBS signals are collected by the spectrometer 108 and then are transmitted to the computer, and analysis results are displayed after being analyzed and processed by the computer.
According to the multi-mode laser-induced breakdown spectroscopy device, two double-pulse LIBS working modes, namely a collinear mode and a vertical mode, are realized through one pulse laser 104, and can be switched freely under the two working modes, so that the LIBS signals of a sample are collected and analyzed.
Example 2:
based on embodiment 1, in order to realize that the sample is pre-ablated by the frequency doubling light and then re-ablated by the fundamental frequency light, the ablation quality is improved, and the detection error is reduced.
As shown in fig. 1 and 2, the spectroscopic optical path includes a first lens barrel 201, a beam splitter 202, a frequency doubling crystal 203 and a second photoelectric gate 204, a third light through hole 205 is formed in a side wall of the first lens barrel 201, the pulse laser 104 is disposed at a top end of the first lens barrel 201 and is communicated with the first lens barrel 201, the beam splitter 202 is disposed at the third light through hole 205 in the first lens barrel 201, the second photoelectric gate 204 is disposed in the first lens barrel 201, the frequency doubling crystal 203 is disposed between the pulse laser 104 and the beam splitter 202 in the first lens barrel 201, and the second photoelectric gate 204 is electrically connected with the delay controller.
The laser generated by the pulse laser 104 is emitted to the spectroscope 202 after the frequency multiplication effect of the frequency multiplication crystal 203, the frequency multiplication light passes through the spectroscope 202, the fundamental frequency light passes through the third light-passing hole 205 and is emitted to the second focusing light path after being reflected by the spectroscope 202, the delay controller controls the second photoelectric gate 204 to be opened first and then controls the first photoelectric gate 107 to be opened again, and further the sample is ablated again after being pre-ablated, so that the ablation quality is improved, and the detection error is reduced.
Example 3:
in order to allow the frequency-doubled light to be concentrated and irradiated onto the sample on the basis of example 2.
As shown in fig. 1 and 2, the first focusing optical path includes a second lens barrel 301, a first focusing lens 302 and a dichroic mirror 303, where the second lens barrel 301 is connected with a connecting rod 304, the connecting rod 304 is connected with the platen 103, the second lens barrel 301 is communicated with the first lens barrel 201, the top end of the second lens barrel 301 is communicated with the bottom end of the first lens barrel 201, the first focusing lens 302 is disposed in the second lens barrel 301, the first light-passing hole 105 is disposed on a side wall of the bottom end of the second lens barrel 301, and the dichroic mirror 303 is disposed in the second lens barrel 301 at the first light-passing hole 105.
Under the collinearly type, the frequency multiplication light passes through the bicolor mirror 303 after being focused by the first focusing lens 302 and irradiates the sample on the platen 103, the fundamental frequency light passes through the second light through hole 106 and the first light through hole 105 after being focused by the second focusing light path and returns to the bicolor mirror 303 irradiating the first focusing light path, and the fundamental frequency light is collinearly with the frequency multiplication light after being reflected by the bicolor mirror 303 and irradiates the sample on the platen 103. Under the vertical condition, the frequency doubling light passes through the bicolor 303 after being focused by the first focusing lens 302 and irradiates the sample on the platen 103, and the fundamental frequency light passes through the second focusing light path after being focused and irradiates the sample on the platen 103 with the frequency doubling light. By arranging the first focusing lens 302, the frequency multiplication light energy can be gathered and irradiated on the sample, so that the energy density is improved, and the ablation quality is improved.
Example 4:
based on example 3, in order to allow the fundamental light energy to be concentrated and irradiated onto the sample.
As shown in fig. 1 and 2, the second focusing optical path includes a third lens barrel 401, a first reflective mirror 402, a second focusing lens 403 and a second reflective mirror 404, the second light passing hole 106 is disposed at the bottom of the third lens barrel 401, a fourth light passing hole 405 is disposed on a side wall of the top of the third lens barrel 401, the fourth light passing hole 405 is opposite to the third light passing hole 205, the first reflective mirror 402 is disposed at the fourth light passing hole 405 in the third lens barrel 401, the second focusing lens 403 and the first photo gate 107 are both disposed in the third lens barrel 401, and the second reflective mirror 404 is disposed at the second light passing hole 106.
After being reflected by the spectroscope 202 of the beam splitting optical path, the fundamental frequency light is incident into the second focusing optical path through the fourth light through hole 405, reflected by the first reflector, emitted to the second focusing lens 403, focused by the second focusing lens 403, emitted to the second reflector 404, reflected by the second reflector, and emitted from the second light through hole 106. And then the fundamental frequency light can be gathered and irradiated on the sample, so that the energy density of the fundamental frequency light is improved, the re-ablation power density is improved, and the critical power of the excitation spectrum of the sample is ensured.
As a preferable solution, as shown in fig. 1 and 2, the first focusing lens 302 is slidably connected to the inner wall of the second lens barrel 301 in the vertical direction, and the second focusing lens 403 is slidably connected to the inner wall of the third lens barrel 401 in the vertical direction. Through setting the first focusing lens 302 to be in sliding connection with the inner wall of the second lens barrel 301 along the vertical direction, and setting the second focusing lens 403 to be in sliding connection with the inner wall of the third lens barrel 401 along the vertical direction, the focus position after focusing the fundamental frequency light and the frequency doubling light can be conveniently adjusted, thereby facilitating the focusing of a user.
As a preferable solution, as shown in fig. 3, the liquid supply device includes an electromagnetic directional valve 501, a hydraulic pump 502 and a liquid storage cylinder 503, the hydraulic cylinder 102 is a double-acting cylinder, the electromagnetic directional valve 501 is communicated with the double-acting cylinder, the hydraulic pump 502 is communicated with the electromagnetic directional valve 501, the liquid storage cylinder 503 is communicated with the hydraulic pump 502, the liquid storage cylinder 503 is communicated with the electromagnetic directional valve 501, and the electromagnetic directional valve 501 and the hydraulic pump 502 are electrically and mechanically connected with each other. By controlling the operation of the electromagnetic directional valve 501 by using the hydraulic cylinder 102 as a double-acting cylinder, the lifting and lowering of the platen 103 can be controlled very conveniently.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. A multimode laser-induced breakdown spectroscopy device, comprising:
the objective table (101) comprises a hydraulic cylinder (102) and a bedplate (103), wherein the bedplate (103) is connected to a piston of the hydraulic cylinder (102), the hydraulic cylinder (102) is communicated with a liquid supply device, and a sample is placed on the bedplate (103);
the beam splitting optical path is vertically arranged above the platen (103) and is provided with a pulse laser (104);
the first focusing light path is vertically arranged and connected with the platen (103), and is provided with a first light through hole (105);
the second focusing light path is arranged on one side of the platen (103), the second focusing light path is provided with a second light through hole (106), the second light through hole (106) is opposite to the first light through hole (105), the second focusing light path is provided with a first photoelectric gate (107), and the first photoelectric gate (107) is electrically connected with the delay controller;
the spectrometer (108) is used for collecting LIBS signals generated after the sample is excited by the pulsed laser;
the computer is electrically connected with the pulse laser (104), the delay controller and the spectrometer (108) and is used for setting parameters of the pulse laser (104) and receiving, analyzing and displaying LIBS signals acquired by the spectrometer (108), and the computer is electrically connected with the power supply device;
the light emitted by the pulse laser (104) is divided into fundamental frequency light and frequency multiplication light through a light splitting light path, the frequency multiplication light vertically irradiates on a sample on the platen (103) along the direction vertical to the platen (103) through a first focusing light path, and the fundamental frequency light directly irradiates on the sample along the direction parallel to the platen (103) after passing through a second focusing light path or returns to the first focusing light path through a second light through hole (106) and a first light through hole (105) after passing through the second focusing light path and indirectly irradiates on the sample in a collinear way with the frequency multiplication light;
the light splitting optical path comprises a first lens barrel (201), a spectroscope (202), a frequency doubling crystal (203) and a second photoelectric gate (204), a third light through hole (205) is formed in the side wall of the first lens barrel (201), the pulse laser (104) is arranged at the top end of the first lens barrel (201) and is communicated with the first lens barrel (201), the spectroscope (202) is arranged at the third light through hole (205) in the first lens barrel (201), the second photoelectric gate (204) is arranged in the first lens barrel (201), the frequency doubling crystal (203) is arranged between the spectroscope (202) in the first lens barrel (201) and the second photoelectric gate (204), and the second photoelectric gate (204) is electrically connected with the delay controller;
the first focusing light path comprises a second lens barrel (301), a first focusing lens (302) and a bicolor lens (303), the second lens barrel (301) is connected with a connecting rod (304), the connecting rod (304) is connected with the platen (103), the second lens barrel (301) is communicated with the first lens barrel (201), the top end of the second lens barrel (301) is communicated with the bottom end of the first lens barrel (201), the first focusing lens (302) is arranged in the second lens barrel (301), the first light-transmitting hole (105) is formed in the side wall of the bottom end of the second lens barrel (301), and the bicolor lens (303) is arranged at the first light-transmitting hole (105) in the second lens barrel (301);
the second focusing light path comprises a third lens cone (401), a first reflecting mirror (402), a second focusing lens (403) and a second reflecting mirror (404), wherein the second light passing hole (106) is formed in the bottom of the third lens cone (401), a fourth light passing hole (405) is formed in the side wall of the top of the third lens cone (401), the fourth light passing hole (405) is opposite to the third light passing hole (205), the first reflecting mirror (402) is arranged at the fourth light passing hole (405) in the third lens cone (401), the second focusing lens (403) and the first photoelectric gate (107) are all arranged in the third lens cone (401), and the second reflecting mirror (404) is arranged at the second light passing hole (106).
2. The multimode laser-induced breakdown spectroscopy apparatus of claim 1 wherein the first focusing lens (302) is slidably connected to the inner wall of the second barrel (301) in a vertical direction, and the second focusing lens (403) is slidably connected to the inner wall of the third barrel (401) in a vertical direction.
3. The multimode laser-induced breakdown spectroscopy apparatus of claim 1 wherein the liquid supply apparatus comprises an electromagnetic directional valve (501), a hydraulic pump (502) and a liquid storage cylinder (503), the hydraulic cylinder (102) is a double-acting cylinder, the electromagnetic directional valve (501) is in communication with the double-acting cylinder, the hydraulic pump (502) is in communication with the electromagnetic directional valve (501), the liquid storage cylinder (503) is in communication with the hydraulic pump (502), the liquid storage cylinder (503) is in communication with the electromagnetic directional valve (501), and both the electromagnetic directional valve (501) and the hydraulic pump (502) are electrically connected to the computer.
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| CN103323435B (en) * | 2013-06-21 | 2016-01-13 | 中国科学院上海技术物理研究所 | The Laser-induced Breakdown Spectroscopy detection system of pre-ablation is defocused based on dipulse |
| CN104406942B (en) * | 2014-11-17 | 2017-07-21 | 浙江大学 | A kind of multi-mode laser induced breakdown spectroscopy device |
| CN104596997B (en) * | 2015-01-19 | 2017-04-12 | 四川大学 | Laser-induced breakdown-pulsed Raman spectroscopy combined system and using method |
| RU2632803C1 (en) * | 2016-04-12 | 2017-10-09 | Общество с ограниченной ответственностью "Русский инженерный клуб" | Biotissue dissecting method with laser radiation and device for its implementation |
| CN106645078A (en) * | 2016-09-20 | 2017-05-10 | 中国海洋大学 | LIBS (laser-induced breakdown spectroscopy)-Raman combined underwater in-situ detection device and detection method |
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