CN104269446A - 一种太阳能电池用减反射镀层晶体硅片及制备方法 - Google Patents
一种太阳能电池用减反射镀层晶体硅片及制备方法 Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 36
- 239000010703 silicon Substances 0.000 title claims abstract description 36
- 239000013078 crystal Substances 0.000 title claims abstract description 34
- 238000005253 cladding Methods 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000003667 anti-reflective effect Effects 0.000 claims description 20
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 19
- 238000002360 preparation method Methods 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 239000006117 anti-reflective coating Substances 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 235000012054 meals Nutrition 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000002310 reflectometry Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract 1
- 210000004027 cell Anatomy 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 210000003850 cellular structure Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
本发明公开了一种太阳能电池用减反射镀层晶体硅片,包括有晶体硅基片,其特征在于:在所述的晶体硅基片的一侧面复合有减反射镀层。本发明目的是克服了现有技术的不足,提供一种复合有减反射膜层,反射率低,太能利用率高的太阳能电池用减反射镀层晶体硅片。本发明还提供一种太阳能电池用减反射镀层晶体硅片的制备方法。
Description
【技术领域】
本发明涉及一种太阳能电池构件,更具体地说是一种太阳能电池用晶体硅片。本发明还涉及一种太阳能电池用减反射镀层晶体硅片的制备方法。
【背景技术】
晶体硅电池通过其绒面结构来减少硅片表面的反射,从而提高电池对太阳能的吸收。为了更有效地提高晶体硅电池的转换效率,需要对晶体硅片结构作出进一步改进。
【发明内容】
本发明目的是克服了现有技术的不足,提供一种复合有减反射膜层,反射率低,太能利用率高的的太阳能电池用减反射镀层晶体硅片。本发明还提供一种太阳能电池用减反射镀层晶体硅片的制备方法。
本发明是通过以下技术方案实现的:
一种太阳能电池用减反射镀层晶体硅片,包括有晶体硅基片1,其特征在于:在所述的晶体硅基片1的一侧面复合有减反射镀层2。
如上所述的太阳能电池用减反射镀层晶体硅片,其特征在于所述的减反射镀层2为掺Ta的ZrO2膜层。
如上所述的太阳能电池用减反射镀层晶体硅片,其特征在于所述减反射镀层2的厚度为70~100nm。
一种制上述的太阳能电池用减反射镀层晶体硅片的方法,其特征在于包括如下步骤:
(1)清洗晶体硅基片1,将晶体硅基片1放在超声波中清洗;
(2)制备掺Ta的ZrO2靶材;
(3)直流溅射掺Ta的ZrO2膜层,将清洗后的晶体硅基片1用无尘工具放置在托盘上,送入磁控溅射镀膜机上直流溅射掺Ta的ZrO2靶材直流溅射掺Ta的ZrO2膜层。
如上所述的制备太阳能电池用减反射镀层晶体硅片的方法,其特征在于所述步骤(3)中直流溅射时用氩气作为溅射气体,溅射功率8~10KW,沉积速度35nm/min,沉积膜层厚度70~100nm,膜层中Ta:Zr﹤20%,制备时将晶体硅基片1加热到300度。
如上所述的制备太阳能电池用减反射镀层晶体硅片的方法,其特征在于所述步骤(2)包括步骤:
(2a)将Ta和ZrO2原料粉碎成颗粒后,按质量比Ta:ZrO2=10%~30%:70%~90%混匀;
(2b)将混匀后的粉末,用喷涂法在不锈钢圆筒衬底上制备掺Ta的ZrO2靶材。
如上所述的制备太阳能电池用减反射镀层晶体硅片的方法,其特征在于所述步骤(2a)中Ta和ZrO2原料粉碎成颗粒后颗粒直径小于50微米。
与现有技术相比,本发明有如下优点:
本发明通过在晶体硅基片表面增加一层减反射膜层,通过减反射膜层更进一步降低硅片反射率。减反射膜层可将晶体硅片表面的反射率降低到5%以下。
【附图说明】
图1是本发明结构示意图。
【具体实施方式】
一种太阳能电池用减反射镀层晶体硅片,包括有晶体硅基片1,在所述的晶体硅基片1的一侧面复合有减反射镀层2。
所述的减反射镀层2为掺Ta的ZrO2膜层。Ta即金属钽,ZrO2即二氧化锆,金属钽与二氧化锆结合镀膜可以有效降低晶体硅片表面的反射率,提高太阳光的吸收率。
所述减反射镀层2的厚度为70~100nm。
一种制备上述的太阳能电池用减反射镀层晶体硅片的方法,包括如下步骤:
(1)清洗晶体硅基片1,将晶体硅基片1放在超声波中清洗;
(2)制备掺Ta的ZrO2靶材;
(3)直流溅射掺Ta的ZrO2膜层,将清洗后的晶体硅基片1用无尘工具放置在托盘上,送入磁控溅射镀膜机上直流溅射掺Ta的ZrO2靶材直流溅射掺Ta的ZrO2膜层。
所述步骤(3)中直流溅射时用氩气作为溅射气体,溅射功率8~10KW,沉积速度35nm/min,沉积膜层厚度70~100nm,膜层中Ta:Zr﹤20%,折射率恒定在2.05,制备时将晶体硅基片1加热到300度。
所述步骤(2)包括步骤:
(2a)将Ta和ZrO2原料粉碎成颗粒后,按质量比Ta:ZrO2=10%~30%:70%~90%混匀;
(2b)将混匀后的粉末,用喷涂法在不锈钢圆筒衬底上制备掺Ta的ZrO2靶材。
所述步骤(2a)中Ta和ZrO2原料粉碎成颗粒后优选颗粒直径小于50微米。
本发明的复合有掺Ta的ZrO2膜层的晶体硅电池装到电池构件上,通过串联、并联的方式即可形成电池组件。
Claims (7)
1.一种太阳能电池用减反射镀层晶体硅片,包括有晶体硅基片(1),其特征在于:在所述的晶体硅基片(1)的一侧面复合有减反射镀层(2)。
2.根据权利要求1所述的太阳能电池用减反射镀层晶体硅片,其特征在于所述的减反射镀层(2)为掺Ta的ZrO2膜层。
3.根据权利要求2所述的太阳能电池用减反射镀层晶体硅片,其特征在于所述减反射镀层(2)的厚度为70~100nm。
4.一种制备权利要求1-3任意一项所述的太阳能电池用减反射镀层晶体硅片的方法,其特征在于包括如下步骤:
(1)清洗晶体硅基片(1),将晶体硅基片(1)放在超声波中清洗;
(2)制备掺Ta的ZrO2靶材;
(3)直流溅射掺Ta的ZrO2膜层,将清洗后的晶体硅基片(1)用无尘工具放置在托盘上,送入磁控溅射镀膜机上直流溅射掺Ta的ZrO2靶材直流溅射掺Ta的ZrO2膜层。
5.根据权利要求4所述的制备太阳能电池用减反射镀层晶体硅片的方法,其特征在于所述步骤(3)中直流溅射时用氩气作为溅射气体,溅射功率8~10KW,沉积速度35nm/min,沉积膜层厚度70~100nm,膜层中Ta:Zr﹤20%,制备时将晶体硅基片(1)加热到300度。
6.根据权利要求4所述的制备太阳能电池用减反射镀层晶体硅片的方法,其特征在于所述步骤(2)包括步骤:
(2a)将Ta和ZrO2原料粉碎成颗粒后,按质量比Ta:ZrO2=10%~30%:70%~90%混匀;
(2b)将混匀后的粉末,用喷涂法在不锈钢圆筒衬底上制备掺Ta的ZrO2靶材。
7.根据权利要求6所述的制备太阳能电池用减反射镀层晶体硅片的方法,其特征在于所述步骤(2a)中Ta和ZrO2原料粉碎成颗粒后颗粒直径小于50微米。
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CN101044630A (zh) * | 2004-10-27 | 2007-09-26 | 夏普株式会社 | 太阳能电池及太阳能电池的制造方法 |
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US20090071535A1 (en) * | 2005-11-02 | 2009-03-19 | Centrotherm Photovoltaics Ag | Antireflective coating on solar cells and method for the production of such an antireflective coating |
CN102217085A (zh) * | 2008-11-13 | 2011-10-12 | 应用材料股份有限公司 | 无图案化地形成硅太阳能电池之前触点的方法 |
CN102810572A (zh) * | 2011-05-31 | 2012-12-05 | 初星太阳能公司 | 用于光伏装置的薄膜层的折射率匹配及其制造方法 |
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CN101044630A (zh) * | 2004-10-27 | 2007-09-26 | 夏普株式会社 | 太阳能电池及太阳能电池的制造方法 |
US20090071535A1 (en) * | 2005-11-02 | 2009-03-19 | Centrotherm Photovoltaics Ag | Antireflective coating on solar cells and method for the production of such an antireflective coating |
CN101356455A (zh) * | 2005-12-23 | 2009-01-28 | 法国圣戈班玻璃厂 | 包含抗反射涂层的透明衬底 |
CN102217085A (zh) * | 2008-11-13 | 2011-10-12 | 应用材料股份有限公司 | 无图案化地形成硅太阳能电池之前触点的方法 |
CN102810572A (zh) * | 2011-05-31 | 2012-12-05 | 初星太阳能公司 | 用于光伏装置的薄膜层的折射率匹配及其制造方法 |
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